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177 条记录 (耗时 0.04 秒)

    Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon
    91.
    发明授权
    Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon 失效
    形成叠层结构以增强多晶硅上的金属硅化物附着力的方法

    公开(公告)号：US06489208B2

    公开(公告)日：2002-12-03

    申请号：US10042148

    申请日：2002-01-11

    申请人： Masato Koizumi ,  Kazuya Okubo ,  Tsuyoshi Takahashi ,  Tsuyoshi Hashimoto ,  Kimihiro Matsuse

    发明人： Masato Koizumi ,  Kazuya Okubo ,  Tsuyoshi Takahashi ,  Tsuyoshi Hashimoto ,  Kimihiro Matsuse

    IPC分类号： H01L2128

    CPC分类号： H01L29/4933 ,  H01L21/28061 ,  H01L21/76889 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method of forming a gate electrode of a multi-layer structure includes a step of supplying a processing gas for poly-crystal film formation and impurities of a P-type into a film formation device, to form a poly-crystal silicon layer doped with P-type impurities, on a surface of a gate film target, a step of maintaining the processing target in the film formation device to prevent formation of an oxide film on the poly-crystal silicon layer; and a step of supplying a processing gas for tungsten silicide film formation and impurities of a P-type into the film formation device, to form a tungsten silicide layer doped with impurities of P-type impurities, on the poly-crystal silicon layer on which no oxide film is formed.

    摘要翻译： 形成多层结构的栅电极的方法包括：向成膜器件提供多晶硅膜形成处理气体和P型杂质的步骤，以形成掺杂有多晶硅层的多晶硅层 P型杂质，在栅极膜靶的表面上，保持成膜装置中的处理对象以防止在多晶硅层上形成氧化膜的步骤; 以及向所述成膜装置供给硅化钨成膜用处理气体和P型杂质的工序，在所述多晶硅层上形成掺杂有P型杂质的杂质的硅化钨层， 不形成氧化膜。

    Apparatus for forming laminated thin films or layers
    92.
    发明授权
    Apparatus for forming laminated thin films or layers 有权
    用于形成叠层薄膜或层的装置

    公开(公告)号：US06251188B1

    公开(公告)日：2001-06-26

    申请号：US09473682

    申请日：1999-12-29

    申请人： Tsuyoshi Hashimoto ,  Kimihiro Matsuse ,  Kazuya Okubo ,  Tsuyoshi Takahashi

    发明人： Tsuyoshi Hashimoto ,  Kimihiro Matsuse ,  Kazuya Okubo ,  Tsuyoshi Takahashi

    IPC分类号： C23C1600

    CPC分类号： C23C16/45565 ,  C23C16/4404 ,  C23C16/4405 ,  C23C16/45561

    摘要： Pre-coating films are formed in a pretreatment by supplying first film-forming gases into a process chamber of a process vessel while heating the process chamber so as to form a first pre-coating film on the inner surface of the process vessel exposed to the process chamber, followed by supplying second film-forming gases into the process chamber to form a second pre-coating film on the first pre-coating film. A semiconductor wafer is loaded into the process chamber. Then, the first gases are supplied into the process chamber while heating the process chamber so as to form a first layer on the wafer, followed by supplying the second gases into the process chamber so as to form a second layer on the first layer. A silane gas is supplied into the process chamber to permit silicon material to be deposited on the surface of the second layer stacked on the first layer. Finally, the wafer having the first and second multi-film is unloaded out of the process vessel.

    摘要翻译： 在预处理中，通过将第一成膜气体提供到处理容器的处理室中，同时加热处理室以在暴露于该处理容器的处理容器的内表面上形成第一预涂膜，从而在预处理中形成预涂膜 处理室，然后将第二成膜气体供应到处理室中，以在第一预涂膜上形成第二预涂膜。 将半导体晶片装载到处理室中。 然后，在加热处理室的同时，将第一气体供给到处理室中，以在晶片上形成第一层，然后将第二气体供应到处理室中，以在第一层上形成第二层。 将硅烷气体供应到处理室中以允许硅材料沉积在堆叠在第一层上的第二层的表面上。 最后，将具有第一和第二多层膜的晶片从处理容器中卸载出来。

