公开(公告)号：US20200350311A1

公开(公告)日：2020-11-05

申请号：US16923925

申请日：2020-07-08

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor： Fu-Chun Huang ,  Ching-Hui Lin ,  Chun-Ren Cheng ,  Shih-Fen Huang ,  Alexander Kalnitsky

IPC: H01L27/07 ,  H01L21/762 ,  H01L21/8234 ,  H01L29/06 ,  H01L49/02

Abstract: A method for manufacturing a semiconductor structure is provided, wherein the method includes the following operations. A substrate having a transistor is received, wherein the transistor includes a channel region and a gate on a first side of the channel region. A second side of the channel region of the transistor is exposed, wherein the second side is opposite to the first side. A metal oxide is formed on the second side of the channel region of the transistor, wherein the metal oxide contacts the channel region and is exposed to the environment. A semiconductor structure and an operation of a semiconductor structure thereof are also provided.

公开(公告)号：US10077187B2

公开(公告)日：2018-09-18

申请号：US15014871

申请日：2016-02-03

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor： Li-Chen Yen ,  Yi-Hsien Chang ,  Chun-Ren Cheng

IPC: H01L21/78 ,  B81C1/00 ,  H01L23/544

CPC classification number: B81C1/00825 ,  B81C1/00182 ,  B81C2203/0785 ,  H01L21/78 ,  H01L23/544 ,  H01L2223/5446

Abstract: A semiconductor manufacturing method includes providing a wafer. A layer is formed over a surface of the wafer where the layer is able to form a eutectic layer with a conductive element. The layer is partially removed so as to form a plurality of mesas. The wafer is bonded to a substrate through the plurality of mesas. The substrate is thinned down to a thickness so as to be less than a predetermined value.

公开(公告)号：US09810689B2

公开(公告)日：2017-11-07

申请号：US15581673

申请日：2017-04-28

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Ching-Hui Lin ,  Chun-Ren Cheng ,  Shih-Fen Huang ,  Yi-Hsien Chang

IPC: H01L51/05 ,  G01N27/414 ,  G01N33/543 ,  H01L29/78 ,  C12Q1/00 ,  H01L51/00 ,  H01L29/66

CPC classification number: G01N33/5438 ,  C12Q1/006 ,  G01N27/414 ,  G01N27/4145 ,  G01N27/4148 ,  H01L29/66484 ,  H01L29/7831 ,  H01L29/7832 ,  H01L51/0093 ,  H01L51/0512

Abstract: Dual-gate ion-sensitive field effect transistors (ISFETs) for disease diagnostics are disclosed herein. An exemplary dual-gate ISFET includes a gate structure and a fluidic gate structure disposed over opposite surfaces of a device substrate. The gate structure is disposed over a channel region defined between a source region and a drain region in the device substrate. The fluidic gate structure includes a sensing well that is disposed over the channel region. The sensing well includes a sensing layer and an electrolyte solution. The electrolyte solution includes a constituent that can react with a product of an enzymatic reaction that occurs when an enzyme-modified detection mechanism detects an analyte. The sensing layer can react with a first ion generated from the enzymatic reaction and a second ion generated from a reaction between the product of the enzymatic reaction and the constituent, such that the dual-gate ISFET generates an enhanced electrical signal.

公开(公告)号：US20170227533A1

公开(公告)日：2017-08-10

申请号：US15581673

申请日：2017-04-28

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Ching-Hui Lin ,  Chun-Ren Cheng ,  Shih-Fen Huang ,  Yi-Hsien Chang

IPC: G01N33/543 ,  C12Q1/00 ,  G01N27/414 ,  H01L29/78

CPC classification number: G01N33/5438 ,  C12Q1/006 ,  G01N27/414 ,  G01N27/4145 ,  G01N27/4148 ,  H01L29/66484 ,  H01L29/7831 ,  H01L29/7832 ,  H01L51/0093 ,  H01L51/0512

Abstract: Dual-gate ion-sensitive field effect transistors (ISFETs) for disease diagnostics are disclosed herein. An exemplary dual-gate ISFET includes a gate structure and a fluidic gate structure disposed over opposite surfaces of a device substrate. The gate structure is disposed over a channel region defined between a source region and a drain region in the device substrate. The fluidic gate structure includes a sensing well that is disposed over the channel region. The sensing well includes a sensing layer and an electrolyte solution. The electrolyte solution includes a constituent that can react with a product of an enzymatic reaction that occurs when an enzyme-modified detection mechanism detects an analyte. The sensing layer can react with a first ion generated from the enzymatic reaction and a second ion generated from a reaction between the product of the enzymatic reaction and the constituent, such that the dual-gate ISFET generates an enhanced electrical signal.

