公开(公告)号：US20190219730A1

公开(公告)日：2019-07-18

申请号：US16321194

申请日：2017-07-27

申请人： SMITHS HEIMANN SAS

发明人： Guillaume Jegou

IPC分类号： G01V5/00 ,  G21K1/02 ,  H05G2/00 ,  G01N23/04 ,  G01N23/06

CPC分类号： G01V5/0041 ,  G01N23/04 ,  G01N23/06 ,  G01V5/0016 ,  G21K1/025 ,  H01J35/00 ,  H01J2235/08 ,  H05G2/00

摘要： In examples, it is disclosed an inspection system comprising: a secondary source of radiation configured to generate secondary electromagnetic radiation for inspection of a load in response to being irradiated by primary electromagnetic radiation from a primary generator of electromagnetic radiation; and one or more detectors configured to detect radiation from the load after interaction with the secondary inspection beam.

公开(公告)号：US20150198860A1

公开(公告)日：2015-07-16

申请号：US14154443

申请日：2014-01-14

申请人： UNIVERSITY OF CENTRAL FLORIDA RESEARCH FOUNDATION, INC.

发明人： Zenghu Chang ,  Qi Zhang ,  Kun Zhao

IPC分类号： G02F1/35 ,  H05G2/00 ,  H01J35/24

CPC分类号： G02F1/353 ,  G02F2001/3503 ,  G02F2001/354 ,  G21K1/10 ,  H01J35/24 ,  H01J2235/06 ,  H01J2235/08 ,  H05G2/00 ,  H05G2/008

摘要： An optical filtering method that utilizes a Microchannel Plate (MCP) and an optical system that utilizes the optical filtering method. As an example, a XUV/SXR generation system that includes a MCP as a dispersionless, broadband IR pump filter.

摘要翻译： 一种利用微通道板（MCP）和利用光学滤波方法的光学系统的光学滤波方法。 作为示例，XUV / SXR生成系统包括MCP作为无色，宽带IR泵滤波器。

公开(公告)号：US08654927B2

公开(公告)日：2014-02-18

申请号：US13502540

申请日：2010-10-18

申请人： Rainer Pietig

发明人： Rainer Pietig

IPC分类号： H01J35/12 ,  G01N23/04

CPC分类号： H01J35/105 ,  H01J35/12 ,  H01J2235/08 ,  H01J2235/1204 ,  H01J2235/1291

摘要： The present invention relates to X-ray generating technology in general. Providing an electron collecting element of an X-ray generating device statically may allow for the manufacture of X-ray systems with reduced moving parts and actuating parts, possibly reducing manufacturing costs and sources for failure. Consequently, an electron collecting element with increased thermal loadability is presented. According to the present invention, an electron collecting element (28) is provided, comprising a surface element (22) and a heat conducting element (26). The heat conducting element (26) comprises a first thermal conductivity in a first direction and at least a second thermal conductivity in at least a second direction. The first thermal conductivity is greater than the second thermal conductivity. The first direction is substantially perpendicular to the surface element (22).

摘要翻译： 本发明一般涉及X射线产生技术。 静态地提供X射线产生装置的电子收集元件可以允许制造具有减少的移动部件和致动部件的X射线系统，可能降低制造成本和故障源。 因此，提出了具有增加的热负荷能力的电子收集元件。 根据本发明，提供一种电子收集元件（28），其包括表面元件（22）和导热元件（26）。 导热元件（26）包括在第一方向上的第一热导率和至少第二方向上的至少第二热导率。 第一导热系数大于第二导热系数。 第一方向基本上垂直于表面元件（22）。

公开(公告)号：US08204174B2

公开(公告)日：2012-06-19

申请号：US12708579

申请日：2010-02-19

申请人： Dean Connor ,  Christopher Parham ,  Etta Pisano ,  Waldo S. Hinshaw ,  Zhong Zhong ,  Brian P. Wilfley

发明人： Dean Connor ,  Christopher Parham ,  Etta Pisano ,  Waldo S. Hinshaw ,  Zhong Zhong ,  Brian P. Wilfley

IPC分类号： G01N23/087 ,  G01N23/20 ,  G01N23/207 ,  G21K1/06

CPC分类号： A61B6/4035 ,  A61B6/032 ,  A61B6/06 ,  A61B6/482 ,  A61B6/502 ,  A61B6/5282 ,  A61B6/542 ,  G21K2201/062 ,  G21K2207/005 ,  H01J2235/068 ,  H01J2235/08

摘要： Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources are disclosed. A plurality of monochromator crystals may be positioned to intercept the plurality of first X-ray beams such that a plurality of second X-ray beams each having predetermined energy levels is produced. Further, an object to be imaged may be positioned in paths of the second x-ray beams for transmission of the second X-ray beams through the object and emitting from the object a plurality of transmission X-ray beams. The X-ray beams may be directed at angles of incidence upon a plurality of analyzer crystals for detecting an image of the object.

