摘要:
An activated species-generating apparatus using a gaseous phase discharge used as an ozonizer and the like is provided. Wire electrodes 21a, 21b, which are obtained by coating surfaces of electrically conductive wires with a dielectric, are entangled and the resulting crowded electrodes 20a, 20b are combined to form a three-dimensional discharge range.
摘要:
This invention concerns a SiO.sub.2, SiN.sub.x protection film formed by a CVD or PVD gas phase glowing method capable of preventing melting of the matrix ingredients at the surface of a dielectric material in electric discharge of an ozone generator and it relates to a dielectric material used for an ozone generator capable of overcoming the problems for the abrasion of electrode and dielectric material or melting of ions or molecules of during electric discharge, as well as a method of forming a protection film therefor based on the finding that an SiO.sub.2 film or SiN.sub.x film can be formed easily on a surface of a predetermined electric material or, further, on a surface of electrode by processing a specific reaction gas, for example, comprising a crude gas such as SiH.sub.4, SiCl.sub.4, N.sub.2, NH.sub.3 or TEOS or further incorporated with an inert gas or like by means of an atmospheric CVD process such as CVD or heat CVD and, in particular, on the finding that the protection film can be disposed directly to the surface of the dielectric material and the electrode in an ozone generator after the completion of assembling.
摘要:
A plasma processing apparatus for performing plasma processing of an article, comprising: a central electrode; a tubular outer electrode which is provided so as to surround the central electrode; a tubular reaction pipe which is disposed between the central electrode and the outer electrode so as to electrically insulate the central electrode and the outer electrode from each other; a gas supply device for supplying a plasma producing gas to a discharge space defined between the central electrode and the outer electrode in the reaction pipe; an AC power source for applying an AC voltage between the central electrode and the outer electrode; wherein not only the plasma producing gas is supplied to the discharge space by the gas supply device but the AC voltage is applied between the central electrode and the outer electrode by the AC power source so as to generate a glow discharge in the discharge space under atmospheric pressure such that a plasma jet is blown to the article from a blow-off outlet of the reaction pipe; and a cooling device for cooling the central electrode and the outer electrode.
摘要:
A plastic tube extruded from an extruder is conveyed through a plasma treatment apparatus. The plasma treatment apparatus is equipped with a tubular electrode body having a high-voltage side electrode and a grounded-side electrode disposed on a tubular insulator and a high frequency electric power source connected to the electrodes. When the plastic tube is conveyed through the electrode body with one end of the tube open to the atmosphere, a mixture of a glow discharge-stabilizing gas and a treating gas is fed into the other end of the tube and an alternating-current high-voltage is applied to generate a plasma region at a pressure near to atmospheric pressure in which the tube is treated with a glow discharge plasma. This method allows an interior and/or exterior surface of a plastic tube designed to convey a medical fluid to be continuously treated by a glow discharge plasma at atmospheric pressure to form an anti-thrombotic and blood-compatible film on the surface treated. The resulting surface-treated medical material can be produced at a comparatively low cost and maintains its original bulk material properties.
摘要:
Plates, sheets, fibers and other articles can be rendered water repellent by subjecting the articles at their surface to a glow discharge plasma under atmospheric pressure. The treating gas is a mixture of an inert gas and a fluorinated compound in the form of a cyclic or unsaturated hydrocarbon having some or all of the hydrogen atoms thereof replaced by halogen groups including fluorine atoms. The surface treatment lowers the surface energy of the articles in a long lasting manner.
摘要:
A plasma reaction method is conducted at atmospheric pressure and is used to treat a surface of a substrate with a reactive plasma. The reaction method involves introducing a mixture of helium and a reactant (monomer) gas into a reaction vessel having upper and lower electrodes. In a preferred embodiment the upper electrode is provided with grooves for diffusing the plasma uniformly over the surface of the electrode. The helium and reactant gas mixture is excited at atmospheric pressure to produce a stable glow discharge plasma which reacts with the surface of the substrate. The preferred gas mixture has helium present at greater than 90% and uses ethylene or tetrafluoromethane as a reactant component.
摘要:
Generation and stabilization of glow plasma by discharge under atmospheric pressure are monitored by detection of the number of electric current pulses per one-half cycle of an alternating voltage applied to a discharge device. Alternately, or in addition, a Lissajous figure is generated showing a correlation between the applied alternating voltage and a current flow in the discharge device, and a discharge state is discriminated according to the Lissajous figure. Accurate, quick and simple monitoring of atmospheric pressure glow discharge plasma and the control thereof are thus made possible.
摘要:
A method is disclosed for the treatment of a powder by use of a plasma reactor under atmospheric pressure, comprising the steps of providing a reaction chamber having first and second electrodes covered with a dielectric, an upper gas exhaust means and a lower gas inlet means, feeding a fluidizing gas comprising a rare gas, a monomer gas or a mixture thereof through said gas inlet means into said chamber to agitate a powder to be treated in said chamber, concurrently removing said gas from said chamber through said gas exhaust means; and generating a glow plasma under atmospheric pressure in said chamber by applying a voltage to said first electrode and grounding said second electrode whereby said powder is provided with an anticorrosive surface treatment.
摘要:
A surface treatment process for improving surface properties of a timber as to wetness by exposing the timber to a plasma mixture of an inert gas and a reactive gas at a near atmospheric pressure. Prior to being exposed to the plasma mixture, the timber is treated to reduce a moisture content below a fiber saturation point of the timber so as to eliminate free moisture from the fibers of the timber which would otherwise lead to unstable plasma and therefore detract an uniform improvement over substantially the entire surface expected at the subsequent exposure to the plasma mixture. Thus, the plasma treatment can be effected in the absence of the free moisture to obtain a desired surface improvement uniformly across the surface of the timber, which gives an enhanced practicability of improving the surface properties of the timber, in addition to that the plasma mixture is generated at near the atmospheric pressures readily available without requiring substantial vacuum generating equipments.
摘要:
A process for forming a thin polymeric film is disclosed, which comprises introducing a mixture of an organic monomer gas and helium into a reaction vessel, producing a glow discharge plasma at atmospheric pressure and depositing the plasma on a substrate wherein the helium in the gas mixture is present in an amount higher than 90% by volume.