公开(公告)号：US09523642B2

公开(公告)日：2016-12-20

申请号：US13673602

申请日：2012-11-09

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor： Yi-Shao Liu ,  Fei-Lung Lai ,  Chun-Ren Cheng ,  Chun-Wen Cheng

IPC: G01N27/22 ,  G01N21/75 ,  G01N27/414 ,  B01L3/00 ,  B01L9/00 ,  G01N33/543 ,  G01N27/327

CPC classification number: G01N27/4145 ,  B01L3/502707 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/10 ,  B01L2200/143 ,  B01L2300/0645 ,  G01N21/75 ,  G01N27/3271 ,  G01N27/3275 ,  G01N33/5438 ,  Y10T29/49

Abstract: The present disclosure provides a biological field effect transistor (BioFET) device testing and processing methods, system and apparatus. A wafer-level bio-sensor processing tool includes a wafer stage, an integrated electro-microfluidic probe card, and a fluid supply and return. The integrated electro-microfluidic probe card includes a fluidic mount that may be transparent, a microfluidic channels in the fluidic mount, at least one microfluidic probe and a number of electronic probe tips at the bottom of the fluidic mount, fluidic and electronic input and output ports on the sides of the fluidic mount, and at least one handle lug on the fluidic mount. The method includes aligning a wafer, mounting the integrated electro-microfluidic probe card, flowing a test fluid, and measuring electrical properties. The tool may also be used for stamping or printing a fluid in the device area on the wafer.

Abstract translation: 本公开提供了一种生物场效应晶体管（BioFET）器件的测试和处理方法，系统和装置。 晶片级生物传感器处理工具包括晶片台，集成电微流体探针卡和流体供应和返回。 集成的电微流体探针卡包括可以是透明的流体安装件，流体安装件中的微流体通道，至少一个微流体探针和在流体安装底部的多个电子探针尖端，流体和电子输入和输出 流体支架侧面上的端口以及流体支架上的至少一个手柄凸耳。 该方法包括对准晶片，安装集成电微流体探针卡，流动测试流体以及测量电气特性。 该工具还可用于在晶片的装置区域中冲压或印刷流体。

公开(公告)号：US09493347B2

公开(公告)日：2016-11-15

申请号：US14508194

申请日：2014-10-07

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor： Yi-Hsien Chang ,  Chun-Ren Cheng ,  Yi-Shao Liu ,  Allen Timothy Chang ,  Ching-Ray Chen ,  Yeh-Tseng Li ,  Wen-Hsiang Lin

IPC: B23P15/00 ,  C03C25/00 ,  C23F1/00 ,  B44C1/22 ,  C03C25/68 ,  C25F3/00 ,  B81C1/00 ,  G01N27/447 ,  B82Y20/00

CPC classification number: B81C1/00349 ,  B81B2201/042 ,  B81C1/00111 ,  B81C1/00206 ,  B81C1/00214 ,  B82Y20/00 ,  G01N27/44791

Abstract: A method of forming a semiconductor device includes depositing a light reflecting layer over a substrate. The method also includes forming a protection layer over the light reflecting layer. The method further includes forming an anti-reflective coating (ARC) layer over the protection layer. The method additionally includes forming an opening in the ARC layer, the protection layer and the light reflecting layer exposing the substrate. The method also includes removing the ARC layer in a wet solution comprising H2O2, the ARC layer being exposed to the H2O2 at a flow rate greater than about 10 standard cubic centimeters per minute (sccm).

Abstract translation: 形成半导体器件的方法包括在衬底上沉积光反射层。 该方法还包括在光反射层上形成保护层。 该方法还包括在保护层上形成抗反射涂层（ARC）层。 该方法还包括在ARC层中形成开口，保护层和曝光衬底的光反射层。 该方法还包括在包含H 2 O 2的湿溶液中去除ARC层，ARC层以大于约10标准立方厘米每分钟（sccm）的流速暴露于H 2 O 2。

公开(公告)号：US09238581B2

公开(公告)日：2016-01-19

申请号：US13752051

申请日：2013-01-28

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Ting-Hau Wu ,  Chun-Ren Cheng ,  Shang-Ying Tsai ,  Jiou-Kang Lee ,  Jung-Huei Peng

IPC: B81C1/00 ,  G01P15/125 ,  G01P15/18

CPC classification number: B81C1/00134 ,  G01P15/125 ,  G01P15/18

Abstract: An integrated circuit structure includes a triple-axis accelerometer, which further includes a proof-mass formed of a semiconductor material; a first spring formed of the semiconductor material and connected to the proof-mass, wherein the first spring is configured to allow the proof-mass to move in a first direction in a plane; and a second spring formed of the semiconductor material and connected to the proof-mass. The second spring is configured to allow the proof-mass to move in a second direction in the plane and perpendicular to the first direction. The triple-axis accelerometer further includes a conductive capacitor plate including a portion directly over, and spaced apart from, the proof-mass, wherein the conductive capacitor plate and the proof-mass form a capacitor; an anchor electrode contacting a semiconductor region; and a transition region connecting the anchor electrode and the conductive capacitor plate, wherein the transition region is slanted.

