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公开(公告)号:US20240243085A1
公开(公告)日:2024-07-18
申请号:US18517681
申请日:2023-11-22
Inventor: Paul M. Enquist
IPC: H01L23/00 , H01L21/50 , H01L25/00 , H01L25/065
CPC classification number: H01L24/09 , H01L21/50 , H01L24/03 , H01L24/05 , H01L24/08 , H01L24/80 , H01L24/89 , H01L25/0657 , H01L25/50 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/036 , H01L2224/03616 , H01L2224/03825 , H01L2224/05005 , H01L2224/05007 , H01L2224/05026 , H01L2224/05078 , H01L2224/05082 , H01L2224/05124 , H01L2224/05147 , H01L2224/0556 , H01L2224/05561 , H01L2224/05562 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/05655 , H01L2224/05657 , H01L2224/05666 , H01L2224/05676 , H01L2224/05681 , H01L2224/05684 , H01L2224/05686 , H01L2224/08112 , H01L2224/08121 , H01L2224/08123 , H01L2224/08145 , H01L2224/08147 , H01L2224/80011 , H01L2224/80031 , H01L2224/80035 , H01L2224/80047 , H01L2224/80075 , H01L2224/80097 , H01L2224/80099 , H01L2224/8019 , H01L2224/80194 , H01L2224/80895 , H01L2224/80896 , H01L2224/80935 , H01L2224/80986 , H01L2225/06513
Abstract: A method for forming a direct hybrid bond and a device resulting from a direct hybrid bond including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, capped by a conductive barrier, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads capped by a second conductive barrier, aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads capped by conductive barriers formed by contact bonding of the first non-metallic region to the second non-metallic region.
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公开(公告)号:US11830838B2
公开(公告)日:2023-11-28
申请号:US17677161
申请日:2022-02-22
Inventor: Paul M. Enquist
IPC: H01L23/00 , H01L21/50 , H01L25/065 , H01L25/00
CPC classification number: H01L24/09 , H01L21/50 , H01L24/03 , H01L24/05 , H01L24/08 , H01L24/80 , H01L24/89 , H01L25/0657 , H01L25/50 , H01L2224/036 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/03616 , H01L2224/03825 , H01L2224/05005 , H01L2224/05007 , H01L2224/05026 , H01L2224/0556 , H01L2224/0557 , H01L2224/05078 , H01L2224/05082 , H01L2224/05124 , H01L2224/05147 , H01L2224/05562 , H01L2224/05573 , H01L2224/05655 , H01L2224/05657 , H01L2224/05666 , H01L2224/05676 , H01L2224/05681 , H01L2224/05684 , H01L2224/05686 , H01L2224/08112 , H01L2224/08121 , H01L2224/08123 , H01L2224/08145 , H01L2224/08147 , H01L2224/80011 , H01L2224/8019 , H01L2224/80031 , H01L2224/80035 , H01L2224/80047 , H01L2224/80075 , H01L2224/80097 , H01L2224/80099 , H01L2224/80194 , H01L2224/80895 , H01L2224/80896 , H01L2224/80935 , H01L2224/80986 , H01L2225/06513 , H01L2224/03462 , H01L2924/00014 , H01L2224/0345 , H01L2924/00014 , H01L2224/03452 , H01L2924/00014 , H01L2224/29339 , H01L2924/00014 , H01L2224/29386 , H01L2224/80895 , H01L2924/053 , H01L2224/80986 , H01L2224/80896 , H01L2224/05124 , H01L2924/00014 , H01L2224/05147 , H01L2924/00014 , H01L2224/05686 , H01L2924/04941 , H01L2224/05686 , H01L2924/04953 , H01L2224/05684 , H01L2924/049 , H01L2224/05676 , H01L2924/053 , H01L2224/05681 , H01L2924/01014 , H01L2924/049 , H01L2224/05666 , H01L2924/01014 , H01L2924/049 , H01L2224/05684 , H01L2924/01005 , H01L2924/049 , H01L2224/05655 , H01L2924/051 , H01L2924/00014 , H01L2224/05657 , H01L2924/01074 , H01L2224/05657 , H01L2924/01074 , H01L2924/042
Abstract: A method for forming a direct hybrid bond and a device resulting from a direct hybrid bond including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, capped by a conductive barrier, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads capped by a second conductive barrier, aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads capped by conductive barriers formed by contact bonding of the first non-metallic region to the second non-metallic region.
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公开(公告)号:US09953941B2
公开(公告)日:2018-04-24
申请号:US14835379
申请日:2015-08-25
Applicant: INVENSAS BONDING TECHNOLOGIES, INC.
