公开(公告)号：US08388089B2

公开(公告)日：2013-03-05

申请号：US12917098

申请日：2010-11-01

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J29/38 ,  B41J29/393 ,  B41J2/135

CPC分类号： B41J2/12 ,  B41J2/04563 ,  B41J2/16579

摘要： A discharge test device including: a head that includes a plurality of nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a detection electrode that faces the head with a predetermined distance therebetween, an identification section that applies a predetermined voltage to the detection electrode and identifies an abnormal nozzle on the basis of voltage change of the detection electrode generated by liquid discharge from the nozzles, and a control section that controls the head and the identification section so that: when the temperature obtained by the temperature obtaining section is within a first temperature range, the head discharges the liquid to the medium after the identification section identifies the abnormal nozzle, when the temperature obtained by the temperature obtaining section is outside the first temperature range and within a second temperature range that is larger than the first temperature range, the head discharges the liquid to the medium without the abnormal nozzle being identified by the identification section, and when the temperature obtained by the temperature obtaining section is outside the second temperature range, the abnormal nozzle is not identified and the liquid is not discharged to the medium.

摘要翻译： 一种放电测试装置，包括：头，其包括将液体排出到介质的多个喷嘴，获得与头相关的温度的温度获取部，与其之间具有预定距离的头部的检测电极;识别部， 对检测电极施加预定的电压，并根据从喷嘴的液体排出产生的检测电极的电压变化来识别异常喷嘴;以及控制部，其控制头部和识别部，使得：当获得的温度 通过温度获取部在第一温度范围内，当由温度获取部获得的温度在第一温度范围之外且在第二温度范围内时，在识别部识别异常喷嘴之后，喷头将液体排出到介质 大于第一温度范围t 他的头部将液体排出到介质上，而不会由识别部分识别出异常的喷嘴，当温度获取部分获得的温度超出第二温度范围时，不会识别出异常喷嘴，液体不会排放到 中。

公开(公告)号：US08143573B2

公开(公告)日：2012-03-27

申请号：US12490775

申请日：2009-06-24

申请人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

发明人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

IPC分类号： G02F1/1335 ,  G01K1/08

CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2611

摘要： A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.

摘要翻译： 照射在试样上的带电粒子束被设定为具有对应于副视角的左右倾斜角。 提供了一种控制单元，其在垂直于每个扫描线上的光束上交替地向左侧倾斜和对准视角的右侧倾斜扫描样本上的光束。 以这种方式，获取图像。 通过将像差消除装置与根据近视角的光束的控制组合来实时显示分辨率的劣化被抑制的三维图像。 像差消除装置使用具有多级透镜的光学系统，通过利用透镜的作用将光束偏转回光轴来提供像差的整体消除。

公开(公告)号：US20080073534A1

公开(公告)日：2008-03-27

申请号：US11717093

申请日：2007-03-13

申请人： Junichi Katane ,  Sukehiro Ito

发明人： Junichi Katane ,  Sukehiro Ito

IPC分类号： G21K7/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2608

摘要： A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.

摘要翻译： 公开了一种能够确保高离子检测效率的扫描电子显微镜，尽管工作距离短，适用于高分辨率。 用于检测离子的离子检测器布置成比用于将样品室保持在预定真空中的第一限压孔更靠近电子源。 这种结构一方面可以实现半透镜物镜的高分辨率，另一方面可以检测由二次电子和气体分子之间的碰撞产生的离子。

公开(公告)号：US20070284542A1

公开(公告)日：2007-12-13

申请号：US11715506

申请日：2007-03-08

申请人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

发明人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

IPC分类号： G01N21/00

CPC分类号： G01N23/22 ,  H01J37/1471 ,  H01J37/28 ,  H01J2237/1501

摘要： A charged particle beam apparatus facilitating adjusting the beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a processing step (1) for measuring the sensitivity of the aligner and a processing step (2) for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus has means for determining the aligner set values, using the aligner sensitivity measured in the processing step (1) and the amount of deviation detected in the processing step (2), such that the primary charged particle beam passes through the center of the objective aperture and controlling the aligner using the aligner set values.

摘要翻译： 在光学条件被修改的情况下或者由于装置的状态变化使带电粒子束的束中心轴移动的情况下，有利于调整带电粒子束的束中心轴的带电粒子束装置。 当用偏转器（对准器）调整初级带电粒子束的束中心轴时，用于测量对准器的灵敏度的处理步骤（1）和用于检测初级带电粒子的中心之间的偏差的处理步骤（2） 提供带电粒子束和物镜孔的中心。 带电粒子束装置具有使用在处理步骤（1）中测量的对准器灵敏度和在处理步骤（2）中检测到的偏差量来确定对准器设定值的装置，使得初级带电粒子束通过 物镜光圈中心，并使用对准器设定值控制对准器。

公开(公告)号：US09202667B2

公开(公告)日：2015-12-01

申请号：US13521092

申请日：2010-08-11

申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

公开(公告)号：US08933400B2

公开(公告)日：2015-01-13

申请号：US14349630

申请日：2012-09-03

申请人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

发明人： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

IPC分类号： H01J37/30 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

摘要： Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.

