APPARATUS AND METHOD FOR FLUORESCENCE MEASUREMENTS USING SPATIALLY STRUCTURED ILLUMINATION
    101.
    发明申请
    APPARATUS AND METHOD FOR FLUORESCENCE MEASUREMENTS USING SPATIALLY STRUCTURED ILLUMINATION 有权
    使用空间结构照明进行荧光测量的装置和方法

    公开(公告)号:US20100038559A1

    公开(公告)日:2010-02-18

    申请号:US12556662

    申请日:2009-09-10

    Abstract: An apparatus is disclosed for depth selected fluorescence measurements of a sample. The apparatus may include a carrier for at least one sample substance, the carrier having at least one transparent, planar bottom wall having an upper surface; projection optics having a first optical axis, to expose the at least one sample substance through the bottom wall to a spatially structured pattern of excitation radiation, the projection optics including a first object plane and an image plane that are subject to a Scheimpflug condition, the image plane being substantially coplanar with the upper surface of the bottom wall of the carrier; an image capture module having a second optical axis, a second object plane substantially coplanar with the image plane, and a detection beam path, to receive a data image from the sample; a signal processor to transform the data image to provide depth selected fluorescence measurement for the at least one sample substance; and an arrangement whereby the first optical axis is inclined relative to the second optical axis so that the projection optics has an angle of inclination relative to the image plane, the angle of inclination being selected such that a component of excitation radiation incident upon, but not absorbed by, the at least one sample substance is scattered or reflected to substantially reduce excitation radiation from reaching the detection beam path. A corresponding method is disclosed.

    Abstract translation: 公开了用于样品的深度选择的荧光测量的装置。 该装置可以包括用于至少一个样品物质的载体,载体具有至少一个具有上表面的透明平面底壁; 具有第一光轴的投影光学元件,以将至少一个样本物质通过底壁曝光到空间结构化的激发辐射图案,投影光学元件包括经受Scheimpflug条件的第一物体平面和图像平面, 图像平面与载体的底壁的上表面基本共面; 具有第二光轴的图像捕获模块,与所述图像平面基本上共面的第二物体面和检测光束路径,用于从所述样本接收数据图像; 信号处理器,用于变换所述数据图像以提供所述至少一个样品物质的深度选择的荧光测量; 以及第一光轴相对于第二光轴倾斜的布置,使得投影光学元件相对于像平面具有倾斜角,倾斜角被选择为使得激发辐射的分量入射到但不是 所吸收的是,所述至少一个样品物质被散射或反射,从而基本上减少了到达检测光束路径的激发辐射。 公开了相应的方法。

    Optical inspection of test surfaces
    102.
    发明授权
    Optical inspection of test surfaces 有权
    测试表面的光学检查

    公开(公告)号:US07649628B2

    公开(公告)日:2010-01-19

    申请号:US11576470

    申请日:2005-10-05

    Applicant: Sipke Wadman

    Inventor: Sipke Wadman

    Abstract: In one aspect, the amount of data needed to store image intensity data obtained from a scatterometer (100) such as a Parousiameter is reduced by varying a resolution with which the intensity data is used in different regions of a grid according to determined variations in the intensity. In another aspect, a scatterometer is provided with an aspherical mirror (170, 900, 1000) for imaging a test sample (180) to correct for distortions introduced by the off center placement of the mirror relative to the test sample. In another aspect, an optical surface inspection apparatus uses an auxiliary lens (1440) between a test surface (1420) and an illuminated patterned grid (1410) to project the patterned grid (1610) on the test surface. A camera (1450) is focused on the grid on the test surface as a real image.

    Abstract translation: 在一个方面,存储从诸如Parousiameter之类的散射仪(100)获得的图像强度数据所需的数据量减少,通过改变在网格的不同区域中使用强度数据的分辨率 强度。 在另一方面,散射仪设置有非球面镜(170,900,1000),用于对测试样品(180)进行成像,以校正由反射镜相对于测试样品的离心放置引入的失真。 在另一方面,光学表面检查设备使用测试表面(1420)和照明图案格栅(1410)之间的辅助透镜(1440)将图案化网格(1610)投影在测试表面上。 相机(1450)作为真实图像聚焦在测试表面上的网格上。

    APPARATUS AND METHOD FOR FLUORESCENCE IMAGING AND TOMOGRAPHY USING SPATIALLY STRUCTURED ILLUMINATION
    103.
    发明申请
    APPARATUS AND METHOD FOR FLUORESCENCE IMAGING AND TOMOGRAPHY USING SPATIALLY STRUCTURED ILLUMINATION 有权
    使用空间结构照明进行荧光成像和造影的装置和方法

    公开(公告)号:US20090250631A1

    公开(公告)日:2009-10-08

    申请号:US12411432

    申请日:2009-03-26

    Abstract: An imaging system is disclosed for imaging an object. More specifically, an improvement is disclosed in an imaging system enabling depth sectioned fluorescence imaging in a turbid medium, such as human or animal tissue, in such a manner as to substantially minimize the excitation radiation from reaching the detection beam path. The imaging system includes an arrangement of the excitation radiation source such that the optical axis of the source is inclined relative to the optical axis of the camera, the optical plane of the source and the optical plane of the object are subject to a Scheimpflug condition provided by projection optics, and the angle of inclination of the source is selected such that the excitation radiation incident upon the object is reflected in such a way that substantially minimizes excitation radiation from reaching the detection beam path.