    Method of forming tungsten silicide film
    93.
    发明授权
    Method of forming tungsten silicide film 失效
    形成硅化钨膜的方法

    公开(公告)号：US06245673B1

    公开(公告)日：2001-06-12

    申请号：US09385848

    申请日：1999-08-30

    申请人： Kazuya Okubo ,  Tsuyoshi Takahashi ,  Kimiya Aoki ,  Kimihiro Matsuse

    发明人： Kazuya Okubo ,  Tsuyoshi Takahashi ,  Kimiya Aoki ,  Kimihiro Matsuse

    IPC分类号： H01L213205

    CPC分类号： C23C16/42 ,  H01L21/28518

    摘要： A first tungsten silicide layer relatively rich in silicon is formed on an object by using a process gas having a phosphorus atom-containing gas added thereto, and a second tungsten silicide layer relatively rich in tungsten is formed on the first tungsten silicide layer, so that a tungsten silicide film is formed. The addition amount of the phosphorus atom-containing gas to the process gas is 0.02 to 0.2% by volume “in terms of a phosphine gas”.

    摘要翻译： 通过使用添加了含有磷原子的气体的处理气体，在物体上形成比较富硅的第一硅化钨层，在第一硅化钨层上形成比较富含钨的第二硅化钨层， 形成硅化钨膜。 含磷原子的气体相对于处理气体的添加量为“以磷化氢气体计算”为0.02体积％〜0.2体积％。

    PC card type magnetic disk device
    95.
    发明授权
    PC card type magnetic disk device 失效
    PC卡式磁盘装置

    公开(公告)号：US5862011A

    公开(公告)日：1999-01-19

    申请号：US699425

    申请日：1996-08-19

    申请人： Masahiko Sega ,  Tomio Suzuki ,  Tsuyoshi Takahashi ,  Hiroyuki Mitsuhashi ,  Tetsuo Yuki ,  Takashi Matsuki

    发明人： Masahiko Sega ,  Tomio Suzuki ,  Tsuyoshi Takahashi ,  Hiroyuki Mitsuhashi ,  Tetsuo Yuki ,  Takashi Matsuki

    IPC分类号： G11B25/04 ,  G11B33/12 ,  G11B5/012

    CPC分类号： G11B33/121 ,  G11B25/043

    摘要： A magnetic disk device has a large capacity with a small and thin structure and includes a spindle system, an actuator system, a control package for controlling the systems, and a PCMCIA connector. The spindle system is of an in-hub structure wherein two magnetic disks are rotated in inside diameter portions of the magnetic disks. The actuator system has sliders mounting magnetic heads for writing and reading magnetic information to and from the magnetic disks, guide arms and suspension structures. The suspension structures also include a coil, a magnetic circuit for imparting a drive force in cooperation with the coil, a coil holder for supporting the coil, a pivot sleeve for rocking the guide arms, the coil holder and spacers which are integrally laminated to each other, bearings and a pivot shaft. The PCMCIA connector connects to the control package and is fixed by the housing and a package cover.

    摘要翻译： 磁盘装置具有体积小，结构薄的大容量，包括主轴系统，致动器系统，用于控制系统的控制组件和PCMCIA连接器。 主轴系统是内嵌式结构，其中两个磁盘在磁盘的内径部分中旋转。 致动器系统具有安装用于向磁盘，引导臂和悬架结构写入和读取磁信息的磁头的滑块。 悬架结构还包括线圈，用于与线圈相配合的驱动力的磁路，用于支撑线圈的线圈架，用于摆动引导臂的枢轴套筒，线圈夹持器和间隔件，它们被整体层合到每个 其他轴承和枢轴。 PCMCIA连接器连接到控制包，并由外壳和包装盖固定。

    Magnetic disk apparatus having improved support for head assembly
    98.
    发明授权
    Magnetic disk apparatus having improved support for head assembly 失效
    具有改进的头组件支撑的磁盘装置

    公开(公告)号：US5504636A

    公开(公告)日：1996-04-02

    申请号：US183000

    申请日：1994-01-18

    申请人： Tetsuo Yuki ,  Yuji Nishimura ,  Tomio Suzuki ,  Tsuyoshi Takahashi ,  Naoto Uemura

