Device and method for measuring film longitudinal temperature field during nitride epitaxial growth

    公开(公告)号:US20210143014A1

    公开(公告)日:2021-05-13

    申请号:US16618354

    申请日:2019-03-22

    Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature. The present invention respectively measures the surface temperature of the epitaxial layer and the temperature of the graphite disk by ultraviolet and infrared radiation temperature measurement technologies, and then uses the finite element simulation method to perform thermal field analysis from the bottom surface of the substrate to the surface of the epitaxial layer, so that the longitudinal temperature is obtained, thereby providing a favorable basis for temperature regulation during nitride growth.

    Common mode rejection method and apparatus for electromagnetic induction logging

    公开(公告)号:US11988800B2

    公开(公告)日:2024-05-21

    申请号:US17851348

    申请日:2022-06-28

    CPC classification number: G01V3/28 G01V3/30

    Abstract: A method of reducing or rejecting common mode interference and a circuit for electromagnetic induction logging with improved common mode interference reduction or rejection are disclosed, which are useful in the field of electromagnetic induction logging technology. Accurate formation signals are calculated based on phases and amplitudes of common mode signals, which do not change with the coil access mode, and phases of differential signals, which are reversed with amplitudes unaltered when the coil is connected reversely. This provides a mechanism to effectively eliminate the influence of common mode interference even when the common mode interference is greater in amplitude than the signals from a geological formation.

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