公开(公告)号：US07196666B2

公开(公告)日：2007-03-27

申请号：US11145911

申请日：2005-06-06

Applicant: Mark G. Allen ,  Yong-Kyu Yoon ,  Jin-Woo Park ,  Yeun-Ho Joung ,  Florent Cros ,  Ioannis Papapolymerou ,  Emmanouil Tentzeris ,  Bo Pan

Inventor： Mark G. Allen ,  Yong-Kyu Yoon ,  Jin-Woo Park ,  Yeun-Ho Joung ,  Florent Cros ,  Ioannis Papapolymerou ,  Emmanouil Tentzeris ,  Bo Pan

IPC: H01Q1/38

CPC classification number: H01Q19/32 ,  H01Q9/0407 ,  H01Q9/30

Abstract: A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.

Abstract translation: 表面微加工电磁辐射天线包括在具有导体路径的接地平面涂覆的基板上的共面波导。 导体路径耦合到单极导体，单极导体具有从衬底垂直竖立的通常为圆柱形的主体和以预定厚度沉积在骨架上的金属层。 天线可以通过在接地平面涂覆的基底上沉积环氧树脂至预定深度并根据图案来制造。 环氧树脂暴露于根据图案形成一个或多个柱的紫外线源。 可以在显影柱上形成金属种子层。 将导电金属电沉积在柱表面上以产生单极天线。 可以通过添加单极子和/或定位在单极子顶部并从衬底升高的导电金属贴片和/或条带来产生其它天线。

公开(公告)号：US07145412B2

公开(公告)日：2006-12-05

申请号：US10362435

申请日：2001-08-24

Applicant: Andrew T. Hunt ,  Mark G. Allen ,  David Kiesling ,  Robert E. Schwerzel ,  Yongdong Jiang ,  Fe Alma Gladden ,  John Wegman ,  Zhiyong Zhao ,  Matthew Scott Vinson ,  J. Eric McEntyre ,  Scott Flanagan ,  Todd Polley ,  J. Stevenson Kenney

Inventor： Andrew T. Hunt ,  Mark G. Allen ,  David Kiesling ,  Robert E. Schwerzel ,  Yongdong Jiang ,  Fe Alma Gladden ,  John Wegman ,  Zhiyong Zhao ,  Matthew Scott Vinson ,  J. Eric McEntyre ,  Scott Flanagan ,  Todd Polley ,  J. Stevenson Kenney

IPC: H01P5/04

CPC classification number: H01P1/181 ,  G02B6/12004 ,  G02B6/12007 ,  G02B6/29361 ,  G02B6/29395 ,  G02F1/0316 ,  G02F1/035 ,  G02F1/0508 ,  G02F1/0553 ,  G02F1/292 ,  H01G4/008 ,  H01G4/1227 ,  H01G4/33 ,  H01G7/06 ,  H01L21/31691 ,  H01L27/016

Abstract: Electronic and optical (or photonic) devices with variable or switchable properties and methods used to form these devices, are disclosed. More specifically, the present invention involves forming layers of conductive material and dielectric material or materials with varying conductivity and indexes of refraction to form various electronic and optical devices. One such layer of adjustable material is formed by depositing epitaxial or reduced grain boundary barium strontium titanate on the C-plane of sapphire.

公开(公告)号：US07005645B2

公开(公告)日：2006-02-28

申请号：US10294061

申请日：2002-11-14

Applicant: William A. Von Drasek ,  David Sonnenfroh ,  Mark G. Allen ,  Joy Stafford-Evans

Inventor： William A. Von Drasek ,  David Sonnenfroh ,  Mark G. Allen ,  Joy Stafford-Evans

IPC: G02B6/00

CPC classification number: F23N5/00 ,  F23N5/003 ,  G01N21/3504 ,  Y02T50/677

Abstract: An apparatus and method for simultaneous detection of N gas species through laser radiation attenuation techniques is disclosed. Each of the N species has a spectral absorption band. N laser sources operate at a wavelength λN in a spectral absorption band separated by the cutoff wavelength for single-mode transmission. Each laser source corresponds to a gas species and transmits radiation through an optical fiber constructed and arranged to provide single-mode transmission with minimal power loss.

Abstract translation: 公开了一种通过激光辐射衰减技术同时检测N种气体的装置和方法。 N种中的每一种具有光谱吸收带。 N个激光源在由单模传输的截止波长分开的光谱吸收带中以波长λN N进行操作。 每个激光源对应于气体种类并通过构造和布置成提供具有最小功率损耗的单模传输的光纤传输辐射。

公开(公告)号：US06809392B2

公开(公告)日：2004-10-26

申请号：US10371899

申请日：2003-02-20

Applicant: Mark G. Allen ,  Charles C. Chung

Inventor： Mark G. Allen ,  Charles C. Chung

IPC: H01L31058

CPC classification number: H01L21/761 ,  B81B3/0086 ,  B81B2201/033 ,  Y10S257/93

Abstract: A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.

