Plasma processing apparatus and method of plasma processing
    102.
    发明申请
    Plasma processing apparatus and method of plasma processing 审中-公开
    等离子体处理装置和等离子体处理方法

    公开(公告)号:US20050189068A1

    公开(公告)日:2005-09-01

    申请号:US11057164

    申请日:2005-02-15

    IPC分类号: H01L21/00 C23F1/00

    CPC分类号: H01L21/67069 H01J37/32642

    摘要: Plasma processing apparatus and plasma processing methods capable of maintaining acceptable etching characteristics and to prevent degradation of a lower electrode even when the focus ring is severely eroded by the plasma, while leaving the plasma discharge conditions used in the conventional apparatus and methods substantially unchanged, are disclosed. According to an exemplary embodiment, a side-surface protecting ring formed of a ceramic material is provided to cover the side surface of the lower electrode such that an outer perimeter of the side-surface protecting ring is approximately aligned with, or inside, an outer perimeter of the substrate to be processed. As a result, the side-surface protecting ring does not influence the plasma characteristic.

    摘要翻译: 等离子体处理装置和等离子体处理方法能够保持可接受的蚀刻特性,并且即使当聚焦环被等离子体严重侵蚀时也能防止下电极的劣化,同时留下常规装置和方法中使用的等离子体放电条件基本上不变。 披露 根据示例性实施例,提供由陶瓷材料形成的侧表面保护环以覆盖下电极的侧表面,使得侧表面保护环的外周与外侧的大致对准或内侧 待加工基材的周长。 结果,侧面保护环不影响等离子体特性。

    Optical component using optical transmission element joining metal holder
    104.
    发明申请
    Optical component using optical transmission element joining metal holder 有权
    使用光传输元件接合金属支架的光学部件

    公开(公告)号:US20050099703A1

    公开(公告)日:2005-05-12

    申请号:US10941940

    申请日:2004-09-16

    IPC分类号: G02B7/00 G02B7/02 G02B6/44

    CPC分类号: G02B7/025 G02B7/008 G02B7/028

    摘要: An optical component comprises an optical transmission element (e.g., an optical lens) whose circumferential wall partially joins a metal holder via a joining material (e.g., a low melting point glass), wherein stress is normally applied to the optical transmission element in a compression direction when joining the metal holder. The optical transmission element is inserted into a through hole of the metal holder, and the joining material is kept in a bank actualized by a tapered portion formed in proximity to one end of the through hole of the metal holder. This prevents tensile stress from being applied to the optical transmission element; thus, it is possible to avoid the occurrence of cracks and separations in the optical transmission element; and it is possible to avoid the occurrence of errors in optical characteristics, regardless of variations of the environmental temperature, so that, the optical component is improved in reliability.

    摘要翻译: 光学部件包括光学传输元件(例如,光学透镜),其周壁通过接合材料(例如,低熔点玻璃)部分地连接金属保持器,其中应力通常以压缩方式施加到光传输元件 连接金属支架时的方向。 光传输元件插入到金属保持器的通孔中,并且接合材料保持在由金属保持器的通孔的一端附近形成的锥形部分实现的堤岸中。 这防止了拉伸应力施加到光传输元件上; 因此,可以避免在光传输元件中出现裂纹和分离; 并且不管环境温度的变化如何,可以避免出现光学特性的误差,从而提高了光学部件的可靠性。

    Method for purifying a thermoplastic norbornene resin, a substrate using such a resin, and a magnetic recording medium using such a substrate
    105.
    发明授权
    Method for purifying a thermoplastic norbornene resin, a substrate using such a resin, and a magnetic recording medium using such a substrate 有权
    使用这种树脂的热塑性降冰片烯树脂的纯化方法,使用这种树脂的磁记录介质

    公开(公告)号:US06794488B2

    公开(公告)日:2004-09-21

    申请号:US09828705

    申请日:2001-04-06

    IPC分类号: C08F600

    摘要: A thermoplastic norbornene resin is purified by using a cleaning liquid to eliminate organic impurities, ionic impurities, metallic impurities, and particles of the resin. The cleaning liquid is selected from 2-propanol and a mixed solvent of 2-propanol and water. A substrate for a magnetic recording medium of the invention is fabricated by injection-molding the thermoplastic norbornene resin purified by this method. A magnetic recording medium of the invention includes such a substrate, and a magnetic layer, a protective layer, and a liquid lubricant layer sequentially formed on the substrate. A method for manufacturing such a magnetic recording medium is also provided.

    摘要翻译: 通过使用清洗液来净化热塑性降冰片烯树脂以除去有机杂质,离子杂质,金属杂质和树脂颗粒。 清洗液选自2-丙醇和2-丙醇与水的混合溶剂。 本发明的磁记录介质用基板是通过注射成型用该方法纯化的热塑性降冰片烯树脂来制造的。 本发明的磁记录介质包括这样的基板,并且在基板上依次形成有磁性层,保护层和液体润滑剂层。 还提供了一种制造这种磁记录介质的方法。

    Method of drying thermoplastic norbornene resin and method of manufacturing magnetic recording medium
    108.
    发明授权
    Method of drying thermoplastic norbornene resin and method of manufacturing magnetic recording medium 失效
    干燥热塑性降冰片烯树脂的方法和制造磁记录介质的方法

    公开(公告)号:US06722057B2

    公开(公告)日:2004-04-20

    申请号:US09912449

    申请日:2001-07-25

    IPC分类号: F26B504

    摘要: The gas components in thermoplastic norbornene resin pellets are suppressed below certain levels by drying the resin under vacuum or under the ordinary pressure and under vacuum. A substrate for magnetic recording media is manufactured by injection-molding the resin dried by the method according to the invention. The magnetic recording medium, employing the substrate manufactured according to the invention, includes at least a magnetic layer, a protection layer on the magnetic layer and a liquid lubricant layer on the protection layer. The magnetic recording medium is manufactured by forming these layers, one after another, on the substrate according to the invention.

    摘要翻译: 热塑性降冰片烯树脂颗粒中的气体组分通过在真空或在常压和真空下干燥树脂而被抑制在某些水平以下。 通过注射成型树脂,通过根据本发明的方法干燥的树脂来制造用于磁记录介质的基材。 使用根据本发明制造的基板的磁记录介质至少包括磁性层,磁性层上的保护层和保护层上的液体润滑剂层。 通过在本发明的基板上依次形成这些层来制造磁记录介质。