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    Light Pressure Rotator and Light Pressure Rotating Device
    111.
    发明申请
    Light Pressure Rotator and Light Pressure Rotating Device 失效
    轻压转子和轻压旋转装置

    公开(公告)号：US20080031088A1

    公开(公告)日：2008-02-07

    申请号：US11632962

    申请日：2005-07-21

    Applicant: Hiroo Ukita

    Inventor： Hiroo Ukita

    IPC: B01F7/00

    CPC classification number: F03G6/00 ,  B01F7/0025 ,  B01F13/0059 ,  B01F15/00435 ,  B01F15/00551 ,  B81B3/0029 ,  B81B2201/038 ,  F03G6/06 ,  F03G7/00 ,  Y02E10/46 ,  Y02P70/32

    Abstract: The light pressure rotator (1) is the light pressure rotator being light pressure trapped by irradiation with light and light pressure rotating about the central axis O of rotation, characterized in that a reverse torque generating section generating a torque for rotating the rotator in the direction reverse to the predetermined direction is removed from a section arranged with three blades (2) each having a first side face (3) extending in the radial direction from the central axis O of rotation, a second side face (4) facing the central axis O of rotation, a third side face (5) facing the first side face (3), a lower surface (6) intersecting the central axis O of the rotation, and an upper surface (7) facing the lower surface (6). The light pressure rotating device comprises the light pressure rotator (1), a light source (C), and an objective (condenser) lens D.

    Abstract translation: 轻压旋转器（1）是轻压力旋转器，其是通过围绕中心轴线O旋转的光和轻压照射而被捕获的轻压力，其特征在于，产生用于使旋转器沿方向旋转的转矩的反转扭矩产生部 从具有从旋转中心轴线O沿径向延伸的第一侧面（3）的三个叶片（2）布置的部分去除与预定方向相反的部分，面向中心轴线的第二侧面（4） 旋转的第三侧面（5），与第一侧面（3）相对的第三侧面（5），与旋转的中心轴线O相交的下表面（6）和面向下表面（6）的上表面（7）。 轻压旋转装置包括轻压旋转器（1），光源（C）和物镜（聚光镜）D.

    STRUCTURE FOR PROTECTING FEATAURES DURING THE REMOVAL OF SACRIFICIAL MATERIALS AND A METHOD OF MANUFACTURE THEREFOR
    112.
    发明申请
    STRUCTURE FOR PROTECTING FEATAURES DURING THE REMOVAL OF SACRIFICIAL MATERIALS AND A METHOD OF MANUFACTURE THEREFOR 失效
    在移除材料时保护材料的结构及其制造方法

    公开(公告)号：US20070292981A1

    公开(公告)日：2007-12-20

    申请号：US11425100

    申请日：2006-06-19

    Applicant: Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

    Inventor： Vladimir A. Aksyuk ,  Nagesh R. Basavanhally ,  Omar D. Lopez ,  Chien-Shing Pai

    IPC: H01L21/00

    CPC classification number: B81C1/00476 ,  B81B2201/038 ,  B81C1/00801

    Abstract: The present invention provides a process and an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.

    Abstract translation: 本发明提供一种方法和装置。 在一个实施例中，该过程包括提供微机电系统（MEMS）装置，微机电系统（MEMS）装置包括耦合到可移动特征的致动器，将致动器和可移动特征固定的牺牲材料 相对于彼此，以及位于致动器上方的材料层，可移动特征和牺牲材料。 该方法还可以包括仅去除材料层的一部分以暴露牺牲材料，以及将暴露的牺牲材料经历蚀刻剂以释放可移动特征。

    MICROELECTROMECHANICAL STEP ACTUATOR CAPABLE OF BOTH ANALOG AND DIGITAL MOVEMENTS
    115.
    发明申请
    MICROELECTROMECHANICAL STEP ACTUATOR CAPABLE OF BOTH ANALOG AND DIGITAL MOVEMENTS 审中-公开
    具有两种模拟和数字运动功能的微电子步进致动器

    公开(公告)号：US20070222334A1

    公开(公告)日：2007-09-27

    申请号：US11277479

    申请日：2006-03-24

    Applicant: Chang-Feng Wan

    Inventor： Chang-Feng Wan

    IPC: H01G5/01 ,  G02B26/00 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/038 ,  H01G5/18 ,  H01G5/38 ,  H02N1/006

    Abstract: An embodiment of the present invention provides a step actuator, comprising a suspended membrane comprising a plurality of movable electrodes connected by plurality of spring hinges to a payload platform; and pillars connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes; wherein said movable electrodes of said suspended membrane and said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators. Another embodiment of the present invention provides controlled operation of the step actuator over its entire range of motion, by avoiding its instability region and both digital and analog operations with enhanced stroke. It comprises a suspended membrane comprising a plurality of fixed electrodes, a plurality of movable electrodes connected by plurality of spring hinges to a medial payload platform. The fixed electrodes comprise insulator stops that keep the movable electrodes from entering the unstable region.

