公开(公告)号：US20120152020A1

公开(公告)日：2012-06-21

申请号：US13165436

申请日：2011-06-21

Applicant: Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

Inventor： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

IPC: G01P15/125 ,  G01P15/09 ,  G01P15/12 ,  G01P15/00

CPC classification number: G01P15/125 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/0842

Abstract: Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.

Abstract translation: 这里公开了惯性传感器。 设置有惯性传感器100，包括：板状基板层110，质量体130，柱140，从柱140在质量体130的中心方向延伸的支撑部150，以及检测单元 170检测位移部113的位移。惯性传感器采用限制质量体130的向下位移的支撑部150，以防止质量体130的支撑部被损坏。

公开(公告)号：US07728701B2

公开(公告)日：2010-06-01

申请号：US11452114

申请日：2006-06-12

Applicant: Liwei Lin ,  Firas Sammoura

Inventor： Liwei Lin ,  Firas Sammoura

IPC: H01P1/208 ,  H01P1/18 ,  H01P7/06

CPC classification number: H01P1/208 ,  H01P1/182

Abstract: An actively tunable waveguide-based iris filter having a first part including a first portion of a deformable iris filter cavity having an inlet and an outlet; a second part operatively coupled with the first part and including a second portion of the deformable iris filter cavity having a deformable membrane operatively coupled with the first portion of a deformable iris filter cavity; the first portion and the second portion together forming the deformable iris filter cavity of the tunable waveguide-based iris filter; and means for moving the deformable membrane, whereby movement of the deformable membrane changes the geometry of the deformable iris filter cavity for causing a change in the frequency of a signal being filtered by the filter. The tunable filter is fabricated using a MEMS-based process including a plastic micro embossing process and a gold electroplating process. Prototype filters were fabricated and measured with bandwidth of 4.05 GHz centered at 94.79 GHz with a minimum insertion loss of 2.37 dB and return loss better than 15 dB. A total of 2.59 GHz center frequency shift was achieved when membranes deflected from −50 μm to +150 μm.

Abstract translation: 一种可主动调谐的基于波导的虹膜滤光器，其具有第一部分，该第一部分包括具有入口和出口的可变形虹膜滤光腔的第一部分; 第二部分与第一部分可操作地联接并且包括可变形虹膜过滤器空腔的第二部分，其具有可操作地与可变形虹膜过滤器腔的第一部分耦合的可变形膜; 所述第一部分和所述第二部分一起形成所述可调谐波导基虹膜滤光器的可变形虹膜滤光腔; 以及用于移动可变形膜的装置，由此可变形膜的运动改变了可变形虹膜过滤腔的几何形状，以引起被过滤器过滤的信号频率的变化。 可调滤波器使用基于MEMS的工艺制造，包括塑料微压花工艺和金电镀工艺。 原型滤波器的制作和测量带宽为4.05 GHz，中心为94.79 GHz，插入损耗最小为2.37 dB，回波损耗优于15 dB。 当膜从-50μm偏转到+150μm时，总共获得2.59GHz的中心频移。

公开(公告)号：US20070105341A1

公开(公告)日：2007-05-10

申请号：US11598244

申请日：2006-11-09

Applicant: Brian Sosnowchik ,  Liwei Lin ,  Albert Pisano

Inventor： Brian Sosnowchik ,  Liwei Lin ,  Albert Pisano

IPC: H01L21/00 ,  H01L21/30

CPC classification number: B81C3/001 ,  B23K1/0016 ,  B23K1/002 ,  B23K1/203 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/18 ,  B23K2103/26 ,  B23K2103/52 ,  B23K2103/54 ,  B23K2103/56 ,  G01L1/2293 ,  H01L24/29 ,  H01L24/83 ,  H01L2224/29111 ,  H01L2224/2919 ,  H01L2224/83222 ,  H01L2224/83801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/0133 ,  H01L2924/014 ,  H01L2924/0665 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/30105 ,  H05B3/845 ,  H01L2924/00 ,  H01L2924/3512 ,  H01L2924/00014 ,  H01L2924/00012

Abstract: A bonding technique suitable for bonding a non-metal body, such as a silicon MEMS sensor, to a metal surface, such a steel mechanical component is rapid enough to be compatible with typical manufacturing processes, and avoids any detrimental change in material properties of the metal surface arising from the bonding process. The bonding technique has many possible applications, including bonding of MEMS strain sensors to metal mechanical components. The inventive bonding technique uses inductive heating of a heat-activated bonding agent disposed between metal and non-metal objects to quickly and effectively bond the two without changing their material properties. Representative tests of silicon to steel bonding using this technique have demonstrated excellent bond strength without changing the steel's material properties. Thus, with this induction bonding approach, silicon MEMS devices can be manufacturably bonded to mechanical steel components for real time monitoring of the conditions/environment of a steel component.

