公开(公告)号：US20020031159A1

公开(公告)日：2002-03-14

申请号：US09865908

申请日：2001-05-24

Applicant: Lambda Physik AG

Inventor： Marcus Serwazi ,  Thomas Junemann

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

公开(公告)号：US20020031157A1

公开(公告)日：2002-03-14

申请号：US09842281

申请日：2001-04-24

Applicant: Lambda Physik AG

Inventor： Peter Heist ,  Matthias Kramer ,  Juergen Kleinschmidt ,  Sergei Govorkov ,  Marcus Serwazi ,  Thomas Junemann

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

Abstract translation: 准分子或分子氟激光系统包括包含气体混合物的放电室，连接到用于激励气体混合物的电源电路的多个电极，用于产生激光束的谐振器，处理器和用于监测放大的自发发射的装置 ASE）信号，例如优选ASE检测器。 处理器从优选的ASE检测器接收指示激光的ASE信号的信号。 基于来自ASE检测器的信号，处理器确定是否启动用于调整激光系统的参数的响应动作。

公开(公告)号：US06998620B2

公开(公告)日：2006-02-14

申请号：US10218690

申请日：2002-08-12

Applicant: Guido Schriever

Inventor： Guido Schriever

IPC: G21K1/00 ,  G01J1/42

CPC classification number: B82Y10/00 ,  G01J1/429 ,  G03F7/70033 ,  G03F7/70558 ,  H01L31/02161 ,  H01L31/02162 ,  H01L31/02325 ,  H01L31/1037 ,  H01L31/108

Abstract: A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises a Si pn diodes with doped dead region and zero surface recombination or PtSi-nSi barrier for increasing the long term stability of the detector.

公开(公告)号：US06847671B1

公开(公告)日：2005-01-25

申请号：US09823298

申请日：2001-03-29

Applicant: Juergen Baumler

Inventor： Juergen Baumler

IPC: H01S3/03 ,  H01S3/036 ,  H01S3/22

CPC classification number: H01S3/036 ,  H01S3/03

Abstract: A tangential blower for use in a gas discharge laser is provided provides improved homogeneity of laser gas flow through the discharge region of the laser. A flange which supports adjacent blower sections has an aerodynamic shape and occupies a minimal portion of the space in the inlet region of the blowers. The ends of the blower's shafts may be formed as a twice-profiled polygon which is has a non-uniform and preferably rounded geometry along its longitudinal axis where it fits into end flanges. The blades of the blower may be formed with varying thickness and radii of curvature. The blower's blades and hubs may be cast as a single piece of steel, titanium alloy, or other suitable material.

Abstract translation: 提供用于气体放电激光器的切向鼓风机提供了激光气体流过激光器的放电区域的均匀性。 支撑相邻鼓风机部分的凸缘具有空气动力学形状并且占据鼓风机入口区域中的空间的最小部分。 鼓风机轴的端部可以形成为两倍廓形的多边形，其多边形沿其纵向轴线具有非均匀且优选为圆形的几何形状，其中它配合到端部凸缘中。 鼓风机的叶片可以形成为具有变化的厚度和曲率半径。 鼓风机的叶片和轮毂可以铸造成单件钢，钛合金或其他合适的材料。

公开(公告)号：US20020122452A1

公开(公告)日：2002-09-05

申请号：US10098258

申请日：2002-03-15

Applicant: Lambda Physik AG.,

Inventor： Juergen Kleinschmidt ,  Peter Lokai

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/08068 ,  H01S3/0805 ,  H01S3/105 ,  H01S3/225

Abstract: An excimer or molecular fluorine laser includes a discharge chamber filled with a gas mixture, multiple electrodes within the discharge chamber connected to a power supply circuit for energizing the gas mixture, and a resonator including the discharge chamber and a pair of resonator reflectors for generating an output laser beam. One of the resonator reflectors is an output coupling interferometer including a pair of opposing reflecting surfaces tuned to produce a reflectivity maximum at a selected wavelength for narrowing a linewidth of the output laser beam. One of the pair of opposing reflecting surfaces is configured such that the opposing reflecting surfaces of the interferometer have a varying optical distance therebetween over an incident beam cross-section which serves to suppress outer portions of the reflectivity maximum to reduce spectral purity. Preferably, this surface is non-planar, and may include a step, a recess or a raised or recessed curved portion of a quarter wavelength in height or depth, respectively.

公开(公告)号：US20020075932A1

公开(公告)日：2002-06-20

申请号：US10077327

申请日：2002-02-15

Applicant: Lambda Physik AG.

Inventor： Uwe Stamm

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/137 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser includes a gain medium surrounded by a resonator and including a line-narrowing module preferably including a prism beam expander and one or more etalons and/or a grating or grism within the resonator. The material of transmissive portions of the line-narrowing module including the prisms and the plates of the etalons comprises a material having an absorption coefficient of less than 5null10null3/cm at 248 nm incident radiation, less than 10null10null3/cm at 193 nm incident radiation, and less than 0.1/cm at 157 nm. Preferably the material also has a thermal conductivity greater than 2.0 W/mnull C.

