HETEROJUNCTION STRUCTURES OF DIFFERENT SUBSTRATES JOINED AND METHODS OF FABRICATING THE SAME
    1.
    发明申请
    HETEROJUNCTION STRUCTURES OF DIFFERENT SUBSTRATES JOINED AND METHODS OF FABRICATING THE SAME 有权
    加工不同基板的异相结构及其制作方法

    公开(公告)号:US20120168792A1

    公开(公告)日:2012-07-05

    申请号:US13244544

    申请日:2011-09-25

    IPC分类号: H01L33/26 H01L33/38

    摘要: In one embodiment, a heterojunction structure includes a first substrate; a second substrate comprising an electrode pad, the second substrate joined to the first substrate by an adhesive layer interposed between the first and second substrates, the first substrate and the adhesive layer having a via hole penetrating therethrough to expose a region of the electrode pad; a connection electrode disposed in the via hole and contacting the electrode pad; and an insulation layer electrically insulating the connection electrode from the first substrate. One of the first and second substrates has a thermal expansion coefficient different than a thermal expansion coefficient of the other of the first and second substrates, and at least one of the adhesive layer or the insulation layer comprises an organic material.

    摘要翻译: 在一个实施例中,异质结结构包括第一衬底; 第二基板,其包括电极焊盘,所述第二基板通过插入在所述第一和第二基板之间的粘合剂层连接到所述第一基板,所述第一基板和所述粘合剂层具有贯穿其中的通孔,以暴露所述电极焊盘的区域; 连接电极,设置在所述通孔中并与所述电极焊盘接触; 以及将连接电极与第一基板电绝缘的绝缘层。 第一和第二基板中的一个具有不同于第一和第二基板中的另一个的热膨胀系数的热膨胀系数,并且粘合剂层或绝缘层中的至少一个包括有机材料。