公开(公告)号：US20100108113A1

公开(公告)日：2010-05-06

申请号：US12289725

申请日：2008-11-03

申请人： David Taggart ,  Gianluigi Mascolo ,  Ning Ma

发明人： David Taggart ,  Gianluigi Mascolo ,  Ning Ma

IPC分类号： E04H15/02 ,  E04H15/34

CPC分类号： E04F10/08 ,  F24S20/67 ,  F24S25/50 ,  F24S2030/16 ,  H02S20/10 ,  H02S20/22 ,  Y02B10/10 ,  Y02B10/20 ,  Y02E10/44 ,  Y02E10/47

摘要： An aeroelastic solar-power-generating canopy is described that requires minimal construction efforts. The canopy can be formed over supporting structures such as columns, without requiring an existing roof. The canopy contains a plurality of solar panels arranged substantially adjacent to each other, which are coupled to attachment members. Linking members are coupled to the attachment members, the linking members providing a flexing point for the solar panels. A cable is coupled to the linking members, spanning a substantial portion of the distance covered by the solar panels, providing a restraining force. And, at least one of the attachment members and cable is coupled to a supporting structure, wherein the cable in conjunction with the linking members allows the solar panels to dynamically react to loads, the arranged solar panels operating as a covering and as a source of solar power.

摘要翻译： 描述了一个需要最少施工努力的气动弹性太阳能发电机盖。 天棚可以形成在诸如柱子之类的支撑结构上，而不需要现有屋顶。 冠层包含彼此大体上相邻布置的多个太阳能电池板，这些太阳能电池板耦合到附接构件。 连接构件联接到附接构件，连接构件为太阳能面板提供弯曲点。 电缆耦合到连接构件，跨越由太阳能电池板覆盖的距离的大部分，提供约束力。 并且，附接构件和电缆中的至少一个联接到支撑结构，其中与连接构件结合的电缆允许太阳能电池板对载荷动态地作出反应，所布置的太阳能电池板作为覆盖物起作用并作为 太阳能。

公开(公告)号：US20100052425A1

公开(公告)日：2010-03-04

申请号：US12230381

申请日：2008-08-28

申请人： Jackson Moore ,  William L. Erdman ,  Edward Robert Nelson

发明人： Jackson Moore ,  William L. Erdman ,  Edward Robert Nelson

IPC分类号： H02J1/12

CPC分类号： H02J1/12 ,  H01L31/02021 ,  H02J13/0079 ,  Y02E10/50 ,  Y02E40/72 ,  Y02E60/74 ,  Y04S10/123 ,  Y04S10/30 ,  Y10T307/549

摘要： A group of solar power stations with inverters are adjusted in order to achieve optimum power output in accordance with maximum power-point tracking (MPPT). The MPPT data is used to perform adjustments. Power measurement factors, including Maximum Power Points (MPPs) are established to represent a bus-voltage setting that produces the maximum power output from an individual photovoltaic panel. These settings are established for the group so as to optimize power output under a variety of operating conditions.

摘要翻译： 调整一组带有逆变器的太阳能发电站，以便根据最大功率点跟踪（MPPT）实现最佳功率输出。 MPPT数据用于执行调整。 建立功率测量因子，包括最大功率点（MPP），以表示从单个光伏面板产生最大功率输出的总线电压设置。 为组设置了这些设置，以便在各种操作条件下优化功率输出。

公开(公告)号：US20090212030A1

公开(公告)日：2009-08-27

申请号：US12036977

申请日：2008-02-25

申请人： George M. Clifford, JR.

发明人： George M. Clifford, JR.

IPC分类号： B23K26/073

CPC分类号： B23K26/046

摘要： A laser ablation system is controlled by an autofocus subsystem particularly optimized for precision ablation of large workpieces, in an open factory environment where temperatures are not tightly controlled, where the workpieces may have high-spatial-frequency features that affect the focus condition of the working beam. The autofocus operates at a high bandwidth to support high process speed. The autofocus beam shares most of its optical path with the working beam, so its measurements account for thermal effects in the beam train as well as the workpiece. The autofocus beam measures target or adjacent areas just before, or during, ablation, so that temperature drifts do not have time to change the effective focus error. The autofocus spot is substantially the same size as the working spot, so its measurements account for workpiece features of the same spatial frequencies that affect the working beam.

