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    Resonance scanner
    15.
    发明授权
    Resonance scanner 失效
    共振扫描仪

    公开(公告)号：US06975442B2

    公开(公告)日：2005-12-13

    申请号：US10474410

    申请日：2002-04-12

    Applicant: Thomas Gessner ,  Wolfram Doetzel ,  Christian Kaufmann ,  Jan Mehner ,  Ramon Hahn ,  Steffen Kurt

    Inventor： Thomas Gessner ,  Wolfram Doetzel ,  Christian Kaufmann ,  Jan Mehner ,  Ramon Hahn ,  Steffen Kurt

    IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/113

    CPC classification number: G02B26/105 ,  B81B3/004 ,  B81B2201/047 ,  G02B26/0841

    Abstract: A resonance scanner, wherein a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1), said drive plate (4) being attached within the frame (3) by two first torsion springs (6) such that the drive plate (4) can oscillate about a common first axis of torsion (8) of both torsion springs (6), said mirror (5) being attached within the drive plate (4) by two second torsion springs (7) such that the mirror (5) can oscillate about a common second axis of torsion (9) of both torsion springs (7), and said first axis of torsion (8) and said second axis of torsion (9) being parallel to each other; wherein, further, only the frame (3) of the actuator part (1) is attached to side walls (10) of a box-shaped stator part (2), a drive means (stator electrodes 15 or coil 24) is arranged at a bottom (11) of the stator part (2) only in the region of the geometrical surface area of the drive plate (4) and said bottom (11) has a recess (13) in the region of the geometrical surface area of the mirror (5), which recess (13) is dimensioned at least such that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11), said drive means (stator electrodes 15 or coil 24) applying a force only directly to the drive plate (4) and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (5), which differs from the eigenfrequency of the drive plate (4).

    Abstract translation: 一种共振扫描器，其中框架（3），驱动板（4），反射镜（5）和扭转弹簧（6,7）形成致动器部分（1），所述驱动板（4）附接在框架 （3）通过两个第一扭转弹簧（6），使得驱动板（4）能够围绕两个扭转弹簧（6）的公共第一扭转轴线（8）摆动，所述反射镜（5）附接在驱动板 （4）通过两个第二扭转弹簧（7），使得所述反射镜（5）可围绕两个扭转弹簧（7）的公共第二扭转轴线（9）摆动，并且所述第一扭转轴线（8）和所述第二扭转弹簧 扭转轴（9）彼此平行; 其特征在于，只有将致动器部件（1）的框架（3）安装在箱形定子部件（2）的侧壁（10）上，驱动装置（定子电极15或线圈24） 定子部分（2）的底部（11）仅在驱动板（4）的几何表面区域和所述底部（11）的区域中具有在所述驱动板（4）的几何表面积的区域中的凹部（13） 反射镜（5），该凹部（13）的尺寸至少使得反射镜（5）的最大机械偏转不受底部（11）限制，所述驱动装置（定子电极15或线圈24）施加力 仅直接到驱动板（4）并且具有周期性功能的所述力，其周期被调谐到与驱动板（4）的本征频率不同的反射镜（5）的本征频率。

    Method and device for producing aerogels
    17.
    发明授权
    Method and device for producing aerogels 失效
    生产气凝胶的方法和装置

    公开(公告)号：US06656527B1

    公开(公告)日：2003-12-02

    申请号：US09762003

    申请日：2002-07-03

    Applicant: Thomas Gessner ,  E. Stefan Schulz ,  Thoralf Winkler

    Inventor： Thomas Gessner ,  E. Stefan Schulz ,  Thoralf Winkler

    IPC: B05D302

    CPC classification number: H01L21/02126 ,  C01B33/1585 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/31695

    Abstract: A method of producing an aerogel layer on a substrate is described. A precursor mixture is provided by mixing at least one material selected from the group consisting of silicates, metal alcolates, aluminates and borates with a solvent. The precursor mixture is used to form a lyosol. The precursor mixture or the lyosol formed therefrom is then applied to the substrate wherein a layer of the lyosol is formed on the substrate. A gel is formed from the lyosol by chemical conversion at a temperature at which the solvent is present in a liquid state. At a pressure between 0.5-2.0 torr the ambient temperature is reduced by about 3-70k below the point at which the solvent is converted into a solid state. The solvent is then converted into a gaseous state in a drying chamber while reducing the pressure of the solvent below the triple point and removing solvent from the gel layer.

    Abstract translation: 描述了在基板上制造气凝胶层的方法。 通过将选自硅酸盐，金属醇酸盐，铝酸盐和硼酸盐的至少一种材料与溶剂混合来提供前体混合物。 前体混合物用于形成溶胶。 然后将前体混合物或由其形成的溶菌液施加到基底上，其中在基底上形成溶胶液层。 在溶剂以液态存在的温度下通过化学转化从溶胶中形成凝胶。 在0.5-2.0托之间的压力下，环境温度比溶剂转化成固态的点低约3-70k。 然后将溶剂在干燥室中转化为气态，同时将溶剂的压力降低到三重点以下，并从凝胶层除去溶剂。

    Preparation of Di- or triarylmethane dyes by oxidation
    18.
    发明授权
    Preparation of Di- or triarylmethane dyes by oxidation 失效
    通过氧化制备二 - 或三芳基甲烷染料

