公开(公告)号：US20170261859A1

公开(公告)日：2017-09-14

申请号：US15602206

申请日：2017-05-23

申请人： Carl Zeiss SMT GmbH

发明人： Markus Hauf ,  Alexander Vogler

IPC分类号： G03F7/20 ,  G02B26/08 ,  G02B7/18 ,  G02B7/182

CPC分类号： G03F7/702 ,  G02B7/181 ,  G02B7/182 ,  G02B7/1828 ,  G02B26/0816 ,  G02B26/0833 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70825

摘要： The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness.

公开(公告)号：US09746148B2

公开(公告)日：2017-08-29

申请号：US14786943

申请日：2014-04-24

申请人： THE UNIVERSITY OF BRITISH COLUMBIA

发明人： Lorne Whitehead ,  Allen James Upward ,  Peter George Friedel ,  Jon David Edward Scott

IPC分类号： F21S11/00 ,  E06B9/24 ,  F21V14/04 ,  F21V7/00 ,  F21V7/05 ,  E04D13/03 ,  E04D13/035 ,  G02B17/00 ,  G02B19/00 ,  G02B26/08

CPC分类号： F21S11/002 ,  E04D13/033 ,  E04D13/0354 ,  E04D2013/034 ,  E06B9/24 ,  E06B2009/2417 ,  F21V7/0033 ,  F21V7/05 ,  F21V14/04 ,  G02B17/002 ,  G02B17/006 ,  G02B19/0019 ,  G02B19/0042 ,  G02B26/0816

摘要： A sunlight redirector has a first mirror array formed of a first plurality of substantially parallel, uniformly spaced, longitudinal outward mirror segments; and a second mirror array formed of a second plurality of substantially parallel, uniformly spaced, longitudinal inward mirror segments. Each mirror segment has a normal vector. The outward mirror segments are adjustably positionable, such that their normal vectors remain parallel. The first mirror array is rotatable about a normal vector of the sunlight redirector. The inward mirror segments may remain fixed in position at all times; or they may be moved, twice per day, between first and second fixed positions.

公开(公告)号：US20170242243A1

公开(公告)日：2017-08-24

申请号：US15050359

申请日：2016-02-22

申请人： Raytheon Company

发明人： Andrew L. Bullard

IPC分类号： G02B26/08 ,  H02K41/035

CPC分类号： G02B26/0816 ,  B64G1/22 ,  G02B7/1827 ,  G02B27/644 ,  H02K41/0354

摘要： A reaction compensated steerable platform device is disclosed. The reaction compensated steerable platform device can include a base, a steerable platform movably coupled to the base, and a reaction mass movably coupled to the base. The reaction compensated steerable platform device can also include a primary actuator coupled to the steerable platform and the base to cause movement of the steerable platform. The reaction compensated steerable platform device can further include a secondary actuator coupled to the reaction mass and the base to cause movement of the reaction mass. In addition, the reaction compensated steerable platform device can also include a load sensor configured to provide feedback for actuation of the secondary actuator, such that the reaction mass moves to compensate for a load induced on a support structure by the movement of the steerable platform.

公开(公告)号：US20170242242A1

公开(公告)日：2017-08-24

申请号：US15050346

申请日：2016-02-22

申请人： Raytheon Company

发明人： Andrew L. Bullard

IPC分类号： G02B26/08 ,  H02K41/035

CPC分类号： G02B26/0816 ,  B64G1/22 ,  G02B7/1827 ,  G02B27/644 ,  G05D1/0883 ,  H02K41/0354

摘要： A reaction compensated steerable platform device is disclosed. The reaction compensated steerable platform device can include a base, a steerable platform movably coupled to the base, and a reaction mass movably coupled to the base. The reaction compensated steerable platform device can also include a primary actuator to cause movement of the steerable platform, and a trim actuator coupled to the reaction mass and the base. In addition, the reaction compensated steerable platform device can include a sensor configured to provide feedback for actuation of the trim actuator. The reaction mass can be configured to move by actuation independent of the trim actuator to compensate for a first portion of a load induced by the movement of the steerable platform. Actuation of the trim actuator can be controlled by the sensor, such that the reaction mass moves to compensate for a second portion of the load induced by the movement of the steerable platform.