    发明人： Tetsuo Yuki ,  Yuji Nishimura ,  Tomio Suzuki ,  Tsuyoshi Takahashi ,  Naoto Uemura

    IPC分类号： G11B21/02 ,  G11B5/48 ,  G11B21/18 ,  G11B25/04 ,  G11B5/55 ,  G11B21/08

    CPC分类号： G11B21/18 ,  G11B5/4813

    摘要： A magnetic disk apparatus has a rail support which supports guide rails for guiding a carriage on which heads are mounted. The rail support is positioned outside a magnet of a voice coil motor and mounted on a frame. The guide rails are disposed so as to extend across a cavity in the rail support and have their opposite end portions attached to the rail support. The guide rails do not vibrate even if the voice coil motor receives a reaction during head seeking, whereby the head positioning accuracy can be improved and the storage capacity can be increased. The rigidity of the guide rails is increased by supporting the opposite ends of the guide rails. This structure and a coaxial arrangement of a motor coil allow the overall length of the carriage and, hence, the overall size of the apparatus to be reduced.

    摘要翻译： 磁盘装置具有轨道支撑件，其支撑用于引导其上安装有头的滑架的导轨。 轨道支撑件位于音圈电机的磁体外部并安装在框架上。 导轨设置成延伸穿过轨道支撑件中的空腔并且其相对的端部部分附接到轨道支撑件。 即使在寻线期间音圈电动机接收到反应，导轨也不会振动，从而可以提高头部定位精度并且可以提高存储容量。 通过支撑导轨的相对端来增加导轨的刚性。 这种结构和电动机线圈的同轴布置允许滑架的总长度以及因此减小装置的总体尺寸。

    Magnetic disk storage system
    99.
    发明授权
    Magnetic disk storage system 失效
    磁盘存储系统

    公开(公告)号：US5414591A

    公开(公告)日：1995-05-09

    申请号：US868421

    申请日：1992-04-15

    申请人： Hideyuki Kimura ,  Tsuyoshi Takahashi ,  Tomio Suzuki ,  Toshio Ohdaira ,  Kouki Uefune ,  Yuji Nishimura

    发明人： Hideyuki Kimura ,  Tsuyoshi Takahashi ,  Tomio Suzuki ,  Toshio Ohdaira ,  Kouki Uefune ,  Yuji Nishimura

    IPC分类号： G06F1/20 ,  G11B33/14 ,  H05K7/20

    CPC分类号： H05K7/20736 ,  G06F1/20 ,  G11B33/142

    摘要： A magnetic disk storage system in which magnetic disk drives can be cooled effectively, and even if a blast device for one of he magnetic disk drives fall into trouble or cease operation, a temperature rise of this magnetic disk drive can be suppressed to the minimum. For this purpose, in the magnetic disk storage system containing a plurality of magnetic disk drives, blase devices ae provided for each of the disk drives, and the disk drives are separated by partitions in which openings are formed so that the cooling air can be passed between adjacent magnetic disk drives. With this structure, even if a blast device for a certain magnetic disk drive is out of order or stopped, a part of the cooling air from a blase device for the adjacent disk drives flows into the magnetic disk drive in question through the openings formed in the partitions, and consequently, the temperature rise of the magnetic disk drive whose blase device ceases operation can be suppressed to the minimum, to thereby enhance the reliability of the magnetic disk storage system.

    摘要翻译： 可以有效地冷却磁盘驱动器的磁盘存储系统，即使其中一个磁盘驱动器的鼓风装置出现故障或停止运行，也可以将该磁盘驱动器的升温最小化。 为此，在包含多个磁盘驱动器的磁盘存储系统中，为每个磁盘驱动器提供blase设备，并且磁盘驱动器被分隔开，其中形成有开口的分区，使得冷却空气可以通过 在相邻的磁盘驱动器之间。 利用这种结构，即使用于某个磁盘驱动器的鼓风装置出现故障或停止，来自用于相邻磁盘驱动器的闪光装置的一部分冷却空气通过形成在所述磁盘驱动器中的开口流入所述磁盘驱动器 因此，可以将分隔部，因此能够将消除装置停止运转的磁盘驱动器的温度上升抑制到最小限度，从而提高磁盘存储系统的可靠性。