NANO-MATERIALS FOR ADHESIVE-FREE ADSORBERS FOR BAKABLE EXTREME HIGH VACUUM CRYOPUMP SURFACES
    9.
    发明申请
    NANO-MATERIALS FOR ADHESIVE-FREE ADSORBERS FOR BAKABLE EXTREME HIGH VACUUM CRYOPUMP SURFACES 有权
    用于无菌吸附剂的纳米材料用于耐高温真空CRYOPUMP表面

    公开(公告)号:US20140373558A1

    公开(公告)日:2014-12-25

    申请号:US14300464

    申请日:2014-06-10

    Abstract: A cryosorber panel having nanomaterials used for the cryosorption material, with nanomaterial either grown directly on the cryopanel or freestanding nanomaterials attached to the cryopanel mechanically without the use of adhesives. Such nanomaterial cryosorber materials can be used in place of conventional charcoals that are attached to cryosorber panels with special low outgassing, low temperature capable adhesives. Carbon nanotubes and other nanomaterials could serve the same purpose as conventional charcoal cryosorbers, providing a large surface area for cryosorption without the need for adhesive since the nanomaterials can be grown directly on a metallic substrate or mechanically attached. The nanomaterials would be capable of being fully baked by heating above 100° C., thereby eliminating water vapor from the system, eliminating adhesives from the system, and allowing a full bake of the system to reduce hydrogen outgas sing, with the goal of obtaining extreme high vacuum where the pump can produce pressures below 1×10−12 Torr.

    Abstract translation: 具有用于冷冻吸收材料的纳米材料的冷冻面板,其中纳米材料直接生长在冷冻板上,或者在不使用粘合剂的情况下机械地生长附着于冷冻板的独立纳米材料上。 这种纳米材料的冷冻保护材料可以用于代替常规的木炭,这些炭被附着在具有特别低脱气,低温能力的粘合剂的冷冻面板上。 碳纳米管和其他纳米材料可以用作与常规木炭冷冻剂相同的目的,为冷却吸附提供大的表面积,而不需要粘合剂,因为纳米材料可以直接生长在金属基底上或机械附着。 纳米材料能够通过在100℃以上的加热而被完全烘烤,从而消除了系统中的水蒸气,消除了系统中的粘合剂,并且允许系统完全烘烤以减少氢气排放,目的是获得 极高的真空度,泵可以产生低于1×10-12乇的压力。

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