公开(公告)号：US09729038B2

公开(公告)日：2017-08-08

申请号：US14908173

申请日：2013-12-12

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Sadaharu Takimoto ,  Masakuni Kimoto ,  Norihide Adachi

IPC分类号： G02B26/08 ,  H02K33/18 ,  B81B3/00

CPC分类号： G02B26/085 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  G02B26/0816 ,  G02B26/0858 ,  G02B26/101 ,  H02K33/18

摘要： A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

公开(公告)号：US20170223286A1

公开(公告)日：2017-08-03

申请号：US15428108

申请日：2017-02-08

申请人： LIGHT LABS INC.

发明人： Rajiv Laroia ,  Sapna A Shroff

IPC分类号： H04N5/353 ,  G02B27/09 ,  G02B26/08 ,  F21V14/04 ,  H04N5/235 ,  H04N5/225

CPC分类号： H04N5/3532 ,  F21V5/04 ,  F21V7/04 ,  F21V14/04 ,  F21V23/0442 ,  F21Y2101/00 ,  F21Y2115/10 ,  G02B26/0816 ,  G02B27/0955 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/2258 ,  H04N5/23212 ,  H04N5/23258 ,  H04N5/23296 ,  H04N5/2352 ,  H04N5/238

摘要： Illumination methods and apparatus which are well suited for use with camera devices are described. The methods are well suited for use with a rolling shutter. In some embodiments, plurality of lighting elements are provided and controlled in a manner which is synchronized with operation of the rolling shutter. While the portion of an area which is being captured by the sensor is illuminated during the image capture process, lighting elements corresponding to portions of the area which are not being captured are not activated when the corresponding area portion is not being captured. In this manner the entire area is not illuminated at the same level for the entire image capture period and energy is used more efficiently as compared to devices which illuminate a complete area at a consistent illumination level for the full duration of an image capture time period in which a rolling shutter is used.

公开(公告)号：US20170219810A1

公开(公告)日：2017-08-03

申请号：US15328064

申请日：2015-07-24

申请人： Leica Microsystems CMS GmbH

发明人： Michael Ganser

IPC分类号： G02B21/06 ,  G02B21/16 ,  F21V8/00 ,  G02B26/08 ,  G02B27/14

CPC分类号： G02B21/06 ,  G02B6/0005 ,  G02B21/16 ,  G02B26/0816 ,  G02B27/14

摘要： A method for optically examining or manipulating a microscopic sample includes positioning the sample in front of a lens which is arranged both in an observation beam path and in an illumination beam path of a microscope which has a main beam splitter which separates the paths. An illumination device is selected depending on the type of sample or examination, or a manipulation of the sample to be carried out. The selected illumination device is coupled in a predefined desired position to a mechanical coupling interface of the microscope. An illumination light from the selected illumination device is directed along the illumination beam path to the main beam splitter and from there to the lens and through the lens onto the sample. No optical component for imaging, focusing and/or defocusing is arranged on a light path of the illumination light between the optical apparatus and the lens.

