公开(公告)号：US07136219B2

公开(公告)日：2006-11-14

申请号：US11094720

申请日：2005-03-31

申请人： Takashi Shimizu ,  Shinya Inagaki ,  Tomoaki Takeyama ,  Keiko Sasaki

发明人： Takashi Shimizu ,  Shinya Inagaki ,  Tomoaki Takeyama ,  Keiko Sasaki

IPC分类号： H01S3/00

CPC分类号： H04B10/2941 ,  H01S3/0064 ,  H01S3/06708 ,  H01S3/0672 ,  H01S3/06729 ,  H01S3/06758 ,  H01S3/0677 ,  H01S3/094003 ,  H01S3/094023 ,  H01S3/0941 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/1608 ,  H01S2301/02

摘要： The present invention has an object to provide an optical amplifier capable of realizing a good response characteristic in a wide frequency band, even when a population inversion state is formed by a pumping light supplied to an optical amplification medium and an ASE light generated in the optical amplification medium. To this end, in the optical amplifier according to the present invention, a delayed phase matching fiber in which a first fiber whose response speed is relatively low is arranged on the input side and a second fiber whose response speed is relatively high is arranged on the output side, is used as the optical amplification medium doped with a rare-earth element.

摘要翻译： 本发明的目的是提供一种能够在宽频带中实现良好的响应特性的光放大器，即使当通过提供给光放大介质的泵浦光和在光学放大器中产生的ASE光形成群体反转状态时 扩增介质。 为此，在根据本发明的光放大器中，延迟相位匹配光纤，其中响应速度相对较低的第一光纤被布置在输入侧，并且响应速度相对较高的第二光纤被布置在 输出侧用作掺杂有稀土元素的光放大介质。

公开(公告)号：US07119947B2

公开(公告)日：2006-10-10

申请号：US10869428

申请日：2004-06-16

申请人： Sang-Ho Kim ,  Seong-Taek Hwang ,  Yun-Je Oh

发明人： Sang-Ho Kim ,  Seong-Taek Hwang ,  Yun-Je Oh

IPC分类号： H10S4/00

CPC分类号： H01S3/06754 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/0078 ,  H01S3/06766 ,  H01S3/0677 ,  H01S3/094023 ,  H01S3/0941 ,  H01S3/1608 ,  H01S3/1613 ,  H01S3/1616 ,  H04B10/506

摘要： A dual-port broadband light source is disclosed. In the dual-port broadband light source, a first beam splitter splits a first ASE at a first ratio into the second and third light paths and outputs the first ASE received from the second light path to the first light path. A second beam splitter splits a second ASE at a second ratio into the second and fourth light sources and outputs the second ASE received from the second light path to the first light path. A first reflector reflects input first and second ASEs in the first light path, and a second reflector reflects input first and second ASEs in the second light path. A first gain medium generates the first ASE between the first reflector and the first beam splitter, and a second gain medium generates the second ASE between the first reflector and the second beam splitter.

摘要翻译： 公开了一种双端口宽带光源。 在双端口宽带光源中，第一分束器以第一比率将第一ASE分离成第二和第三光路，并将从第二光路接收的第一ASE输出到第一光路。 第二分束器以第二比例将第二ASE分成第二和第四光源，并将从第二光路接收的第二ASE输出到第一光路。 第一反射器在第一光路中反射输入的第一和第二ASE，并且第二反射器在第二光路中反射输入的第一和第二ASE。 第一增益介质在第一反射器和第一分束器之间产生第一ASE，第二增益介质在第一反射器和第二分束器之间产生第二ASE。

公开(公告)号：US20060198399A1

公开(公告)日：2006-09-07

申请号：US10537900

申请日：2003-12-22

申请人： Mark Jablonski ,  Sze Set ,  Yuichi Tanaka

发明人： Mark Jablonski ,  Sze Set ,  Yuichi Tanaka

IPC分类号： H01S3/11 ,  H01S3/098

CPC分类号： H01S3/1118 ,  B82Y10/00 ,  B82Y20/00 ,  G02B5/08 ,  G02F1/3523 ,  H01S3/0064 ,  H01S3/0602 ,  H01S3/0632 ,  H01S3/067 ,  H01S3/06712 ,  H01S3/06791 ,  H01S3/08059 ,  H01S3/09415 ,  H01S3/1109 ,  H01S3/1121 ,  H01S3/113 ,  H01S3/1608

摘要： The present invention provides pulsed lasers which employ carbon nanotubes, particularly layers of carbon nanotubes, as saturable absorbers, mode lockers or for Q-switching elements. The present invention also provides methods and materials for mode-locking and Q-switching of lasers in which carbon nanotubes are employed as non-linear optical materials and/or saturable absorbers which facilitate mode-locking and/or Q-switching. The invention further provides mode locker and Q-switching elements or devices which comprise one or more layers containing carbon nanotubes which layer or layers function for mode locking and/or Q-switching.