    Abstract translation: 公开了一种用于成像对象的成像系统。 更具体地,在使得能够在诸如人或动物组织的混浊介质中进行深度分割荧光成像的成像系统中公开了一种改进,使得基本上最小化到达检测光束路径的激发辐射。 成像系统包括激发辐射源的布置,使得源的光轴相对于照相机的光轴倾斜,源的光学平面和物体的光学平面经受提供的Scheimpflug条件 通过投影光学器件,并且选择源的倾斜角,使得入射到物体上的激发辐射以使得激发辐射达到检测光束路径基本上最小化的方式被反射。

    Spatial light modulator apparatus and method
    104.
    发明授权
    Spatial light modulator apparatus and method 失效
    空间光调制装置及方法

    公开(公告)号:US07532323B2

    公开(公告)日:2009-05-12

    申请号:US10577597

    申请日:2004-10-28

    CPC classification number: G01N21/6458 G01N2201/0635

    Abstract: A device for discriminately illuminating a sample (22) to be viewed with excitation light (70). For example, an image taken with a CCD (10) provides feedback which is used to modulate the output of an excitation light source (40), thereby allowing a sample (22) to be viewed within the optimal range of detection for the particular CCD device (10) being used, despite the potential of wide dynamic ranges of sample luminescence.

    Abstract translation: 一种用于用激发光(70)来区分地照亮待观察的样品(22)的装置。 例如,用CCD(10)拍摄的图像提供用于调制激发光源(40)的输出的反馈,从而允许在针对特定CCD的最佳检测范围内观察样品(22) 使用器件(10),尽管具有宽的动态范围的样品发光的潜力。

    Tray flipper and method for parts inspection
    106.
    发明授权
    Tray flipper and method for parts inspection 失效
    托盘和零件检查方法

    公开(公告)号:US07353954B1

    公开(公告)日:2008-04-08

    申请号:US09350251

    申请日:1999-07-08

    Abstract: Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

    Abstract translation: 生产线包括用于监测生产零件质量的检测系统。 用于制造半导体器件的制造线通常检查每个制造的部件。 获得的信息用于解决半导体晶圆厂的制造问题。 用于检查装置的机器视觉系统包括翻转机构。 在第一站检查后,托盘传送装置将托盘从第一检查站移动到翻动机构。 导板机构包括两个钳口,一个动子和一个旋转器。 导板机构将装置转过来并将装置放置在第二托盘中,使得可以检查装置的另一个表面。 第二托盘传送装置将第二托盘从托板移动到第二检查台。 导板机构的移动器从第一检查表面移除托盘,并将托盘放置在第二检查表面。

    Device and Method for Acquiring Information on Objective Substance to Be Detected By Detecting a Change of Wavelength Characteristics on the Optical Transmittance
    107.
    发明申请
    Device and Method for Acquiring Information on Objective Substance to Be Detected By Detecting a Change of Wavelength Characteristics on the Optical Transmittance 失效
    通过检测光学透射率波长特性变化来获得要检测的物质信息的装置和方法

    公开(公告)号:US20070285666A1

    公开(公告)日:2007-12-13

    申请号:US11659717

    申请日:2005-09-14

    Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

    Abstract translation: 一种信息获取装置,用于获取关于待检测的物质的信息,该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件,并且使得施加的光响应于该检测元件的波长特性而改变其 要检测的目标物质的固定状态,光源和用于接收通过感测元件从光源发射的光的光接收装置,其中光接收装置和光源布置在同一基板上 使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置,并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

    Methods and apparatus for inspecting an object
    109.
    发明申请
    Methods and apparatus for inspecting an object 审中-公开
    用于检查物体的方法和装置

    公开(公告)号:US20070090310A1

    公开(公告)日:2007-04-26

    申请号:US11259343

    申请日:2005-10-24

    Abstract: A method for inspecting an object using a structured light measurement system that includes a light source and an imaging sensor includes illuminating each of a plurality of different areas of the object with different wavelengths of light using the light source, filtering light reflected from the object into a first wavelength of the different wavelengths, and receiving the first wavelength of light reflected from the object with the imaging sensor.

    Abstract translation: 使用包括光源和成像传感器的结构化光测量系统来检查物体的方法包括使用光源照射具有不同波长的光的物体的多个不同区域中的每一个,将从物体反射的光过滤成 不同波长的第一波长,并且利用成像传感器接收从物体反射的第一波长的光。

    Coordinated polarization for shiny surface measurement
    110.
    发明授权
    Coordinated polarization for shiny surface measurement 有权
    用于光泽表面测量的协调极化

    公开(公告)号:US07092094B2

    公开(公告)日:2006-08-15

    申请号:US10673598

    申请日:2003-09-29

    CPC classification number: G01B11/25 G01N21/21 G01N2201/0635

    Abstract: The present disclosure provides for an optical metrology system for scanning an object (106) having a shiny surface. The optical metrology system includes at least one light source (102) configured and adapted to emit a structured light pattern (L) against the surface of the object, at least one first polarizer (108) disposed between the light source and the object such that the light pattern passes therethrough, the first polarizer being configured and adapted to vary at least one of the plane of polarization and the polarization angle of the light pattern, at least one camera (124a–124c) configured and adapted to take images of the object, and at least one second polarizer disposed between the camera and the object, the second polarizer having a fixed orientation.

    Abstract translation: 本公开提供了一种用于扫描具有光泽表面的物体(106)的光学测量系统。 光学测量系统包括至少一个光源(102),其配置并适于发射抵靠物体表面的结构化光图案(L),设置在光源和物体之间的至少一个第一偏振器(108),使得 所述光图案通过其中,所述第一偏振器被配置和适于改变所述光图案的偏振平面和偏振角中的至少一个,至少一个相机(124a -124c)被配置并适于拍摄 物体以及设置在相机和物体之间的至少一个第二偏振器,第二偏振器具有固定的取向。

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