Inventor: Paul M. Enquist
IPC: H01L23/00 , H01L25/065 , H01L25/00 , H01L21/50
CPC classification number: H01L24/09 , H01L21/50 , H01L24/03 , H01L24/80 , H01L24/89 , H01L25/0657 , H01L25/50 , H01L2224/036 , H01L2224/05005 , H01L2224/05078 , H01L2224/05082 , H01L2224/08145 , H01L2224/8019 , H01L2224/80895 , H01L2225/06513
Abstract: A method for forming a direct hybrid bond and a device resulting from a direct hybrid bond including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, capped by a conductive barrier, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads capped by a second conductive barrier, aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads capped by conductive barriers formed by contact bonding of the first non-metallic region to the second non-metallic region.
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公开(公告)号:US20170372998A1
公开(公告)日:2017-12-28
申请号:US15194445
申请日:2016-06-27
Applicant: Yenhao Benjamin Chen
Inventor: Yenhao Benjamin Chen
IPC: H01L23/528 , H01L23/31 , H01L21/304 , H01L23/00 , H01L21/56
CPC classification number: H01L23/528 , H01L21/304 , H01L21/561 , H01L21/565 , H01L23/3114 , H01L23/3171 , H01L23/525 , H01L24/06 , H01L24/11 , H01L24/13 , H01L2224/02175 , H01L2224/02181 , H01L2224/0219 , H01L2224/022 , H01L2224/02206 , H01L2224/02215 , H01L2224/023 , H01L2224/03013 , H01L2224/03436 , H01L2224/036 , H01L2224/03602 , H01L2224/03828 , H01L2224/0384 , H01L2224/0391 , H01L2224/0401 , H01L2224/05124 , H01L2224/05147 , H01L2224/05569 , H01L2224/10145 , H01L2224/11013 , H01L2224/113 , H01L2224/11849 , H01L2224/13021 , H01L2224/13022 , H01L2224/13024 , H01L2224/81024
Abstract: Discussed generally herein are methods and devices including or providing a redistribution layer device without under ball metallization. A device can include a substrate, electrical interconnect circuitry in the substrate, redistribution layer (RDL) circuitry electrically connected to the electrical interconnect circuitry, a conductive bump electrically connected to the RDL circuitry, the conductive bump interfacing directly with the RDL circuitry, and a sheet molding material over the substrate.
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公开(公告)号:US20170200670A1
公开(公告)日:2017-07-13
申请号:US15412993
申请日:2017-01-23
Applicant: MC10, Inc.
Inventor: Conor Rafferty , Mitul Dalal
IPC: H01L23/498 , H01L23/00 , H01L21/56 , H01L23/538 , H01L23/31 , H01L21/683
CPC classification number: H01L23/4985 , H01L21/56 , H01L21/6836 , H01L23/16 , H01L23/3107 , H01L23/3121 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/29 , H01L24/82 , H01L2221/68327 , H01L2221/68381 , H01L2224/02379 , H01L2224/03436 , H01L2224/036 , H01L2224/0401 , H01L2224/04105 , H01L2224/05144 , H01L2224/05155 , H01L2224/05166 , H01L2224/05171 , H01L2224/05184 , H01L2224/05548 , H01L2224/2919 , H01L2224/2929 , H01L2224/293 , H01L2224/32225 , H01L2224/32245 , H01L2224/73267 , H01L2224/8203 , H01L2224/82039 , H01L2224/83132 , H01L2224/83192 , H01L2224/92244 , H01L2924/07802 , H01L2924/12042 , H01L2924/12043 , H01L2924/15153 , H05K1/0283 , H05K1/185 , H05K1/189 , H05K2203/1469 , H01L2924/00 , H01L2924/00014
Abstract: Systems and methods are provided for the embedding of thin chips. A well region is generated in a substrate that includes a conductive material disposed on a flexible polymer. The standoff well region can be generated by pattern the conductive material, where the thin chip is embedded in the standoff well region. A cavity can be generated in the polymer layer to form a polymer well region, where the thin chip is embedded in the polymer well region.