摘要翻译： 公开了通过使用由多个小区域源产生的X射线束来检测物体的图像的系统和方法。 可以将多个单色器晶体定位成截取多个第一X射线束，使得产生多个具有预定能级的第二X射线束。 此外，要成像的物体可以位于第二X射线束的路径中，用于透过物体传输第二X射线束，并从物体发射多个透射X射线束。 X射线束可以以多个分析器晶体的入射角定向，以检测物体的图像。

公开(公告)号：US20100310045A1

公开(公告)日：2010-12-09

申请号：US12809238

申请日：2007-12-21

申请人： Kevin John Brown ,  Maria Giulia Thompspm ,  Vibeke Nordmark Hansen ,  Philip Mark Evans ,  David Anthony Roberts

发明人： Kevin John Brown ,  Maria Giulia Thompspm ,  Vibeke Nordmark Hansen ,  Philip Mark Evans ,  David Anthony Roberts

IPC分类号： G01N23/04 ,  H05G1/52 ,  A61N5/10

CPC分类号： H05H7/12 ,  H01J35/00 ,  H01J2235/08 ,  H05H6/00 ,  H05H9/04

摘要： X-ray apparatus comprises a linear accelerator adapted to produce a beam of electrons at one of at least two selectable energies and being controlled to change the selected energy on a periodic basis, and a target to which the beam is directed thereby to produce a beam of x-radiation, the target being non-homogenous and being driven to move periodically in synchrony with the change of the selected energy. In this way, the target can move so that a different part is exposed to the electron beam when different pulses arrive. This enables the appropriate target material to be employed depending on the selected energy. The easiest form of periodic movement for the target is likely to be a rotational movement. The target can be immersed in a coolant fluid such as water. The linear accelerator can be of the type disclosed in WO2006/097697A1. The target preferably contains at least one exposed area of tungsten and/or at least one exposed area of carbon. These can be present as inhomogeneities in the material of which the target is composed, such as Carbon inserts in a Tungsten substrate (or vice versa), alternating segments of Carbon and Tungsten, Carbon and Tungsten inserts in a substrate of a third material, or arrangements involving other materials in addition to or instead of Carbon and/or Tungsten. Alternatively, the target can be of a homogenous material but have inhomogeneities in its thickness to cater for the different electron energies. The same concept can be applied to the filter. A detector can be provided, operating in synchrony with the energy variation. Such an x-ray apparatus can form a part of a radiotherapy apparatus, in which case the first selected energy can be a diagnostic energy and a second selected energy a therapeutic energy.

摘要翻译： X射线装置包括线性加速器，其适于以至少两个可选择的能量之一产生电子束，并被控制以周期性地改变所选择的能量，以及射束从而产生射束 的x辐射，目标是不均匀的并且被驱动以与所选择的能量的变化同步地周期性地移动。 以这种方式，当不同的脉冲到达时，目标可以移动，使得不同的部分暴露于电子束。 这使得能够根据所选择的能量使用适当的目标材料。 目标的最简单的周期性运动形式可能是旋转运动。 目标可以浸入冷却液如水中。 线性加速器可以是WO2006 / 097697A1中公开的类型。 目标优选地包含钨的至少一个暴露区域和/或至少一个暴露的碳区域。 这些可以作为靶材组成的材料中的不均匀性，例如在钨基底（或反之亦然）中的碳插入物），碳和钨的交替段，碳和钨插入物在第三材料的衬底中，或 除碳或/或钨之外还有其他材料的安排。 或者，靶可以是均质材料，但是其厚度具有不均匀性以适应不同的电子能量。 相同的概念可以应用于过滤器。 可以提供与能量变化同步操作的检测器。 这种X射线设备可以形成放射治疗设备的一部分，在这种情况下，第一选择的能量可以是诊断能量，而第二选择的能量可以是治疗能量。

公开(公告)号：US07724876B2

公开(公告)日：2010-05-25

申请号：US11913975

申请日：2006-05-11

申请人： Hiroyuki Nose ,  Daisuke Ishida ,  Namio Kaneko ,  Hisaharu Sakae ,  Mitsuru Uesaka ,  Katsuhiro Dobashi

发明人： Hiroyuki Nose ,  Daisuke Ishida ,  Namio Kaneko ,  Hisaharu Sakae ,  Mitsuru Uesaka ,  Katsuhiro Dobashi

IPC分类号： H01J35/00

CPC分类号： H05G2/00 ,  G21K5/00 ,  H01J35/14 ,  H01J35/28 ,  H01J2235/08

摘要： A multi-color X-ray generator includes an electron beam generator 10 which accelerates an electron beam to generate a pulse electron beam 1 and which transmits the beam along a predetermined rectilinear orbit 2, a composite laser generator 20 which successively generates a plurality of pulse laser lights 3a, 3b having different wavelengths, and a laser light introduction device 30 which introduces the pulse laser lights along the rectilinear orbit 2 to be opposed to the pulse electron beam 1, so that the plurality of pulse laser lights 3a, 3b successively head-on collide with the pulse electron beam 1 along the rectilinear orbit 2 so as to generate two or more types of monochromatic hard X-rays 4 (4a, 4b).