摘要翻译： 本发明提供使用碳纳米管，特别是碳纳米管层作为可饱和吸收体，模式储存器或用于Q开关元件的脉冲激光器。 本发明还提供了用于模拟锁定和Q开关的方法和材料，其中使用碳纳米管作为促进锁模和/或Q开关的非线性光学材料和/或可饱和吸收体。 本发明还提供了模式锁定器和Q开关元件或器件，其包括一层或多层含有碳纳米管的层，所述层或层用于模式锁定和/或Q开关。

公开(公告)号：US20060158717A1

公开(公告)日：2006-07-20

申请号：US10538846

申请日：2002-12-19

申请人： Marco De Donno ,  Alain Repingon

发明人： Marco De Donno ,  Alain Repingon

IPC分类号： H01S3/00

CPC分类号： H01S3/06758 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/06766 ,  H01S3/0677 ,  H01S3/094096 ,  H01S3/09415 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/302 ,  H01S2301/04 ,  H04B10/2916 ,  H04B2210/003

摘要： A multiple stage Raman amplifier includes an interstage wavelength-selective pump combiner. Wavelength-selection characteristics are such that the pump combiner substantially blocks the passage of the pump signal of the first stage to the second stage and/or vice versa while allowing the passage of the transmission signal from the first stage to the second stage. The pump combiner substantially blocks different portions of the wavelength spectrum of the pump radiation which is fed into the pump combiner from different ports. The pump combiner preferably includes thin-film filters. The pump combiner has the multiple function of coupling the pump signal of the first (or second) pump source and of isolating from one another the pump signals of the two amplification stages. This allows the reduction of the number of passive components present in a multistage optical amplifier, which in turn leads to a decrease of the overall insertion loss in the amplifier and to shorter assembly processing.

摘要翻译： 多级拉曼放大器包括级间波长选择泵组合器。 波长选择特性使得泵组合器基本上阻止第一级的泵浦信号到第二级的传递，和/或反之亦然，同时允许传输信号从第一级通过到第二级。 泵组合器基本上阻挡从不同端口进入泵组合器的泵浦辐射的波长谱的不同部分。 泵组合器优选地包括薄膜过滤器。 泵组合器具有耦合第一（或第二）泵浦源的泵浦信号并且彼此隔离两个放大级的泵浦信号的多重功能。 这允许减少存在于多级光放大器中的无源部件的数量，这又导致放大器中的整体插入损耗的降低以及更短的组装处理。

公开(公告)号：US20060146397A1

公开(公告)日：2006-07-06

申请号：US11364157

申请日：2006-02-28

申请人： Shinichi Aozasa ,  Hiroji Masuda ,  Makoto Shimizu

发明人： Shinichi Aozasa ,  Hiroji Masuda ,  Makoto Shimizu

IPC分类号： H01S3/00

CPC分类号： H04B10/296 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/0078 ,  H01S3/06754 ,  H01S3/06758 ,  H01S3/094011 ,  H01S3/094023 ,  H01S3/10007 ,  H01S3/10023 ,  H01S3/1301 ,  H01S3/1302 ,  H01S3/131 ,  H01S3/1616 ,  H01S3/2383

摘要： An optical amplifier includes a rare-earth doped optical fiber or rare-earth doped optical waveguide serving as an amplification medium where rare-earth ions have been doped in its core and/or clad, an excitation mechanism for exciting the amplification medium, and a plurality of optical resonator that causes laser oscillation at a plurality of wavelengths of amplified spontaneous emission light produced in the amplification medium.