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公开(公告)号:US09589862B2
公开(公告)日:2017-03-07
申请号:US13914426
申请日:2013-06-10
Inventor: Hsuan-Ting Kuo , Tsung-Yuan Yu , Hsien-Wei Chen , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
CPC classification number: H01L23/3171 , H01L21/563 , H01L21/566 , H01L23/3192 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L2224/0345 , H01L2224/03452 , H01L2224/0347 , H01L2224/036 , H01L2224/03828 , H01L2224/0401 , H01L2224/05548 , H01L2224/05568 , H01L2224/05573 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05684 , H01L2224/10126 , H01L2224/11334 , H01L2224/1145 , H01L2224/11462 , H01L2224/1181 , H01L2224/11849 , H01L2224/119 , H01L2224/1191 , H01L2224/13022 , H01L2224/13082 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/73204 , H01L2224/81024 , H01L2224/81191 , H01L2224/81815 , H01L2224/83104 , H01L2224/83855 , H01L2924/00014 , H01L2924/01046 , H01L2924/01079 , H01L2924/014
Abstract: Embodiments of the present disclosure include interconnect structures and methods of forming interconnect structures. An embodiment is a method of forming an interconnect structure, the method including forming a first post-passivation interconnect (PPI) over a first substrate, forming a second PPI over the first substrate, and forming a first conductive connector on the first PPI. The method further includes forming a second conductive connector on the second PPI, and forming a molding compound on top surfaces of the first and second PPIs and surrounding portions of the first and second connectors, a first section of molding compound being laterally between the first and second connectors, the first section of molding compound having a curved top surface.
Abstract translation: 本公开的实施例包括互连结构和形成互连结构的方法。 实施例是形成互连结构的方法,该方法包括在第一衬底上形成第一钝化后互连(PPI),在第一衬底上形成第二PPI,以及在第一PPI上形成第一导电连接器。 该方法还包括在第二PPI上形成第二导电连接器,以及在第一和第二PPI的顶表面和第一和第二连接器的周围部分上形成模制化合物,模制化合物的第一部分横向在第一和第二PPI之间 第二连接器,第一部分模塑料具有弯曲的顶表面。
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公开(公告)号:US09564410B2
公开(公告)日:2017-02-07
申请号:US14793813
申请日:2015-07-08
Applicant: Texas Instruments Incorporated
Inventor: Floro Lopez Camenforte, III , James Raymond Maliclic Baello , Armando Tresvalles Clarina, Jr.
IPC: H01L21/50 , H01L21/48 , H01L23/498 , H01L23/00 , H01L21/768 , H01L21/78
CPC classification number: H01L24/13 , H01L21/4853 , H01L21/76834 , H01L21/78 , H01L23/49844 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/94 , H01L2224/0345 , H01L2224/0346 , H01L2224/036 , H01L2224/0401 , H01L2224/05022 , H01L2224/05124 , H01L2224/05147 , H01L2224/05541 , H01L2224/05572 , H01L2224/05582 , H01L2224/05647 , H01L2224/0569 , H01L2224/1145 , H01L2224/1146 , H01L2224/116 , H01L2224/13005 , H01L2224/13007 , H01L2224/13016 , H01L2224/13144 , H01L2224/13147 , H01L2224/16227 , H01L2224/16245 , H01L2224/81191 , H01L2224/814 , H01L2224/94 , H01L2924/01022 , H01L2924/01042 , H01L2924/01073 , H01L2924/01074 , H01L2924/2064 , H01L2924/3512 , H01L2924/00014 , H01L2924/013 , H01L2924/014 , H01L2224/11 , H01L2224/03 , H01L2924/207
Abstract: A semiconductor device having a terminal site (100) including a flat pad (110) of a first metal covered by a layer (130) of dielectric material, the layer over the pad parallel to the pad and having a window of a first diameter (132) exposing the surface of the underlying pad. The terminal site further has a patch-shaped film (140) of a second metal covering the surface of the exposed first metal and the surface of an annulus of the dielectric layer framing the window, the film patch having a second diameter (141) greater than the first diameter; and a bump (150) of a third metal adhering to the film, the bump having a third diameter (151) smaller than the second diameter, whereby the film protrudes like a flange from the bump.
