Low resistance and reliable copper interconnects by variable doping
    2.
    发明授权
    Low resistance and reliable copper interconnects by variable doping 有权
    低电阻和可靠的铜互连可变掺杂

    公开(公告)号:US07026244B2

    公开(公告)日:2006-04-11

    申请号:US10637105

    申请日:2003-08-08

    IPC分类号: H01C23/48

    摘要: A method and system is provided for efficiently varying the composition of the metal interconnects for a semiconductor device. A metal interconnect according to the present disclosure has an intermediate layer on a dielectric material, the intermediate layer having a relatively higher concentration of an impurity metal along with a primary metal, the impurity metal having a lower reduction potential than the primary metal. The metal interconnect has a main layer of the metal alloy interconnect on top of the intermediate layer and surrounded by the intermediate layer, the main layer having a relatively higher concentration of the primary metal than the intermediate layer, wherein the intermediate and main layers of the metal alloy interconnect each maintains a material uniformity.

    摘要翻译: 提供了一种方法和系统,用于有效地改变半导体器件的金属互连的组成。 根据本公开的金属互连在电介质材料上具有中间层,中间层与主金属一起具有较高浓度的杂质金属,杂质金属具有比初级金属低的还原电位。 金属互连件在中间层的顶部具有金属合金互连的主层,被中间层包围,主层具有比中间层更高的一次金属浓度,其中,中间层和中间层的中间层和主要层 金属合金互连件均保持材料均匀性。

    Semiconductor device having high aspect ratio contacts
    4.
    发明授权
    Semiconductor device having high aspect ratio contacts 失效
    具有高纵横比接触的半导体器件

    公开(公告)号:US6127732A

    公开(公告)日:2000-10-03

    申请号:US059671

    申请日:1998-04-13

    摘要: Impurities are added to a conductor layer in a semiconductor process to prevent formation of void spaces and encourage complete filling of contacts. The impurities reduce the melting point and surface tension of a conductor layer, thereby improving filling characteristics during a reflow step. The impurities may be added at any time during the process, including during conductor deposition and/or reflow.

    摘要翻译: 在半导体工艺中将杂质添加到导体层中以防止形成空隙并促进接触的完全填充。 杂质降低导体层的熔点和表面张力,从而改善回流步骤期间的填充特性。 杂质可以在该过程中的任何时间加入,包括在导体沉积和/或回流期间。