Abstract:
PROBLEM TO BE SOLVED: To allow a metal electrode to be patterned more easily and reliably at lower costs when compared to conventional methods, in a semiconductor device in which a metal electrode for connection is formed on an aluminum electrode formed on one surface of a semiconductor substrate. SOLUTION: An aluminum electrode 11 and a protection film 12 are sequentially formed on the surface 1a of a semiconductor substrate 1, and then an opening 12a is formed in the protection film 12, and subsequently a metal electrode 13 is formed on the surface 11a of the aluminum electrode 11 exposed through the opening 12a, thereby forming a semiconductor device. A level difference is formed so that the surface 11a of the aluminum electrode 11 exposed through the opening 12a is recessed relative to the top surface of the protection film 12. The metal electrode 13 is formed only on the surface 11a of the aluminum electrode 11, which is exposed through the opening 12a, and the side surface 12b of the protection film 12 by patterning the film formed on the aluminum electrode 11 and the protection film 12 by means of cutting, grinding, or polishing. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To suppress warp of a semiconductor wafer becoming a semiconductor chip as much as possible at the time of producing the semiconductor chip in a semiconductor device being produced by arranging heat sinks on the opposite major surface sides of the semiconductor chip having electrodes on the major surface and the major rear surface and then resin molding the device substantially entirely. SOLUTION: A semiconductor wafer 100 becoming a semiconductor chip 10 having a major surface and a major rear surface matching those of the semiconductor chip 10 is prepared, a rear surface electrode 13 is formed on the major rear surface of the semiconductor wafer 100, and under a state where the major rear surface of the semiconductor wafer 100 is secured to a substrate 200 for supporting the semiconductor wafer 100, a surface electrode 12 is formed on the major surface of the semiconductor wafer 100, the supporting substrate 200 is removed and the semiconductor wafer 100 is cut thus forming the semiconductor chip 10. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To reduce production cost, while enhancing heat dissipation properties by simplifying insulation arrangement or heat transfer arrangement. SOLUTION: The semiconductor device 11 comprises a first metal body 13 bonded to the back side of a semiconductor element 12 and serving as an electrode and a heat dissipation, a second metal body 14 bonded to the surface side of the semiconductor element 12 and serving as an electrode and a heat dissipation, where the entire body is molded body resin 17. The first metal body 13 and the second metal body 14 are exposed to one planar part 19 of the molding 18. According to the arrangement, insulation arrangement or heat transfer arrangement is required only for the first metal body 13 and for the second metal body 14 exposed to one planar part 19 of the molding 18. COPYRIGHT: (C)2003,JPO
Abstract:
PROBLEM TO BE SOLVED: To prevent decrease in the non-defective rate, simplify the processing of a lead frame, reduce the size of a package, even if the chip size is increased, and to make an IC applicable even to a device of such a structure as to be cooled from the surface of a chip. SOLUTION: This insulated-gated power IC comprises a plurality of cell blocks 12 formed on a chip 1, a plurality of independent gate electrodes formed on the cell blocks 12 respectively, a plurality of gate pads 18 connected to the gate electrodes formed on the chip 1 respectively, and a plurality of pads 19, having the emitter potential formed on the chip 1 which are formed so as to be adjacent to the gate pads 18. Due to this structure, gate pads 18 of cell blocks 12 of defective products can be wire-bonded to pads 19 having emitter potential.
Abstract:
PROBLEM TO BE SOLVED: To realize a semiconductor device equipped with resistors and capacitors suitable for integration. SOLUTION: A silicon oxide film 5 is formed on a P-type silicon substrate 1, and an N -type diffusion region 7a is formed on the surface of the P-type silicon substrate 1. The silicon oxide film 5 is partially removed, a silicon thermal oxide film 20 is formed, and a thin film resistor 9 is formed thereon. By this setup, a capacitor is formed of the thin film resistor 9 and an N -type diffusion region 7a formed on the surface of a P -type semiconductor substrate. The capacitor can be formed under a region where the thin film resistor 9 is formed and suitable for integration.
