公开(公告)号：US20160301184A1

公开(公告)日：2016-10-13

申请号：US15190102

申请日：2016-06-22

申请人： Voxtel, Inc.

发明人： George Williams

IPC分类号： H01S3/094 ,  H01S3/042 ,  H01S3/13 ,  H01S3/08 ,  H01S3/102 ,  H01S3/16 ,  H01S3/04

CPC分类号： H01S3/094076 ,  H01S3/025 ,  H01S3/0401 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0604 ,  H01S3/0612 ,  H01S3/094038 ,  H01S3/094053 ,  H01S3/09408 ,  H01S3/09415 ,  H01S3/11 ,  H01S3/1115 ,  H01S3/1118 ,  H01S3/1124 ,  H01S3/113 ,  H01S3/115 ,  H01S3/117 ,  H01S3/121 ,  H01S3/1312 ,  H01S3/1317 ,  H01S3/1608 ,  H01S3/1618 ,  H01S3/1666

摘要： A method of operating a q-switch RE,XAB laser includes: providing a pump bias current to a pump source, the pump source directed to an RE:XAB gain medium, the RE:XAB gain medium within a resonator cavity, where X is selected from Ca, Lu, Yb, Nd, Sm, Eu, Gd, Ga, Tb, Dy, Ho, Er, and where RE is selected from Lu, Y, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Pr, Tm, Cr, Ho, with a bias current level below a lasing threshold of the RE:XAB gain medium; providing a pump pulse to the gain medium, the pump pulse of the lasing threshold of the RE:XAB gain medium, the pump pulse causing the RE:XAB gain medium to emit a laser pulse; and reducing the pump bias current to at least below the gain medium lasing threshold, the combination of the pump bias, the pump pulse, and the pump reduction having a current profile.

摘要翻译： 操作q开关RE，XAB激光器的方法包括：向泵浦源提供泵偏置电流，泵浦源指向RE：XAB增益介质，谐振腔内的RE：XAB增益介质，其中X为 选自Ca，Lu，Yb，Nd，Sm，Eu，Gd，Ga，Tb，Dy，Ho，Er，其中RE选自Lu，Y，Nd，Sm，Eu，Gd，Tb，Dy，Ho， Er，Pr，Tm，Cr，Ho，偏置电流水平低于RE：XAB增益介质的激光阈值; 向增益介质提供泵浦脉冲，RE：XAB增益介质的激光阈值的泵浦脉冲，引起RE：XAB增益介质的泵浦脉冲发射激光脉冲; 并且将泵偏置电流减小到至少低于增益介质激光阈值，泵偏压，泵脉冲和具有电流分布的泵减小的组合。

公开(公告)号：US08660154B1

公开(公告)日：2014-02-25

申请号：US13347160

申请日：2012-01-10

申请人： Jasmine Louise Strong

发明人： Jasmine Louise Strong

IPC分类号： H01S3/121

CPC分类号： H01S3/121 ,  G11B7/127 ,  G11B7/1392 ,  H01S3/08059 ,  H01S3/105 ,  H01S3/139 ,  H01S5/06821 ,  H01S5/14

摘要： A digitally-controllable laser apparatus includes a resonator, which includes a two-dimensional micromirror array, and an output facet configured to output a laser beam. The array has a controllable two-dimensional reflectivity to provide control of a two-dimensional wave front of the laser beam. A digitally-controlled Q-switching of the laser apparatus, and shaping of the laser beam wave front to thereby steer the laser beam can be realized.

摘要翻译： 数字可控激光装置包括一个包括二维微镜阵列的谐振器和一个被配置为输出激光束的输出小面。 阵列具有可控的二维反射率，以提供对激光束的二维波前的控制。 可以实现激光装置的数字控制的Q开关，以及激光束波前的成形，从而控制激光束。

公开(公告)号：US07491954B2

公开(公告)日：2009-02-17

申请号：US11580414

申请日：2006-10-13

申请人： Alexander N. Bykanov ,  Igor V. Fomenkov ,  Oleh Khodykin ,  Alexander I. Ershov

发明人： Alexander N. Bykanov ,  Igor V. Fomenkov ,  Oleh Khodykin ,  Alexander I. Ershov

