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2.发明专利
公开(公告)号：JP5143787B2
公开(公告)日：2013-02-13
申请号：JP2009134962
申请日：2009-06-04
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01J37/20 , G01B15/00 , H01L21/683
CPC classification number: H01L21/6831 , H01J37/145 , H01J37/28 , H01J2237/2817 , H01L22/12
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公开(公告)号：JP5537386B2
公开(公告)日：2014-07-02
申请号：JP2010250386
申请日：2010-11-09
Applicant: 株式会社日立ハイテクノロジーズ
CPC classification number: H01J37/261 , G10K11/172 , H01J37/16 , H01J37/28 , H01J2237/0216
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公开(公告)号：JP5107984B2
公开(公告)日：2012-12-26
申请号：JP2009217641
申请日：2009-09-18
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01J37/20 , H01L21/027
CPC classification number: H01J37/20 , H01J2237/20228 , H01J2237/20278
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Patent Agency Ranking
公开(公告)号：JP4871027B2
公开(公告)日：2012-02-08
申请号：JP2006148924
申请日：2006-05-29
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01J37/20 , G01N23/225
CPC classification number: H01J37/3174 , B82Y10/00 , B82Y40/00 , Y10T74/20354
Abstract: Provided is a stage on which to place a sample, which is capable of performing a high-precision positioning at a short time, and which prevents an image drift of a measuring object. The stage includes: a base having a guiding unit; a table which moves in a movement direction along the guiding unit; a motion unit which provides motion in the movement direction in order to cause the table to move; and a transmission unit for transmitting the motion to the table. In the stage, the transmission unit includes a table block fixed to the table, and a motion block fixed to the motion unit; and the table block and the motion block contact each other at two points forward and backward in the movement direction while in motion, and are separated away from each other while not in motion.
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公开(公告)号：JP5547044B2
公开(公告)日：2014-07-09
申请号：JP2010259352
申请日：2010-11-19
Applicant: 株式会社日立ハイテクノロジーズ
IPC: H01L21/677 , H01J37/20 , H01L21/66
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公开(公告)号：JP5337531B2
公开(公告)日：2013-11-06
申请号：JP2009045029
申请日：2009-02-27
Applicant: 株式会社日立ハイテクノロジーズ
Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam device for accurately specifying an object to be measured without depending on coordinate errors owing to heat generated by the continuous movement of a stage mechanism or others. SOLUTION: The charged particle beam device includes an arithmetic unit for specifying a measurement position with template matching. It also includes a storing medium for storing a relationship for a change of a shift length between an ideal measurement position for the object to measured, which is specified with an increase in the number of measurement points and the template matching of the increase in the number of measurement points, and an actual measurement position. The arithmetic unit calculates the shift length at the next measurement point in accordance with the relationship. When the calculation value exceeds a predetermined threshold value, it calculates a displacement that the shift length is corrected in accordance with the calculation value. COPYRIGHT: (C)2010,JPO&INPIT
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