3D CMOS Image Sensors, Sensor Systems Including the Same
    1.
    发明申请
    3D CMOS Image Sensors, Sensor Systems Including the Same 有权
    3D CMOS图像传感器,包括它的传感器系统

    公开(公告)号:US20110193940A1

    公开(公告)日:2011-08-11

    申请号:US12984972

    申请日:2011-01-05

    IPC分类号: H04N13/02 H01L27/146

    CPC分类号: H01L27/14629 H01L27/14687

    摘要: A three-dimensional (3D) CMOS image sensor (CIS) that sufficiently absorbs incident infrared-rays (IRs) and includes an infrared-ray (IR) receiving unit formed in a thin epitaxial film, thereby being easily manufactured using a conventional CIS process, a sensor system including the 3D CIS, and a method of manufacturing the 3D CIS, the 3D CIS including an IR receiving part absorbing IRs incident thereto by repetitive reflection to produce electron-hole pairs (EHPs); and an electrode part formed on the IR receiving part and collecting electrons produced by applying a predetermined voltage thereto.

    摘要翻译: 一种三维(3D)CMOS图像传感器(CIS),其足以吸收入射的红外线(IR)并且包括形成在薄的外延膜中的红外线(IR)接收单元,由此容易地使用传统的CIS工艺 包括3D CIS的传感器系统和制造3D CIS的方法,3D CIS包括通过重复反射吸收入射到其中的IR的IR接收部分以产生电子 - 空穴对(EHP); 以及形成在IR接收部上并且收集通过施加预定电压而产生的电子的电极部分。

    Apparatus for analyzing a substrate employing a copper decoration
    2.
    发明授权
    Apparatus for analyzing a substrate employing a copper decoration 失效
    用于分析使用铜装饰的基板的装置

    公开(公告)号:US06919214B2

    公开(公告)日:2005-07-19

    申请号:US10688954

    申请日:2003-10-21

    IPC分类号: G01N33/00 H01L21/66 H01L21/00

    CPC分类号: H01L22/24 G01N2033/0095

    摘要: An apparatus for analyzing a substrate employing a copper decoration includes a bath having at least two receiving containers for receiving electrolytes, slots formed at insides of the receiving containers for receiving substrates to be analyzed in a direction that is normal to a bottom face of the bath, lower copper plates provided in the receiving containers, the lower copper plates making contact with entire rear faces of the substrates received in the receiving containers, upper copper plates provided in the receiving containers, each of the upper copper plates corresponding to a respective one of the lower copper plates, and separated from front faces of the substrates, and a power source connected to the upper copper plates and the lower copper plates for providing voltages to the same. A plurality of substrates may be simultaneously analyzed using one apparatus thereby greatly reducing an amount of time required for the analysis.

    摘要翻译: 用于分析使用铜装饰的基板的装置包括具有至少两个用于接收电解质的接收容器的浴槽,在接收容器的内侧形成的槽,用于接收正常于浴底面的方向分析的基板 设置在接收容器中的下铜板,与接收容器中容纳的基板的整个后表面接触的下铜板,设置在接收容器中的上铜板,每个上铜板对应于 下铜板,并且与基板的前表面分离,以及连接到上铜板和下铜板的电源,用于向其提供电压。 可以使用一个装置同时分析多个基板,从而大大减少了分析所需的时间量。

    Polishing pad of a chemical mechanical polishing apparatus and method of manufacturing the same
    7.
    发明申请
    Polishing pad of a chemical mechanical polishing apparatus and method of manufacturing the same 有权
    化学机械抛光装置的抛光垫及其制造方法

    公开(公告)号:US20070197143A1

    公开(公告)日:2007-08-23

    申请号:US11706241

    申请日:2007-02-15

    IPC分类号: B24B1/00 B24D11/00

    CPC分类号: B24B37/24 B24D18/0063

    摘要: The surface(s) of a polishing pad for polishing an object has a first portion including hydrophilic material and a second portion including hydrophobic material. The first portion of the polishing surface is located in a first region of the polishing pad and the second portion of the polishing surface is located in a second region of the polishing pad juxtaposed with the first region in the radial direction of the pad. The hydrophilic material may be a polymer resin that contains hydrophilic functional groups having OH and/or ═O at bonding sites of the polymer. The hydrophobic material may be a polymer resin that contains hydrophobic functional groups having H and/or F at bonding sites of the polymer. The polishing pad is manufactured by extruding respective lines of the hydrophilic and hydrophobic materials. The extruders and a backing are moved relative to each other such that the lines form concentric rings of the hydrophilic and hydrophobic materials.

    摘要翻译: 用于抛光物体的抛光垫的表面具有包括亲水材料的第一部分和包括疏水材料的第二部分。 抛光表面的第一部分位于抛光垫的第一区域中,并且抛光表面的第二部分位于抛光垫的与垫的径向方向上与第一区域并置的第二区域中。 亲水材料可以是聚合物树脂,其在聚合物的键合位置含有具有OH和/或-O的亲水性官能团。 疏水性材料可以是在聚合物的结合位置含有H和/或F的疏水官能团的聚合物树脂。 抛光垫通过挤出亲水和疏水材料的相应线来制造。 挤出机和背衬相对于彼此移动,使得线形成亲水和疏水材料的同心环。