公开(公告)号：US11688579B2

公开(公告)日：2023-06-27

申请号：US17549854

申请日：2021-12-13

Applicant: ASML Netherlands B.V.

Inventor： Juying Dou ,  Zheng Fan ,  Tzu-Yi Kuo ,  Zhong-wei Chen

IPC: H01J37/073 ,  H01J37/065 ,  H01J1/304 ,  H01J1/14 ,  H01J9/02 ,  H01J9/04 ,  H01J37/26

CPC classification number: H01J37/073 ,  H01J1/14 ,  H01J1/304 ,  H01J9/025 ,  H01J9/042 ,  H01J37/065 ,  H01J37/26 ,  H01J2201/196 ,  H01J2201/30403 ,  H01J2201/30426 ,  H01J2201/30449 ,  H01J2201/30484 ,  H01J2201/30492 ,  H01J2209/0223 ,  H01J2237/06308 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

公开(公告)号：US09437391B2

公开(公告)日：2016-09-06

申请号：US13592751

申请日：2012-08-23

Applicant: Yang Wei ,  Shou-Shan Fan

Inventor： Yang Wei ,  Shou-Shan Fan

IPC: H01J37/073 ,  H01J1/14 ,  H01J1/304 ,  H01J63/02 ,  H01J63/06

CPC classification number: H01J1/14 ,  H01J1/3044 ,  H01J9/042 ,  H01J37/073 ,  H01J63/02 ,  H01J63/06 ,  H01J2201/196 ,  H01J2201/30411 ,  H01J2201/30469 ,  H01J2237/06316 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/28 ,  H01J2329/0455 ,  Y10T428/24132

Abstract: A carbon nanotube micro-tip structure includes an insulating substrate and a patterned carbon nanotube film structure. The insulating substrate includes a surface. The surface includes an edge. The patterned carbon nanotube film structure is partially arranged on the surface of the insulating substrate. The patterned carbon nanotube film structure includes two strip-shaped arms joined at one end to form a tip portion protruded from the edge of the surface of the insulating substrate and suspended. Each of the two strip-shaped arms includes a plurality of carbon nanotubes parallel to the surface of the insulating substrate.

Abstract translation: 碳纳米管微尖端结构包括绝缘基板和图案化碳纳米管薄膜结构。 绝缘基板包括表面。 表面包括边缘。 图案化的碳纳米管膜结构部分地布置在绝缘基板的表面上。 图案化碳纳米管膜结构包括两端连接的带状臂，形成从绝缘基板的表面的边缘突出的顶端部分并悬挂。 两个条形臂中的每一个包括平行于绝缘基板的表面的多个碳纳米管。

公开(公告)号：US06559442B1

公开(公告)日：2003-05-06

申请号：US09551563

申请日：2000-04-18

Applicant: Didier Pierrejean

Inventor： Didier Pierrejean

IPC: B01D5944

CPC classification number: H01J3/022 ,  H01J1/20 ,  H01J1/3042 ,  H01J2201/196 ,  H01J2201/30403

Abstract: A system in accordance with the invention which generates electrons by means of a field-emission cathode comprises an array of electron-emitting micropoints associated with a grid and carried by a substrate with integral heater means for heating the micropoints to a temperature in the range approximately 300° C. to approximately 400° C. and maintaining them at that temperature during emission of electrons. The cathode can therefore function at higher residual air pressures with no risk of breakdown.

Abstract translation: 根据本发明的通过场发射阴极产生电子的系统包括与栅格相关联的电子发射微点阵列，并由具有用于将微点加热到大约范围内的温度的整体加热器装置的衬底承载 300℃至约400℃，并在电子发射期间将其保持在该温度。 因此，阴极可以在更高的残留空气压力下起作用，而不会有击穿的危险。

公开(公告)号：US20160329184A1

公开(公告)日：2016-11-10

申请号：US15214779

申请日：2016-07-20

Applicant: Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： YANG WEI ,  SHOU-SHAN FAN

IPC: H01J1/14 ,  H01J1/304 ,  H01J9/04

CPC classification number: H01J1/14 ,  H01J1/3044 ,  H01J9/042 ,  H01J37/073 ,  H01J63/02 ,  H01J63/06 ,  H01J2201/196 ,  H01J2201/30411 ,  H01J2201/30469 ,  H01J2237/06316 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/28 ,  H01J2329/0455 ,  Y10T428/24132

Abstract: An array of carbon nanotube micro-tip structure includes an insulating substrate and a plurality of patterned carbon nanotube film structures. The insulating substrate includes a surface. The surface includes an edge. A plurality of patterned carbon nanotube film structures spaced from each other. Each of the plurality of patterned carbon nanotube film structures is partially arranged on the surface of the insulating substrate. Each of the plurality of patterned carbon nanotube film structures comprises two strip-shaped arms joined together forming a tip portion protruding and suspending from the edge of the surface of the insulating substrate. Each of the two strip-shaped arms comprises a plurality of carbon nanotubes parallel to the surface of the insulating substrate.

