TFT array substrate, manufacturing method thereof, and display device
    13.
    发明授权
    TFT array substrate, manufacturing method thereof, and display device 有权
    TFT阵列基板及其制造方法以及显示装置

    公开(公告)号:US09530808B2

    公开(公告)日:2016-12-27

    申请号:US14387686

    申请日:2013-12-09

    IPC分类号: H01L27/12 H01L29/66

    CPC分类号: H01L27/1288 H01L29/66765

    摘要: A method of manufacturing a TFT array substrate and a TFT array substrate and a display device are provided. During a pattern of a gate layer (2), a pattern of the gate insulating layer (3) and a pattern of the active layer are made, a gate layer (2) material, a gate insulating layer (3) material and an active layer material are deposited successively. The gate layer (2), the gate insulating layer (3) and the active layer are made through one patterning process. At least one mask process is saved and the process complexity is reduced.

    摘要翻译: 提供一种制造TFT阵列基板和TFT阵列基板和显示装置的方法。 在栅极层(2)的图案中,形成栅极绝缘层(3)的图案和有源层的图案,栅极层(2),栅极绝缘层(3)材料和活性层 层材料依次沉积。 通过一个图案化工艺制造栅极层(2),栅极绝缘层(3)和有源层。 至少保存一个掩码进程并减少进程复杂度。

    Capacitive touch panel, display device and method for manufacturing the touch panel
    14.
    发明授权
    Capacitive touch panel, display device and method for manufacturing the touch panel 有权
    电容触摸面板,显示装置及制造触摸屏的方法

    公开(公告)号:US09513752B2

    公开(公告)日:2016-12-06

    申请号:US14345040

    申请日:2013-07-10

    IPC分类号: G06F3/044 C23F1/02 H05K3/06

    摘要: An embodiment of the present application discloses a capacitive touch panel including a base substrate, on which a plurality of transparent conductive patters being capable of transmitting touch signals and not overlapping with each are provided, and each transparent conductive pattern is an integrated pattern made of a same material layer. An embodiment of the present application further provides a method for manufacturing a capacitive touch panel, which includes forming a plurality of transparent conductive patterns on a base substrate through one mask patterning process. An embodiment of the present application further includes a display device comprising the capacitive touch panel as described above. An embodiment of the present application can save masks and can manufacture capacitive touch panels at a low cost. Furthermore, the embodiments of the present application have advantages of high production efficiency and of high yield rate.

    摘要翻译: 本申请的一个实施方案公开了一种电容式触摸屏,其包括基底,多个透明导电图案能够传输触摸信号并且不与每个透明导电图案重叠,并且每个透明导电图案是由 相同的材料层。 本申请的实施例还提供了一种用于制造电容式触摸屏的方法,其包括通过一个掩模图案化工艺在基底衬底上形成多个透明导电图案。 本申请的实施例还包括包括如上所述的电容式触摸面板的显示装置。 本申请的实施例可以节省掩模并且可以以低成本制造电容式触摸面板。 此外,本申请的实施方案具有生产效率高,产率高的优点。

    METHODS FOR PRODUCING TFT ARRAY SUBSTRATE AND DISPLAY APPARATUS
    15.
    发明申请
    METHODS FOR PRODUCING TFT ARRAY SUBSTRATE AND DISPLAY APPARATUS 审中-公开
    制造TFT阵列基板和显示装置的方法

    公开(公告)号:US20160322404A1

    公开(公告)日:2016-11-03

    申请号:US15083017

    申请日:2016-03-28

    摘要: Embodiments of the present disclosure provide a method for producing a TFT array substrate and a method for producing a display apparatus. The method for producing the TFT array substrate includes forming a semiconductor layer onto a substrate, and forming a shading pattern onto the semiconductor layer at a position at least corresponding to a channel region of the semiconductor layer, wherein the shading pattern contacts with the semiconductor layer; forming a transparent electrode of ITO material onto the substrate formed with the shading pattern, and removing the shading pattern after forming the transparent electrode.