Abstract translation: 一种半导体器件,具有端子部位(100),该端子部位(100)包括由电介质材料层(130)覆盖的第一金属的平坦焊盘(110),所述焊盘上方的层平行于焊盘并具有第一直径的窗口 132)暴露下面的垫的表面。 终端位置还具有覆盖暴露的第一金属的表面的第二金属的片状膜(140)和构成窗口的电介质层的环的表面,膜片具有更大的第二直径(141) 比第一个直径; 以及附着在所述膜上的第三金属的凸块(150),所述凸块具有比所述第二直径小的第三直径(151),由此所述膜从所述凸块凸出成凸缘。
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公开(公告)号:US20170033071A1
公开(公告)日:2017-02-02
申请号:US15202700
申请日:2016-07-06
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Sumihiro ICHIKAWA
IPC: H01L23/00 , H01L23/498 , H01L23/29 , H01L25/065 , H01L23/31
CPC classification number: H01L24/17 , H01L23/295 , H01L23/3142 , H01L23/49811 , H01L23/49833 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/0657 , H01L25/50 , H01L2224/036 , H01L2224/0401 , H01L2224/111 , H01L2224/1132 , H01L2224/11334 , H01L2224/1147 , H01L2224/1184 , H01L2224/11845 , H01L2224/11848 , H01L2224/119 , H01L2224/13005 , H01L2224/13014 , H01L2224/13109 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/1319 , H01L2224/1403 , H01L2224/14051 , H01L2224/14131 , H01L2224/14136 , H01L2224/14179 , H01L2224/14505 , H01L2224/16145 , H01L2224/16148 , H01L2224/16227 , H01L2224/16238 , H01L2224/2929 , H01L2224/29387 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81065 , H01L2224/81143 , H01L2224/81193 , H01L2224/81856 , H01L2224/81862 , H01L2224/81895 , H01L2224/81907 , H01L2224/81986 , H01L2224/83104 , H01L2224/83862 , H01L2224/92125 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06565 , H01L2225/06593 , H01L2924/00015 , H01L2924/14 , H05K3/305 , H05K3/328 , H05K3/368 , H01L2224/81121 , H01L2224/81 , H01L2924/00014 , H01L2924/0665 , H01L2924/05442 , H01L2224/034 , H01L2224/113 , H01L2924/00012 , H01L2224/81203 , H01L2924/00
Abstract: A packaging structure includes a first substrate including a first metal terminal and a first protruding resin portion formed at a first surface; a second substrate including a second metal terminal and a second protruding resin portion formed at a second surface, the second metal terminal being made of the same kind of metal as the first metal terminal; and a sealing portion filled between the first surface of the first substrate and the second surface of the second substrate, the first metal terminal and the second metal terminal being directly bonded with each other, the first protruding resin portion and the second protruding resin portion being directly bonded with each other, each of the first protruding resin portion and the second protruding resin portion being made of a resin material that does not include fillers, and the sealing portion being made of a resin material including fillers.
Abstract translation: 包装结构包括:第一基板,包括形成在第一表面的第一金属端子和第一突出树脂部分; 第二基板,包括形成在第二表面的第二金属端子和第二突出树脂部分,所述第二金属端子由与所述第一金属端子相同种类的金属制成; 以及填充在第一基板的第一表面和第二基板的第二表面之间的密封部分,第一金属端子和第二金属端子彼此直接接合,第一突出树脂部分和第二突出树脂部分是 彼此直接接合,第一突出树脂部分和第二突出树脂部分由不包括填料的树脂材料制成,并且密封部分由包括填料的树脂材料制成。
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公开(公告)号:US20170025387A1
公开(公告)日:2017-01-26
申请号:US15196170
申请日:2016-06-29
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Sumihiro ICHIKAWA
IPC: H01L25/065 , H01L25/00 , H01L23/00
CPC classification number: H01L25/0657 , H01L23/49811 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/17 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/94 , H01L24/97 , H01L25/50 , H01L2224/036 , H01L2224/0401 , H01L2224/1132 , H01L2224/11334 , H01L2224/11462 , H01L2224/1147 , H01L2224/1184 , H01L2224/11845 , H01L2224/119 , H01L2224/13014 , H01L2224/13082 , H01L2224/13109 , H01L2224/13111 , H01L2224/13139 , H01L2224/13147 , H01L2224/13155 , H01L2224/1403 , H01L2224/14051 , H01L2224/14131 , H01L2224/14136 , H01L2224/14179 , H01L2224/14505 , H01L2224/16145 , H01L2224/16148 , H01L2224/16227 , H01L2224/16238 , H01L2224/1701 , H01L2224/2929 , H01L2224/29387 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/81065 , H01L2224/81143 , H01L2224/81193 , H01L2224/812 , H01L2224/81205 , H01L2224/81815 , H01L2224/81895 , H01L2224/81906 , H01L2224/81907 , H01L2224/81986 , H01L2224/83104 , H01L2224/83862 , H01L2224/83895 , H01L2224/92125 , H01L2224/94 , H01L2224/97 , H01L2225/06513 , H01L2225/06565 , H01L2225/06593 , H01L2924/00015 , H01L2924/14 , H05K3/328 , H05K3/368 , H05K3/4007 , H05K2203/167 , H01L2924/00012 , H01L2924/01083 , H01L2924/0103 , H01L2924/00014 , H01L2224/81121 , H01L2224/81 , H01L2924/0665 , H01L2924/05442 , H01L2224/034 , H01L2224/113 , H01L2224/81203 , H01L2224/81201 , H01L2924/00
Abstract: A packaging structure includes a first substrate including a first metal terminal and a second metal terminal whose height is lower than the height of the first metal terminal; and a second substrate including a third metal terminal and a fourth metal terminal whose height is lower than the height of the third metal terminal, the second substrate being provided on the first substrate, the first metal terminal and the third metal terminal being directly bonded with each other, and the second metal terminal and the fourth metal terminal being bonded via a connection portion.