摘要翻译： 光放大器包括稀土掺杂光纤或稀土掺杂光波导，其用作在其核和/或包层中掺杂稀土离子的放大介质，用于激发放大介质的激发机制，以及 多个光谐振器，其在放大介质中产生的放大的自发发射光的多个波长处引起激光振荡。

公开(公告)号：US20060132903A1

公开(公告)日：2006-06-22

申请号：US11015671

申请日：2004-12-20

申请人： Sami Shakir ,  Sami Hendow ,  William Culver ,  Burke Nelson

发明人： Sami Shakir ,  Sami Hendow ,  William Culver ,  Burke Nelson

IPC分类号： H01S3/00

CPC分类号： H01S3/2383 ,  G02B6/2817 ,  G02B27/108 ,  G02B27/144 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/06754 ,  H01S3/06758 ,  H01S3/10092 ,  H01S3/1302 ,  H01S3/1307

摘要： A method passively locks and phases an array of fiber amplifiers in a fiber amplifier system that emits a beam, such as a laser beam. The method locks the fiber amplifiers so that the fiber amplifiers operate at same or similar frequencies. The method samples a small portion of the emitted beam in a far-field around a central lobe on an optical axis and then couples this portion of emitted beam back into the array of fiber amplifiers. The fiber amplifiers may be phased so that the emitted beam concentrates its energy around the central lobe in the far-field. Phasing may be achieved by using an aperture, for example, to restrict the portion of the emitted beam to be coupled back to a restricted region around the optical axis.

摘要翻译： 一种方法，被动地锁定和相位发射光束（例如激光束）的光纤放大器系统中的光纤放大器阵列。 该方法锁定光纤放大器，使得光纤放大器以相同或相似的频率工作。 该方法在光轴上的中心波瓣周围的远场中采样一小部分发射光束，然后将发射光束的这一部分耦合回光纤放大器阵列。 光纤放大器可以被定相，使得发射的光束将其能量集中在远场中的中央波瓣周围。 相位可以通过使用孔径来实现，例如，将发射的光束的部分限制为耦合回到围绕光轴的受限区域。

公开(公告)号：US20060126676A1

公开(公告)日：2006-06-15

申请号：US10521088

申请日：2003-07-10

申请人： Guenter Hollemann ,  Martin Leitner ,  Jan Symanowski

发明人： Guenter Hollemann ,  Martin Leitner ,  Jan Symanowski

IPC分类号： H01S3/13

CPC分类号： H01S3/0941 ,  H01S3/0064 ,  H01S3/0606 ,  H01S3/0615 ,  H01S3/08072 ,  H01S3/0815 ,  H01S3/09415 ,  H01S3/10007 ,  H01S3/1022 ,  H01S3/117 ,  H01S3/1611 ,  H01S3/1673 ,  H01S3/2316

摘要： The object of a pulsed laser arrangement and a method for adjusting the pulse length of laser pulses is to change the pulse length over a wide range substantially independent from the laser output power, in particular to counteract a reduction in output and to prevent a negative change in the beam parameters when lengthening the pulse by means of varying the oscillator output. A multistage laser amplifier in which an amplifying medium with a small-signal amplification of more than 10 is provided in every stage (17-22) is arranged downstream of a diode-pumped Q-switched solid state laser oscillator with variable oscillator output for supplying oscillator pulses. The total small-signal amplification brought about by all of the amplifying media is greater than 1000. The pulsed laser arrangement and the method can be used for industrial and medical purposes requiring pulse lengths in the range of several hundred ns to several μs at pulse repetition rates between 10 kHz and 200 kHz.

摘要翻译： 脉冲激光装置的目的和用于调节激光脉冲的脉冲长度的方法是在与激光输出功率基本无关的宽范围内改变脉冲长度，特别是为了抵消输出的减小并防止负变化 在通过改变振荡器输出来延长脉冲时的光束参数。 在每个阶段（17-22）中提供具有大于10的小信号放大的放大介质的多级激光放大器布置在具有可变振荡器输出的二极管泵浦Q开关固态激光振荡器的下游，用于供应 振荡器脉冲。 由所有放大介质引起的总小信号放大大于1000.脉冲激光装置和方法可用于工业和医疗用途，需要在脉冲重复的几百ns至几mus范围内的脉冲长度 速率在10 kHz到200 kHz之间。

公开(公告)号：US20060126164A1

公开(公告)日：2006-06-15

申请号：US11135286

申请日：2005-05-24

申请人： Joon Tae Ahn ,  Hong Seok Seo ,  Woon Jin Chung ,  Bong Je Park

发明人： Joon Tae Ahn ,  Hong Seok Seo ,  Woon Jin Chung ,  Bong Je Park

IPC分类号： H01S3/00

CPC分类号： H01S3/06758 ,  H01S3/0064 ,  H01S3/10015

摘要： Provided is a gain-clamped fiber amplifier for amplifying the magnitude of an input optical signal in an optical communication system. The gain-clamped fiber amplifier includes a first amplifier for amplifying a predetermined optical signal and a second amplifier for compensating for a noise figure characteristic of the first amplifier and for separating remaining pumping light whose intensity changes in accordance with an optical signal. Therefore, it is possible to improve the noise figure and dynamic range characteristics and the performance of the amplifier.

