摘要:
To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.
摘要:
A cowling structure for a saddle-ride type vehicle for cooling an engine and providing a windshield for a rider. The cowling structure includes a seat for a rider to sit thereon, the seat is arranged behind and above an engine suspended from a vehicle body frame. An under cowl covers at least part of a lower portion of the engine. The under cowl is formed to cover at least part of a side surface of the engine. A guide portion is provided in an upper portion of the under cowl, the guide portion extending inward in a vehicle width direction and toward the side surface of the engine. An opening is provided in front of the guide portion, the opening introducing a flow of air into the under cowl. The guide portion has a slope surface which slopes downward from the front to the rear of the vehicle.
摘要:
A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.
摘要:
According to the present invention, there is disclosed a gas introduction system for temperature adjustment comprising passing a gas whose temperature is managed for the temperature adjustment of an object to be processed between a mounting surface of a mounting base for holding the object to be processed under vacuum and a back surface of the object to be processed through a gas supply line, controlling a flow rate adjustment valve by control means based on a measured pressure of the gas supply line measured by a manometer, and adjusting a gas flow rate to the gas supply line so as to obtain a set pressure, so that the gas pressure can be set to a predetermined value in a short time, and the system is miniaturized with little waste of the gas.
摘要:
A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice—the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC=KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS.
摘要:
Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.
摘要:
An eccentric orbiting type planetary gear device includes a bearing which requires no pre-load adjustment. The planetary gear device is small in the number of components when compared with the conventional device, and is improved in performance and in assembling efficiency. In manufacturing an eccentric orbiting type planetary gear device in which a supporting block (31) is made up of a supporting member (32) having a plurality of pillar-like portions (32a), and a disk (33), the supporting member and the disk being fastened to each other with fastening members (35) with an external gear (21) between the supporting member and the disk in such a manner the external gear is engaged with an internal gear; the supporting member and the disk are abutted against each other through end faces thereof, and are fastened to each other to form the supporting block, and bearing rolling surfaces (32b) and (33a) corresponding to inner races are formed in the supporting member and the disk at a predetermined interval.
摘要:
There is provided a plasma processing apparatus including a susceptor 114, having a substrate mounting portion for mounting thereon a substrate, to which a high frequency power is applied; a focus ring 210, disposed to surround the substrate mounted on the substrate mounting portion, including an outer ring 214 having a top surface higher than a top surface of the substrate and an inner ring 212 extending inwardly from the outer ring so as to allow at least a part of the inner ring to be positioned below a periphery of the substrate, the outer ring and the inner ring being formed as a single member; a dielectric ring 220 positioned between the focus ring and the susceptor; a dielectric constant varying device 250 for varying a dielectric constant of the dielectric ring.