Trench Schottky barrier diode
    13.
    发明授权
    Trench Schottky barrier diode 有权
    沟槽肖特基势垒二极管

    公开(公告)号:US06855593B2

    公开(公告)日:2005-02-15

    申请号:US10193783

    申请日:2002-07-11

    Abstract: A fabrication process for a Schottky barrier structure includes forming a nitride layer directly on a surface of an epitaxial (“epi”) layer and subsequently forming a plurality of trenches in the epi layer. The interior walls of the trenches are then deposited with a final oxide layer without forming a sacrificial oxide layer to avoid formation of a beak bird at the tops of the interior trench walls. A termination trench is etched in the same process step for forming the plurality of trenches in the active area.

    Abstract translation: 用于肖特基势垒结构的制造方法包括在外延(“epi”)层的表面上直接形成氮化物层,随后在外延层中形成多个沟槽。 然后将沟槽的内壁沉积有最终的氧化物层,而不形成牺牲氧化物层,以避免在内部沟槽壁的顶部形成喙鸟。 在用于在有源区域中形成多个沟槽的相同工艺步骤中蚀刻端接沟槽。

    Process for counter doping N-type silicon in Schottky device Ti silicide barrier
    19.
    发明授权
    Process for counter doping N-type silicon in Schottky device Ti silicide barrier 有权
    肖特基元件Ti硅化物屏蔽中的反相掺杂N型硅的工艺

    公开(公告)号:US06846729B2

    公开(公告)日:2005-01-25

    申请号:US10254112

    申请日:2002-09-25

    CPC classification number: H01L27/0814 H01L29/66143 H01L29/8725

    Abstract: A Schottky diode is adjusted by implanting an implant species by way of a titanium silicide Schottky contact and driving the implant species into the underlying silicon substrate by a rapid anneal. The implant is at a low energy, (e.g. about 10 keV) and at a low dose (e.g. less than about 9E12 atoms per cm2) such that the barrier height is slightly increased and the leakage current reduced without forming pn junction and retaining the peak boron concentration in the titanium silicide layer.

    Abstract translation: 通过用硅化钛肖特基接触注入植入物种并通过快速退火将植入物种驱动到下面的硅衬底中来调节肖特基二极管。 植入物处于低能量(例如约10keV)和低剂量(例如小于约9E12原子/ cm 2),使得势垒高度略微增加,并且漏电流减小而不形成pn结,并且 保留钛硅化物层中的峰值硼浓度。

    Recessed termination for trench schottky device without junction curvature
    20.
    发明授权
    Recessed termination for trench schottky device without junction curvature 有权
    沟槽肖特基器件的凹陷端接无接头曲率

    公开(公告)号:US07466005B2

    公开(公告)日:2008-12-16

    申请号:US11077929

    申请日:2005-03-11

    Applicant: Davide Chiola

    Inventor: Davide Chiola

    CPC classification number: H01L29/8725 H01L29/0619 H01L29/66143

    Abstract: A trench type Schottky device has a guard ring diffusion of constant depth between the outermost of an active trench and an outer surrounding termination trench. The junction curvature of the guard ring diffusion is suppressed or cut out by the trenches.

    Abstract translation: 沟槽式肖特基器件具有在有源沟槽的最外部和外部周围终止沟槽之间的恒定深度的保护环扩散。 保护环扩散的接合曲率被沟槽抑制或切除。

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