公开(公告)号：US20230253475A1

公开(公告)日：2023-08-10

申请号：US18130334

申请日：2023-04-03

Applicant: Intel Corporation

Inventor： Tanay Gosavi ,  Chia-Ching Lin ,  Raseong Kim ,  Ashish Verma Penumatcha ,  Uygar Avci ,  Ian Young

IPC: H01L29/51 ,  H01L27/088 ,  H01L29/78 ,  H03H9/17 ,  H01L29/423

CPC classification number: H01L29/516 ,  H01L27/0886 ,  H01L29/7851 ,  H03H9/17 ,  H01L29/78391 ,  H01L29/42356

Abstract: Describe is a resonator that uses anti-ferroelectric (AFE) materials in the gate of a transistor as a dielectric. The use of AFE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, additional current drive is also achieved from the piezoelectric response generated to due to AFE material. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above or below the AFE based transistor. Increased drive signal from the AFE results in larger output signal and larger bandwidth.

公开(公告)号：US11696514B2

公开(公告)日：2023-07-04

申请号：US17565106

申请日：2021-12-29

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H10N50/85 ,  H10B61/00 ,  H10N50/80

CPC classification number: H10N50/85 ,  H10B61/22 ,  H10N50/80

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.

公开(公告)号：US11508903B2

公开(公告)日：2022-11-22

申请号：US16022094

申请日：2018-06-28

Applicant: Intel Corporation

Inventor： Angeline Smith ,  Ian Young ,  Kaan Oguz ,  Sasikanth Manipatruni ,  Christopher Wiegand ,  Kevin O'Brien ,  Tofizur Rahman ,  Noriyuki Sato ,  Benjamin Buford ,  Tanay Gosavi

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/10

Abstract: An insertion layer for perpendicular spin orbit torque (SOT) memory devices between the SOT electrode and the free magnetic layer, memory devices and computing platforms employing such insertion layers, and methods for forming them are discussed. The insertion layer is predominantly tungsten and improves thermal stability and perpendicular magnetic anisotropy in the free magnetic layer.

公开(公告)号：US20220352358A1

公开(公告)日：2022-11-03

申请号：US17833662

申请日：2022-06-06

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Sou-Chi Chang ,  Dmitri Nikonov ,  Ian A. Young

IPC: H01L29/66 ,  H01L29/82 ,  G11C11/16 ,  H01F10/32

Abstract: An apparatus is provided which comprises: a first stack comprising a magnetic insulating material (MI such as, EuS, EuO, YIG, TmIG, or GaMnAs) and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, or graphene; a second stack comprising an MI material and a TMD, wherein the first and second stacks are separated by an insulating material (e.g., oxide); a magnet (e.g., a ferromagnet or a paramagnet) adjacent to the TMDs of the first and second stacks, and also adjacent to the insulating material; and a magnetoelectric material (e.g., (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, or (SmBi)FeO3) adjacent to the magnet.

公开(公告)号：US20220199783A1

公开(公告)日：2022-06-23

申请号：US17133087

申请日：2020-12-23

Applicant: Intel Corporation

Inventor： Ashish Verma Penumatcha ,  Kevin O'Brien ,  Chelsey Dorow ,  Kirby Maxey ,  Carl Naylor ,  Tanay Gosavi ,  Sudarat Lee ,  Chia-Ching Lin ,  Seung Hoon Sung ,  Uygar Avci

IPC: H01L29/24 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L27/22 ,  H01L27/24

Abstract: A transistor includes a first channel layer over a second channel layer, where the first and the second channel layers include a monocrystalline transition metal dichalcogenide (TMD). The transistor structure further includes a source structure coupled to a first end of the first and second channel layers, a drain structure coupled to a second end of the first and second channel layers, a gate structure between the source material and the drain material, and between the first channel layer and the second channel layer. The transistor further includes a spacer laterally between the gate structure and the and the source structure and between the gate structure and the drain structure. A liner is between the spacer and the gate structure. The liner is in contact with the first channel layer and the second channel layer and extends between the gate structure and the respective source structure and the drain structure.