IPC分类号： H01J35/20

CPC分类号： H05G2/003 ,  G03F7/70033 ,  H01S3/0064 ,  H01S3/073 ,  H01S3/0805 ,  H01S3/08054 ,  H01S3/08059 ,  H01S3/083 ,  H01S3/10092 ,  H01S3/105 ,  H01S3/1066 ,  H01S3/115 ,  H01S3/121 ,  H01S3/127 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2383 ,  H05G2/008

摘要： An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may be configured to expose the optic to a gaseous etchant pressure for optic cleaning while the window is exposed to a lower gaseous etchant pressure to avoid window coating deterioration. In another aspect, an EUV light source may comprise a target material positionable along a beam path to participate in a first interaction with light on the beam path; an optical amplifier; and at least one optic directing photons scattered from the first interaction into the optical amplifier to produce a laser beam on the beam path for a subsequent interaction with the target material to produce an EUV light emitting plasma.

摘要翻译： 公开了一种LPP EUV光源，其具有位于等离子体室中的光学器件，用于反射在其中产生的EUV光和激光输入窗口。 对于该方面，EUV光源可以被配置为将窗口暴露于更低的气体蚀刻剂压力以将窗口暴露于气体蚀刻剂压力以进行光学清洁，以避免窗口涂层变质。 在另一方面，EUV光源可以包括沿着光束路径定位以参与与光束路径上的光的第一相互作用的目标材料; 光放大器; 以及至少一个光导向光子从第一相互作用散射到光放大器中以在光束路径上产生激光束，用于随后与目标材料的相互作用以产生EUV发光等离子体。

公开(公告)号：US6002704A

公开(公告)日：1999-12-14

申请号：US008333

申请日：1998-01-16

申请人： Ingo Freitag ,  Andreas Tunnermann

发明人： Ingo Freitag ,  Andreas Tunnermann

IPC分类号： H01S3/06 ,  H01S3/083 ,  H01S3/113 ,  H01S3/121

CPC分类号： H01S3/0606 ,  H01S3/083 ,  H01S3/121 ,  H01S3/0604 ,  H01S3/0612 ,  H01S3/0627 ,  H01S3/07 ,  H01S3/113

摘要： A monolithic, non-planar ring laser having Q-switched single-frequency operation comprises a diode laser as the pumping light source of which the pumping light is coupled to a ring laser crystal (2) that comprises at least three total reflection faces B, C and D and a dielectrically coated crystal face A designed as a coupling and decoupling mirror. To obtain high-power laser pulses in the highly stable single-frequency mode and further to achieve compactness, the following design solutions are offered: 1. A switching crystal (20) having an appropriate index of refraction which can be moved to a distance of about one laser beam wavelength to one of the total reflection faces B, C, D of the ring laser crystal (2) to decouple the evanescent wave field and thereby to suppress laser oscillation, said switching crystal being displaceable away from the total reflection face to generate laser pulses, 2. The ring laser crystal (2) is composed of a laser material having saturable losses at the lasing transition (lasing wavelength), 3. The ring laser crystal (30) consists of at least one active laser material crystal (32, 34) and of a further crystal (36) made of a saturable absorber material, 4. The ring laser crystal (2) is fitted at least on one surface with a saturable absorber-material layer (40), said layer preferably being deposited epitaxially, where the ring laser crystal, by means of a non-planar beam path, causes reciprocal rotation of the direction of polarization of the lasing light and by means of the Faraday effect in a permanent magnetic field (16) implements non-reciprocal rotation of the direction of polarization of the lasing light.

摘要翻译： 具有Q开关单频操作的单片，非平面环形激光器包括作为泵浦光源的二极管激光器，其中泵浦光耦合到包括至少三个全反射面B的环形激光晶体（2） C和D以及设计为耦合和去耦镜的介电涂层晶面A。 为了在高度稳定的单频模式下获得高功率激光脉冲，并进一步达到紧凑性，提供以下设计方案：1.具有适当的折射率的开关晶体（20），其可以移动到 大约一个激光束波长到环形激光晶体（2）的全反射面B，C，D之一，以消除ev逝波场，从而抑制激光振荡，所述开关晶体可以从全反射面移位到 产生激光脉冲2.环形激光晶体（2）由激光激光材料组成，激光材料在激光激发波长（激光波长）3处具有可饱和损耗。3.环形激光晶体（30）由至少一个有源激光材料晶体 由环形激光晶体（2）至少在一个表面上安装有可饱和吸收材料层（40），所述层优选为 存放 其中环形激光晶体通过非平面光束路径引起激光的偏振方向的往复旋转，并且借助于永久磁场（16）中的法拉第效应，实现了不可逆旋转 的激光的偏振方向。

