公开(公告)号：US6109574A

公开(公告)日：2000-08-29

申请号：US174155

申请日：1998-10-16

Applicant: Xiaojiang J. Pan ,  James K. Howey ,  Curtiss L. Mixon

Inventor： Xiaojiang J. Pan ,  James K. Howey ,  Curtiss L. Mixon

IPC: G12B5/00 ,  G02B7/00 ,  H01S3/02 ,  H01S3/03 ,  H01S3/034 ,  H01S3/225 ,  F16M11/00

CPC classification number: G02B7/00 ,  H01S3/02 ,  H01S3/225

Abstract: A chamber/optics support structure for a laser having a laser chamber with a vibration source. The chamber and the laser resonance cavity optical elements are supported on a platform. The chamber is supported by a plurality of wheels which in turn rests on two tracks on track supports mounted on the platform. A flexible clamp flexibly clamps the chamber in a horizontal position to align it with the resonance cavity optical elements and to substantially decouple vibration between the chamber vibration source to the optical elements in a frequency range of concern.The invention is especially useful for positioning the heavy laser chamber of a narrow band excimer laser and for decoupling vibrations resulting from its blower from the lasers line narrowing module and output coupler. In a preferred embodiment the plurality of wheels is three wheels, two of which rest in a V-groove track and one of which rests on a flat track. This preferred embodiment uses two flex-clamps each having an adjustment bolt and four symmetrically spaced silicon rubber vibration isolators. Precise horizontal alignment of the chamber is accomplished using the adjustment bolt which is then held in position with a lock nut and a clamping bolt. Silicon rubber dampers in the isolators decouple horizontal chamber vibrations from the optical elements.

Abstract translation: 一种用于具有具有振动源的激光室的激光器的腔室/光学器件支撑结构。 腔室和激光共振腔光学元件支撑在平台上。 该室由多个轮支撑，多个轮依次放置在安装在平台上的轨道支架上的两个轨道上。 柔性夹具可灵活地将腔室夹持在水平位置，以将其与谐振腔光学元件对准，并且在所考虑的频率范围内基本上将室振动源与光学元件之间的振动解耦。 本发明对于定位窄带准分子激光器的重激光室以及将其鼓风机产生的振动与激光线窄线模块和输出耦合器分离是特别有用的。 在优选实施例中，多个车轮是三个车轮，其中两个车轮搁置在V形槽轨道中，其中一个车轮搁置在平坦轨道上。 该优选实施例使用两个具有调节螺栓和四个对称间隔的硅橡胶隔振器的挠性夹具。 使用调节螺栓实现腔室的精确水平对准，调节螺栓然后通过锁紧螺母和夹紧螺栓保持在适当的位置。 隔离器中的硅橡胶阻尼器将水平室振动与光学元件分离。

公开(公告)号：US08639847B2

公开(公告)日：2014-01-28

申请号：US13116977

申请日：2011-05-26

Applicant: Michael A. Blaszczak ,  James K. Howey

Inventor： Michael A. Blaszczak ,  James K. Howey

IPC: G06F15/16

CPC classification number: G06F12/023

Abstract: The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense.The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI, a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph). Each node in the graph selected by the user represents predefined data transformation functionality, and connections between nodes define the data flow pathway.

Abstract translation: 一个实施例中的数据转换系统包括接收数据，数据目的地和存储变换数据的能力的能力，以及通过流水线从一个或多个数据流流出的数据来构建复杂的端到端数据转换功能的数据变换流水线 通过各种互连节点向一个或多个目的地发送数据，用于在数据流动时转换数据。 管道中的每个组件具有预定义的数据转换功能，组件之间的逻辑连接在操作意义上定义数据流通路。 数据转换流水线允许用户通过图形地描述和表示通过各种互连节点（图）从一个或多个源到一个或多个目的地的期望数据流来开发复杂的端到端数据变换功能。 由用户选择的图中的每个节点表示预定义的数据变换功能，并且节点之间的连接定义数据流通路。

公开(公告)号：US08259764B2

公开(公告)日：2012-09-04

申请号：US11472088

申请日：2006-06-21

Applicant: Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

Inventor： Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

IPC: H01S3/136

CPC classification number: H01S3/225 ,  H01S3/03 ,  H01S3/034 ,  H01S3/08009 ,  H01S3/137 ,  H01S3/2256

Abstract: A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.

