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公开(公告)号：US12025588B2
公开(公告)日：2024-07-02
申请号：US17539686
申请日：2021-12-01
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan Su , Chin-Fu Kuo , Liang-Ying Liu , Chao-Ta Huang
Abstract: A microelectromechanical sensing apparatus with calibration function comprises a microelectromechanical sensor and an IC chip. The microelectromechanical sensor comprises a proof mass, a movable driving electrode and a movable sensing electrode disposed on the proof mass, and a stationary driving electrode and stationary sensing electrode disposed on a substrate, wherein the sensing electrodes output a sensing signal when the proof mass vibrates. The IC chip comprises a conversion module electrically connected to the microelectromechanical sensor, wherein the conversion module converts the sensing signal into an input spectrum signal, and a calibration module electrically connected to the conversion module, wherein the calibration module receives the input spectrum signal and transforms the input spectrum signal into an output spectrum signal; wherein, the output spectrum signal is equal amplitude spectrum signal when the microelectromechanical sensor is subjected to an equal amplitude vibration and the input spectrum signal is an unequal amplitude spectrum signal.
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公开(公告)号：US11630020B2
公开(公告)日：2023-04-18
申请号：US17371102
申请日：2021-07-09
Applicant: Industrial Technology Research Institute
Inventor： Che-Kai Yeh , Tzung-Ching Lee , Yu-Wen Hsu , Chao-Ta Huang
Abstract: A pressure sensor with calibration device includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes the pressure applied to the medium. The pressure sensor with calibration device adjusts the pressure value sensed by the sensing element via the calibration element.
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公开(公告)号：US10730744B2
公开(公告)日：2020-08-04
申请号：US16235054
申请日：2018-12-28
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Yu-Wen Hsu , Che-Kai Yeh , Chin-Fu Kuo , Chao-Ta Huang
Abstract: A MEMS device includes a substrate, at least one anchor disposed on the substrate, a movable stage, a sensing chip disposed on the movable stage, and at least one elastic member connected with the movable stage and the anchor. The movable stage includes at least one electrode and at least one conductive connecting layer. The sensing chip includes at least one electrical interconnection connected with the conductive connecting layer. The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer disposed between the first electrical channel and the second electrical channel. The first electrical channel is electrically connected with the electrical interconnection, and the second electrical channel is electrically connected with the electrode.
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公开(公告)号：US10203252B2
公开(公告)日：2019-02-12
申请号：US15393254
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Feng-Chia Hsu , Chao-Ta Huang , Shih-Ting Lin
Abstract: A MEMS apparatus having measuring range selector including a sensor and an IC chip is provided. The sensor includes a sensing device. The IC chip includes a voltage range selector, an analog front end, a control device and an A/D converter. The sensing device is configured to detect the physical quantity and generate a sensing voltage. The voltage range selector is configured to select a sub-voltage range having a first upper-bound and a first lower-bound. The analog front end is configured to receive the sensing voltage and output a first voltage. The A/D converter has a full scale voltage range having a second lower-bound and a second upper-bound. A ratio of the full scale voltage range to the sub-voltage range is defined as a gain factor. A difference obtained by subtracting the first lower-bound from the first voltage is defined as a shift factor. The control device is configured to adjust the first voltage to the second voltage according to the gain factor and the shift factor.
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公开(公告)号：US10132877B2
公开(公告)日：2018-11-20
申请号：US14576203
申请日：2014-12-19
Applicant: Industrial Technology Research Institute
Inventor： Chung-Yuan Su , Chao-Ta Huang , Sheng-Ren Chiu
IPC: G01C19/5712 , G01R33/02
Abstract: A micro-electromechanical apparatus may include a substrate, a first frame, a plurality of first anchors, a region and a plurality of pivot elements. The plurality of first anchors and the region is disposed on the substrate. The region is surrounded by the plurality of first anchors. Each of the pivot elements includes a pivot end and a rotary end. Each of the pivot ends is connected to a corresponding first anchor and each of the rotary ends is connected to the first frame such that the first frame is able to rotate with respect to an axis passing the region. The micro-electromechanical apparatus having the pivot elements and the region is adapted for detecting multi-degree physical quantities such as angular velocities in at least two axes, angular velocities and accelerations, angular velocities and Earth's magnetic field.
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Patent Agency Ranking
公开(公告)号：US20170184628A1
公开(公告)日：2017-06-29
申请号：US15252226
申请日：2016-08-31
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chung-Yuan Su , Chao-Ta Huang
CPC classification number: G01P15/18 , B81B3/0062 , B81B3/0072 , B81B2201/0235 , B81B2201/025 , B81B2203/0163 , B81B2203/0307 , B81B2203/04 , B81B2203/051 , B81B2203/053 , B81B2203/055 , G01P15/08 , G01P15/125 , G01P2015/084
Abstract: A micro-electromechanical (MEMS) apparatus includes a substrate, two first anchors, a frame, and two elastic members. The substrate is provided with a reference point thereon. The frame surrounds the two first anchors, and each of the elastic members connects the corresponding first anchor and the frame. Each of the first anchors is disposed near the center of the MEMS apparatus to decrease an effect caused by warpage of the substrate. The MEMS apparatus can be applied to an MEMS sensor having a rotatable mass, such as a three-axis accelerometer or a magnetometer, to improve process yield, reliability, and measurement accuracy.
