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公开(公告)号：US11701478B2
公开(公告)日：2023-07-18
申请号：US15765889
申请日：2016-10-06
Applicant: BOEHRINGER INGELHEIM INTERNATIONAL GMBH
Inventor： Daniel Frache
IPC: A61M11/00 , B05B11/00 , A61M15/00 , B81C1/00 , B05B13/04 , B05B1/16 , B05B1/20 , B05B1/04 , B01J2/06 , B05D7/00 , B01J2/04 , B05D7/24 , C09D183/08 , C03C17/30 , B05B11/10 , B05D5/08
CPC classification number: A61M11/006 , A61M15/009 , A61M15/0065 , A61M15/0068 , B01J2/04 , B01J2/06 , B05B1/042 , B05B1/16 , B05B1/202 , B05B11/0032 , B05B13/0436 , B05D7/00 , B05D7/24 , B81C1/00 , B81C1/00015 , B81C1/0038 , B81C1/0065 , B81C1/00206 , B81C1/00341 , B81C1/00349 , B81C1/00642 , B81C1/00682 , C03C17/30 , C09D183/08 , A61M2205/0238 , A61M2205/70 , A61M2205/7545 , A61M2205/7563 , A61M2207/00 , B05B11/1091 , B05D5/08 , B05D2518/12 , B81C2201/01 , B81C2201/0161 , B81C2201/0174 , B81C2201/0197
Abstract: The present disclosure provides a method for the surface modification of microstructured components having a polar surface, in particular for high-pressure applications. According to the method, a microstructured component is contacted, in particular treated, with a modification reagent, wherein the surface properties of the component are modified by chemical and/or physical interaction of the component surface and of the modification reagent.
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公开(公告)号：US20180282152A1
公开(公告)日：2018-10-04
申请号：US15870429
申请日：2018-01-12
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri DUQI , Lorenzo BALDO , Roberto CARMINATI
IPC: B81C1/00
CPC classification number: B81C1/00222 , B81B3/0021 , B81B7/02 , B81B2201/0242 , B81B2201/0264 , B81B2207/097 , B81C1/00261 , B81C1/00349 , B81C2201/01
Abstract: MEMS device, in which a body made of semiconductor material contains a chamber, and a first column inside the chamber. A cap of semiconductor material is attached to the body and forms a first membrane, a first cavity and a first channel. The chamber is closed on the side of the cap. The first membrane, the first cavity, the first channel and the first column form a capacitive pressure sensor structure. The first membrane is arranged between the first cavity and the second face, the first channel extends between the first cavity and the first face or between the first cavity and the second face and the first column extends towards the first membrane and forms, along with the first membrane, plates of a first capacitor element.
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公开(公告)号：US08887569B2
公开(公告)日：2014-11-18
申请号：US13177485
申请日：2011-07-06
Applicant: Jong Woon Kim , Won Kyu Jeung
Inventor： Jong Woon Kim , Won Kyu Jeung
CPC classification number: B81C1/00158 , B81B3/0062 , B81B3/007 , B81B2201/0235 , B81B2203/053 , B81C1/00484 , B81C1/00531 , B81C1/00539 , B81C1/00571 , B81C2201/01 , B81C2201/0132 , B81C2201/0133 , B81C2201/014 , C09K13/00 , C09K13/08 , G01C19/56 , G01P15/0802 , G01P15/0922 , G01P15/18 , G01P2015/084 , G01P2015/0871
Abstract: Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.
Abstract translation: 本文公开了一种惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100被配置为包括板状膜110，质量体120，其包括设置在膜110的中心部分113下方并设置在中心部分处的粘合部123 以及设置在粘合部123的外侧并被图案化以垂直贯穿其中的图案形成部分125，以及形成在膜110和粘合部123之间的第一粘合层130，并且设置在第一粘合层130的内侧 图形部分125.通过使用图案形成部分125作为掩模的各向同性蚀刻，第一粘合剂层130的区域变窄，从而可以提高惯性传感器100的灵敏度。
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公开(公告)号：US20110290022A1
公开(公告)日：2011-12-01
申请号：US13177485
申请日：2011-07-06
Applicant: Jong Woon Kim , Won Kyu Jeung
Inventor： Jong Woon Kim , Won Kyu Jeung
CPC classification number: B81C1/00158 , B81B3/0062 , B81B3/007 , B81B2201/0235 , B81B2203/053 , B81C1/00484 , B81C1/00531 , B81C1/00539 , B81C1/00571 , B81C2201/01 , B81C2201/0132 , B81C2201/0133 , B81C2201/014 , C09K13/00 , C09K13/08 , G01C19/56 , G01P15/0802 , G01P15/0922 , G01P15/18 , G01P2015/084 , G01P2015/0871
Abstract: Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.
Abstract translation: 本文公开了一种惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100被配置为包括板状膜110，质量体120，其包括设置在膜110的中心部分113下方并设置在中心部分处的粘合部123 以及设置在粘合部123的外侧并被图案化以垂直贯穿其中的图案形成部分125，以及形成在膜110和粘合部123之间的第一粘合层130，并且设置在第一粘合层130的内侧 图形部分125.通过使用图案形成部分125作为掩模的各向同性蚀刻，第一粘合剂层130的区域变窄，从而可以提高惯性传感器100的灵敏度。
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公开(公告)号：US10017381B2
公开(公告)日：2018-07-10
申请号：US15477593
申请日：2017-04-03
Applicant: Innovative Micro Technology
Inventor： Benedikt Zeyen
CPC classification number: B81C1/00182 , B81B3/0018 , B81B2201/0264 , B81C2201/01 , G01L7/022 , G01L7/024 , G01L7/026 , G01L7/163 , G01L9/0001 , G01L9/0042 , G01L9/0054 , G01L9/0089
Abstract: A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.