Abstract translation: 公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。 该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。 主动波前补偿机构可以包括气动驱动机构。

公开(公告)号：US20110231576A1

公开(公告)日：2011-09-22

申请号：US13116977

申请日：2011-05-26

Applicant: Michael A. Blaszczak ,  James K. Howey

Inventor： Michael A. Blaszczak ,  James K. Howey

IPC: G06F15/16

CPC classification number: G06F12/023

Abstract: The data transformation system in one embodiment, comprises a capability to receive data, a data destination and a capability to store transformed data, and a data transformation pipeline that constructs complex end-to-end data transformation functionality by pipelining data flowing from one or more sources to one or more destinations through various interconnected nodes for transforming the data as it flows. Each component in the pipeline possesses predefined data transformation functionality, and the logical connections between components define the data flow pathway in an operational sense.The data transformation pipeline enables a user to develop complex end-to-end data transformation functionality by graphically describing and representing, via a GUI, a desired data flow from one or more sources to one or more destinations through various interconnected nodes (graph). Each node in the graph selected by the user represents predefined data transformation functionality, and connections between nodes define the data flow pathway.

Abstract translation: 一个实施例中的数据转换系统包括接收数据，数据目的地和存储变换数据的能力的能力，以及通过流水线从一个或多个数据流流出的数据来构建复杂的端到端数据转换功能的数据变换流水线 通过各种互连节点向一个或多个目的地发送数据，用于在数据流动时转换数据。 管道中的每个组件具有预定义的数据转换功能，组件之间的逻辑连接在操作意义上定义数据流通路。 数据转换流水线允许用户通过图形地描述和表示通过各种互连节点（图）从一个或多个源到一个或多个目的地的期望数据流来开发复杂的端到端数据变换功能。 由用户选择的图中的每个节点表示预定义的数据变换功能，并且节点之间的连接定义数据流通路。

公开(公告)号：US20080013589A1

公开(公告)日：2008-01-17

申请号：US11488879

申请日：2006-07-17

Applicant: John T. Melchior ,  Richard C. Ujazdowski ,  James K. Howey

Inventor： John T. Melchior ,  Richard C. Ujazdowski ,  James K. Howey

IPC: H01S3/08

CPC classification number: H01S3/034 ,  H01S3/0346 ,  H01S3/225

Abstract: A window assembly for a pressurized laser discharge chamber is disclosed and may include a housing that is formed with a recess. The assembly may also include an optic having a first side that is exposed to chamber pressure and an opposed second side, and a compliant member that may be positioned in the recess to space the second side of the optic from the housing under normal chamber operating pressures. For the assembly, the compliant member may be compressible to allow the optic to mechanically abut the assembly housing during a chamber overpressure.

Abstract translation: 公开了一种用于加压激光放电室的窗组件，并且可以包括形成有凹部的壳体。 组件还可以包括具有暴露于腔室压力的第一侧面和相对的第二侧面的光学元件，以及柔性构件，其可以定位在凹部中，以在正常室操作压力下将光学元件的第二侧与壳体间隔开 。 对于组件，柔性构件可以是可压缩的，以允许光学器件在腔室超压期间机械地邻接组件壳体。

公开(公告)号：US20070297467A1

公开(公告)日：2007-12-27

申请号：US11472088

申请日：2006-06-21

Applicant: Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

Inventor： Igor V. Fomenkov ,  William N. Partlo ,  Daniel J. Reiley ,  James K. Howey ,  Stanley C. Aguilar

IPC: H01S3/10

CPC classification number: H01S3/225 ,  H01S3/03 ,  H01S3/034 ,  H01S3/08009 ,  H01S3/137 ,  H01S3/2256

Abstract: A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.

Abstract translation: 公开了用于操作可以包括标称中心波长和带宽选择光学器件的激光输出光束脉冲线窄化机构的方法和装置; 静态波前补偿机构整形选择光学元件的曲率; 主动波前补偿机构整形选择光学元件的曲率并独立于静态波前补偿机制工作。 该方法和装置可以包括标称中心波长和带宽选择光学器件包括光栅; 静态波前补偿机构将预选的弯矩应用于光栅; 主动波前补偿机构响应于基于来自监视激光输出光束脉冲的带宽的带宽监视器的带宽反馈的弯矩控制器的控制，向光栅施加单独的选定弯矩。 主动波前补偿机构可以包括气动驱动机构。

公开(公告)号：US20070294312A1

公开(公告)日：2007-12-20

申请号：US11535358

申请日：2006-09-26

Applicant: Praveen Seshadri ,  Michiel J. Wories ,  Hongfei Guo ,  Ciprian Gerea ,  Daniel T. Jones ,  James A. Holt ,  Grigory Pogulsky ,  Sethu Srinivasan ,  James K. Howey

Inventor： Praveen Seshadri ,  Michiel J. Wories ,  Hongfei Guo ,  Ciprian Gerea ,  Daniel T. Jones ,  James A. Holt ,  Grigory Pogulsky ,  Sethu Srinivasan ,  James K. Howey

IPC: G06F17/30

CPC classification number: G06F9/44505 ,  G06F11/1458 ,  H04L41/024 ,  H04L63/20

Abstract: User productivity can be facilitated by providing an interface between a high-level intent and low-level settings that should be configured to achieve the intent. The intent can be expressed in declarative language. The intent can be verified to determine if it conforms to a target, a policy, or both. Policy binding can provide a relationship between the target and the policy. An application view can be provided that allows the user to view a server having one or more databases.