Abstract translation: 碳纳米管微尖端结构的阵列包括绝缘基板和多个图案化的碳纳米管薄膜结构。 绝缘基板包括表面。 表面包括边缘。 多个图案化的碳纳米管薄膜结构彼此间隔开。 多个图案化碳纳米管膜结构中的每一个部分地布置在绝缘基板的表面上。 多个图案化碳纳米管膜结构中的每一个包括两个连接在一起的条形臂，形成从绝缘基板的表面的边缘突出并悬挂的末端部分。 两个条形臂中的每一个包括平行于绝缘基板的表面的多个碳纳米管。

公开(公告)号：US20100127170A1

公开(公告)日：2010-05-27

申请号：US12306635

申请日：2006-06-30

Applicant: Shin Fujita ,  Mohamed El-Gomati ,  Torquil Wells

Inventor： Shin Fujita ,  Mohamed El-Gomati ,  Torquil Wells

IPC: G01N23/225 ,  H01J29/46 ,  G21K1/08 ,  H01J35/06

CPC classification number: H01J37/065 ,  H01J35/06 ,  H01J2201/196 ,  H01J2237/06316 ,  H01J2237/3175

Abstract: Provided is a Schottky emitter having the conical end with a radius of curvature of 2.0 μm on the emission side of an electron beam. Since a radius of curvature is 1 μm or more, a focal length of an electron gun can be longer than in a conventional practice wherein a radius of curvature is in the range of from 0.5 μm to not more than 0.6 μm. The focal length was found to be roughly proportional to the radius of the curvature. Since the angular current intensity (the beam current per unit solid angle) is proportional to square of the electron gun focal length, the former can be improved by an order of magnitude within a practicable increase in the emitter radius. A higher angular current intensity means a larger beam current available from the electron gun and the invention enables the Schottky emitters to be used in applications which require relatively high beam current of microampere regime such as microfocus X-ray tube, electron probe micro-analyzer, and electron beam lithography system.

Abstract translation: 提供了一种在电子束的发射侧具有2.0μm的曲率半径的锥形端的肖特基发射体。 由于曲率半径为1μm以上，电子枪的焦距可以比曲率半径在0.5μm以上0.6μm以下的现有技术中更长。 发现焦距与曲率半径成正比。 由于角电流强度（每单位立体角的射束电流）与电子枪焦距的平方成比例，所以前者可以在发射极半径的可行增加范围内提高一个数量级。 较高的角电流强度意味着可从电子枪获得的较大的束电流，并且本发明使肖特基发射体能够用于需要相对较高的微安电流束流的应用，如微焦X射线管，电子探针微量分析仪， 和电子束光刻系统。

公开(公告)号：US07638933B2

公开(公告)日：2009-12-29

申请号：US11478406

申请日：2006-06-28

Applicant: Kai-Li Jiang ,  Peng Liu ,  Yang Wei ,  Liang Liu ,  Shou-Shan Fan

Inventor： Kai-Li Jiang ,  Peng Liu ,  Yang Wei ,  Liang Liu ,  Shou-Shan Fan

IPC: H01J13/08 ,  H01J19/06 ,  H01J19/30 ,  H01K1/04

CPC classification number: H01J1/14 ,  H01J1/15 ,  H01J1/20 ,  H01J1/304 ,  H01J2201/19 ,  H01J2201/196 ,  H01J2201/30449 ,  H01J2201/30469 ,  H01J2201/30496

Abstract: An exemplary electron emission device includes an electron emitter, an anode opposite to and spaced apart from the electron emitter, a first power supply circuit, and a second power supply circuit. The first power supply circuit is configured for electrically connecting the electron emitter and the anode with a power supply to generate an electric field between the electron emitter and the anode. The second power supply circuit is configured for electrically connecting the electron emitter with a power supply to supply a heating current for heating the electron emitter whereby electrons emit therefrom. Methods for generating an emission current with a relatively higher stability also are provided.