公开(公告)号：US5572543A

公开(公告)日：1996-11-05

申请号：US318665

申请日：1994-11-29

申请人： Stefan Heinemann ,  Axel Mehnert ,  Walter Kroy ,  Peter Peuser ,  Nikolaus P. Schmitt ,  Helmut Seidel

发明人： Stefan Heinemann ,  Axel Mehnert ,  Walter Kroy ,  Peter Peuser ,  Nikolaus P. Schmitt ,  Helmut Seidel

IPC分类号： G02B1/10 ,  G02B5/08 ,  G02B26/00 ,  G02B26/08 ,  H01S3/02 ,  H01S3/0941 ,  H01S3/105 ,  H01S3/121 ,  H01S5/14 ,  H01S5/40 ,  H01S5/42 ,  H01S3/08

CPC分类号： G02B26/0841 ,  G02B1/10 ,  G02B26/002 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B5/0833 ,  G02B5/0858 ,  H01S3/105 ,  H01S3/121 ,  H01S5/14 ,  H01S3/025 ,  H01S3/09415 ,  H01S5/02252 ,  H01S5/4062 ,  H01S5/42

摘要： The invention provides a laser system with one or several micro-mechnically produced, actively controlled laser mirrors which are provided with an actuation device, so that the rapid manipulation of small laser mirrors is assured. The mirrors are designed so that they permit an economical production in large numbers.

摘要翻译： 本发明提供一种激光系统，其具有一个或多个微机械制造的主动控制的激光反射镜，其设置有致动装置，从而确保小激光镜的快速操纵。 镜子的设计使其能够大量经济地生产。

公开(公告)号：US5210764A

公开(公告)日：1993-05-11

申请号：US735635

申请日：1991-07-25

申请人： Hermann Bucher ,  Werner Fuss ,  Wolfram E. Schmid

发明人： Hermann Bucher ,  Werner Fuss ,  Wolfram E. Schmid

IPC分类号： H01S3/08 ,  H01S3/082 ,  H01S3/11

CPC分类号： H01S3/121 ,  H01S3/082 ,  H01S3/08086 ,  H01S3/127

摘要： The present invention relates to a method and an apparatus for gerating pulsed laser radiation which contains components at several freely selectable wavelengths. Multi-wavelength emission is synchronized in time, propagates in a precise spatial overlap and has the same beam parameters on a common propagation direction. A preferred embodiment of an apparatus for a such method is a low pressure CO.sub.2 laser gas discharge in conjunction with a multi-wavelength resonator including a Q switch.

摘要翻译： 本发明涉及一种脉冲激光辐射的方法和装置，其包含几种可自由选择的波长的分量。 多波长发射在时间上同步，在精确的空间重叠中传播，并且在共同的传播方向上具有相同的波束参数。 用于这种方法的装置的优选实施例是与包括Q开关的多波长谐振器相结合的低压CO 2激光气体放电。

公开(公告)号：US3597701A

公开(公告)日：1971-08-03

申请号：US3597701D

申请日：1969-02-13

申请人： INT STANDARD ELECTRIC CORP

发明人： CORNILLAULT JEAN EUGENE MARTIA

IPC分类号： H01S3/081 ,  H01S3/121 ,  H01S3/11 ,  H01S3/02

CPC分类号： H01S3/121 ,  H01S3/081

摘要： Apparatus for improving the Q-switching of a laser beam wherein a critical transmission prism is placed in the Fabry-Perot interferometric cavity. In one embodiment, two Lummer-Gehrke plates are joined by their end faces in a V-shape to form said critical transmission prism having an aligned input and output. In a second embodiment, two Lummer-Gehrke plates are joined to a prism to form said critical transmission prism having an aligned input and output.

