Abstract:
Enhanced fidelity of pattern transfer of aqueous developable photoresist compositions is achieved with top antireflective coatings which are fluorine-containing and have a refractive index approximately equal to the square root of the underlying photoresist and which are removable in the developer for the photoresist.
Abstract:
A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
Abstract:
An antireflective coating composition (ARC) for use with chemically amplified photoresist compositions comprising a polymer composition which is highly absorbent to mid and deep UV radiation, which is substantially inert to contact reactions with a chemically amplified photoresist composition, and which is insoluble in the developer for the chemically amplified photoresist composition.
Abstract:
A protective material for use as an overcoating film for acid catalyzed resist compositions comprising a polymeric film forming compound, the films of which are impermeable to vapors of organic and inorganic bases.
Abstract:
A non-destructive test system for determining the number, size and location of pinhole defects in insulative coatings on a semiconductor substrate employing photocathodic current measurement at the semiconductor surface. This current is produced by contacting the coated semiconductor with an aqueous electrolyte, applying a small electrical bias with respect to a metal electrode, and scanning a small, focused light beam over the semiconductor surface. The frequency of current peaks produced is proportional to defect density. Current peaks provide data relative to defect size and location is correlated relative to scanning data to determine defect location.
Abstract:
A buoyant, flexible, resilient aquatic mat for use on water surfaces adapted to support one or more persons. The mat comprises an elongated slab and a headrest formed of the same material. The material of the mat comprises a unicellular, non-water absorbent, plastic foam. The material comprising the mat may have a tough plastic coating over the entire surface or by use of a suitable plastic foam material the material comprising the mat may be used without a coating. A series of parallel grooves with rounded inner surfaces extends into the mat from its lower surface. The grooves formed with heated rounded bars to provide density increased skin surfaces in areas of the grooves.
Abstract:
A buoyant, flexible, resilient aquatic mat for use on water surfaces adapted to support one or more persons. The mat comprises an elongated slab and a headrest formed of the same material. The material of the mat comprises a unicellular, non-water absorbent, plastic foam having a tough plastic coating over the entire surface. The headrest comprises a transverse void which provides additional buoyancy. Several embodiments of the aquatic mat are described, and in addition, a modification applicable to all the embodiments, wherein the void of the headrest is enclosed at both ends to provide a closed air chamber and alternatively, the closed air chamber can have vent holes communicating therewith through the bottom of the headrest.
Abstract:
Light transmissive structures include a light transmissive substrate that includes optical microstructures. The optical microstructures have a geometric feature that is configured to reduce glare in light transmitted through the light transmissive structure. Moreover, the plurality of optical microstructures also have a geometric feature that is configured to vary randomly and/or pseudorandomly across the light transmissive substrate so as to diffuse light transmitted through the light transmissive structure. Related fabrication methods are also described.
Abstract:
The invention relates to a sealed duct vehicle cab post. A cab frame includes a hollow cab post having an air vent in a sidewall thereof and open first and second ends. A piece of unexpanded foam is attached to a clip. The clip has a base forming a foam piece support to which the piece of unexpanded foam is attached. The clip has a gripping member, and an arm connecting the base to the gripping member. The clip and the foam piece are inserted through the vent and into the post so that the unexpanded foam piece is inside the post and spaced apart from an edge of the vent and between the vent and the first end of the post. The gripping member is coupled to the post so that the gripping member grips, an edge of the vent. The cab frame and/or the post is then heated so that the foam expands and forms a seal within the post between the vent and the first end of the post. The result is a cab post with a sealed lower end wherein conditioned air from a roof mounted HVAC unit will flow from the upper end of the post, through the post to the vent and out of the vent and into the interior of the cab.