摘要:
When processing such as SiC epitaxial growth is performed at an ultrahigh temperature of 1500° C. to 1700° C., a film-forming gas can be decreased to heat-resistant temperature of a manifold and film quality uniformity can be improved. A substrate processing apparatus includes a reaction chamber for processing a plurality of substrates, a boat for holding the plurality of substrates, a gas supply nozzle for supplying a film-forming gas to the plurality of substrates, an exhaust port for exhausting the film-forming gas supplied into the reaction chamber, a heat exchange part which defines a second flow path narrower than a first flow path defined by an inner wall of the reaction chamber and the boat, and a gas discharge part installed under the lowermost substrate of the plurality of substrates.
摘要:
When processing such as SiC epitaxial growth is performed at an ultrahigh temperature of 1500° C. to 1700° C., a film-forming gas can be decreased to heat-resistant temperature of a manifold and film quality uniformity can be improved. A substrate processing apparatus includes a reaction chamber for processing a plurality of substrates, a boat for holding the plurality of substrates, a gas supply nozzle for supplying a film-forming gas to the plurality of substrates, an exhaust port for exhausting the film-forming gas supplied into the reaction chamber, a heat exchange part which defines a second flow path narrower than a first flow path defined by an inner wall of the reaction chamber and the boat, and a gas discharge part installed under the lowermost substrate of the plurality of substrates.
摘要:
There are provided a substrate processing apparatus capable of suppressing leakage of magnetic field during processing of a substrate. The substrate processing apparatus of the present invention includes: a reaction tube having a processing chamber provided therein to process a substrate; an induction heating unit installed outside of the reaction tube to accommodate the reaction tube, wherein the induction heating unit is configured to electromagnetically induction-heat the processing chamber by generating a magnetic field; an accommodation tube installed outside of the induction heating unit to accommodate the induction heating unit, wherein the accommodation tube accommodates the reaction tube and the induction heating unit in an air-tight manner; a shielding unit made of a conductive material installed to surround an outside of the accommodation tube; and an inert gas supply unit installed in a gap between the reaction tube and the accommodation tube where the induction heating unit is installed, wherein the inert gas supply unit is configured to supply an inert gas into the gap.
摘要:
A control unit for a rotary electric machine control system includes a first current command module, a second current command module and a change module. The first current command module controls the rotary electric machine based on a maximum efficiency characteristic line. The second current command module controls the rotary electric machine based on an early switching characteristic line, which is set at a retard angle side relative to the maximum efficiency characteristic line with a predetermined phase difference. When a control mode is switched over to a rectangular wave voltage phase control mode from an overmodulation current control mode in accordance with an increase in torque, the change module changes the current command from the first current command module to the second command current module.
摘要:
In a vehicle control system that includes an engine, a first rotary electric machine, a second rotary electric machine and a transmission, a control unit includes a shift state acquisition module that acquires a shift state of a vehicle; a stepped-up voltage reduction permission module that determines whether reduction of a system voltage is permitted on the basis of the acquired shift state; a stepped-up voltage reduction execution module that reduces the system voltage to a predetermined upper limit voltage when reduction of the system voltage is permitted; and a drive control module that controls operations of a converter and inverter to thereby control the first rotary electric machine and the second rotary electric machine.
摘要:
In application of a square wave voltage to a motor MG2 to make the motor MG2 output a torque equivalent to a torque command Tm2*, the procedure of square wave control corrects reference phases ψb and −ψb as phases for maximizing an absolute value of the output torque of the motor MG2 with a rotational position detection error θerr and sets the results of the correction to an upper limit phase ψul and a lower limit phase ψll of the square wave voltage (step S110). A target voltage phase ψ* is set within a phase range defined by the upper limit phase ψul and the lower limit phase ψll, in order to reduce a torque difference between the torque command Tm2* and a torque estimate Tm2est (steps S120 and S130). An inverter 42 is controlled based on the target voltage phase ψ* and a rotational angle θ of the motor MG2.
摘要:
A one-way clutch includes a radially-outer annular member having an inner peripheral race surface, a radially-inner annular member having an outer peripheral race surface, plural torque-transmitting members interposed between the annular members such that they are selectively tiltable to first positions where they come into engagement with the race surfaces to transmit a torque and second positions where they come out of engagement with the race surfaces, a ribbon spring for biasing the torque-transmitting members in a direction that they come into engagement with the race surfaces, a cylindrical cage for holding the torque-transmitting members at predetermined angular intervals and controlling their tilting, and a pair of end bearings arranged between the annular members on axially opposite sides of the cage, respectively, and supporting the annular members in a concentric relation. The ribbon spring is arranged between the cage and the inner peripheral race surface.
摘要:
A seat back comprises a support bracket in which a stay of a head rest is inserted, a guide bracket for supporting a rear surface of a vertically intermediate portion of the support bracket on the seat back frame, a head rest tilt mechanism, and a pressure receiving member which moves rearward when pushed by the body of an occupant. The head rest tilt mechanism includes slotted brackets each having a guide hole and slide members which individually movably engage the respective guide holes of the slotted brackets along the longitudinal direction thereof. The head rest tilt mechanism drives the sub-frame so that the head rest body tilts forward while moving upward as the slide members are moved upward along the guide holes when the pressure receiving member is moved rearward.
摘要:
A lower punch is arranged to be inserted into a cavity of a die from a lower side of the die. A upper punch is arranged to be inserted into the cavity from an upper side of the die to compact the powder filled in the cavity, in cooperation with the lower punch. A feeder supplies the powder into the cavity. A first cam driving system has a first cam for vertically moving the die relative to the lower punch. A second cam driving system has a second cam for vertically moving the upper punch. A third cam driving system has a third cam for moving the feeder forward or backward relative to the cavity. A contact member is connected to the first cam driving system. A stopper is located above or below the contact member and regulates relative vertical movement of the die with respect to the lower punch, in cooperation with the contact member. A fourth cam driving system has a fourth cam for vertically moving the stopper. The first cam, the second cam, the third cam, and the fourth cam are rotated in synchronism.
摘要:
The present invention simply, rapidly and accurately detects, quantitatively determines and types genes of protein groups [which refer to TDH (Thermostable direct hemolysin), TRH (TDH-related hemolysin) and other analogous hemolysin proteins, hereinafter referred to as TDH-related toxins] of thermostable hemolysin groups produced by pathogenic bacteria of the genus Vibrio. Present Invention provides a method which enables detection and quantitative determination of actual TDH-related toxin-producing bacteria, which are important in food hygiene control. Using a primer pair which contains gene sequences encoding common amino acid sequences of TDH and TRH, TDH-related toxin genes are comprehensively detected and determined, thereby TDH-related toxin-producing bacteria themselves are detected and quantitative determined.