Abstract translation: 包装结构包括:第一基板,包括第一金属端子和第二金属端子,第二金属端子的高度低于第一金属端子的高度; 以及第二基板,包括高度低于所述第三金属端子的高度的第三金属端子和第四金属端子,所述第二基板设置在所述第一基板上,所述第一金属端子和所述第三金属端子直接与 并且第二金属端子和第四金属端子经由连接部分接合。
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公开(公告)号:US20160181174A1
公开(公告)日:2016-06-23
申请号:US14802341
申请日:2015-07-17
Applicant: International Business Machines Corporation
Inventor: Jeffrey P. Gambino , Richard S. Graf , Sudeep Mandal , Sebastian T. Ventrone
IPC: H01L23/367 , H01L23/373 , H01L21/56 , H01L21/48 , H01L25/00 , H01L25/065 , H01L23/48 , H01L21/768
CPC classification number: H01L23/367 , H01L21/4871 , H01L21/563 , H01L21/76898 , H01L23/3171 , H01L23/3677 , H01L23/3736 , H01L23/481 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L2224/0345 , H01L2224/03452 , H01L2224/03462 , H01L2224/0347 , H01L2224/036 , H01L2224/0401 , H01L2224/05082 , H01L2224/05166 , H01L2224/05184 , H01L2224/05187 , H01L2224/0556 , H01L2224/05569 , H01L2224/0557 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/06181 , H01L2224/11849 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13118 , H01L2224/1312 , H01L2224/13139 , H01L2224/13147 , H01L2224/16145 , H01L2224/16227 , H01L2224/17181 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2224/8101 , H01L2224/81011 , H01L2224/81024 , H01L2224/8113 , H01L2224/81132 , H01L2224/81191 , H01L2224/81204 , H01L2224/81815 , H01L2224/83104 , H01L2224/8313 , H01L2224/83132 , H01L2224/83191 , H01L2224/83192 , H01L2224/83204 , H01L2224/92 , H01L2224/9211 , H01L2224/92125 , H01L2224/922 , H01L2224/92225 , H01L2224/94 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06544 , H01L2225/06565 , H01L2225/06589 , H01L2924/10253 , H01L2924/14 , H01L2924/1432 , H01L2924/1434 , H01L2924/15311 , H01L2924/3512 , H01L2924/014 , H01L2224/11 , H01L2224/03 , H01L2924/00 , H01L2924/00014 , H01L2924/0665 , H01L2224/81 , H01L2224/83 , H01L2224/81203 , H01L2224/83203 , H01L2924/00012 , H01L2924/04941
Abstract: A chip fabricated from a semiconductor material is disclosed, which may include active devices located below a first depth from the chip back side, and a structure to remove heat from the active devices to the chip back side. The structure may include thermally conductive partial vias (TCPVs), which may include a recess with a depth, from the chip back side towards the active devices less than the first depth. Each TCPV may include a barrier layer deposited within the recess and deposited upon the back side of the chip. Each TCPV may also include a thermally conductive layer deposited upon the barrier layer. The structure may also include through-silicon vias (TSVs) electrically connected to active devices, extending from the back side to an active device side of the chip to conductively remove heat from the active devices to the back side of the chip.
Abstract translation: 公开了一种由半导体材料制造的芯片,其可以包括位于从芯片背面的第一深度以下的有源器件,以及将热量从有源器件移除到芯片背面的结构。 该结构可以包括导热部分通孔(TCPV),其可以包括从芯片背侧朝向有源器件的深度的凹陷小于第一深度。 每个TCPV可以包括沉积在凹槽内并沉积在芯片背面的阻挡层。 每个TCPV还可以包括沉积在阻挡层上的导热层。 该结构还可以包括电连接到有源器件的穿硅通孔(TSV),其从芯片的背面延伸到有源器件侧,以将热量从有源器件导电移除到芯片的背面。
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