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Patent Agency Ranking
公开(公告)号：US20170217768A1
公开(公告)日：2017-08-03
申请号：US15515399
申请日：2015-09-28
Applicant: 3M INNOVATIVE PROPERTIES COMPANY
Inventor： Chi-fan CHEN , Wan-chun CHEN , Yu-chih LIN , Tze Yuan WANG , Chia-yuan LIU
CPC classification number: B81C1/00388 , A61B5/14532 , A61B5/150022 , A61B5/150274 , A61B5/150358 , A61B2562/0295 , A61B2562/125 , B01J2219/00382 , B41C1/003 , B41M1/12 , B41M1/26 , B81C1/00 , B81C1/00206 , B81C1/00396 , B81C2201/01 , H01L21/4867 , H05K1/0393 , H05K3/061 , H05K2203/0108 , H05K2203/1545
Abstract: A master tool is provided with an ink pattern on a major surface thereof. The ink pattern is formed by a screen printing process. A stamp-making material is applied to the major surface of the master tool to form a stamp having a stamping pattern being negative to the ink pattern of the master tool. The stamping pattern is inked with an ink composition and contacted with a metalized surface to form a printed pattern on a metalized surface of a substrate according to the stamping pattern. Using the printed pattern as an etching mask, the metalized surface is etched to form electrically conductive traces on the substrate.
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公开(公告)号：US20150031161A1
公开(公告)日：2015-01-29
申请号：US14514356
申请日：2014-10-14
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Jong Woon Kim , Won Kyu Jeung
IPC: B81C1/00
CPC classification number: B81C1/00158 , B81B3/0062 , B81B3/007 , B81B2201/0235 , B81B2203/053 , B81C1/00484 , B81C1/00531 , B81C1/00539 , B81C1/00571 , B81C2201/01 , B81C2201/0132 , B81C2201/0133 , B81C2201/014 , C09K13/00 , C09K13/08 , G01C19/56 , G01P15/0802 , G01P15/0922 , G01P15/18 , G01P2015/084 , G01P2015/0871
Abstract: Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.
Abstract translation: 本文公开了一种惯性传感器及其制造方法。 根据本发明的优选实施例的惯性传感器100被配置为包括板状膜110，质量体120，其包括设置在膜110的中心部分113下方并设置在中心部分处的粘合部123 以及设置在粘合部123的外侧并被图案化以垂直贯穿其中的图案形成部分125，以及形成在膜110和粘合部123之间的第一粘合层130，并且设置在第一粘合层130的内侧 图形部分125.通过使用图案形成部分125作为掩模的各向同性蚀刻，第一粘合剂层130的区域变窄，从而可以提高惯性传感器100的灵敏度。
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公开(公告)号：US11753295B2
公开(公告)日：2023-09-12
申请号：US18079519
申请日：2022-12-12
Applicant: Knowles Electronics, LLC
Inventor： Peter V. Loeppert , Michael Pedersen
CPC classification number: B81C1/00166 , B81B3/0021 , B81B2203/04 , B81C2201/01
Abstract: A MEMS device can include a solid dielectric including a plurality of apertures, the solid dielectric having a first side and a second side. The MEMS device can include a first plurality of electrodes extending completely through a first subset of the plurality of apertures, a second plurality of electrodes extending partially through a second subset of the plurality of apertures, a third plurality of electrodes extending partially into a third subset of the plurality of apertures. The MEMS device can include a first diaphragm coupled to the first plurality and to the third plurality of electrodes, the first diaphragm facing the first side of the solid dielectric. The MEMS device can include a second diaphragm coupled to the first plurality and to the second plurality of electrodes the second diaphragm facing the second side of the solid dielectric.
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公开(公告)号：US20230166966A1
公开(公告)日：2023-06-01
申请号：US18079519
申请日：2022-12-12
Applicant: Knowles Electronics, LLC
Inventor： Peter V. Loeppert , Michael Pedersen
CPC classification number: B81C1/00166 , B81B3/0021 , B81C2201/01 , B81B2203/04
Abstract: A MEMS device can include a solid dielectric including a plurality of apertures, the solid dielectric having a first side and a second side. The MEMS device can include a first plurality of electrodes extending completely through a first subset of the plurality of apertures, a second plurality of electrodes extending partially through a second subset of the plurality of apertures, a third plurality of electrodes extending partially into a third subset of the plurality of apertures. The MEMS device can include a first diaphragm coupled to the first plurality and to the third plurality of electrodes, the first diaphragm facing the first side of the solid dielectric. The MEMS device can include a second diaphragm coupled to the first plurality and to the second plurality of electrodes the second diaphragm facing the second side of the solid dielectric.
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公开(公告)号：US20170283252A1
公开(公告)日：2017-10-05
申请号：US15477593
申请日：2017-04-03
Applicant: Innovative Micro Technology
Inventor： Benedikt ZEYEN
CPC classification number: B81C1/00182 , B81B3/0018 , B81B2201/0264 , B81C2201/01 , G01L7/022 , G01L7/024 , G01L7/026 , G01L7/163 , G01L9/0001 , G01L9/0042 , G01L9/0054 , G01L9/0089
Abstract: A microfabricated pressure transducer is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied.
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