公开(公告)号：US3434073A

公开(公告)日：1969-03-18

申请号：US3434073D

申请日：1964-02-24

申请人： PHILCO FORD CORP

发明人： FORKNER JOHN F

IPC分类号： H01S3/121 ,  H01S3/00 ,  G02F1/34 ,  H01S3/16

CPC分类号： H01S3/121

公开(公告)号：US09407057B2

公开(公告)日：2016-08-02

申请号：US14759517

申请日：2014-01-16

申请人： HyperMemo Oy

发明人： Vadim Kiyko

IPC分类号： H01S3/081 ,  H01S3/104 ,  H01S3/121 ,  H01S3/223 ,  H01S3/08 ,  H01S3/097

CPC分类号： H01S3/0818 ,  H01S3/08068 ,  H01S3/0817 ,  H01S3/082 ,  H01S3/09702 ,  H01S3/104 ,  H01S3/11 ,  H01S3/121 ,  H01S3/2232

摘要： The present disclosure discloses a CO2 laser and a method for the CO2 laser. The CO2 laser comprises an unstable laser cavity in the form of a first optical resonator having a semi-transparent output coupler (3), a laser medium (2) in the unstable laser cavity, and means (1) for exciting the laser medium (2). A part of the laser beam propagating beyond the light aperture of the output coupler (3) is directed to a second resonator, the second resonator comprising at least one focusing member (6), and the optical length of the second resonator being equal or multiple to the optical length of the first optical resonator. The part of the laser beam passing through the focal plane of the focusing member (6) is modulated by using a Q-switching device (8) in a manner that the excitation of the laser medium is in synchrony with the operation of the Q-switching device (8).

摘要翻译： 本公开公开了一种CO2激光器和用于CO 2激光器的方法。 CO2激光器包括具有半透明输出耦合器（3），不稳定激光腔中的激光介质（2）和激光介质激光器（1）的第一光谐振器形式的不稳定激光腔， 2）。 传播超过输出耦合器（3）的光孔的激光束的一部分被引导到第二谐振器，第二谐振器包括至少一个聚焦构件（6），并且第二谐振器的光学长度相等或多 到第一光学谐振器的光学长度。 通过使用Q开关器件（8）来激发穿过聚焦元件（6）的焦平面的激光束的部分，激光介质的激发与Q- 开关装置（8）。

公开(公告)号：US20150171591A1

公开(公告)日：2015-06-18

申请号：US14237006

申请日：2013-10-21

申请人： Kiwamu Takehisa

发明人： Kiwamu Takehisa

IPC分类号： H01S3/123 ,  H01S3/097 ,  H01S3/08 ,  H01S3/034 ,  H01S3/22 ,  H01S3/104

CPC分类号： H01S3/123 ,  H01S3/034 ,  H01S3/036 ,  H01S3/08059 ,  H01S3/081 ,  H01S3/0815 ,  H01S3/0816 ,  H01S3/0817 ,  H01S3/0818 ,  H01S3/0835 ,  H01S3/095 ,  H01S3/097 ,  H01S3/104 ,  H01S3/121 ,  H01S3/134 ,  H01S3/22 ,  H01S3/223

摘要： The disclosed invention relates to a method of realizing an oxygen laser oscillator. The laser oscillator relating to one aspect of the invention is provided with a laser cavity consisting of a high-reflectivity mirror (108) and a partial-reflectivity output mirror (107), a singlet oxygen generator (105), a focusing optics (109), and a shutter (113). Singlet oxygen (O2(1Δg)) is supplied to the chamber (102A) which is pumped beforehand by a vacuum pump. In order to produce a laser oscillation, the shutter (113) is pulled out so that the radiation from O2(1Δg) goes back and forth inside the laser cavity. This causes a stimulated emission from O2(1Δg), and a pulsed laser is extracted from the output mirror (107).

摘要翻译： 所公开的发明涉及一种实现氧激光振荡器的方法。 涉及本发明的一个方面的激光振荡器设置有由高反射率反射镜（108）和部分反射率输出镜（107），单线态氧发生器（105），聚焦光学元件（109） ）和快门（113）。 将单线态氧（O2（1＆Dgr; g））供给到由真空泵预先泵送的室（102A）。 为了产生激光振荡，拉出快门（113），使得来自O2（1＆Dgr; g）的辐射在激光腔内前后移动。 这导致来自O2（1＆Dgr; g）的受激发射，并且从输出反射镜（107）中提取脉冲激光。