摘要翻译： 激光烧蚀系统由自动聚焦子系统控制，该自动对焦子系统在温度不受严格控制的开放工厂环境中特别优化用于大型工件的精密烧蚀，其中工件可能具有影响工作焦点状态的高空间频率特征 光束。 自动对焦以高带宽工作，以支持高处理速度。 自动对焦光束与工作光束共享其大部分光路，因此其测量结果表明光束列和工件中的热效应。 自动对焦光束在消融之前或期间测量目标或相邻区域，使得温度漂移没有时间改变有效聚焦误差。 自动对焦点的大小与工作点大致相同，因此其测量结果影响到影响工作光束的相同空间频率的工件特征。

公开(公告)号：US07922864B2

公开(公告)日：2011-04-12

申请号：US11943065

申请日：2007-11-20

申请人： James S. Harroun

发明人： James S. Harroun

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/50 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578

摘要： A tube-array showerhead for CVD or PECVD on large substrates delivers precursors to a process chamber via an array of tubes drilled with precision holes. The tubes rapidly become contaminated with use and must be changed frequently to maintain process quality. An improved manifold for a tube-array showerhead, intended for processes with a low pressure differential between the tubes and process chamber, includes holding-stubs to hold each tube by its ends outside the manifold block. At least one holding-stub for each tube is spring-loaded along the direction of the tube's operating axis. Contaminated tubes can be removed, and clean tubes installed, without disassembling the manifolds or disturbing any high-pressure-differential seals to the ambient atmosphere or precursor supplies. This invention reduces production costs by decreasing chamber down-time and reducing the risk of creating leaks when tubes are changed.

摘要翻译： 用于大尺寸基板上的CVD或PECVD的管阵列喷头通过钻有精密孔的管阵列将前体提供给处理室。 管子迅速被使用污染，必须频繁更换以保持工艺质量。 用于管阵列喷头的改进歧管，用于管和处理室之间具有低压差的过程，包括保持柱，以将其每个管的端部保持在歧管块的外部。 每个管的至少一个固定短管沿管的操作轴线的方向弹簧加载。 受污染的管可以被拆除，并且清洁管被安装，而不拆卸歧管或者干扰任何高压差的密封到环境大气或前体供应。 本发明通过减少室停机时间降低生产成本，并降低管改变时产生泄漏的风险。

公开(公告)号：US20100198420A1

公开(公告)日：2010-08-05

申请号：US12320715

申请日：2009-02-03

申请人： Philip Rettger ,  Marvin Keshner ,  Alexandra Katrina Pligavko ,  Jackson Moore ,  Bodo W. Littmann

发明人： Philip Rettger ,  Marvin Keshner ,  Alexandra Katrina Pligavko ,  Jackson Moore ,  Bodo W. Littmann

IPC分类号： G06F1/30 ,  G06F1/26 ,  G06N5/02

CPC分类号： G01W1/10 ,  H02S10/00 ,  Y02A90/14 ,  Y02E10/50

摘要： Tracking movement of clouds is used to predict the effects of cloud cover on irradiation of a solar-powered distributed power generation system. The predictions enable a solar power plant to maintain the changes in its total power output within operating requirements with less or no dependence on energy storage, back up generation, or load control, use centralized and/or local coordination of solar farm control systems to use storage to its best advantage, alternately reduce power fluctuations without cloud knowledge and use real time solar output prediction capabilities to be able to provide utilities with advance information regarding power fluctuations.

摘要翻译： 云的跟踪运动用于预测云层对太阳能分布式发电系统照射的影响。 这些预测使得太阳能发电厂能够在对能量存储，备份发电或负载控制的依赖较少或不依赖的情况下，在运行要求内保持其总功率输出的变化，使用太阳能农场控制系统的集中和/或局部协调来使用 存储，以最大的优势，交替地减少没有云知识的功率波动，并使用实时的太阳能输出预测功能能够提供实用程序有关功率波动的提前信息。

公开(公告)号：US20100151680A1

公开(公告)日：2010-06-17

申请号：US12314809

申请日：2008-12-17

申请人： Shulin Wang ,  Gautam Ganguly ,  Marvin Keshner ,  Erik G. Vaaler ,  James Harroun ,  Paul McClelland

发明人： Shulin Wang ,  Gautam Ganguly ,  Marvin Keshner ,  Erik G. Vaaler ,  James Harroun ,  Paul McClelland

IPC分类号： H01L21/3205 ,  H01L21/67

CPC分类号： H01L21/6776 ,  C23C16/4581 ,  C23C16/4585 ,  C23C16/46 ,  C23C16/54 ,  H01L21/67109 ,  H01L21/67173 ,  H01L21/67346 ,  H01L21/67748 ,  H01L21/68721

摘要： A substrate carrier is used in an in-line fabrication such as Plasma Enhanced Chemical Vapor Deposition (PECVD) for application of thin film on substrates. The carrier is in thermal communication with the substrate and thereby provides heat sinking. The carrier further permits movement of the substrate past a deposition apparatus at a deposition station.

