OPTICAL MODULATOR AND OPTICAL TRANSMISSION APPARATUS

    公开(公告)号:US20240142848A1

    公开(公告)日:2024-05-02

    申请号:US18493538

    申请日:2023-10-24

    CPC classification number: G02F1/2255 G02F1/0121 G02F1/0356 G02F1/212

    Abstract: An optical modulator includes an optical waveguide device including an optical waveguide and a signal electrode for controlling a light wave propagating through the optical waveguide, a drive circuit that outputs two high-frequency signals, and two termination resistors for respectively terminating the two high-frequency signals, in which one high-frequency signal among the high-frequency signals output from the drive circuit propagates through the signal electrode of the optical waveguide device and is terminated by a first termination resistor that is one of the termination resistors, an other high-frequency signal among the high-frequency signals output from the drive circuit is terminated by a second termination resistor that is an other one of the termination resistors, a resistance value of the first termination resistor is lower than a resistance value of the second termination resistor, and the signal electrode includes a plurality of sections having constant impedances different from each other.

    OPTICAL WAVEGUIDE ELEMENT, AND OPTICAL TRANSMISSION APPARATUS AND OPTICAL MODULATION DEVICE USING SAME

    公开(公告)号:US20240134117A1

    公开(公告)日:2024-04-25

    申请号:US18279021

    申请日:2021-09-29

    CPC classification number: G02B6/1228 G02B2006/12097

    Abstract: An optical waveguide device in which an optical loss is reduced by removing an air bubble inside an adhesive layer for joining a reinforcing member from near an optical waveguide or the like even in a case where a protruding part such as a rib type optical waveguide or a spot size converter is formed on an optical waveguide substrate is provided. An optical waveguide device includes an optical waveguide substrate (1, 2) provided with an optical waveguide (10, 12), and a reinforcing member (3) disposed on an upper side of the optical waveguide (10, 12) near an end portion of the optical waveguide (10, 12), the optical waveguide substrate (1, 2) and the reinforcing member (3) being joined through an adhesive layer (4), in which a protective layer (13) that covers the optical waveguide (10, 12) is provided on the optical waveguide (10, 12) positioned on a lower side of the reinforcing member (3), and the adhesive layer (4) is disposed outside the protective layer (13).

    ELECTROSTATIC CHUCK DEVICE
    14.
    发明公开

    公开(公告)号:US20240075575A1

    公开(公告)日:2024-03-07

    申请号:US18365514

    申请日:2023-08-04

    CPC classification number: B23Q11/126 B23Q3/1543 H02N13/00

    Abstract: An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk shape which has a central axis at a center thereof, and a coolant channel extending along the support surface is provided inside the base part, wherein the coolant channel includes an outer peripheral channel which overlaps an outer edge of the plate-shaped sample when viewed from an axial direction of the central axis, and an inner peripheral channel which is disposed on an inner side in a radical direction than the outer peripheral channel, wherein at least a portion of the inner peripheral channel extends spirally around the central axis, and a channel cross-sectional area of the inner peripheral channel decreases as a distance from the central axis increases.

    OPTICAL MODULATOR AND OPTICAL TRANSMISSION DEVICE USING SAME

    公开(公告)号:US20230350235A1

    公开(公告)日:2023-11-02

    申请号:US18025843

    申请日:2022-01-26

    CPC classification number: G02F1/0113 G02F1/0102 G02F1/0121

    Abstract: An optical modulator with which electrical connection between a signal electrode and signal wiring of a wiring substrate can be reliably made even in a case where a width of the signal electrode in an action portion of an optical control substrate is narrow is provided. An optical modulator includes an optical control substrate (1) that includes an optical waveguide (OW) including at least a branched waveguide which branches one light wave into two light waves, and that includes a control electrode for applying an electrical field to the branched waveguide, and a wiring substrate provided with a wiring which relays an electrical signal to be applied to the control electrode or with a wiring which terminates the electrical signal, in which the control electrode is provided with a signal electrode (S), the wiring is provided with signal wiring, and in a part (Sc) in which electrical connection is made between the signal electrode (S) and the signal wiring, a clearance (W1) in which the branched waveguide (OW) sandwiches the signal electrode is wider than a clearance (W2) in which the branched waveguide sandwiches the signal electrode in an action portion in which the control electrode applies the electrical field to the branched waveguide.

    ELECTROSTATIC CHUCK
    18.
    发明公开
    ELECTROSTATIC CHUCK 审中-公开

    公开(公告)号:US20230290620A1

    公开(公告)日:2023-09-14

    申请号:US17999830

    申请日:2021-05-27

    Abstract: Provided is an electrostatic chuck device including: an electrostatic chuck plate which has a dielectric substrate having a placement surface on which a wafer is placed and electrodes positioned in the dielectric substrate; a focus ring which is installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface; and a power connection portion which connects the electrode and a power supply. The electrostatic chuck plate has a first electrode positioned in a region overlapping the placement surface in plan view and a second electrode positioned in a region overlapping the focus ring in plan view. The power connection portion includes a power wire electrically connecting the first electrode and the second electrode via a current regulator.

    OPTICAL WAVEGUIDE DEVICE, OPTICAL MODULATOR, OPTICAL MODULATION MODULE, AND OPTICAL TRANSMISSION APPARATUS

    公开(公告)号:US20230258967A1

    公开(公告)日:2023-08-17

    申请号:US18012021

    申请日:2021-08-03

    CPC classification number: G02F1/0356 G02F1/212 G02B6/4206

    Abstract: In an optical waveguide device using a convex optical waveguide, the absorption loss of guided light at an intersection between an optical waveguide and an electrode is reduced, without deteriorating optical characteristics and reducing long-term reliability. Provided is an optical waveguide device including a substrate on which an optical waveguide is formed, and an electrode having an intersection crossing over the optical waveguide on the substrate, in which the optical waveguide is formed with a protruding portion extending on the substrate, a resin layer is provided between the optical waveguide and the electrode at the intersection, the resin layer is formed to cover an upper surface and a side surface of the protruding portion of the optical waveguide, and in a cross section along a width direction of the optical waveguide, a boundary with the electrode is formed with a curve.

    SURFACE-MODIFIED ZINC OXIDE PARTICLES, LIQUID DISPERSION, AND COSMETIC

    公开(公告)号:US20230218488A1

    公开(公告)日:2023-07-13

    申请号:US17997348

    申请日:2020-04-30

    Abstract: Surface-modified zinc oxide particles which have a silane coupling agent having an alkoxy group on surfaces thereof, in which d50 when measured with a laser diffraction/scattering type particle size distribution-measuring instrument by the following measurement method is 4 μm or less. (Measurement method) 10 g of the surface-modified zinc oxide particles, 88 g of cyclopentasiloxane, and 2 g of polyglyceryl-3 polydimethylsiloxyethyl dimethicone are mixed to obtain a liquid mixture, a dispersion treatment is performed on the obtained liquid mixture at 9,500 rpm for 5 minutes using a homogenizer to obtain a liquid dispersion, the liquid dispersion is diluted with cyclopentasiloxane so that a content of the surface-modified zinc oxide particles in the obtained liquid dispersion is 0.01% by mass to produce a measurement solution, and d50 is measured with the laser diffraction/scattering type particle size distribution-measuring instrument using the obtained measurement solution.

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