Abstract translation: 通过提供应该配置为实现意图的高级意图和低级别设置之间的接口，可以促进用户生产力。 意图可以用声明语言表达。 可以验证意图以确定其是否符合目标，策略或两者。 策略绑定可以提供目标与策略之间的关系。 可以提供允许用户查看具有一个或多个数据库的服务器的应用程序视图。

公开(公告)号：US20070288500A1

公开(公告)日：2007-12-13

申请号：US11535375

申请日：2006-09-26

Applicant: Maciek Sarnowicz ,  Praveen Seshadri ,  Vipul M. Shah ,  James A. Holt ,  Michiel J. Wories ,  Hongfei Guo ,  Ciprian Gerea ,  Daniel T. Jones ,  Oscar G. Naim ,  Grigory Pogulsky ,  Sethu Srinivasan ,  James K. Howey

Inventor： Maciek Sarnowicz ,  Praveen Seshadri ,  Vipul M. Shah ,  James A. Holt ,  Michiel J. Wories ,  Hongfei Guo ,  Ciprian Gerea ,  Daniel T. Jones ,  Oscar G. Naim ,  Grigory Pogulsky ,  Sethu Srinivasan ,  James K. Howey

IPC: G06F17/00

CPC classification number: G06F11/3495 ,  G06F11/3409 ,  G06F2201/87 ,  G06F2201/885 ,  H04L41/024 ,  H04L41/0631 ,  H04L41/0893 ,  H04L41/16 ,  H04L41/22

Abstract: User productivity can be facilitated through automated sampling and aggregation of performance or other dynamically varying data to make such data available for a wide range of uses. A data collector is provided and can be a dedicated data collector per machine, there can be multiple data collectors per machine, or there can be an instance-less data collector.

Abstract translation: 通过自动采样和聚合性能或其他动态变化的数据可以促进用户生产力，使这些数据可用于广泛的用途。 提供数据收集器，每个机器可以是专用数据收集器，每个机器可以有多个数据收集器，或者可以有一个无实例的数据收集器。

公开(公告)号：US06795474B2

公开(公告)日：2004-09-21

申请号：US10000991

申请日：2001-11-14

Applicant: William N. Partlo ,  Richard L. Sandstrom ,  Holzer K. Glatzel ,  Raymond F. Cybulski ,  Peter C. Newman ,  James K. Howey ,  William G. Hulburd ,  John T. Melchior ,  Alex P. Ivaschenko

Inventor： William N. Partlo ,  Richard L. Sandstrom ,  Holzer K. Glatzel ,  Raymond F. Cybulski ,  Peter C. Newman ,  James K. Howey ,  William G. Hulburd ,  John T. Melchior ,  Alex P. Ivaschenko

IPC: H01S322

CPC classification number: G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2366

Abstract: An excimer laser with a purged beam path capable of producing a high quality pulsed laser beam at pulse rates in excess of 2,000 Hz at pulse energies of about 5 mJ or greater. The entire purged beam path through the laser system is sealed to minimize contamination of the beam path. A preferred embodiment comprises a thermally decoupled LNP aperture element to minimize thermal distortions in the LNP. This preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter is provided with a special purge of a compartment exposed to the output laser beam.

Abstract translation: 具有清除光束路径的准分子激光器，其能够以大约5mJ或更大的脉冲能量产生超过2000Hz的脉冲速率的高质量脉冲激光束。 通过激光系统的整个清除的光束路径被密封以最小化光束路径的污染。 优选实施例包括热去耦LNP孔元件以最小化LNP中的热失真。 该优选实施例是专门设计为用于集成电路光刻的光源的ArF准分子激光器。 改进的波形计提供了暴露于输出激光束的隔室的特殊吹扫。

公开(公告)号：US6144686A

公开(公告)日：2000-11-07

申请号：US400026

申请日：1999-09-21

Applicant: Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

Inventor： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

IPC: F16F15/10 ,  G03F7/20 ,  H01S3/036 ,  H01S3/223 ,  H01S3/225 ,  H01S3/22

CPC classification number: G03F7/708 ,  H01S3/036 ,  H01S3/225

Abstract: A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.