公开(公告)号：US20170362699A1

公开(公告)日：2017-12-21

申请号：US15627952

申请日：2017-06-20

申请人： Axcelis Technologies, Inc.

发明人： Dennis Elliott Kamenitsa ,  Richard J. Rzeszut ,  Fernando M. Silva ,  Neil K. Colvin

IPC分类号： C23C16/12 ,  C01F7/48 ,  C01B7/13 ,  C23C16/448 ,  H01L21/306 ,  H01L21/02

CPC分类号： C23C16/12 ,  C01B7/135 ,  C01B31/36 ,  C01F7/48 ,  C23C14/48 ,  C23C16/448 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/08 ,  H01J2237/31705 ,  H01L21/02019 ,  H01L21/02167 ,  H01L21/26506 ,  H01L21/306

摘要： An ion implantation system is provided having an ion source configured to form an ion beam from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station configured to accept the ion beam for implantation of aluminum ions into a workpiece. The ion source has a solid-state material source having aluminum iodide in a solid form. A solid source vaporizer vaporizes the aluminum iodide, defining gaseous aluminum iodide. An arc chamber forms a plasma from the gaseous aluminum iodide, where arc current from a power supply is configured to dissociate aluminum ions from the aluminum iodide. One or more extraction electrodes extract the ion beam from the arc chamber. A water vapor source further introduces water to react residual aluminum iodide to form hydroiodic acid, where the residual aluminum iodide and hydroiodic acid is evacuated from the system.

公开(公告)号：US20110104034A1

公开(公告)日：2011-05-05

申请号：US12153610

申请日：2008-05-21

申请人： Randell L. Mills

发明人： Randell L. Mills

IPC分类号： C01B6/04 ,  C01D7/00 ,  C01B7/19 ,  C01B7/01 ,  C01B7/09 ,  C01B7/13 ,  C01B5/00 ,  C01B31/00 ,  C01B21/38 ,  C01B17/69 ,  C01B33/04 ,  C01B6/06 ,  C01B6/02

CPC分类号： H01M10/345 ,  C01B3/02 ,  H01M2/16 ,  H01M4/36 ,  H01M4/383 ,  H01M4/58 ,  H01M8/08 ,  H01M8/14 ,  H01M10/24 ,  H01M2300/0014 ,  Y02P70/56

摘要： This invention is directed to compositions of matter comprising a hydride ion having a binding energy greater than about 0.8 eV. The claimed hydride ions may be combined with cations, including a proton, to form novel hydrides.

摘要翻译： 本发明涉及包含结合能大于约0.8eV的氢化物离子的物质组合物。 所要求的氢化物离子可以与阳离子（包括质子）组合以形成新的氢化物。

公开(公告)号：US20090130016A1

公开(公告)日：2009-05-21

申请号：US12153614

申请日：2008-05-21

申请人： Randell L. Mills

发明人： Randell L. Mills

IPC分类号： C01B6/24 ,  C01B6/00 ,  C01G39/00 ,  C01B4/00 ,  C01B6/04 ,  C01B7/19 ,  C01B7/01 ,  C01B7/09 ,  C01B7/13 ,  C01B31/24 ,  C01B17/96

CPC分类号： H01M10/345 ,  C01B3/02 ,  H01M2/16 ,  H01M4/36 ,  H01M4/383 ,  H01M4/58 ,  H01M8/08 ,  H01M8/14 ,  H01M10/24 ,  H01M2300/0014 ,  Y02P70/56

摘要： Provided is a thermionic cathode doped with an increased binding energy hydrogen species and a method of making the doped thermionic cathode.

摘要翻译： 提供了掺杂有增加的结合能氢物种的热离子阴极和制造掺杂的热离子阴极的方法。

公开(公告)号：US5840267A

公开(公告)日：1998-11-24

申请号：US670536

申请日：1996-06-27

申请人： Kunio Saegusa

发明人： Kunio Saegusa

IPC分类号： C01B13/32 ,  C01F1/00 ,  C01F7/42 ,  C01G1/02 ,  C01G9/02 ,  C01G15/00 ,  C01G19/02 ,  C01B7/01 ,  C01B7/09 ,  C01B7/13

CPC分类号： C01G19/02 ,  C01B13/326 ,  C01F7/42 ,  C01G15/00 ,  C01G9/02 ,  C01P2002/72 ,  C01P2004/03 ,  C01P2004/32

摘要： A method for producing a metal oxide powder which comprises heating a metal or metals in an atmosphere gas comprising a halogen gas, a hydrogen halide gas or a mixture of these gases in a concentration of from 0.5% by volume or more to 99.5% by volume or less; and oxygen, water vapor or a mixture of these gases in a concentration of from 0.5% by volume or more to 99.5% by volume or less.