公开(公告)号：US20150084099A1

公开(公告)日：2015-03-26

申请号：US14033089

申请日：2013-09-20

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Wei-Cheng Shen ,  Yi-Hsien Chang ,  Shih-Wei Lin ,  Chun-Ren Cheng

IPC: G01N27/414

CPC classification number: G01N27/4145 ,  G01N27/4148

Abstract: The present disclosure provides a biological field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET includes a microwells having a sensing layer, a top metal stack under the sensing layer, and a multi-layer interconnect (MLI) under the top metal stack. The top metal stack includes a top metal and a protective layer over and peripherally surrounding the top metal.

Abstract translation: 本公开提供了生物场效应晶体管（BioFET）和制造BioFET器件的方法。 该方法包括使用与互补金属氧化物半导体（CMOS）工艺兼容或典型的一个或多个工艺步骤形成BioFET。 BioFET包括具有感测层的微孔，感测层下的顶部金属堆叠，以及在顶部金属堆叠下的多层互连（MLI）。 顶部金属堆叠包括顶部金属和保护层，并且围绕顶部金属周围。

公开(公告)号：US20140273281A1

公开(公告)日：2014-09-18

申请号：US13801182

申请日：2013-03-13

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chia-Hua Chu ,  Allen Timothy Chang ,  Ching-Ray Chen ,  Yi-Hsien Chang ,  Yi-Shao Liu ,  Chun-Ren Cheng ,  Chun-Wen Cheng

IPC: G01N33/543

CPC classification number: G01N33/54386 ,  H01L21/00 ,  H01L2224/18

Abstract: The present disclosure provides biochips and methods of fabricating biochips. The method includes combining three portions: a transparent substrate, a first substrate with microfluidic channels therein, and a second substrate. Through-holes for inlet and outlet are formed in the transparent substrate or the second substrate. Various non-organic landings with support medium for bio-materials to attach are formed on the first substrate and the second substrate before they are combined. In other embodiments, the microfluidic channel is formed of an adhesion layer between a transparent substrate and a second substrate with landings on the substrates.

Abstract translation: 本公开提供了生物芯片和制造生物芯片的方法。 该方法包括组合三个部分：透明衬底，其中具有微流体通道的第一衬底和第二衬底。 用于入口和出口的通孔形成在透明基板或第二基板中。 在组合之前，在第一基板和第二基板上形成具有用于附着生物材料的支撑介质的各种非有机着陆。 在其他实施例中，微流体通道由透明基板和第二基板之间的粘合层形成，在基板上具有着陆。

公开(公告)号：US20140166484A1

公开(公告)日：2014-06-19

申请号：US13716709

申请日：2012-12-17

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD

Inventor： Yiu-Hsien Chang ,  Chun-Ren Cheng

IPC: G01N33/48

CPC classification number: G01N33/54366 ,  B01L3/502792 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0887 ,  B01L2300/161 ,  B01L2400/0427

Abstract: An integrated semiconductor device for manipulating and processing bio-entity samples is disclosed. The device includes a microfluidic channel that is coupled to fluidic control circuitry, a photosensor array coupled to sensor control circuitry, an optical component aligned with the photosensor array to manipulate a light signal before the light signal reaches the photosensor array, and a microfluidic grid coupled to the microfluidic channel and providing for transport of bio-entity sample droplets by electrowetting. The device further includes logic circuitry coupled to the fluidic control circuitry and the sensor control circuitry, with the fluidic control circuitry, the sensor control circuitry, and the logic circuitry being formed on a first substrate.

Abstract translation: 公开了一种用于操纵和处理生物实体样本的集成半导体器件。 该装置包括耦合到流体控制电路的微流体通道，耦合到传感器控制电路的光电传感器阵列，与光传感器阵列对准的光学部件以在光信号到达光电传感器阵列之前操纵光信号;以及耦合 涉及微流体通道并且通过电润湿提供生物实体样品液滴的输送。 该装置还包括耦合到流体控制电路和传感器控制电路的逻辑电路，流体控制电路，传感器控制电路和逻辑电路形成在第一基板上。