ETCHING AGENT AND METHOD FOR PRODUCING CIRCUIT BOARD

    公开(公告)号:US20230407486A1

    公开(公告)日:2023-12-21

    申请号:US18036313

    申请日:2021-09-30

    CPC classification number: C23F1/18 C23F11/12 C23F11/14 H05K3/06

    Abstract: The present invention includes an etching agent that selectively etches a copper layer of a processing target in which a noble metal layer containing a metal nobler than copper and the copper layer coexist, the etching agent including: a copper ion; one or more nitrogen-containing compounds selected from the group consisting of a heterocyclic compound having two or more nitrogen atoms in a ring and an amino group-containing compound having 8 or less carbon atoms; a polyalkylene glycol; and a halogen ion, in which the polyalkylene glycol is contained in an amount of 0.0005% by weight or more and 7% by weight or less, and the halogen ion is contained in an amount of 1 ppm or more and 250 ppm or less.

    Etchant, replenishment solution and method for forming copper wiring

    公开(公告)号:US10174428B2

    公开(公告)日:2019-01-08

    申请号:US15124018

    申请日:2016-05-31

    Abstract: An etchant for copper includes an acid and one or more compounds selected from the group consisting of an aliphatic noncyclic compound, an aliphatic heterocyclic compound and a heteroaromatic compound. The aliphatic noncyclic compound is a saturated aliphatic noncyclic compound (A) including only two or more nitrogen atoms as heteroatoms, and 2 to 10 carbon atoms. The aliphatic heterocyclic compound is a compound (B) including a five-, six-, or seven-membered ring having one or more nitrogen atoms as one or more heteroatoms constituting the ring. The heteroaromatic compound is a compound (C) including a six-membered heteroaromatic ring having one or more nitrogen atoms as one or more heteroatoms constituting the ring.

    Method for forming a laminate
    10.
    发明授权
    Method for forming a laminate 有权
    层压体的形成方法

    公开(公告)号:US08147631B2

    公开(公告)日:2012-04-03

    申请号:US12708657

    申请日:2010-02-19

    Abstract: The method for forming a laminate of the present invention is a method for forming a laminate, comprising a silane coupling agent treatment step of applying an aqueous solution of a silane coupling agent onto a surface of a metal layer, and drying the resultant applied film to form a silane coupling agent coating, and a lamination step of laminating a resin layer on the silane coupling agent coating, these steps being continuously performed, wherein when the formed silane coupling agent coating is analyzed in the silane coupling agent treatment step by FT-IR with a reflection absorption spectrometry and then the peak area of Si—O is turned to a value less than a predetermined threshold value, at least one part of the aqueous solution of the silane coupling agent is renewed, thereby conducting the silane coupling agent treatment while the peak area is controlled into a predetermined range.

    Abstract translation: 本发明的层叠体的形成方法是层叠体的形成方法,其包括将硅烷偶联剂的水溶液涂布在金属层的表面上的硅烷偶联剂处理工序,将所得的涂膜干燥 形成硅烷偶联剂涂层,以及在硅烷偶联剂涂层上层叠树脂层的层压步骤,连续进行这些步骤,其中当通过FT-IR在硅烷偶联剂处理步骤中分析形成的硅烷偶联剂涂层时 利用反射吸收光谱法,然后将Si-O的峰面积变为小于预定阈值的值,至少一部分硅烷偶联剂的水溶液被更新,从而进行硅烷偶联剂处理,同时 将峰面积控制在预定范围内。

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