    Abstract translation: 本发明的实施例提供了一种步进致动器，其包括悬浮膜，该悬浮膜包括通过多个弹簧铰链连接到有效载荷平台的多个可移动电极; 以及将所述膜连接到基底的柱，所述基底包括多个固定电极; 其中所述悬浮膜的所述可移动电极和所述固定电极从所述衬底形成平行板静电副致动器。 本发明的另一个实施例通过避免其不稳定区域以及具有增强的行程的数字和模拟操作来提供步进致动器在整个运动范围内的受控操作。 它包括悬浮膜，其包括多个固定电极，多个可动电极，通过多个弹簧铰链连接到内侧有效载荷平台。 固定电极包括使可动电极不进入不稳定区域的绝缘体止动件。

    Method of fabricating micro actuator having media stage
    116.
    发明申请
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号：US20070137780A1

    公开(公告)日：2007-06-21

    申请号：US11595876

    申请日：2006-11-13

    Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    IPC: B32B37/00

    CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

    Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

    Vertical displacement device
    117.
    发明授权
    Vertical displacement device 有权
    垂直位移装置

    公开(公告)号：US07215429B2

    公开(公告)日：2007-05-08

    申请号：US11065017

    申请日：2005-02-24

    Applicant: Huikai Xie

    Inventor： Huikai Xie

    IPC: G01B9/02

    CPC classification number: G02B26/0866 ,  B81B3/0018 ,  B81B2201/038 ,  B81B2201/06 ,  G02B6/3512 ,  G02B6/3526 ,  G02B6/3534 ,  G02B6/3584

    Abstract: A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.

    Abstract translation: 能够相对于基座移动一个或多个可垂直移位的平台的MEMS垂直位移装置。 特别地，垂直位移装置可以能够移动可垂直移动的平台，使得垂直移位的平台保持大致平行于基部。 可垂直移位的平台可以是但不限于微透镜，微镜，微光栅或其他器件。 垂直位移装置也可以包括在光学相干和共焦成像系统中。

    Micro power generator and apparatus for producing reciprocating movement
    118.
    发明申请
    Micro power generator and apparatus for producing reciprocating movement 失效
    用于生产往复运动的微型发电机和设备

    公开(公告)号：US20060278263A1

    公开(公告)日：2006-12-14

    申请号：US11365950

    申请日：2006-02-27

    Applicant: Kwang Ho Kim ,  Gwi Eun Song ,  Jae Hak Jeon ,  Yoon Pyo Lee

    Inventor： Kwang Ho Kim ,  Gwi Eun Song ,  Jae Hak Jeon ,  Yoon Pyo Lee

    IPC: H01L37/00

    CPC classification number: H02K35/02 ,  B81B3/0024 ,  B81B2201/038 ,  F01K25/08 ,  F03G7/06 ,  H02K7/1876

    Abstract: There is provided a micro power generator enhanced in efficiency and power generation output, and having an increased temperature range for operation. The micro power generator comprises: a high-temperature heat source; a low-temperature heat source; an enclosed body containing a working substance therein, the enclosed body being deformable by means of a phase change of the working substance between a first shape wherein heat can be transferred from the high-temperature heat source and a second shape wherein heat can be transferred to the low-temperature heat source; a permanent magnet constituting the enclosed body, the permanent magnet being maintained in a first position when the enclosed body has the first shape and in a second position when the enclosed body has the second shape; and a wire in which an electric current is induced by a movement of the permanent magnet. Further, the present invention provides an apparatus for producing a reciprocating movement between two heat sources having a temperature difference therebetween.

    Abstract translation: 提供了增强效率和发电输出的微型发电机，并且具有增加的操作温度范围。 微型发电机包括：高温热源; 低温热源; 封闭体，其中包含工作物质，所述封闭体可通过所述工作物质的相变在第一形状和第二形状之间变形，所述第一形状可以从所述高温热源传递热量， 低温热源; 构成所述封闭体的永磁体，当所述封闭体具有所述第一形状时，所述永磁体保持在第一位置，并且当所述封闭体具有所述第二形状时，所述永磁体保持在第一位置。 以及通过永磁体的移动而引起电流的电线。 此外，本发明提供一种用于在两个温度差之间的两个热源之间产生往复运动的装置。

    Split spring providing multiple electrical leads for MEMS devices
    120.
    发明授权
    Split spring providing multiple electrical leads for MEMS devices 有权
    分离弹簧为MEMS器件提供多个电引线

    公开(公告)号：US06924581B2

    公开(公告)日：2005-08-02

    申请号：US10261087

    申请日：2002-09-30

    Applicant: Dennis S. Greywall

    Inventor： Dennis S. Greywall

    IPC: B81B3/00 ,  B81C99/00 ,  G02B26/08 ,  H02N1/00

    CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B26/0841 ,  H02N1/006

    Abstract: An integrated device has a spring having at least two split parts that are not in direct electrical contact with each other. The integrated device also has a substrate and a movable part, where both parts of the spring are configured between the substrate and the movable part to support the movable part on the substrate. The two or more split parts of the spring enable two or more independent voltages to be applied to the movable part. The split spring of the invention may be used in MEMS devices for optical switches in order to provide independent voltages to the movable part(s) in those devices.

    Abstract translation: 集成装置具有至少两个彼此不直接电接触的分开部分的弹簧。 集成装置还具有基板和可动部，弹簧的两部分构造在基板和可动部之间，以支撑基板上的可动部。 弹簧的两个或多个分开部分能够将两个或多个独立电压施加到可动部件。 本发明的裂缝弹簧可以用于光学开关的MEMS装置中，以便为这些装置中的可移动部件提供独立的电压。

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