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公开(公告)号:US11177284B2
公开(公告)日:2021-11-16
申请号:US16798643
申请日:2020-02-24
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Peter Rabkin , Masaaki Higashitani , Alan Kalitsov
IPC: H01L27/11597 , H01L21/02 , H01L21/306 , H01L29/778
Abstract: A ferroelectric memory device includes a two-dimensional electron gas channel, a gate electrode, and a ferroelectric element located between the gate electrode and the two-dimensional electron gas channel.
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公开(公告)号:US20210174881A1
公开(公告)日:2021-06-10
申请号:US17173023
申请日:2021-02-10
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Kiyohiko Sakakibara , Ippei Yasuda , Ken Oowada , Masaaki Higashitani
Abstract: Methods for reducing read disturb using NAND strings with poly-silicon channels and p-type doped source lines are described. During a boosted read operation for a selected memory cell transistor in a NAND string, a back-gate bias or bit line voltage may be applied to a bit line connected to the NAND string and a source line voltage greater than the bit line voltage may be applied to a source line connected to the NAND string; with these bias conditions, electrons may be injected from the bit line and annihilated in the source line during the read operation. To avoid leakage currents through NAND strings in non-selected memory blocks, the threshold voltages of source-side select gate transistors of the NAND strings may be set to a negative threshold voltage that has an absolute voltage value greater than the source line voltage applied during the read operation.
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公开(公告)号:US11004773B2
公开(公告)日:2021-05-11
申请号:US16391632
申请日:2019-04-23
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Chen Wu , Peter Rabkin , Masaaki Higashitani
IPC: H01L23/48 , H01L23/528 , H01L23/532 , H01L23/00 , H01L25/18 , H01L21/02 , H01L21/768 , H01L21/311 , H01L25/00 , H01L27/11556 , H01L27/11521 , H01L27/11526 , H01L27/11568 , H01L27/11573 , H01L27/11582 , H01L23/522 , H01L21/321 , H01L21/3105
Abstract: First semiconductor devices, a first dielectric material layer, a porous dielectric material layer, and a metal interconnect structure formed within a second dielectric material layer are formed on a front-side surface of a first semiconductor substrate. A via cavity extending through the first semiconductor substrate and the first dielectric material layer are formed. The via cavity stops on the porous dielectric material layer. A continuous network of pores that are free of any solid material therein continuously extends from a bottom of the via cavity to a surface of the metal interconnect structure. A through-substrate via structure is formed in the via cavity. The through-substrate via structure includes a porous metallic material portion filling the continuous network of pores and contacting surface portions of the metal interconnect structure. Etch damage to the first semiconductor devices and metallic particle generation may be minimized by using the porous metallic material portion.
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公开(公告)号:US10910064B2
公开(公告)日:2021-02-02
申请号:US16400280
申请日:2019-05-01
Applicant: SanDisk Technologies LLC
Inventor: Peter Rabkin , Kwang-Ho Kim , Masaaki Higashitani
IPC: G11C16/24 , G11C16/04 , G11C16/32 , G11C16/34 , G11C16/08 , G11C16/14 , H01L27/11582 , H01L27/11556
Abstract: An apparatus comprising strings of non-volatile memory cells, a first set of pathways connected to the strings, and a second set of pathways connected to the strings. The first set of pathways have first impedances that depend on location of respective strings. The second set of pathways having second impedances. The apparatus also includes one or more control circuits configured to compensate for location dependent impedance mismatch between the first set of pathways and the second set of pathways during memory operations on the non-volatile memory cells.
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公开(公告)号:US20200321061A1
公开(公告)日:2020-10-08
申请号:US16909830
申请日:2020-06-23
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Dae Wung Kang , Peter Rabkin , Masaaki Higashitani
IPC: G11C16/26 , G11C7/04 , G11C16/04 , G11C11/4074 , G11C11/56
Abstract: Methods and systems for improving the reliability of data stored within a semiconductor memory over a wide range of operating temperatures are described. The amount of shifting in the threshold voltages of memory cell transistors over temperature may depend on the location of the memory cell transistors within a NAND string. To compensate for these variations, the threshold voltages of memory cell transistors in the middle of the NAND string or associated with a range of word lines between the ends of the NAND string may be adjusted by increasing the word line voltages biasing memory cell transistors on the drain-side of the selected word line when the read temperature is greater than a first threshold temperature and/or decreasing the word line voltages biasing memory cell transistors on the source-side of the selected word line when the read temperature is less than a second threshold temperature.