公开(公告)号：US20220115438A1

公开(公告)日：2022-04-14

申请号：US17070808

申请日：2020-10-14

Applicant: Intel Corporation

Inventor： Hai Li ,  Dmitri Nikonov ,  Chia-Ching Lin ,  Tanay Gosavi ,  Ian Young

IPC: H01L27/22 ,  H01F10/32

Abstract: A differential magnetoelectric spin-orbit (MESO) logic device is provided where two ports are used to connect the spin orbital module of the MESO device and a ferroelectric capacitor. In some examples, an insulating layer is added to decouple current paths.

公开(公告)号：US11257613B2

公开(公告)日：2022-02-22

申请号：US15942434

申请日：2018-03-31

Applicant: Intel Corporation

Inventor： Kaan Oguz ,  Tanay Gosavi ,  Sasikanth Manipatruni ,  Charles Kuo ,  Mark Doczy ,  Kevin O'Brien

IPC: H01F10/32 ,  H01F41/30 ,  G11C11/16 ,  H01L43/12 ,  H01L27/22 ,  H01L43/08 ,  H01L43/10

Abstract: A perpendicular spin orbit torque (SOT) memory device includes an electrode having a spin orbit torque material, where the SOT material includes iridium and manganese and a perpendicular magnetic tunnel junction (pMTJ) device on a portion of the electrode. The pMTJ device includes a free magnet structure electrode, a fixed layer and a tunnel barrier between the free layer and the fixed layer and a SAF structure above the fixed layer. The Ir—Mn SOT material and the free magnet have an in-plane magnetic exchange bias.

公开(公告)号：US11245068B2

公开(公告)日：2022-02-08

申请号：US16009035

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H01L43/10 ,  H01L43/02 ,  H01L27/22

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.

公开(公告)号：US20210305398A1

公开(公告)日：2021-09-30

申请号：US16833375

申请日：2020-03-27

Applicant: Intel Corporation

Inventor： Sou-Chi Chang ,  Chia-Ching Lin ,  Nazila Haratipour ,  Tanay Gosavi ,  I-Cheng Tung ,  Seung Hoon Sung ,  Ian Young ,  Jack Kavalieros ,  Uygar Avci ,  Ashish Verma Penumatcha

IPC: H01L29/51 ,  H01L29/92 ,  H01L29/24

Abstract: A capacitor device includes a first electrode having a first metal alloy or a metal oxide, a relaxor ferroelectric layer adjacent to the first electrode, where the ferroelectric layer includes oxygen and two or more of lead, barium, manganese, zirconium, titanium, iron, bismuth, strontium, neodymium, potassium, or niobium and a second electrode coupled with the relaxor ferroelectric layer, where the second electrode includes a second metal alloy or a second metal oxide.

公开(公告)号：US10861861B2

公开(公告)日：2020-12-08

申请号：US16221083

申请日：2018-12-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Sou-Chi Chang ,  Uygar E. Avci ,  Ian A. Young

IPC: H01L27/11509 ,  H01L27/11592

Abstract: An embodiment includes a system comprising: first, second, third, fourth, fifth, and sixth layers, (a) the second, third, fourth, and fifth layers being between the first and sixth layers, and (b) the fourth layer being between the third and fifth layers; a formation between the first and second layers, the formation including: (a) a material that is non-amorphous; and (b) first and second sidewalls; a capacitor between the second and sixth layers, the capacitor including: (a) the third, fourth, and fifth layers, and (b) an electrode that includes the third layer and an additional electrode that includes the fifth layer; and a switching device between the first and sixth layers; wherein: (a) the first layer includes a metal and the sixth layer includes the metal, and (b) the fourth layer includes a Perovskite material. Other embodiments are addressed herein.