摘要翻译： 一种金属氧化物粉末的制造方法，其特征在于，在含有卤素气体，卤化氢气体或这些气体的混合气体的气氛气体中，加入金属或金属，浓度为0.5体积％〜99.5体积％ 或更少; 和氧气，水蒸汽或这些气体的混合物，其浓度为0.5体积％以上至99.5体积％以下。

公开(公告)号：US5693306A

公开(公告)日：1997-12-02

申请号：US562084

申请日：1995-11-22

申请人： Atsushi Utsunomiya ,  Kenju Sasaki ,  Yoshinori Tanaka ,  Masahiro Omura ,  Naoki Tomoshige

发明人： Atsushi Utsunomiya ,  Kenju Sasaki ,  Yoshinori Tanaka ,  Masahiro Omura ,  Naoki Tomoshige

IPC分类号： C01B7/13

CPC分类号： C01B7/135

摘要： A process for producing refined hydrogen iodide having organic components of 0.2 ppm by volume or less and water of 0.1 ppm by volume or less by contacting crude hydrogen iodide with a zeolite is disclosed. Crude hydrogen iodide is obtained by reducing iodine with a hydrogenated naphthalene, wherein all of the iodine is dissolved in advance in a portion of the hydrogenated naphthalene to prepare an iodine solution, and the reaction is carried out while adding continuously or intermittently the iodine solution to the balance of the hydrogenated naphthalene. The same operation may be repeated in succession using unreacted hydrogenated naphthalene and fresh iodide. The zeolite is contacted in advance with crude hydrogen iodide, the amount of which is at least 1/3 (weight ratio) relative to the amount of the zeolite, to convert impurities of sulfur components contained in the zeolite to hydrogen sulfide, thereby removing the sulfur components. Further, an activated carbon may be combined with the zeolite at the rear stage thereof.

摘要翻译： 公开了一种通过使粗碘化氢与沸石接触来制造有机成分为0.2ppm（体积）或更少的精制碘化氢和0.1ppm（体积）以下的水的方法。 通过用氢化萘还原碘获得粗碘化氢，其中所有碘预先溶解在氢化萘的一部分中以制备碘溶液，并且在连续或间歇地将碘溶液加入到 氢化萘的平衡。 可以使用未反应的氢化萘和新鲜碘化物连续地重复相同的操作。 预先将沸石与粗的碘化氢接触，其中的碘化氢至少为+ E，相对于沸石的量为1/3 + EE（重量比），将沸石中所含的硫成分的杂质转化为 硫化氢，从而除去硫成分。 此外，活性炭可以在其后段与沸石结合。

公开(公告)号：US5137700A

公开(公告)日：1992-08-11

申请号：US342587

申请日：1989-04-24

申请人： Hilbert Sloan

发明人： Hilbert Sloan

IPC分类号： C01B7/13 ,  C01B7/14 ,  C01G7/00

CPC分类号： C22B11/04 ,  C01B7/13

摘要： Aqueous iodine-iodide etching solutions are employed in the recovery of precious metals. Elemental iodine is precipitated from spent etching solutions and used to supply both the iodine and iodide of new etching solutions. Prior to extraction of the elemental iodine, used solutions, if not substantially contaminated, may be oxidized and recycled for further precious metal recovery. Aqueous etching solutions of hydriodic acid and iodine, or of ammonium iodide and iodine may be employed. Etching in such solutions, as well as in solutions of iodine and an alkali metal iodide, such as potassium iodide, may be accelerated by the use of small amounts of hydrogen peroxide (or equivalents) during etching.

摘要翻译： 碘化碘水溶液用于回收贵金属。 元素碘从废蚀刻溶液中沉淀出来，用于提供新的蚀刻溶液的碘和碘化物。 在提取元素碘之前，使用的溶液（如果基本上不被污染）可以被氧化并再循环用于进一步的贵金属回收。 可以使用氢碘酸和碘的水蚀刻溶液，或碘化铵和碘。 在蚀刻期间，可以通过使用少量的过氧化氢（或等同物）来加速这种溶液中的碘化物和碘化钾等碱金属碘化物的溶液的蚀刻。

公开(公告)号：US5105011A

公开(公告)日：1992-04-14

申请号：US554514

申请日：1990-07-20

申请人： Georges Cordier ,  Jean-Michel Grosselin

发明人： Georges Cordier ,  Jean-Michel Grosselin

IPC分类号： C01B7/13 ,  B01J25/02 ,  B01J27/128 ,  C07B43/04 ,  C07B61/00 ,  C07C209/36 ,  C07C211/45 ,  C07C211/52

CPC分类号： C07C209/36 ,  C07C209/365

摘要： A process for the preparation of amino halogeno aromatic compounds, according to which a halogenonitro-aromatic compound is brought into the presence of a nickel-, cobalt- or iron-based catalyst, preferably nickel-based, and, more preferably, Raney nickel, in the presence of an effective amount of iodide, at a temperature and hydrogen pressure sufficient to form said halogenoamino-aromatic compound.

