THREE CAPACITOR STACK AND ASSOCIATED METHODS

    公开(公告)号:US20180097056A1

    公开(公告)日:2018-04-05

    申请号:US15282504

    申请日:2016-09-30

    CPC classification number: H01L28/75

    Abstract: A three capacitor stack and associated methods are shown. An exemplary capacitor device may include a first capacitor stack that includes a first plurality of layers of reference electrodes interleaved with first capacitor electrodes, a second capacitor stack on the first capacitor stack that includes a second plurality of layers of reference electrodes interleaved with second capacitor electrodes, and a third capacitor stack on the second capacitor stack that includes a reference electrode and a third capacitor electrode. A respective layer of dielectric material is formed between the reference electrodes and the first capacitor electrodes, the second capacitor electrodes, and the third capacitor electrode.

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