Abstract translation: 示例性的电子发射装置包括电子发射极，与电子发射极相对且间隔开的阳极，第一电源电路和第二电源电路。 第一电源电路被配置为用电源电连接电子发射器和阳极，以在电子发射器和阳极之间产生电场。 第二电源电路被配置为将电子发射器与电源电连接以提供用于加热电子发射器的加热电流，从而电子从其发射。 还提供了用于产生具有相对较高稳定性的发射电流的方法。

公开(公告)号：US20090167138A1

公开(公告)日：2009-07-02

申请号：US12288865

申请日：2008-10-23

Applicant: Peng Liu ,  Liang Liu ,  Kai-Li Jiang ,  Shou-Shan Fan

Inventor： Peng Liu ,  Liang Liu ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC: H01J21/10

CPC classification number: H01J1/14 ,  H01J31/127 ,  H01J2201/196

Abstract: A thermionic electron source includes a substrate, two electrodes, and a thermionic emitter. The thermionic emitter is electrically connected to the two electrodes. The substrate has a recess formed on a surface thereof, and the thermionic emitter is located on the surface of the substrate corresponding to the recess.

Abstract translation: 热电子源包括衬底，两个电极和热离子发射器。 热电子发射器电连接到两个电极。 基板的表面形成有凹部，热离子发射体位于与凹部对应的基板的表面上。

公开(公告)号：US09490098B1

公开(公告)日：2016-11-08

申请号：US14992870

申请日：2016-01-11

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/146 ,  H01J1/148 ,  H01J19/10 ,  H01J1/14

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

公开(公告)号：US07915797B2

公开(公告)日：2011-03-29

申请号：US12288865

申请日：2008-10-23

Applicant: Peng Liu ,  Liang Liu ,  Kai-Li Jiang ,  Shou-Shan Fan

Inventor： Peng Liu ,  Liang Liu ,  Kai-Li Jiang ,  Shou-Shan Fan

IPC: H01J9/02

CPC classification number: H01J1/14 ,  H01J31/127 ,  H01J2201/196

Abstract: A thermionic electron source includes a substrate, two electrodes, and a thermionic emitter. The thermionic emitter is electrically connected to the two electrodes. The substrate has a recess formed on a surface thereof, and the thermionic emitter is located on the surface of the substrate corresponding to the recess.

Abstract translation: 热电子源包括衬底，两个电极和热离子发射器。 热电子发射器电连接到两个电极。 基板的表面形成有凹部，热离子发射体位于与凹部对应的基板的表面上。

公开(公告)号：US20090289555A1

公开(公告)日：2009-11-26

申请号：US11478406

申请日：2006-06-28

Applicant: Kai-Li Jiang ,  Peng Liu ,  Yang Wei ,  Liang Liu ,  Shou-Shan Fan

Inventor： Kai-Li Jiang ,  Peng Liu ,  Yang Wei ,  Liang Liu ,  Shou-Shan Fan

IPC: H01J1/14 ,  H05B41/14

CPC classification number: H01J1/14 ,  H01J1/15 ,  H01J1/20 ,  H01J1/304 ,  H01J2201/19 ,  H01J2201/196 ,  H01J2201/30449 ,  H01J2201/30469 ,  H01J2201/30496

Abstract: An exemplary electron emission device includes an electron emitter, an anode opposite to and spaced apart from the electron emitter, a first power supply circuit, and a second power supply circuit. The first power supply circuit is configured for electrically connecting the electron emitter and the anode with a power supply to generate an electric field between the electron emitter and the anode. The second power supply circuit is configured for electrically connecting the electron emitter with a power supply to supply a heating current for heating the electron emitter whereby electrons emit therefrom. Methods for generating an emission current with a relatively higher stability also are provided.

Abstract translation: 示例性的电子发射装置包括电子发射极，与电子发射极相对且间隔开的阳极，第一电源电路和第二电源电路。 第一电源电路被配置为用电源电连接电子发射器和阳极，以在电子发射器和阳极之间产生电场。 第二电源电路被配置为将电子发射器与电源电连接以提供用于加热电子发射器的加热电流，从而电子从其发射。 还提供了用于产生具有相对较高稳定性的发射电流的方法。