Abstract translation: 适用于将诸如硅MEMS传感器的非金属体接合到诸如钢机械部件的金属表面的接合技术足够快以与典型的制造工艺相容，并且避免了材料特性的任何有害变化 金属表面产生的粘结过程。 粘合技术具有许多可能的应用，包括将MEMS应变传感器结合到金属机械部件。 本发明的粘合技术使用设置在金属和非金属物体之间的热激活粘合剂的感应加热来快速有效地粘合两者而不改变它们的材料性质。 使用这种技术的硅到钢接合的代表性测试已经证明了优异的粘合强度，而不改变钢的材料性质。 因此，通过这种感应焊接方法，硅MEMS器件可以可制造地结合到机械钢部件上，以实时监测钢部件的状况/环境。

公开(公告)号：US20060208608A1

公开(公告)日：2006-09-21

申请号：US11381035

申请日：2006-05-01

Applicant: Jongbaeg Kim ,  Liwei Lin

Inventor： Jongbaeg Kim ,  Liwei Lin

IPC: G02B26/08 ,  H02N1/00 ,  H02K7/10 ,  H02K7/18

CPC classification number: H02N1/008 ,  G02B26/0841 ,  Y10T29/49609 ,  Y10T29/49861 ,  Y10T29/49865

Abstract: A microfabricated actuator of the vertical comb-drive (AVC) type or staggered vertical comb-drive type for torsional or linear applications includes torsion springs which permit self-aligned deformation of the device (micromirror) structure of the actuator through the heating of the torsional springs to plasticity. The torsional springs can include perpendicular-beam springs or double folded beams which allow axial movement of the spring when heated. Heating of the springs can be by bulk heating of the actuator structure or by Joule heating to the torsional springs by passing an electrical current therethrough.

Abstract translation: 用于扭转或线性应用的垂直梳驱动（AVC）型或交错垂直梳驱动型的微加速致动器包括扭簧，其允许致动器的装置（微镜）结构通过加热扭转而自对准变形 弹性到可塑性。 扭转弹簧可以包括垂直梁弹簧或双折叠梁，其允许当加热时弹簧的轴向移动。 弹簧的加热可以通过致动器结构的体积加热或者通过使电流通过其而通过焦耳加热到扭转弹簧。

公开(公告)号：US08739628B2

公开(公告)日：2014-06-03

申请号：US13165436

申请日：2011-06-21

Applicant: Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

Inventor： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

IPC: G01P15/08

CPC classification number: G01P15/125 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/0842

Abstract: An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.

Abstract translation: 惯性传感器包括板状基材层，质​​量体，支撑框架，从支撑框架沿质量体的中心方向延伸的限位挡块，以及检测位移部的位移的检测单元。 惯性传感器采用极限挡块限制质量体的向下位移，防止质量体的支撑部分损坏。

公开(公告)号：US20130081465A1

公开(公告)日：2013-04-04

申请号：US13591335

申请日：2012-08-22

Applicant: Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Won Kyu Jeung

Inventor： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Won Kyu Jeung

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Abstract translation: 这里公开了惯性传感器。 惯性传感器包括：多个驱动质量块; 支撑驱动质量的支撑体，以便在驱动质量浮动的状态下自由移动; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

公开(公告)号：US20100238085A1

公开(公告)日：2010-09-23

申请号：US12409262

申请日：2009-03-23

Applicant: Michael Yiin-kuen Fuh ,  Alexandros Margomenos ,  Liwei Lin

Inventor： Michael Yiin-kuen Fuh ,  Alexandros Margomenos ,  Liwei Lin

IPC: H01Q13/10 ,  H01P11/00

CPC classification number: H01Q13/22 ,  H01Q21/005 ,  H01Q21/0087 ,  Y10T29/49016

Abstract: The present invention discloses a waveguide antenna structure and a method of manufacture. The waveguide antenna structure can include a non-metallic substrate having a waveguide channel extending along a first direction and an inlet channel extending along a second direction. The inlet channel intersects with the waveguide channel and both channels are at least partially coated with a metallic material. The waveguide channel can have a generally U-shaped cross-section with an open side that is at partially enclosed by a slot plate that is attached to the non-metallic substrate.