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公开(公告)号：US09369788B1
公开(公告)日：2016-06-14
申请号：US14586086
申请日：2014-12-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Tzong-Che Ho , Yu-Wen Fan , Hong-Ren Chen , Chao-Ta Huang
CPC classification number: H04R1/021 , B81B7/0061 , B81B7/0064 , B81B7/007 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48227 , H04R1/04 , H04R1/342 , H04R19/005 , H04R23/00 , H04R31/00 , H04R2201/003 , H04R2410/03 , H04R2499/11 , H01L2924/00014
Abstract: An MEMS microphone package includes a substrate, an MEMS microphone, an IC chip and an electrically conductive cover. The substrate includes a first hole, an upper surface, a bottom surface, a side surface, a first electrically conductive layer and a second electrically conductive layer. The side surface has two sides connected to the upper surface and the bottom surface, respectively. The first electrically conductive layer is disposed on the upper surface. The second electrically conductive layer is disposed on the bottom surface. The MEMS microphone is electrically coupled to the substrate. The IC chip is electrically coupled to the substrate. The electrically conductive cover includes a second hole. The electrically conductive cover is bonded to the substrate to form a chamber for accommodating the MEMS microphone and the IC chip. The first hole and the second hole together form an acoustic hole.
Abstract translation: MEMS麦克风封装包括基板，MEMS麦克风，IC芯片和导电盖。 基板包括第一孔，上表面，底表面，侧表面，第一导电层和第二导电层。 侧表面分别连接到上表面和底表面。 第一导电层设置在上表面上。 第二导电层设置在底面上。 MEMS麦克风电耦合到基板。 IC芯片电耦合到基板。 导电盖包括第二孔。 导电盖结合到基板上以形成用于容纳MEMS麦克风和IC芯片的室。 第一孔和第二孔一起形成声孔。
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公开(公告)号：US20140245832A1
公开(公告)日：2014-09-04
申请号：US14151843
申请日：2014-01-10
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Shih-Chieh Lin , Chao-Ta Huang , Chung-Yuan Su , Yu-Wen Hsu
IPC: G01P15/08
CPC classification number: G01P15/125 , G01P2015/0814 , G01P2015/0857
Abstract: A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.
Abstract translation: 提供了具有叉指弹簧的微机电装置，其包括基板，至少一个第一质量块，可动电极，固定电极，锚和叉指弹簧。 可移动电极沿轴向设置在质量块上。 固定电极沿着轴向设置在基板上，可动电极和固定电极之间具有临界间隙。 交叉弹簧沿着轴向连接质量块和锚固件。 叉指弹簧包括第一折叠部分，第一连接部分，第二折叠部分和第二连接部分。 每个第一折叠部分包括两个第一跨度和第一头部。 每个第二折叠部分包括两个第二跨度和第二头部。 第一跨度的宽度和第二跨度的宽度分别大于临界间隙。
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公开(公告)号：US11411161B2
公开(公告)日：2022-08-09
申请号：US16849828
申请日：2020-04-15
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chih-Hsiou Lin , Shih-Ting Lin , Chung-Yuan Su , Chao-Ta Huang
IPC: G06F3/041 , G09G5/08 , H01L41/04 , G01L1/16 , H01L41/113
Abstract: A piezoelectric system comprises a piezoelectric sensor, a voltage stabilizer, a discharger and an operation sensor. The piezoelectric sensor outputs a sensing signal through a sensor output terminal according to a rate of change of pressure. The voltage stabilizer has a positive terminal electrically connecting with the sensor output terminal. The voltage stabilizer receives the sensing signal, stores the energy of the sensing signal, and keeps the voltage of the sensing signal as a constant when the rate of change of pressure is zero. The discharger has a first terminal connecting with the positive terminal, a second terminal coupled to ground, and a control terminal receiving a trigger signal to control the first terminal to conduct with or not conduct with the second terminal. The operation sensor electrically connects to the control terminal for sensing an operation generating the pressure and outputs the trigger signal accordingly.
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公开(公告)号：US10962992B2
公开(公告)日：2021-03-30
申请号：US15853850
申请日：2017-12-25
Applicant: Industrial Technology Research Institute
Inventor： Chien-Nan Yeh , Chung-Yuan Su , Chih-Yuan Chen , Chao-Ta Huang , Yu-Wen Hsu
Abstract: An apparatus with two anchors including a housing, a movable element, and a rotary element is provided. The housing includes a first expansion unit, a second expansion unit, and a linkage. First alignment structures are disposed in the movable element and anti-rotation structures are disposed in the linkage. When the movable element and the rotary element enter the housing from two ends and are coupled along an axis, the movable element and the rotary element can approach each other to expand the first expansion unit and the second expansion unit to form two anchors. The apparatus with two anchors secures a sensor in a variety of environments such as walls or machines. When the apparatus with two anchors fixes a sensor in a hole of a stamping machine, the impact force does not cause stress concentration on the sensor so as to improve the reliability of the sensor.
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