摘要翻译： 衬底载体用于诸如等离子体增强化学气相沉积（PECVD）的在线制造，用于在衬底上施加薄膜。 载体与衬底热连通，从而提供散热。 载体还允许衬底在沉积站处移动通过沉积设备。

公开(公告)号：US20090126632A1

公开(公告)日：2009-05-21

申请号：US11943065

申请日：2007-11-20

申请人： James S. Harroun

发明人： James S. Harroun

IPC分类号： C23C16/455 ,  B05B5/025 ,  C23C16/50

CPC分类号： C23C16/50 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578

摘要： A tube-array showerhead for CVD or PECVD on large substrates delivers precursors to a process chamber via an array of tubes drilled with precision holes. The tubes rapidly become contaminated with use and must be changed frequently to maintain process quality. An improved manifold for a tube-array showerhead, intended for processes with a low pressure differential between the tubes and process chamber, includes holding-stubs to hold each tube by its ends outside the manifold block. At least one holding-stub for each tube is spring-loaded along the direction of the tube's operating axis. Contaminated tubes can be removed, and clean tubes installed, without disassembling the manifolds or disturbing any high-pressure-differential seals to the ambient atmosphere or precursor supplies. This invention reduces production costs by decreasing chamber down-time and reducing the risk of creating leaks when tubes are changed.

摘要翻译： 用于大尺寸基板上的CVD或PECVD的管阵列喷头通过钻有精密孔的管阵列将前体提供给处理室。 管子迅速被使用污染，必须频繁更换以保持工艺质量。 用于管阵列喷头的改进歧管，用于管和处理室之间具有低压差的过程，包括保持柱，以将其每个管的端部保持在歧管块的外部。 每个管的至少一个固定短管沿管的操作轴线的方向弹簧加载。 受污染的管可以被拆除，并且清洁管被安装，而不拆卸歧管或者干扰任何高压差的密封到环境大气或前体供应。 本发明通过减少室停机时间降低生产成本，并降低管改变时产生泄漏的风险。

公开(公告)号：US07264849B2

公开(公告)日：2007-09-04

申请号：US10618478

申请日：2003-07-11

申请人： Marvin S Keshner ,  Warren B. Jackson ,  Krzysztof Nauka

发明人： Marvin S Keshner ,  Warren B. Jackson ,  Krzysztof Nauka

IPC分类号： H05H1/24

CPC分类号： C23C16/45502 ,  C23C16/4412 ,  C23C16/45578 ,  C23C16/509 ,  H01J37/32082 ,  H01J37/3244 ,  H01J37/32449

摘要： A chemical vapor deposition method includes a step of maintaining a hydrogen plasma at low pressure in a processing chamber. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration. A silane-concentration monitor observes the relative amplitudes of the spectral signatures of the silane and the hydrogen constituents in the roll-vortex plasma and outputs a process control feedback signal that is used to keep the silane in hydrogen concentration at about 6-7%.

摘要翻译： 化学气相沉积方法包括在处理室中保持低压下的氢等离子体的步骤。 处理室具有长的，宽的，薄的几何形状，以有利于在室壁上的薄片基材上沉积薄膜硅。 片材基片在两端之间移动。 在工件上方和下方的一对相对的射频电极被电驱动，以在处理室的中间空间中产生平坦的，扁平的等离子体云。 在硅烷喷射歧管上略微向上突出的共线系列气体喷射器喷嘴从侧面以高速度引入100％硅烷气体，以在同轴涡流中滚动等离子体云。 第二个这样的硅烷喷射歧管放置在相反的一侧并稍微向下倾斜，以进一步帮助滚动等离子体并保持窄的硅烷浓度带。 硅烷浓度监测器观察到辊涡流等离子体中硅烷和氢组分的光谱特征的相对振幅，并输出用于将硅烷在氢浓度中保持在约6-7％的过程控制反馈信号。