Abstract translation: 本发明公开了一种波导天线结构及其制造方法。 波导天线结构可以包括具有沿着第一方向延伸的波导通道的非金属基底和沿着第二方向延伸的入口通道。 入口通道与波导通道相交，两个通道至少部分地涂有金属材料。 波导通道可以具有大致U形的横截面，其开口侧部分地被连接到非金属基底的狭槽板封闭。

公开(公告)号：US07311776B2

公开(公告)日：2007-12-25

申请号：US11027749

申请日：2004-12-29

Applicant: Liwei Lin ,  Ongi Englander ,  Dane Christensen

Inventor： Liwei Lin ,  Ongi Englander ,  Dane Christensen

IPC: C30B19/12

CPC classification number: H01L21/02532 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B33/02 ,  C01B2202/34 ,  C01B2202/36 ,  C23C16/0281 ,  C23C16/24 ,  C23C16/26 ,  H01L21/02381 ,  H01L21/02603 ,  H01L21/02606 ,  H01L21/0262 ,  H01L21/02636 ,  H01L21/02645 ,  H01L21/02653 ,  H01L51/0002 ,  H01L51/0048 ,  H01L51/0052

Abstract: Systems and methods for local synthesis of silicon nanowires and carbon nanotubes, as well as electric field assisted self-assembly of silicon nanowires and carbon nanotubes, are described. By employing localized heating in the growth of the nanowires or nanotubes, the structures can be synthesized on a device in a room temperature chamber without the device being subjected to overall heating. The method is localized and selective, and provides for a suspended microstructure to achieve the thermal requirement for vapor deposition synthesis, while the remainder of the chip or substrate remains at room temperature. Furthermore, by employing electric field assisted self-assembly techniques according to the present invention, it is not necessary to grow the nanotubes and nanowires and separately connect them to a device. Instead, the present invention provides for self-assembly of the nanotubes and nanowires on the devices themselves, thus providing for nano-to micro-integration.

Abstract translation: 描述了用于硅纳米线和碳纳米管的局部合成的系统和方法，以及硅纳米线和碳纳米管的电场辅助自组装。 通过在纳米线或纳米管的生长中采用局部加热，可以在室温室中的器件上合成结构，而不对器件进行整体加热。 该方法是局部和选择性的，并且提供悬浮的微结构以实现气相沉积合成的热需求，而芯片或衬底的其余部分保持在室温。 此外，通过采用根据本发明的电场辅助自组装技术，不需要使纳米管和纳米线生长并且将它们单独地连接到器件。 相反，本发明提供纳米管和纳米线在装置本身上的自组装，从而提供纳米到微集成。

公开(公告)号：US5759870A

公开(公告)日：1998-06-02

申请号：US520055

申请日：1995-08-28

Applicant: Weijie Yun ,  Liwei Lin ,  Tariq M. Haniff

Inventor： Weijie Yun ,  Liwei Lin ,  Tariq M. Haniff

IPC: B81B3/00 ,  G01L9/00 ,  H01L21/44 ,  H01L21/465

CPC classification number: B81C1/00047 ,  G01L9/0042 ,  G01L9/0054 ,  G01L9/0055 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C2201/0178 ,  B81C2203/0136

Abstract: Methods for surface micro-machining silicon wafers, including coating cavity sidewalls with oxidation-resistant material to prevent lateral oxidation. This in turn prevents "bird's beak" during formation of a diaphragm. The methods are useful for, among other things, the manufacture of absolute-type pressure sensors. Along with bulk micro-machining techniques, the methods can be used to produce gauge- and differential-type pressure sensors, as well.

Abstract translation: 用于表面微加工硅晶片的方法，包括具有抗氧化材料的涂层腔侧壁以防止侧向氧化。 这反过来又会在隔膜的形成期间阻止“鸟的喙”。 这些方法尤其适用于制造绝对型压力传感器。 随着大量的微加工技术，该方法也可用于生产量规和差压式压力传感器。

公开(公告)号：US5589082A

公开(公告)日：1996-12-31

申请号：US480467

申请日：1995-06-07

Applicant: Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

IPC: H03H9/46 ,  H01L21/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

Abstract translation: 具有平面部件的微机械滤波器，并且可使用非常大规模的集成电路微加工技术制造。 输入和输出换能器是叉指梳状电极。 输入和输出换能器之间的机械耦合包括平面弯曲，电极的位移产生弯曲元件的弯曲。 通过在真空中密封微机械滤波器并提供板上电路，可以实现高信噪比和质量因素。 构建使用许多微机械谐振器的实时频谱分析仪，为设备提供高精度和短的采样时间。