摘要翻译： 提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。 具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间， 能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴， 粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。

公开(公告)号：US20130313430A1

公开(公告)日：2013-11-28

申请号：US13982805

申请日：2011-11-02

申请人： Yusuke Ominami ,  Sukehiro Ito ,  Masami Katsuyama

发明人： Yusuke Ominami ,  Sukehiro Ito ,  Masami Katsuyama

IPC分类号： H01J37/16 ,  H01J37/26

CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/2608 ,  H01J2237/2811

摘要： Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere.A charged particle beam device that adopts a thin film which partitions a vacuum atmosphere and the air atmosphere (or gaseous atmosphere) includes a charged particle optical lens barrel in which a charged particle optical system is stored, a housing in which a route along which a primary charged particle beam emitted from the charged particle optical lens barrel reaches the thin film is sustained in the vacuum atmosphere, and a mechanism that bears the charged particle optical lens barrel and first housing against a device installation surface. As the bearing mechanism, a housing having an opening through which a large-sized specimen is carried in or a mechanism having a shape other than the shape of the housing, such as, a post is adopted.

摘要翻译： 提供了一种带电粒子束装置或带电粒子显微镜，其允许在空气气氛或气体气氛中甚至观察大尺寸样品。 采用分隔真空气氛的薄膜和空气气氛（或气体气氛）的带电粒子束装置包括其中存储带电粒子光学系统的带电粒子光学镜筒，其中沿着 从带电粒子光学透镜镜筒发射的到达薄膜的初级带电粒子束在真空气氛中被维持，并且使得带电粒子光学镜片镜筒和第一壳体抵抗装置安装​​表面的机构。 作为轴承机构，采用具有大尺寸样本的开口的壳体或具有除壳体的形状以外的形状的机构，例如柱。

公开(公告)号：US08294097B2

公开(公告)日：2012-10-23

申请号：US13147980

申请日：2010-01-20

申请人： Junichi Katane ,  Sukehiro Ito

发明人： Junichi Katane ,  Sukehiro Ito

IPC分类号： H01J37/28 ,  H01J37/26 ,  G01N23/225

CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

摘要： The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

摘要翻译： 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。

公开(公告)号：US20110115841A1

公开(公告)日：2011-05-19

申请号：US12917098

申请日：2010-11-01

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J29/38

CPC分类号： B41J2/12 ,  B41J2/04563 ,  B41J2/16579

摘要： A discharge test device including: a head that includes a plurality of nozzles discharging liquid to a medium, a temperature obtaining section that obtains a temperature related to the head, a detection electrode that faces the head with a predetermined distance therebetween, an identification section that applies a predetermined voltage to the detection electrode and identifies an abnormal nozzle on the basis of voltage change of the detection electrode generated by liquid discharge from the nozzles, and a control section that controls the head and the identification section so that: when the temperature obtained by the temperature obtaining section is within a first temperature range, the head discharges the liquid to the medium after the identification section identifies the abnormal nozzle, when the temperature obtained by the temperature obtaining section is outside the first temperature range and within a second temperature range that is larger than the first temperature range, the head discharges the liquid to the medium without the abnormal nozzle being identified by the identification section, and when the temperature obtained by the temperature obtaining section is outside the second temperature range, the abnormal nozzle is not identified and the liquid is not discharged to the medium.

摘要翻译： 一种放电测试装置，包括：头，其包括将液体排出到介质的多个喷嘴，获得与头相关的温度的温度获取部，与其之间具有预定距离的头部的检测电极;识别部， 对检测电极施加预定的电压，并根据从喷嘴的液体排出产生的检测电极的电压变化来识别异常喷嘴;以及控制部，其控制头部和识别部，使得：当获得的温度 通过温度获取部在第一温度范围内，当由温度获取部获得的温度在第一温度范围之外且在第二温度范围内时，在识别部识别异常喷嘴之后，喷头将液体排出到介质 大于第一温度范围t 他的头将液体排放到介质上，而不会由识别部分识别出异常的喷嘴，当温度获得部分获得的温度在第二温度范围之外时，不会识别异常喷嘴，液体不会排放到 中。

公开(公告)号：US20110090284A1

公开(公告)日：2011-04-21

申请号：US12902963

申请日：2010-10-12

申请人： Sukehiro Ito

发明人： Sukehiro Ito

IPC分类号： B41J2/135

CPC分类号： B41J2/14274 ,  B41J2/0451 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/16547 ,  B41J2/16579

摘要： The printing apparatus includes: a head which discharges liquid from a nozzle and is grounded; a detection electrode which is opposed to the nozzle at a predetermined interval and is sealed by an insulating member; a power source which ensures the detection electrode is at a predetermined potential; a determining unit which detects a change in potential of the detecting electrode that is caused by the discharge of the liquid from the nozzle and determines a nozzle that does not normally discharge the liquid to the head on the basis of the change in potential of the detection electrode; and a cap portion which abuts the head during non-printing and accommodates the detection electrode.

摘要翻译： 打印装置包括：头部，其从喷嘴排出液体并接地; 检测电极，其以预定间隔与所述喷嘴相对并且被绝缘构件密封; 确保检测电极处于预定电位的电源; 检测从喷嘴排出液体引起的检测电极的电位变化的判定单元，基于检测电位的变化，确定不能正常地将液体喷射到头部的喷嘴 电极; 以及在非打印期间与头部邻接并容纳检测电极的盖部。