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公开(公告)号:US11639547B2
公开(公告)日:2023-05-02
申请号:US16401467
申请日:2019-05-02
发明人: Prerna Goradia , Jennifer Y. Sun , Xiaowei Wu , Geetika Bajaj , Atul Chaudhari , Ankur Kadam
摘要: Described herein are articles, systems and methods where a halogen resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The halogen resistant coating has an optional amorphous seed layer and a transition metal-containing layer. The halogen resistant coating uniformly covers features of the chamber component, such as those having an aspect ratio of about 3:1 to about 300:1.
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公开(公告)号:US11587771B2
公开(公告)日:2023-02-21
申请号:US15982888
申请日:2018-05-17
IPC分类号: H01L21/02 , H01L21/67 , H01J37/32 , C23C4/134 , C23C4/11 , C04B41/50 , C04B41/00 , C04B41/87 , C04B35/10 , C23C4/10 , C04B35/00 , H01L21/3065 , H01L21/56 , H01L21/48 , C04B35/505 , C04B35/48 , B32B15/20 , B32B15/04 , C04B35/01 , C04B35/50 , C23C26/00 , C23C30/00 , C23C4/12 , B32B18/00
摘要: A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.
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公开(公告)号:US11566317B2
公开(公告)日:2023-01-31
申请号:US15711885
申请日:2017-09-21
发明人: Jennifer Y. Sun , Vahid Firouzdor , Biraja Prasad Kanungo , Tom K. Cho , Vedapuram S. Achutharaman , Ying Zhang
IPC分类号: C04B41/89 , C04B41/00 , C04B41/52 , C04B35/505 , C04B35/622 , C04B41/45 , C04B35/00 , C23C14/08 , C04B41/50 , C23C14/46 , C23C14/58 , H01J37/32 , C04B41/87
摘要: An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide is selected from a group consisting of YF3, Er4Al2O9, ErAlO3, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
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公开(公告)号:US11424136B2
公开(公告)日:2022-08-23
申请号:US17137076
申请日:2020-12-29
IPC分类号: H01J37/32 , H01L21/67 , B65D43/02 , C23C4/11 , C23C4/12 , C23C4/04 , C23C4/10 , C23C4/01 , C23C14/00 , C23C4/134 , C23C4/14 , C23C4/16 , C23C14/08
摘要: A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.
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公开(公告)号:US11373882B2
公开(公告)日:2022-06-28
申请号:US17006361
申请日:2020-08-28
发明人: Jennifer Y. Sun , Ren-Guan Duan , Jie Yuan , Li Xu , Kenneth S. Collins
IPC分类号: C04B35/486 , C04B35/505 , H01L21/67
摘要: Disclosed herein is a ceramic article or coating useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The ceramic article or coating is formed from a combination of yttrium oxide and zirconium oxide.
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公开(公告)号:US11053581B2
公开(公告)日:2021-07-06
申请号:US16685341
申请日:2019-11-15
发明人: Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
摘要: An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Er2O3, Er3Al5O12, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
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公开(公告)号:US11014853B2
公开(公告)日:2021-05-25
申请号:US16279247
申请日:2019-02-19
发明人: Jennifer Y. Sun , David Fenwick
IPC分类号: H01J37/32 , C04B35/505 , C04B35/638 , C04B35/622 , H01L21/67 , H01L21/683 , C04B35/645 , H01L21/687 , C23C30/00 , C04B41/00
摘要: A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y2O3—ZrO2. The ceramic material consists essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
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公开(公告)号:US11008653B2
公开(公告)日:2021-05-18
申请号:US15844335
申请日:2017-12-15
发明人: David Fenwick , Xiaowei Wu , Jennifer Y. Sun
摘要: A multi-layer coating for a surface of an article comprises a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film comprising YZrxOy. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.
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公开(公告)号:US20210123143A1
公开(公告)日:2021-04-29
申请号:US17072301
申请日:2020-10-16
发明人: David Fenwick , Jennifer Y. Sun , Cheng-Hsuan Chou , Xiao-Ming He
IPC分类号: C23F11/02 , C23C16/40 , C23C16/505 , C23C16/455 , C23F11/18
摘要: Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.
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公开(公告)号:US20200181771A1
公开(公告)日:2020-06-11
申请号:US16211335
申请日:2018-12-06
发明人: Xiaowei Wu , Jennifer Y. Sun , Michael R. Rice
IPC分类号: C23C16/40 , C23C16/455
摘要: Certain embodiments of the present disclosure relate to coated articles and methods of coating articles. In one embodiment, a coated article comprises an article adapted for use in a processing chamber, and a coating formed on exterior and interior surfaces of the article. In one embodiment, the coating comprises a rare earth metal-containing ceramic, and the coating is substantially uniform, conformal, and porosity-free.
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