摘要翻译： 一种制备氨基卤代芳族化合物的方法，根据该方法，将卤代硝基芳族化合物置于镍，钴或铁基催化剂的存在下，优选为镍基，更优选为阮内镍， 在有效量的碘化物的存在下，在足以形成所述卤代氨基 - 芳族化合物的温度和氢气压力下进行。

公开(公告)号：US4925646A

公开(公告)日：1990-05-15

申请号：US357049

申请日：1989-05-25

申请人： Glenn M. Tom ,  Duncan W. Brown

发明人： Glenn M. Tom ,  Duncan W. Brown

IPC分类号： B01D53/28 ,  C01B7/07 ,  C01B7/09 ,  C01B7/13 ,  C01B7/19 ,  C01G1/06

CPC分类号： C01B7/093 ,  B01D53/28 ,  C01B7/0718 ,  C01B7/135 ,  C01B7/197 ,  C01G1/06

摘要： A process for drying a gaseous hydrogen halide of the formula HX, wherein X is bromine, Chlorine, FLuorine, or iodine, to remove water impurity therefrom, in which a scavenger precursor composition is provided, including a support having associated therewith partially or fully alkylated metal alkyl compounds or pendant groups. The precursor composition is reacted with gaseous hydrogen halide to convert the metal alkyl compounds and/or pendant functional groups to the corresponding metal halide compounds and/or pendant functional groups, which in turn react with the water impurity to produce an essentially completely water-free (below 0.1 ppm) gaseous hydrogen halide effluent. The process of the invention has utility for producing high purity, anhydrous gaseous hydrogen halides for semiconductor manufacturing operations.

摘要翻译： 一种用于干燥式HX的气态卤化氢的方法，其中X是溴，氯，氟嘌呤或碘，以除去其中含有杂质的水分杂质，其中提供了一种清除剂前体组合物，包括其部分或完全烷基化的载体 金属烷基化合物或侧基。 前体组合物与气态卤化氢反应以将金属烷基化合物和/或侧链官能团转化成相应的金属卤化物化合物和/或侧基官能团，其又与水杂质反应以产生基本上完全无水的 （低于0.1ppm）气态卤化氢流出物。 本发明的方法可用于生产用于半导体制造操作的高纯度无水气态卤化氢。

公开(公告)号：US3848065A

公开(公告)日：1974-11-12

申请号：US29368672

申请日：1972-09-29

申请人： MONSANTO CO

发明人： PAULIK F

IPC分类号： C01B7/13 ,  C01B7/18

CPC分类号： C01B7/135

摘要： 1. A PROCESS FOR PRODUCING AQUEOUS HYDROGEN IODIDE WHICH COMPRISES REACTING HYDROGEN AND IODINE IN WATER AT A TEMPERATURE FROM ABOUT 70* TO ABOUT 125*C. AND A PRESSURE FROM ABOUT 50 TO ABOUT 80 P.S.I.G. IN CONTACT WITH A CATALYST CONSISTING ESSENTIALLY OF A METAL SELECTED FROM THE GROUP CONSISTING OF RHODIUM AND RUTHENIUM SUPPORTED ON AN INERT MATERIAL, THE AMOUNT OF METAL IN SAID CATLSYT BEING IN THE RANGE FROM ABOUT 0.00001 MOLE TO ABOUT 0.01 MOLE PER MOLE OF IODINE.

公开(公告)号：US3667913A

公开(公告)日：1972-06-06

申请号：US3667913D

申请日：1970-05-04

申请人： BAYER AG

发明人： HUND FRANZ

IPC分类号： B01J23/26 ,  C01B7/04 ,  C01B7/13 ,  C01B17/78 ,  C01B21/26 ,  C01B21/40 ,  C01B32/50

CPC分类号： C01B17/78 ,  B01J23/26 ,  C01B7/04 ,  C01B7/13 ,  C01B21/265 ,  C01B21/40 ,  C01B32/50

摘要： CHROMIUM-DIOXIDE OF RUTILE-TYPE CRYSTAL-STRUCTURE AND MODIFIED CHROMIUM-DIOXIDE CONTAINING OXIDES AND/OR FLUORIDES OF CATIONS WHICH HAVE RADII IN THE RANGE BETWEEN 0.46 AND 0.91 A. CAN BE USED AS CATALYSTS WITH HIGH AND PERMANENT ACTIVITY TO PROMOTE OXIDATION-PROCESSES SUCH AS OXIDATION OF HYDROGEN-CHLORIDE TO CHLORINE AND WATER, CONVERSION OF SULFUR-DIOXIDE TO SULFUR-TRIOXIDE OXIDATION OF CARBON-MONOXIDE TO CARON-DIOXIDE, OXIDATION OF AMMONIA TO NITRIC OXIDES OXIDATION AND OXYCLORINATION OF HYDROCARBONS, COMBUSTION OF HYDROGEN OR ALCOHOLS AND THE LIKE. THE CHROMIUM-DIOXIDE OR THE MODIFIED CHROMIUM-DIOXIDE CAN BE USED AS SUCH OR TOGETHER WITH CARRIERS. FURTHERMORE IT IS POSSIBLE TO COMBINE THE CHROMIUM-DIOXIDE CATALYSTS WITH OTHER CATALYTICALLY ACTIVE MATERIALS.