公开(公告)号：US09706632B2

公开(公告)日：2017-07-11

申请号：US14885267

申请日：2015-10-16

申请人： Semiconductor Manufacturing International (Shanghai) Corporation

发明人： Qiang Wu ,  Liwan Yue ,  Emily Yixie Shu

IPC分类号： H05G2/00 ,  G21K1/06 ,  G02B26/08 ,  H05G1/30 ,  G21K1/04 ,  G03F7/20

CPC分类号： H05G2/008 ,  G02B26/0816 ,  G03F7/70033 ,  G21K1/04 ,  G21K1/067 ,  H05G1/30 ,  H05G2/005 ,  H05G2/006

摘要： An extreme ultraviolet (EUV) light source is provided. The EUV light source comprises a spray nozzle array having a plurality of spray nozzles configured to spray a plurality of rows of droplets to an irradiating position; a laser source configured to generate a first laser beam and a second laser beam and cause the first laser beam and the second laser beam to alternately bombard the rows of droplets to generate EUV light with increased output power; a focusing mirror having at least two first sub-focusing mirrors and at least two second sub-focusing mirrors; and a first driving device having at least two first sub-driving device and at least two second sub-driving device, each of first driving devices driving one of the first sub-focusing mirrors and each of the second sub-driving devices driving one of the second sub-focusing mirrors.

公开(公告)号：US20170189228A1

公开(公告)日：2017-07-06

申请号：US15313169

申请日：2015-07-14

申请人： University of Rochester

发明人： Qiang Yang ,  Jie Zhang

IPC分类号： A61F9/008 ,  A61B3/113 ,  G02B27/10 ,  G02B26/08 ,  G02B26/10 ,  G02B27/00 ,  A61B3/10 ,  A61B3/13

CPC分类号： A61F9/008 ,  A61B3/1015 ,  A61B3/102 ,  A61B3/113 ,  A61B3/12 ,  A61B3/13 ,  A61F9/00802 ,  A61F9/00825 ,  A61F2009/00846 ,  A61F2009/00848 ,  A61F2009/00851 ,  A61F2009/00853 ,  A61F2009/00863 ,  G02B26/06 ,  G02B26/0816 ,  G02B26/105 ,  G02B27/0093 ,  G02B27/106

摘要： Systems and methods of real-time laser control and modulation for ophthalmic devices are described. The systems and methods can be used for precise laser delivery at sub-micron resolution in both laser treatment and scan imaging processes. In various embodiments, the systems can include a laser delivery device useful for surgical eye treatment, a laser delivery device useful for an ophthalmic scan imaging device, or both. In one embodiment, the system includes a laser surgery device integrated with a scan-based ophthalmic imaging apparatus. In such an embodiment, an eye motion signal obtained from the imaging apparatus can be used to provide fine-tuned control of the operation of the surgical laser beam in the laser surgery device.

公开(公告)号：US09691923B2

公开(公告)日：2017-06-27

申请号：US14778469

申请日：2014-03-13

申请人： M-SOLV LTD.

发明人： Adam North Brunton ,  Simon John Henley

IPC分类号： H01L31/04 ,  H01L31/0463 ,  B23K26/06 ,  B23K26/067 ,  G03F7/20 ,  B23K26/364 ,  B23K26/402 ,  G02B26/08 ,  H01L31/18 ,  G02B27/10 ,  B23K101/40 ,  G02B13/22 ,  G02B27/28

CPC分类号： H01L31/0463 ,  B23K26/0652 ,  B23K26/067 ,  B23K26/364 ,  B23K26/402 ,  B23K2101/40 ,  B23K2103/50 ,  G02B13/22 ,  G02B26/0808 ,  G02B26/0816 ,  G02B27/1093 ,  G02B27/283 ,  G03F7/70383 ,  H01L31/1876

摘要： An apparatus for and a method of forming a plurality of groups of laser beams (2, 2′, 2″) are defined. Each group (2, 2′, 2″) may comprise two or more laser beams. The apparatus comprises a first diffractive optical element (3, referred as DOE) and a second diffractive optical element (8), the first DOE (3) being arranged to receive a first laser beam (1) and to divide this into a plurality of second laser sub-beams and the second DOE (8) being arranged to receive said plurality of second laser sub-beams and to divide each of these into two or more groups of third laser sub-beams (2, 2′, 2″), the separation of the groups in a direction perpendicular to a first axis being adjustable by rotation of the first DOE (3) about its optical axis and the separation of the third laser sub-beams (2, 2′, 2″) within each group in a direction perpendicular to the first axis being adjustable by rotation of the second DOE (8) about its optical axis.