Abstract translation: 具有电隔离组分的微加工结构通过通过衬底热掺杂掺杂剂形成，以在衬底内形成掺杂区域。 掺杂区域分离衬底的两部分。 选择掺杂剂使得掺杂区域通过结隔离将衬底的两个部分彼此电隔离。

公开(公告)号：US06588497B1

公开(公告)日：2003-07-08

申请号：US10126867

申请日：2002-04-19

Applicant: Ari Glezer ,  Raghavendran Mahalingam ,  Mark G. Allen

Inventor： Ari Glezer ,  Raghavendran Mahalingam ,  Mark G. Allen

IPC: F28G700

CPC classification number: F15D1/02 ,  F04D33/00 ,  F15D1/009 ,  G06F1/20 ,  H01L23/467 ,  H01L2924/0002 ,  H01L2924/09701 ,  Y10S165/908 ,  H01L2924/00

Abstract: One embodiment of a thermal management system comprises a heated body, where a heat energy is contained within this heated body. This first embodiment also comprises an ambient fluid adjacent to an exterior surface of the heated body. Walls forming a channel are disposed within an interior of the heated body. The heat contained in the heated body is moved into at least one of these channel walls. The first embodiment comprises a synthetic jet actuator adjacent to one of the channel walls. The synthetic jet actuator is positioned so as to direct a synthetic jet flow through the channel. The operation of the synthetic jet actuator creates a flow consisting of the ambient fluid though the channel. This flow of ambient fluid cools the walls of the channel and thereby also cools the heated body itself.

Abstract translation: 热管理系统的一个实施例包括加热体，其中热能被包含在该加热体内。 该第一实施例还包括邻近加热体的外表面的环境流体。 形成通道的壁设置在加热体的内部。 被加热体中的热量被移动到这些通道壁中的至少一个中。 第一实施例包括与通道壁之一相邻的合成射流致动器。 合成射流致动器被定位成将合成射流引导通过通道。 合成射流致动器的操作通过通道产生由环境流体组成的流。 这种流动的环境流体冷却通道的壁，从而也冷却加热体本身。

公开(公告)号：US06566251B2

公开(公告)日：2003-05-20

申请号：US09871200

申请日：2001-05-31

Applicant: Mark G. Allen ,  Florent Cros ,  Jin-Woo Park ,  Kim Kieun

Inventor： Mark G. Allen ,  Florent Cros ,  Jin-Woo Park ,  Kim Kieun

IPC: H01L214763

CPC classification number: B81C99/009 ,  B81C2201/0188

Abstract: Methods for creating one or more structures in a micromachined device. In one arrangement, the methods include the steps of providing a substrate, forming upstanding nonconductive mold walls on the substrate so that first and second wells are formed, the second well being wider than the first well. The method further includes applying a first material to the surface of the wells so that the first well fills with the first material before the second well, and removing the first material from the second well while leaving a portion in the first well.

公开(公告)号：US5909069A

公开(公告)日：1999-06-01

申请号：US935200

申请日：1997-09-22

Applicant: Mark G. Allen ,  Chong-Hyuk Ahn

Inventor： Mark G. Allen ,  Chong-Hyuk Ahn

IPC: F04D13/06 ,  F04D15/00 ,  F04D29/22 ,  H02K7/14 ,  H02K19/10 ,  H02K29/00 ,  H02K37/04 ,  H02K37/00

CPC classification number: F04D13/06 ,  F04D13/0646 ,  F04D15/0066 ,  F04D29/2283 ,  H02K19/103 ,  H02K7/14 ,  H02K99/00 ,  H02K37/04 ,  Y10S310/06

Abstract: A planar fully integrated variable reluctance micromotor (10) is microfabricated on a substrate base (18). The micromotor includes a pin (19), rotor (12) with radially extending poles (16), and a stator (20) having a plurality of poles (21) configured in pairs (22) circumferentially spaced about the rotor. The rotor is microfabricated in place, or in situ, contiguous to the substrate base. The pairs of stator poles include a multilevel core (26) wrapped around a meander conductor (27) which is connected to bonding pads (32). The variable reluctance micromotor is particularly adapted to operating as a micropump (45) for conductive fluids.

Abstract translation: 平面完全集成的可变磁阻微电机（10）在基底（18）上被微制成。 微型电动机包括具有径向延伸的极（16）的销（19），转子（12）和定子（20），定子（20）具有围绕转子周向间隔成对地配置的多个极（21）。 转子在原位或微小的位置，与基底相邻。 成对的定子极包括缠绕在与焊盘（32）连接的曲折导体（27）周围的多层铁芯（26）。 可变磁阻微电机特别适用于作为导电流体的微型泵（45）。