Abstract translation: 准分子或分子氟激光器包括由谐振器包围的增益介质，并且包括在谐振器内优选地包括棱镜束扩展器和一个或多个标准具和/或光栅或棱镜的线条变窄模块。 包括棱镜和标准具的板的线变窄模块的透射部分的材料包括在248nm入射辐射下吸收系数小于5×10 -3 / cm的材料，在193处小于10×10 -3 / cm nm入射辐射，在157nm处小于0.1 / cm。 优选地，该材料还具有大于2.0W / m℃的热导率。

公开(公告)号：US20020041614A1

公开(公告)日：2002-04-11

申请号：US09965498

申请日：2001-09-26

Applicant: Lambda Physik AG

Inventor： Sergei V. Govorkov ,  Klaus Wolfgang Vogler ,  Frank Voss ,  Rainer Patzel

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  B23K2103/05 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/134

Abstract: A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

公开(公告)号：US20020031161A1

公开(公告)日：2002-03-14

申请号：US09923632

申请日：2001-08-06

Applicant: Lambda Physik AG

Inventor： Hans-Stephan Albrecht ,  Peter Heist ,  Klaus Wolfgang Vogler

IPC: H01S003/098

CPC classification number: H01S3/08036 ,  H01S3/08 ,  H01S3/08081 ,  H01S3/1305 ,  H01S3/139 ,  H01S3/225

Abstract: An apparatus and method are provided for bandwidth narrowing of an excimer laser to nullnullnull6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.

公开(公告)号：US20020018506A1

公开(公告)日：2002-02-14

申请号：US09883127

申请日：2001-06-15

Applicant: Lambda Physik AG

Inventor： Klaus Vogler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/036 ,  H01S3/08004 ,  H01S3/1055 ,  H01S3/106 ,  H01S3/134 ,  H01S3/2258 ,  H01S2301/02

Abstract: A molecular fluorine laser system emitting a narrow bandwidth laser beam and having efficient line-selection of a main line null1 of multiple closely-spaced lines around 157 nm includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, a gas handling module for periodically replenishing the molecular fluorine in the discharge chamber for maintaining said gas mixture at a selected composition, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam around 157 nm. The resonator further includes line-selection optics for selecting a main line null1 and suppressing a secondary line null2 of said plurality of closely-spaced lines. The line-selection optics include a line-selection package on the opposite of an output coupling side of the chamber and/or a solid element on the outcoupling side of the chamber having an interference maximum at the main line and an interference minimum at the secondary line. A contrast ratio of the main line to the secondary line in the laser beam is at least 100. The laser system further includes an enclosure maintained substantially free of VUV photoabsorbing species wherein the laser beam propagates within the enclosure between the resonator and an application process.

Abstract translation: 发射窄带宽激光束并且对157nm附近的多个紧密间隔的线的主线lambd1的有效线选择的分子氟激光系统包括：填充有包括分子氟和缓冲气体的激光气体的放电室，气体 处理模块，用于周期性地补充放电室中的分子氟以将所述气体混合物保持在所选择的组成，放电室内的多个电极并连接到用于激发分子氟的放电电路，以及包括用于产生 激光束约157nm。 谐振器还包括用于选择主线lambd1并抑制所述多个紧密间隔线的次级线lambd2的线选择光学器件。 线路选择光学器件包括在腔室的输出耦合侧相对的线选择包和/或腔室的输出耦合侧上的固体元件，其在主线处具有干扰最大值，并且在次级线路处具有干扰最小值 线。 激光束中主线与次级线的对比度至少为100.激光系统还包括基本上不含VUV光吸收物质的外壳，其中激光束在谐振器和应用过程之间的外壳内传播。

公开(公告)号：US20020015431A1

公开(公告)日：2002-02-07

申请号：US09924814

申请日：2001-08-07

Applicant: Lambda Physik AG

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

Abstract translation: F2准分子激光器在157nm处具有多个紧密分布的感兴趣的谱线，并且通过波长选择光学器件选择一条线。 第一优选实施例的波长选择光学器件包括包围放电室的激光气体体积的双折射布鲁斯特窗口。 窗口优选地包括MgF 2，并且位于放电室的一端。 当窗口的光学厚度与窗口的可旋转调节的正交折射率配合选择时，选择两条线。 窗的透射率取决于正交折射率和窗口的光学厚度。 第二优选实施例的波长选择光学器件至少部分地在激光有源体积内。 以这种方式，以优化光和放电效率，谐振器尺寸和成本的组合的方式执行线选择。 波长选择单元优选地包括具有以布鲁斯特角取向的前表面的棱镜和定向成接收和反射在棱镜内以与该背面成直角的方式行进的普通折射光线的后表面。 背表面还优选地包括用作谐振器的高反射表面的高反射涂层。 波长选择单元优选地还包括用于调整棱镜的取向并且用于封闭与外耦合端相对的壳体的另一端的调节部件。