摘要翻译： 提供了一种用于在光通信系统中放大输入光信号的幅度的增益钳位光纤放大器。 增益钳位光纤放大器包括用于放大预定光信号的第一放大器和用于补偿第一放大器的噪声系数特性的第二放大器，以及用于根据光信号分离其强度变化的剩余泵浦光。 因此，可以提高噪声系数和动态范围特性以及放大器的性能。

公开(公告)号：US20060120418A1

公开(公告)日：2006-06-08

申请号：US11005218

申请日：2004-12-07

申请人： Donald Harter ,  Gyu Cho ,  Zhenlin Liu ,  Martin Fermann ,  Xinhua Gu ,  Salvatore Nati ,  Lawrence Shah ,  Ingmar Hartl ,  Mark Bendett

发明人： Donald Harter ,  Gyu Cho ,  Zhenlin Liu ,  Martin Fermann ,  Xinhua Gu ,  Salvatore Nati ,  Lawrence Shah ,  Ingmar Hartl ,  Mark Bendett

IPC分类号： H01S3/13

CPC分类号： H01S3/1106 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0064 ,  H01S3/0085 ,  H01S3/0092 ,  H01S3/06712 ,  H01S3/06725 ,  H01S3/0675 ,  H01S3/06754 ,  H01S3/06758 ,  H01S3/094003 ,  H01S3/094019 ,  H01S3/094042 ,  H01S3/094076 ,  H01S3/09415 ,  H01S3/1086 ,  H01S3/109 ,  H01S3/11 ,  H01S3/1118 ,  H01S3/1305 ,  H01S3/1611 ,  H01S3/1618 ,  H01S3/1643 ,  H01S3/235

摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.

公开(公告)号：US20060098269A1

公开(公告)日：2006-05-11

申请号：US11313686

申请日：2005-12-22

申请人： Tomoko Ohtsuki ,  Soichi Owa

发明人： Tomoko Ohtsuki ,  Soichi Owa

IPC分类号： G02F1/35

CPC分类号： H01S3/067 ,  G02B6/14 ,  G02B6/32 ,  G02F1/1303 ,  G02F1/35 ,  G02F1/3501 ,  G02F1/353 ,  G02F1/37 ,  G02F2001/3503 ,  G02F2001/354 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0064 ,  H01S3/0078 ,  H01S3/0085 ,  H01S3/06716 ,  H01S3/06729 ,  H01S3/06745 ,  H01S3/06758 ,  H01S3/06766 ,  H01S3/094011 ,  H01S3/09415 ,  H01S3/1608 ,  H01S3/23 ,  H01S3/2383

摘要： An ultraviolet laser apparatus according to the present invention comprises a laser generating portion having a single-wavelength oscillating laser for generating laser light having a single wavelength falling within a wavelength range from an infrared band to a visible band, an optical amplifier having a fiber optical amplifier for amplifying the laser light generated by the laser generating portion, and a wavelength converting portion for wavelength-converting the amplified laser light into ultraviolet light by using a non-linear optical crystal, whereby ultraviolet light having a single wavelength is generated. Further, an exposure apparatus according to the present invention serves to transfer a pattern image of a mask onto a substrate and comprises a light source including a laser apparatus for emitting a laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively: and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.

摘要翻译： 根据本发明的紫外线激光装置包括具有单波长振荡激光器的激光发生部分，用于产生具有从红外波段到可见波段的波长范围内的单一波长的激光，具有光纤的光放大器 放大器，用于放大由激光产生部分产生的激光;以及波长转换部分，用于通过使用非线性光学晶体将放大的激光波长转换为紫外光，由此产生具有单一波长的紫外光。 此外，根据本发明的曝光装置用于将掩模的图案图像转印到基板上，并且包括包括用于发射具有单一波长的激光的激光装置的光源，用于放大激光的第一光纤放大器 光，用于将放大的激光分割或分支成多个光的分光装置，以及用于分别放大多个分支或分支的光的第二光纤放大器和用于将从光源发射的激光传输到 曝光装置。