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40 条记录 (耗时 0.025 秒)

    Energy-efficient, laser-based method and system for processing target material
    13.
    发明授权
    Energy-efficient, laser-based method and system for processing target material 有权

    公开(公告)号：US07582848B2

    公开(公告)日：2009-09-01

    申请号：US11305129

    申请日：2005-12-19

    申请人： Donald V. Smart

    发明人： Donald V. Smart

    IPC分类号： B23K26/40 ,  H01L21/82

    CPC分类号： B23K26/0736 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  Y10S438/94 ,  Y10T29/49156 ,  H01L2924/00

    摘要： An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material. The rise time (less than about 1 ns) is fast enough to efficiently couple laser energy to the target material, the pulse duration (typically 2-10 ns) is sufficient to process the target material, and the fall time (a few ns) is rapid enough to prevent the undesirable changes to the material surrounding the target material.

    Pulse control in laser systems
    15.
    发明授权
    Pulse control in laser systems 有权
    激光系统中的脉冲控制

    公开(公告)号：US06831936B1

    公开(公告)日：2004-12-14

    申请号：US09633837

    申请日：2000-08-07

    申请人： Donald V. Smart

    发明人： Donald V. Smart

    IPC分类号： H01S310

    CPC分类号： H01C17/242 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/0648 ,  H01G5/019 ,  H01S3/0057 ,  H01S3/0085 ,  H01S3/08068 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/1068 ,  H01S3/117

    摘要： A pulsed laser system includes a laser pump, a laser rod, a reflector interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector through which energy is emitted from the laser rod, a switch interposed between the laser rod and the output reflector, and a control device. The switch, when closed, causes energy to be stored in the laser rod and, when opened, allows energy to be emitted from the laser rod during an emission period. The control device allows a primary laser pulse emitted from the laser rod during the emission period to impinge on a workpiece and blocks from the workpiece secondary laser emission occurring during the emission period after emission of the primary pulse. The pulsed laser system is operated over a range of repetition rates, so as to cause laser energy to be emitted during a plurality of emission periods at each repetition rate. At least a portion of the laser energy emitted during the emission periods is directed toward the target structure in order to perform passive or functional trimming of the target structure. The switch is closed for a fixed, predetermined period of time prior to each emission period regardless of repetition rate of the primary laser pulse within the range of repetition rates in order to store energy in the laser rod. The pump is operated continuously at constant power.

    摘要翻译： 脉冲激光系统包括激光泵，激光棒，介于激光泵和激光棒之间的反射器，来自激光泵的能量通过该反射器进入激光棒，通过激光棒从激光棒发射能量的输出反射器， 介于激光棒和输出反射器之间的开关，以及控制装置。 关闭时，开关将能量存储在激光棒中，并且在打开时允许在发射期间从激光棒发射能量。 控制装置允许在发射周期期间从激光棒发射的初级激光脉冲撞击工件，并阻止在发射主脉冲之后的发射周期期间发生的工件辅助激光发射。 脉冲激光系统在重复频率的范围内运行，以便在每个重复频率的多个发射周期期间使激光能量发射。 在发射周期期间发射的激光能量的至少一部分指向目标结构，以便执行目标结构的被动或功能修整。 在每个发射周期之前，开关闭合固定的预定时间段，而不管重复频率范围内的主激光脉冲的重复率如何，以便在激光棒中存储能量。 泵以恒定功率连续运行。

    Laser processing
    16.
    发明授权
    Laser processing 有权

    公开(公告)号：US06337462B1

    公开(公告)日：2002-01-08

    申请号：US09441201

    申请日：1999-11-16

    申请人： Donald V. Smart

    发明人： Donald V. Smart

    IPC分类号： B23K2636

    CPC分类号： H01L21/76894 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/361 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/42 ,  B23K2103/50