    公开(公告)号：US5659053A

    公开(公告)日：1997-08-19

    申请号：US615065

    申请日：1996-03-13

    Applicant: Thomas Gessner ,  Udo Mayer

    Inventor： Thomas Gessner ,  Udo Mayer

    IPC: C09B11/02 ,  C09B11/18 ,  C09B11/04 ,  C09B11/10

    CPC classification number: C09B11/02 ,  C09B11/18

    Abstract: A process for preparing di- or triarylmethane dyes by oxidation of di- or triarylmethanes in the presence of a diluent and of an oxygen transfer catalyst that contains a complexed heavy metal ion comprises using as oxidizing agent hydrogen peroxide, a hydrogen peroxide donor compound, an organic hydroperoxide or a percarboxylic acid and as the oxygen transfer catalyst a member of the class of the porphyrins, tetraaza[14]annulenes, phthalocyanines or tetraazacyclotetradecanes.

    Abstract translation: 在稀释剂和含有复合重金属离子的氧转移催化剂存在下，通过氧化二芳基甲烷或三芳基甲烷制备二芳基甲烷或三芳基甲烷染料的方法包括使用过氧化氢，过氧化氢供体化合物， 有机氢过氧化物或过羧酸，并且作为氧转移催化剂是卟啉类，四氮杂萘，酞菁或四氮杂环十四烷的成员。

    Method for the production of a substrate having a coating comprising copper, and coated substrate and device prepared by this method
    19.
    发明授权
    Method for the production of a substrate having a coating comprising copper, and coated substrate and device prepared by this method 有权
    用于生产具有包含铜的涂层的基材的方法，以及通过该方法制备的涂布的基材和装置

    公开(公告)号：US09005705B2

    公开(公告)日：2015-04-14

    申请号：US13232569

    申请日：2011-09-14

    Applicant: Thomas Waechtler ,  Stefan Schulz ,  Thomas Gessner ,  Steve Mueller ,  André Tuchscherer ,  Heinrich Lang

    Inventor： Thomas Waechtler ,  Stefan Schulz ,  Thomas Gessner ,  Steve Mueller ,  André Tuchscherer ,  Heinrich Lang

    IPC: C23C16/00 ,  C23C16/18 ,  H01L21/768 ,  H01L21/285 ,  C23C16/455

    CPC classification number: C23C16/18 ,  C23C16/45553 ,  H01L21/28562 ,  H01L21/76873 ,  H01L21/76898

    Abstract: A method for producing a substrate with a copper or a copper-containing coating is disclosed. The method comprises a first step wherein a first precursor, a second precursor and a substrate are provided. The first precursor is a copper complex that contains no fluorine and the second precursor is selected from a ruthenium complex, a nickel complex, a palladium complex or mixtures thereof. In the second step, a layer is deposited at least on partial regions of a surface of the substrate by using the first precursor and the second precursor by means of atomic layer deposition (ALD). The molar ratio of the first precursor:second precursor used for the ALD extends from 90:10 to 99.99:0.01. The obtained layer contains copper and at least one of ruthenium, nickel and palladium. Finally, a reduction is performed step in which a reducing agent acts on the substrate obtained after depositing the copper-containing layer.

    Abstract translation: 公开了一种用铜或含铜涂层制造衬底的方法。 该方法包括第一步骤，其中提供第一前体，第二前体和基底。 第一前体是不含氟的铜络合物，第二前体选自钌络合物，镍络合物，钯络合物或其混合物。 在第二步骤中，通过使用第一前体和第二前体借助于原子层沉积（ALD），至少在衬底的表面的部分区域上沉积一层。 用于ALD的第一前体：第二前体的摩尔比从90:10延伸至99.99:0.01。 所得层含有铜和钌，镍和钯中的至少一种。 最后，进行还原反应，其中还原剂作用于在沉积含铜层之后获得的基板上。

    Control device for a micromirror, method for controlling a micromirror and image projection system
    20.
    发明授权
    Control device for a micromirror, method for controlling a micromirror and image projection system 有权
    用于微镜的控制装置，用于控制微镜和图像投影系统的方法

    公开(公告)号：US08963898B2

    公开(公告)日：2015-02-24

    申请号：US13566810

    申请日：2012-08-03

    Applicant: Detlef Billep ,  Hendrik Specht ,  Kurth Steffen ,  Thomas Hilberath ,  Thomas Gessner ,  Oliver Krayl

    Inventor： Detlef Billep ,  Hendrik Specht ,  Kurth Steffen ,  Thomas Hilberath ,  Thomas Gessner ,  Oliver Krayl

    IPC: G09G5/00 ,  G02B26/08 ,  G02B26/10

    CPC classification number: G02B26/0833 ,  G02B26/101

    Abstract: A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.

    Abstract translation: 一种用于控制微镜的方法，具有以下特征：产生以第一频率编码微镜围绕第一倾斜轴的倾斜运动的第一控制信号; 产生第二控制信号，该第二控制信号以低于第一频率的第二频率编码微反射镜围绕垂直于第一倾斜轴的第二倾斜轴的倾斜运动; 以第一频率对第二控制信号进行二进制调制来调制第二控制信号; 以及使用调制的第二控制信号和第一控制信号来控制微镜的力耦合元件。

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