    摘要翻译: 本公开的实施例提供一种TFT阵列基板的制造方法及显示装置的制造方法。 制造TFT阵列基板的方法包括在基板上形成半导体层,并且在至少对应于半导体层的沟道区域的位置上在半导体层上形成阴影图案,其中,阴影图案与半导体层接触 ; 在形成有阴影图案的基板上形成ITO材料的透明电极,以及在形成透明电极之后去除遮光图案。

    Method for fabricating sensor
    18.
    发明授权
    Method for fabricating sensor 有权
    制造传感器的方法

    公开(公告)号:US09171879B2

    公开(公告)日:2015-10-27

    申请号:US14123992

    申请日:2012-11-16

    IPC分类号: H01L27/146

    摘要: A method for fabricating a sensor, comprising: forming a pattern of a bias line on a base substrate by using a first patterning process; forming a pattern of a transparent electrode, a pattern of a photodiode, a pattern of a receive electrode, a pattern of a source electrode, a pattern of a drain electrode, a pattern of a data line and a pattern of an ohmic layer by using a second patterning process; forming a pattern of an active layer, a pattern of a first passivation layer, a pattern of a gate electrode and a pattern of a gate line by using a third patterning process. The above method reduces the number of used mask in the fabrication processes as well as the production cost and simplifies the production process, thereby significantly improves the production capacity and the yield rate.

    摘要翻译: 一种用于制造传感器的方法,包括:通过使用第一图案化工艺在基底基板上形成偏置线图案; 通过使用透明电极的图案,光电二极管的图案,接收电极的图案,源极的图案,漏极的图案,数据线的图案和欧姆层的图案 第二图案化过程; 通过使用第三图案化工艺形成有源层的图案,第一钝化层的图案,栅电极的图案和栅极线的图案。 上述方法减少了制造工艺中使用的掩模的数量以及生产成本,并简化了生产过程,从而显着提高了生产能力和产量。

    Space imaging overlay inspection method and array substrate
    19.
    发明授权
    Space imaging overlay inspection method and array substrate 有权
    空间成像覆盖检查方法和阵列基板

    公开(公告)号:US09127934B2

    公开(公告)日:2015-09-08

    申请号:US13704678

    申请日:2012-11-08

    IPC分类号: G01B11/14 G03F7/20 G03F9/00

    摘要: Embodiments of the invention discloses a space imaging overlay inspection method and an array substrate; the method comprises: forming a thin film having a space imaging overlay mark by photolithography; when the thin film is a transparent thin film, performing a color developing treatment on the space imaging overlay mark on the transparent thin film, so as to make the space imaging overlay mark appear in a non-transparent color; and conducting a space imaging overlay inspection between the transparent thin film and an adjacent thin film by using the space imaging overlay mark appear appearing in the non-transparent color. In the method, by conducting the color developing treatment to the space imaging overlay mark on the transparent thin film and then conducting positioning, the space imaging overlay mark can be positioned quickly and accurately, thus alignment condition between two photolithography procedures can be detected swiftly and effectively.

    摘要翻译: 本发明的实施例公开了一种空间成像覆盖检查方法和阵列基板; 该方法包括:通过光刻形成具有空间成像重叠标记的薄膜; 当薄膜是透明薄膜时,对透明薄膜上的空间成像叠加标记进行彩色显影处理,以使空间成像重叠标记以不透明的颜色出现; 并且通过使用以非透明颜色出现的空间成像叠加标记,在透明薄膜和相邻薄膜之间进行空间成像覆盖检查。 在该方法中,通过对透明薄膜上的空间成像重叠标记进行彩色显影处理,然后进行定位,可以快速准确地定位空间成像重叠标记,从而可以迅速地检测两个光刻步骤之间的对准条件, 有效。

    METHOD FOR FABRICATING SENSOR
    20.
    发明申请
    METHOD FOR FABRICATING SENSOR 有权
    制作传感器的方法

    公开(公告)号:US20150194461A1

    公开(公告)日:2015-07-09

    申请号:US14123992

    申请日:2012-11-16

    IPC分类号: H01L27/146

    摘要: A method for fabricating a sensor, comprising: forming a pattern of a bias line on a base substrate by using a first patterning process; forming a pattern of a transparent electrode, a pattern of a photodiode, a pattern of a receive electrode, a pattern of a source electrode, a pattern of a drain electrode, a pattern of a data line and a pattern of an ohmic layer by using a second patterning process; forming a pattern of an active layer, a pattern of a first passivation layer, a pattern of a gate electrode and a pattern of a gate line by using a third patterning process. The above method reduces the number of used mask in the fabrication processes as well as the production cost and simplifies the production process, thereby significantly improves the production capacity and the yield rate.

    摘要翻译: 一种用于制造传感器的方法,包括:通过使用第一图案化工艺在基底基板上形成偏置线图案; 通过使用透明电极的图案,光电二极管的图案,接收电极的图案,源极的图案,漏极的图案,数据线的图案和欧姆层的图案 第二图案化过程; 通过使用第三图案化工艺形成有源层的图案,第一钝化层的图案,栅电极的图案和栅极线的图案。 上述方法减少了制造工艺中使用的掩模的数量以及生产成本,并简化了生产过程,从而显着提高了生产能力和产量。