    摘要： A controlled, switched laser system for vaporizing a target structure on a substrate includes a diode-pumped, solid-state laser for producing a laser output, a controllable switch for controlling the on/off state and power level of the laser, and a wavelength shifter. The wavelength shifter shifts the wavelength of the laser output from a conventional wavelength to a wavelength beyond the absorption edge of the substrate but shorter than 1.2 &mgr;m in order to obtain a decrease in absorption of the laser output by the substrate due to the shift in the wavelength of the laser output. The wavelength shifter is removably insertable into the switched laser system so as to enable the switched laser system to operate at the conventional wavelength and at the wavelength beyond the absorption edge of the substrate. Heating of the substrate and hence damage to the substrate is limited due to the wavelength being beyond the absorption edge of the substrate. Good depth of focus of the laser beam output is maintained relative to spot size of the laser beam output due to the wavelength being less than about 1.2 &mgr;m.

    ENERGY EFFICIENT, LASER-BASED METHOD AND SYSTEM FOR PROCESSING TARGET MATERIAL
    17.
    发明申请
    ENERGY EFFICIENT, LASER-BASED METHOD AND SYSTEM FOR PROCESSING TARGET MATERIAL 审中-公开
    能源效率，基于激光的方法和处理目标材料的系统

    公开(公告)号：US20120187098A1

    公开(公告)日：2012-07-26

    申请号：US13417613

    申请日：2012-03-12

    申请人： Donald V. SMART

    发明人： Donald V. SMART

    IPC分类号： B23K26/00

    CPC分类号： B23K26/0736 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  Y10S438/94 ,  Y10T29/49156 ,  H01L2924/00

    摘要： An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses.

    摘要翻译： 提供了一种用于在微观区域中处理诸如微结构的目标材料而不引起围绕目标材料的材料的电气和/或物理特性的不期望的变化的能量效率方法和系统。 该系统包括用于产生处理控制信号的控制器和用于基于处理控制信号产生调制的驱动波形的信号发生器。 波形具有亚纳秒上升时间。 该系统还包括用于以重复率产生激光脉冲串的增益切换脉冲半导体种子激光器。 驱动波形泵浦激光器，使得脉冲串的每个脉冲具有预定的形状。 此外，该系统包括用于光学放大脉冲串以获得放大的脉冲串而不显着改变脉冲的预定形状的激光放大器。

    Energy efficient, laser-based method and system for processing target material
    19.
    发明授权
    Energy efficient, laser-based method and system for processing target material 有权
    高能效，基于激光的方法和处理目标材料的系统

    公开(公告)号：US07750268B2

    公开(公告)日：2010-07-06

    申请号：US11843229

    申请日：2007-08-22

    申请人： Donald V. Smart

    发明人： Donald V. Smart

    IPC分类号： B23K26/36 ,  B23K26/38

    CPC分类号： B23K26/0736 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  Y10S438/94 ,  Y10T29/49156 ,  H01L2924/00

    摘要： An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material.

    摘要翻译： 提供了一种用于在微观区域中处理诸如微结构的目标材料而不引起围绕目标材料的材料的电气和/或物理特性的不期望的变化的能量效率方法和系统。 该系统包括用于产生处理控制信号的控制器和用于基于处理控制信号产生调制的驱动波形的信号发生器。 波形具有亚纳秒上升时间。 该系统还包括用于以重复率产生激光脉冲串的增益切换脉冲半导体种子激光器。 驱动波形泵浦激光器，使得脉冲串的每个脉冲具有预定的形状。 此外，该系统包括用于光学放大脉冲串以获得放大的脉冲串而不显着改变脉冲的预定形状的激光放大器。 放大的脉冲具有很小的失真，并且具有与来自激光器的原始脉冲串相当的相对时间功率分布。 每个放大的脉冲具有基本上正方形的时间功率密度分布，急剧上升时间，脉冲持续时间和下降时间。 该系统还包括用于将放大的脉冲序列的至少一部分传送和聚焦到目标材料上的束传递和聚焦子系统。