Abstract:
PROBLEM TO BE SOLVED: To reduce ruggedness of a metal electrode, to improve bonding of an aluminum electrode and to reduce electrical defects in a semiconductor device configured by forming the soldering or wire bonding metal electrode with respect to the aluminum electrode formed on one face of a semiconductor substrate. SOLUTION: In the semiconductor device, an aluminum electrode 11 is formed on one face 1a of a semiconductor substrate 1, a protecting film 12 is formed on the aluminum electrode 11, an opening 12a is formed on the protecting film 12, a front face of the aluminum electrode 11 appearing from the opening 12a is etched, and a metal electrode 13 is then formed on the etched front face of the aluminum electrode 11. A recess 11a on the front face of the aluminum electrode 11 formed by etching has a shape widening the bottom side rather than the opening side. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To make temperatures of a plurality of semiconductor elements substantially equal even if there are variations in characteristics of the plurality of the semiconductor elements connected in parallel. SOLUTION: This inverter circuit 1 is composed of a circuit constitution 7 formed by connecting the two or more semiconductor elements 6 in parallel, and characterized in that the semiconductor element 6 used for the two or more semiconductor elements 6 has a characteristic that a current value at a cross point where a normal temperature Vce-Ice characteristic and a high temperature Vce-Ice characteristic intersect with each other is smaller than a normal energization current value. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To employ a structure of radiating heat from both upper and lower faces of a semiconductor element, while obtaining a sufficient heat radiation performance. SOLUTION: A semiconductor device 11 is constituted in such a way that two heatsinks 13, 14 are solder-joined to upper and lower faces of a semiconductor element 12, by interposing a radiation block 15 having an external shape which is smaller than the semiconductor element 12, between the upper face of the semiconductor element 12 and the upper heatsink 14. A region where a channel of a main cell is formed or a region where a channel current of the main cell flows on the upper face of the semiconductor element 12 is disposed below the radiation block 15, and also this structure is not formed away from the end of the radiation block 15 by about 1.0 mm or more. With this structure, a radiation path of heat generated in the main cell is directed to a vertical direction of the element, thereby obtaining the sufficient heat radiation performance. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To improve adhesion of an Al electrode and a metal electrode in a semiconductor device constituted by forming the metal electrode for soldering or wire bonding to the Al electrode formed on one surface of a semiconductor substrate. SOLUTION: A protective film 12 is formed on an Al electrode 11 on one surface of a semiconductor substrate 1, a metal electrode 13 is formed on the front surface of the Al electrode 11 exposed from an opening 12a formed on the protecting film 12, and a recess 11a that is recessed by etching, is formed on the front surface of the Al electrode 11 exposed from the opening 12a. The film thickness (d) in the portion remaining after etching in the Al electrode 11 is greater than the depth d' of the recess, the Al electrode 11 comprises a material of which an etching rate in etching is smaller than Al, so that an etched surface of the Al electrode 11 is made into a rugged shape wherein a projecting part 11b is composed of a material of a small etching rate. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To prevent a semiconductor chip electrode from breakdown due to stress produced by heat cycles. SOLUTION: An emitter electrode 16 is formed on the surface of a semiconductor substrate 2 having a semiconductor circuit formed thereon, and is constituted of a circuit wiring electrode 13, a barrier metal layer 14, and an element surface protective film 15. The element surface protective film 15 is made of a hard material having a high Young's modulus, and completely covers the surface and end faces of the circuit wiring electrode 13. The element surface protective film 15 is so designed as to satisfy the equation: E t≈Esub tsub, wherein E is the Young's modulus of the element surface protective film 15 and t its thickness, and Esub is the Young's modulus of the semiconductor substrate 2 and tsub its thickness. In a semiconductor device constituted in this way, the circuit wiring electrode 13 is free from the effect of the stress, and is protected from being broken. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation:要解决的问题:防止半导体芯片电极由于热循环产生的应力而击穿。 解决方案:在其上形成有半导体电路的半导体衬底2的表面上形成发射电极16,由电路布线电极13,阻挡金属层14和元件表面保护膜15构成。 元件表面保护膜15由具有高杨氏模量的硬质材料制成,并且完全覆盖电路布线电极13的表面和端面。元件表面保护膜15被设计成满足以下等式:E t ≈Eubububub,其中E是元件表面保护膜15的杨氏模量,其厚度,Esub是半导体衬底2的杨氏模量,并使其厚度减小。 在这样构成的半导体装置中,电路布线电极13不受应力的影响,不受破坏。 版权所有(C)2005,JPO&NCIPI