摘要翻译： 多色X射线发生器包括电子束发生器10，其加速电子束以产生脉冲电子束1并沿预定的直线轨道2传输光束;复合激光发生器20，其连续产生多个脉冲 具有不同波长的激光3a，3b以及与脉冲电子束1相对的沿着直线轨道2引入脉冲激光的激光导入装置30，使得多个脉冲激光3a，3b依次头 - 沿着直线轨道2与脉冲电子束1碰撞，以产生两种或更多种类型的单色硬X射线4（4a，4b）。

公开(公告)号：US20090173881A1

公开(公告)日：2009-07-09

申请号：US11970255

申请日：2008-01-07

申请人： John L. Adamski

发明人： John L. Adamski

IPC分类号： H01J47/00

CPC分类号： H01J35/08 ,  H01J2235/08

摘要： A method and apparatus, such as a spectrometer, are provided for facilitating the detection of an x-ray signal in a manner that effectively discriminates the x-ray signal from noise. A spectrometer may be provided which includes an x-ray converter for converting x-ray signals which impinge thereupon into corresponding pairs of electrons and positrons. The spectrometer also includes a deflector for separately deflecting the electrons and the positrons as well as electron and positron detectors for separately detecting the deflected electrons and positrons, respectively. As such, an x-ray signal can be identified in instances in which the deflected electrons and positrons are detected in coincidence.

摘要翻译： 提供了一种方法和装置，例如光谱仪，用于有助于以有效地区分X射线信号与噪声的方式检测X射线信号。 可以提供一种光谱仪，其包括用于将X射线信号转换成相应的电子和正电子对的x射线转换器。 光谱仪还包括用于分别偏转电子和正电子的偏转器以及用于分别检测偏转的电子和正电子的电子和正电子检测器。 因此，可以在重合检测偏转的电子和正电子的情况下识别x射线信号。

公开(公告)号：US07505563B2

公开(公告)日：2009-03-17

申请号：US12033035

申请日：2008-02-19

申请人： Edward James Morton ,  Russell David Luggar ,  Paul De Antonis

发明人： Edward James Morton ,  Russell David Luggar ,  Paul De Antonis

IPC分类号： H01J35/08

CPC分类号： H01J35/08 ,  H01J2235/068 ,  H01J2235/08

摘要： An anode for an X-ray source is formed in two parts, a main part and a collimating part. The main part has the target region formed on it. The two parts between them define an electron aperture through which electrons pass to reach the target region, and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.

摘要翻译： 用于X射线源的阳极形成为主要部分和准直部分两部分。 主要部分是在其上形成目标区域。 它们之间的两个部分限定了电子通过的电子孔，以达到目标区域，并且在靶处产生的X射线的X射线孔离开阳极。 阳极至少产生所产生的X射线束的准直的第一阶段。

公开(公告)号：US20080095319A1

公开(公告)日：2008-04-24

申请号：US11681828

申请日：2007-03-05

申请人： Lee Grodzins ,  Hal Grodzins

发明人： Lee Grodzins ,  Hal Grodzins

IPC分类号： G21K5/02

CPC分类号： G21K1/06 ,  G01N2223/316 ,  G21K2201/062 ,  H01J2235/08

摘要： A method for obtaining a concentrated, monochromatic x-ray beam from a standard x-ray tube or other source of polychromatic emission. X-rays from the anode of the x-ray tube fluoresce an adjoining, independent target that produces a monochromatic spectrum, a portion of which is focused by the x-ray optical system. This two-stage method gives the system considerably versatility without undue loss in signal. The two-stage concentrator makes practical the use of focusing optics in hand-held and portable instruments.

摘要翻译： 用于从标准X射线管或其他多色发射源获得浓缩的单色X射线束的方法。 来自X射线管的阳极的X射线发出相邻的独立目标，产生单色光谱，其一部分由x射线光学系统聚焦。 这种两阶段的方法使得系统具有很大的通用性，而不会在信号中造成不必要的损失。 两级聚光器使手持和便携式仪器中的聚焦光学器件成为可能。

公开(公告)号：US20070069125A1

公开(公告)日：2007-03-29

申请号：US11237041

申请日：2005-09-27

申请人： Bruno Schueler ,  David Reed

发明人： Bruno Schueler ,  David Reed

IPC分类号： H01J40/00

CPC分类号： G01N23/2273 ,  G01N2223/085 ,  G01N2223/6116 ,  H01J2235/08

摘要： According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.

摘要翻译： 根据本发明的一个方面，提供了一种基板处理系统。 该系统可以包括封闭室的室壁，位于腔室内以支撑衬底的衬底支撑件，用于向衬底支撑件上的衬底上发射电磁辐射的电磁辐射源，引起光电子从材料发射的电磁辐射 在基板上，分析器捕获从基板发射的光电子，以及磁场发生器，以在室内产生磁场，并将光电子从基板引导到分析器。