公开(公告)号：US5280184A

公开(公告)日：1994-01-18

申请号：US865379

申请日：1992-04-08

Applicant: Nan M. Jokerst ,  Martin A. Brooke ,  Mark G. Allen

Inventor： Nan M. Jokerst ,  Martin A. Brooke ,  Mark G. Allen

IPC: H01L21/20 ,  H01S5/02 ,  H01S5/183 ,  H01L27/14

CPC classification number: H01L27/14694 ,  H01L21/2007 ,  H01L2221/68368 ,  H01S5/0215 ,  H01S5/0217 ,  H01S5/183

Abstract: Three dimensional communication within an integrated circuit occurs via electromagnetic communication between emitters and detectors situated throughout the integrated circuit. The emitters and detectors can be produced in a diode or laser configuration. The emitters and detectors can be fabricated via novel lift-off and alignable deposition processes. Integrated circuit layers, including silicon and gallium arsenide, are transparent to the electromagnetic signals propagated from the emitter and received by the detector. Furthermore, arrays of optical detectors can be implemented to perform image processing with tremendous speed. Processing circuitry can be situated directly below the optical detectors to process in massive parallel signals from individual optical detectors.

Abstract translation: 通过位于整个集成电路的发射器和检测器之间的电磁通信，发生集成电路内的三维通信。 发射器和检测器可以以二极管或激光器配置产生。 发射器和检测器可以通过新颖的剥离和可对准的沉积工艺制造。 包括硅和砷化镓的集成电路层对从发射器传播并由检测器接收的电磁信号是透明的。 此外，可以实现光学检测器的阵列以极大的速度进行图像处理。 处理电路可以位于光学检测器的正下方，以处理来自各个光学检测器的巨大的并行信号。

公开(公告)号：US5244818A

公开(公告)日：1993-09-14

申请号：US865126

申请日：1992-04-08

Applicant: Nan M. Jokerst ,  Martin A. Brooke ,  Mark G. Allen

Inventor： Nan M. Jokerst ,  Martin A. Brooke ,  Mark G. Allen

IPC: H01L21/20 ,  H01L21/78 ,  H01L27/146 ,  H01L33/00 ,  H01S5/02 ,  H01S5/183

CPC classification number: H01L27/14698 ,  H01L21/78 ,  H01L27/14643 ,  H01L27/14687 ,  H01L33/0062 ,  H01L2221/68354 ,  H01L2221/68368 ,  H01S5/0215 ,  H01S5/0217 ,  H01S5/183 ,  Y10S117/915 ,  Y10S148/135

Abstract: Various novel processes permit integrating thin film semiconductor materials and devices using lift off, alignment, and deposition onto a host substrate. As a result, three dimensional integrated circuits can be constructed. Three dimensional communication in an integrated circuit can be implemented via electromagnetic communication between emitters and detectors fabricated via the novel processes. Integrated circuit layers are transparent to the electromagnetic signals propagated from the emitter and received by the detector. Furthermore, arrays of optical detectors can be implemented to perform image processing with tremendous speed. Processing circuitry can be situated directly below the optical detectors to process in massive parallel signals from individual optical detectors.

Abstract translation: 各种新颖的工艺允许将薄膜半导体材料和器件集成到主机衬底上，使用剥离，取向和沉积。 结果，可以构造三维集成电路。 集成电路中的三维通信可以通过经由新颖工艺制造的发射器和检测器之间的电磁通信来实现。 集成电路层对从发射器传播并由检测器接收的电磁信号是透明的。 此外，可以实现光学检测器的阵列以极大的速度进行图像处理。 处理电路可以位于光学检测器的正下方，以处理来自各个光学检测器的巨大的并行信号。

公开(公告)号：US08849072B2

公开(公告)日：2014-09-30

申请号：US12704174

申请日：2010-02-11

Applicant: Juan Montoya ,  Mark G. Allen ,  Joel M. Hensley ,  Krishnan R. Parameswaran ,  Rajeev Ram

Inventor： Juan Montoya ,  Mark G. Allen ,  Joel M. Hensley ,  Krishnan R. Parameswaran ,  Rajeev Ram

IPC: G02F1/295 ,  G02B6/12 ,  G02B6/02 ,  G02B6/122 ,  G02F1/095 ,  G02F1/01 ,  B82Y20/00

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  G02B2006/12097 ,  G02F1/011 ,  G02F1/0955 ,  G02F2203/10

Abstract: An optical device for integrated photonic applications includes a substrate, a dielectric waveguide and a surface plasmon waveguide. The dielectric waveguide includes a dielectric waveguide core disposed relative to a dielectric waveguide cladding and a common cladding. The surface plasmon waveguide includes a surface plasmon waveguide core disposed relative to the common cladding and a surface plasmon waveguide cladding. The common cladding couples the dielectric waveguide and the surface plasmon waveguide.

Abstract translation: 用于集成光子应用的光学装置包括基板，电介质波导和表面等离子体波导。 电介质波导包括相对于电介质波导包层和公共包层设置的电介质波导芯。 表面等离子体激元波导包括相对于公共包层设置的表面等离子体波导芯和表面等离子体激元波导包层。 公共覆层耦合介质波导和表面等离子体波导。