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96.
公开(公告)号:US20200294910A1
公开(公告)日:2020-09-17
申请号:US16886702
申请日:2020-05-28
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Luisa Lin , Mohan Dunga , Venkatesh P. Ramachandra , Peter Rabkin , Masaaki Higashitani
IPC: H01L23/522 , H01L23/528 , H01L23/00 , H01L49/02 , H01L27/11582
Abstract: A non-volatile storage apparatus comprises a non-volatile memory structure and a plurality of I/O pads in communication with the non-volatile memory structure. The I/O pads include a power I/O pad, a ground I/O pad and data/control I/O pads. The non-volatile storage apparatus further comprises one or more capacitors connected to the power I/O pad and the ground I/O pad. The one or more capacitors are positioned in one or more metal interconnect layers below the signal lines and/or above device capacitors on the top surface of the substrate.
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公开(公告)号:US20200013795A1
公开(公告)日:2020-01-09
申请号:US16141149
申请日:2018-09-25
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Mohan Dunga , James Kai , Venkatesh P. Ramachandra , Piyush Dak , Luisa Lin , Masaaki Higashitani
IPC: H01L27/11582 , H01L27/11573 , H01L27/1157 , G11C16/10 , G11C16/28 , G11C7/10
Abstract: A non-volatile storage apparatus comprises a non-volatile memory structure and an I/O interface. A portion of the memory die is used as a pool capacitor for the I/O interface.
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公开(公告)号:US10297329B2
公开(公告)日:2019-05-21
申请号:US15352390
申请日:2016-11-15
Applicant: SanDisk Technologies LLC
Inventor: Peter Rabkin , Yingda Dong , Masaaki Higashitani
Abstract: Methods for improving channel boosting and reducing program disturb during programming of memory cells within a memory array are described. The memory array may comprise a NAND flash memory structure, such as a vertical NAND structure or a bit cost scalable (BiCS) NAND structure. In some cases, by applying continuous voltage ramping to unselected word lines during or throughout a programming operation, the boosting of channels associated with program inhibited memory cells may be improved. In one example, the slope and timing of a Vpass waveform applied to a group of unselected word lines (e.g., the neighboring word lines of the selected word line) during the programming operation may be set based on the location of the selected word line within the memory array and the locations of the group of unselected word lines within the memory array.
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99.
公开(公告)号:US10115459B1
公开(公告)日:2018-10-30
申请号:US15720556
申请日:2017-09-29
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Katsuo Yamada , Tomoyasu Kakegawa , Peter Rabkin , Jayavel Pachamuthu , Mohan Dunga , Masaaki Higashitani
Abstract: An opening is formed through at least one dielectric material layer. A first metallic liner is formed on a bottom surface and sidewalls of the opening by depositing a first metallic material. A metal portion including an elemental metal or an intermetallic alloy of at least two elemental metals is formed on the first metallic liner. A second metallic liner including a second metallic material is formed directly on a top surface of the metal portion. The first metallic material and the second metallic material differ in composition. The first metallic liner and the second metallic liner contact an entirety of all surfaces of the metal portion. The first and second metallic liners can protect the metal portion from a subsequently deposited dielectric material layer, which may be formed as an air-gap dielectric layer after recessing the at least one dielectric material layer.
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公开(公告)号:US10103161B2
公开(公告)日:2018-10-16
申请号:US15195377
申请日:2016-06-28
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Fumitoshi Ito , Masaaki Higashitani , Cheng-Chung Chu , Jayavel Pachamuthu , Tuan Pham
IPC: H01L29/792 , H01L27/11582 , H01L27/1157 , H01L27/11573 , H01L23/535 , H01L29/06
Abstract: Die cracking of a three dimensional memory device may be reduced by adding offsets to backside contact via structures. Each backside contact via structure can include laterally extending portions that extend along a first horizontal direction adjoined by adjoining portions that extend along a horizontal direction other than the first horizontal direction. In order to preserve periodicity of memory stack structures extending through an alternating stack of insulating layers and electrically conductive layers, the distance between an outermost row of a string of memory stack structures between a pair of backside contact via structures and a most proximal backside contact via structure can vary from a laterally extending portion to another laterally extending portion within the most proximal backside contact via structure. Source shunt lines that are parallel to bit lines can be formed over a selected subset of offset portions of the backside contact via structures.
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