Abstract:
A film bulk acoustic wave resonator of the invention includes a substrate; a resonant structure provided on the substrate constituted by a lower electrode, a piezoelectric film and an upper electrode; and an acoustic multilayer of a plurality of reflective films provided between the substrate and the resonant structure. At least one of the reflective films of the acoustic multilayer has a specified crystal plane orientation, and an X-ray rocking curve full width at half maximum that is preferably not greater than 10 degrees, and more preferably is not greater than 3 degrees. This makes it possible to obtain better resonance characteristics than in the case of the prior art, by increasing the efficiency with which bulk waves propagating towards the substrate are reflected.
Abstract:
In a filter device 10 constituted by circuit elements formed on a single substrate 11, the circuit elements includes a first wing section 14 formed between an input signal electrode 12 and an output signal electrode 13, first resonators 15a, 15b, 15c located in the first wiring section 14 and having a predetermined resonance frequency, second wiring sections 17a, 17b, 17c, 17d formed between the first wiring section 14 and a ground electrode 16, second resonators 18a, 18b, 18c, 18d located in the second wiring sections 17a, 17b, 17c, 17d and having an anti-resonance frequency forming a pass-band with the predetermined resonance frequency of the first resonators 15a, 15b, 15c. An effective electric and mechanical coupling factor of the second resonator 18a is different from those of the other resonators 15a, 15b, 15c, 18b, 18c, 18d.
Abstract:
An optically active amino acid derivative is produced by N-protecting an optically active 3-haloalanine derivative followed by cyclization, or cyclizing this derivative followed by N-protection to thereby give an optically active N-protected-aziridine-2-carboxylic acid derivative which is protected by a benzenesulfonyl group substituted by nitro at the 2- and/or 4-positions and then treating this product with an organic metal reagent, or by N-protecting an optically active 3-haloalanine derivative to thereby give N-protected-aziridine-2-carboxylic acid which is protected by a benzenesulfonyl group substituted by nitro at the 2- and/or 4-positions and then treating this product with an organic metal reagent. According to this process, natural and unnatural optically active amino acids can be produced from inexpensive materials by using simple procedures.
Abstract:
A film bulk acoustic wave resonator wafer of the present invention prevents electric discharge from occurring in the process of fabricating a film bulk acoustic wave resonator, thereby enhancing product reliability and yield. The film bulk acoustic wave resonator wafer of the present invention comprises a substrate, a lower electrode and an upper electrode provided on the substrate and a piezoelectric film provided between the lower electrode and upper electrode. The lower electrode and upper electrode are shorted through a window provided in the piezoelectric film. Since the lower electrode and upper electrode are therefore kept at the same potential, no electric discharge passing through the piezoelectric film occurs even during the formation of a protective film covering the upper electrode, dicing of the substrate and other processes in which discharge has heretofore been likely to occur.
Abstract:
The present invention provides a simple, practical, and industrially advantageous process for producing an optically active α-substituted cysteine or a salt thereof from inexpensive and readily available materials. The present invention provides a process for producing an optically active α-substituted cysteine or a salt thereof by converting a cysteine derivative into a thiazoline compound and subjecting the resulting thiazoline compound to a stereoselective substituent-introducing reaction catalyzed by an optically active quaternary ammonium salt, in particular, an axially asymmetric quaternary ammonium salt to produce an optically active thiazoline compound and then hydrolyzing the resulting thiazoline compound.
Abstract:
A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.
Abstract:
A film bulk acoustic resonator of the present invention includes an upper electrode 104, a lower electrode 102, and a piezoelectric film 103 as well as an acoustic multilayer 120 that are provided between the upper electrode 104 and the lower electrode 102. Thus, a distance between the upper electrode 104 and the lower electrode 102 is extended by a thickness of the acoustic multilayer 120, and electrostatic capacitance between the upper electrode 104 and the lower electrode 102 per unit area can be reduced accordingly. Therefore, an electrode area can be increased as compared to when there is no acoustic multilayer 120, and an influence of grains of a piezoelectric material can be reduced.
Abstract:
A surface acoustic wave device is provided with an input signal electrode 15 and an output signal electrode 16 to and from which an electric signal is inputted or outputted; a first surface acoustic wave resonator 18 including an input terminal 18a connected to the input signal electrode 15 and having a plurality of comb electrodes, an output terminal 18b connected to the output signal electrode 16 and having a plurality of comb electrodes, a common terminal 18c which has a plurality of comb electrodes and which forms interdigital transducers A and B together with the comb electrodes of the input terminal 18a and the comb electrodes of the output terminal 18b; and a second surface acoustic wave resonator 19 connected between the common terminal 18c of the first surface acoustic wave resonator 18 and a pair of grounding terminals 17.
Abstract:
An electronic component according to an embodiment of the present invention comprises a resonator, a mounting substrate, and an electric connection member. The resonator has a terminal. The mounting substrate has a first principal surface, a second principal surface opposite to the first principal surface, and an electrode provided in a hole intersecting with the second principal surface. The electric connection member electrically connects the electrode of the mounting substrate to the terminal of the resonator. One end of the electrode of the mounting substrate is provided along the second principal surface. The electric connection member is provided on the one end of the electrode of the mounting substrate. The resonator is provided on the electric connection member so that the terminal of the resonator is in contact with the electric connection member.
Abstract:
An optically active amino acid derivative is produced by N-protecting an optically active 3-haloalanine derivative followed by cyclization, or cyclizing this derivative followed by N-protection to thereby give an optically active N-protected-aziridine-2-carboxylic acid derivative which is protected by a benzenesulfonyl group substituted by nitro at the 2- and/or 4-positions and then treating this product with an organic metal reagent, or by N-protecting an optically active 3-haloalanine derivative to thereby give N-protected-aziridine-2-carboxylic acid which is protected by a benzenesulfonyl group substituted by nitro at the 2- and/or 4-positions and then treating this product with an organic metal reagent. According to this process, natural and unnatural optically active amino acids can be produced from inexpensive materials by using simple procedures.