Abstract:
A method is provided that includes forming a word line above a substrate, the word line disposed in a first direction, forming a bit line above the substrate, the bit line disposed in a second direction perpendicular to the first direction, forming a nonvolatile memory material between the word line and the bit line, and forming a memory cell including the nonvolatile memory material at an intersection of the bit line and the word line. The word line includes a first portion and a second portion including an electrically conductive carbon-containing material. The nonvolatile memory material includes a semiconductor material layer and a conductive oxide material layer, with the semiconductor material layer disposed adjacent the second portion of the word line.
Abstract:
To provide enhanced data storage devices and systems, various systems, architectures, apparatuses, and methods, are provided herein. In a first example, a multi-layer resistive random access memory (ReRAM) array is provided. Active layers of the array each comprise a plurality of ReRAM elements that each include a gate portion having a gate terminal and a memory cell portion with a source terminal and drain terminal. Insulating layers of the array alternate with the active layers and each comprise an insulating material between adjacent active layers. Wordlines span through more than one layer of the array, with each of the wordlines comprising a column of memory cell portions coupled via source terminals and drain terminals of column-associated ReRAM elements. Bitlines each span through an associated active layer of the array, with each of the bitlines comprising a row of gate portions coupled via at least gate terminals of row-associated ReRAM elements.
Abstract:
An apparatus for high density memory with integrated logic. Specifically, a three terminal resistive random access memory (ReRAM) device having Schottky barriers that can switch from a low resistive state to a high resistive state is provided. The Schottky transistor memory device includes an insulating layer, a source region disposed on the insulating layer, a drain region disposed on the insulating layer, a binary or complex oxide memory material, a gate dielectric layer, and a gate electrode. As voltage is applied the Schottky barrier breaks down leading to the formation of a conductive anodic filament (CAF). The CAF is non-volatile and short-circuits the reverse-biased barrier thus keeping the device in a low resistance state. Removing the CAF switches the device back to a high resistance state. Thus, a new type of semiconductor device advantageously combines computation and memory further providing for very high density NAND chains.
Abstract:
A method is provided that includes forming a vertical bit line disposed in a first direction above a substrate, forming a multi-layer word line disposed in a second direction above the substrate, the second direction perpendicular to the first direction, and forming a memory cell including a nonvolatile memory material at an intersection of the vertical bit line and the multi-layer word line. The multi-layer word line includes a first conductive material layer and a second conductive material layer disposed above the first conductive material layer. The memory cell includes a working cell area encompassed by an intersection of the first conductive material layer and the nonvolatile memory material.
Abstract:
A method is provided for forming a monolithic three-dimensional memory array. The method includes forming a first vertically-oriented polysilicon pillar above a substrate, the first vertically-oriented polysilicon pillar surrounded by a dielectric material, removing the first vertically-oriented polysilicon pillar to form a first void in the dielectric material, and filling the first void with a conductive material to form a first via.
Abstract:
Methods for improving the operation of a memory array by arranging a Metal-Insulator-Metal (MIM) structure between a word line and an adjustable resistance bit line structure are described. The MIM structure may correspond with a metal/ReRAM material/metal structure that is arranged between the word line and an intrinsic polysilicon region of the adjustable resistance bit line structure. In one example, a word line may be arranged adjacent to a ReRAM material that is adjacent to a first metal that is adjacent to the intrinsic polysilicon region. In another example, the word line may be arranged adjacent to a ReRAM material that is adjacent to a first metal that is adjacent to a second metal different from the first metal that is adjacent to the intrinsic polysilicon region.
Abstract:
Thin film resistive memory material stacks including at least one of a high work function metal oxide at an interface of a first electrode and a thin film memory material, and a low work function rare earth metal at an interface of a second electrode and the thin film memory material. The high work function metal oxide provides a good Schottky barrier height relative to memory material for high on/off current ratio. Compatibility of the metal oxide with switching oxide reduces cycling loss of oxygen/vacancies for improved memory device durability. The low work function rare earth metal provides high oxygen solubility to enhance vacancy creation within the memory material in as-deposited state for low forming voltage requirements while providing an ohmic contact to the resistive memory material.
Abstract:
An embodiment relates to a transistor device including a pillar of semiconductor material extending vertically from a bottom portion in contact with an electrically conductive contact line, where the electrically conductive contact line extends laterally past the pillar in a horizontal direction, a gate insulating liner layer on a lateral side of the pillar, a gate electrode on the gate insulating layer extending along the lateral side of the pillar, and a region of electrically insulating semiconductor oxide material filling a space between a bottom portion of the gate electrode and a top portion of the electrically conductive contact line.
Abstract:
Techniques are disclosed for forming non-planar resistive memory cells, such as non-planar resistive random-access memory (ReRAM or RRAM) cells. The techniques can be used to reduce forming voltage requirements and/or resistances involved (such as the resistance during the low-resistance state) relative to planar resistive memory cells for a given memory cell space. The non-planar resistive memory cell includes a first electrode, a second electrode, and a switching layer disposed between the first and second electrodes. The second electrode may be substantially between opposing portions of the switching layer, and the first electrode may be substantially adjacent to at least two sides of the switching layer, after the non-planar resistive memory cell is formed. In some cases, an oxygen exchange layer (OEL) may be disposed between the switching layer and one of the first and second electrodes to, for example, increase flexibility in incorporating materials in the cell.