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公开(公告)号:US20200246929A1
公开(公告)日:2020-08-06
申请号:US16854207
申请日:2020-04-21
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Guang Lu , Mehmet E. Alpay , Mike Tyler , Qian XU , Jan Kleinert , Zhibin Lin , James D. Brookhyser , Ho Wai Lo , Kurt M. Eaton
IPC: B23Q15/14 , G05B19/19 , G05B19/402
Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.
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公开(公告)号:US20170361398A1
公开(公告)日:2017-12-21
申请号:US15691344
申请日:2017-08-30
Applicant: Electro Scientific Industries, Inc.
Inventor: Jan Kleinert
IPC: B23K26/03 , H01S3/067 , H01S3/10 , B23K26/035 , B23K26/067 , H01S3/00
CPC classification number: B23K26/03 , B23K26/035 , B23K26/0676 , H01S3/005 , H01S3/0071 , H01S3/06737 , H01S3/06741 , H01S3/06754 , H01S3/1003 , H01S3/10053 , Y10T29/49165
Abstract: A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.
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13.
公开(公告)号:US20140259659A1
公开(公告)日:2014-09-18
申请号:US14214649
申请日:2014-03-14
Applicant: Electro Scientific Industries, Inc.
Inventor: Jan Kleinert
CPC classification number: B23K26/03 , B23K26/035 , B23K26/0676 , H01S3/005 , H01S3/0071 , H01S3/06737 , H01S3/06741 , H01S3/06754 , H01S3/1003 , H01S3/10053 , Y10T29/49165
Abstract: A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.
Abstract translation: 基于激光的样品处理系统的激光束定位系统在光束定位器阶段从全光纤耦合的光学相控阵激光束转向系统,转向激光输入光束产生。 系统将光束引导通过一个或多个其它光束定位器台,以形成处理安装在支撑件上的工件的目标特征的处理激光束。
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公开(公告)号:US20210376549A1
公开(公告)日:2021-12-02
申请号:US17290198
申请日:2020-02-04
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Jan Kleinert , Justin Redd , James Brookhyser
Abstract: A system includes a multi-channel beam splitter arranged and configured to split an input optical signal into a plurality of split optical signals; a plurality of phase modulators, wherein each phase modulator of the plurality of phase modulators is operative to modify a phase of a corresponding split optical signal of the plurality of split optical signals in response to a control signal; a waveguide arranged at an optical output of the plurality of phase modulators, the waveguide configured to spatially-rearrange the split optical signals output from the plurality of phase modulators into a pattern, thereby producing an optical signal pattern; and an optical amplifier arranged at an optical output of the waveguide, wherein the optical amplifier is configured to amplify the optical signal pattern produced by the waveguide.
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公开(公告)号:US20210245303A1
公开(公告)日:2021-08-12
申请号:US17272155
申请日:2019-10-02
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Hisashi Matsumoto , Jan Kleinert , Zhibin Lin
IPC: B23K26/382 , B23K26/402 , B23K26/0622
Abstract: A method for forming a through-via in a substrate having opposing first and second surfaces can include directing a focused beam of laser pulses into the substrate through the first surface of the substrate and, subsequently, through the second surface of the substrate. The focused beam of laser pulses can have a wavelength to which the substrate is at least substantially transparent and a beam waist of the focused beam of laser pulses is closer to the second surface than to the first surface. The focused beam of laser pulses is characterized by a pulse repetition rate, a peak optical intensity at the substrate and an average power at the substrate sufficient to: melt a region of the substrate near the second surface, thereby creating a melt zone within the substrate; propagate the melt zone toward the first surface; and vaporize or boil material of the substrate and located within the melt zone.
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公开(公告)号:US20210226406A1
公开(公告)日:2021-07-22
申请号:US16636605
申请日:2018-09-20
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: James Brookhyser , Jan Kleinert , Jered Richter , Kurt Eaton
Abstract: A beam positioner can be broadly characterized as including a first acousto-optic (AO) deflector (AOD) operative to diffract an incident beam of linearly polarized laser light, wherein the first AOD has a first diffraction axis and wherein the first AOD is oriented such that the first diffraction axis has a predetermined spatial relationship with the plane of polarization of the linearly polarized laser light. The beam positioner can include at least one phase-shifting reflector arranged within a beam path along which light is propagatable from the first AOD. The at least one phase-shifting reflector can be configured and oriented to rotate the plane of polarization of light diffracted by the first AOD.
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17.
公开(公告)号:US20190001442A1
公开(公告)日:2019-01-03
申请号:US15750140
申请日:2016-09-08
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Mark Unrath , Chuan Yang , Jan Kleinert , Mark Peeples , Hugh Owens , Gwendolyn Byrne , Haibin Zhang , Justin Redd , Corie Neufeld , James D. Brookhyser , Yasu Osako , Mehmet Alpay , Zhibin Lin , Patrick Riechel , Tim Nuckolls , Hisashi Matsumoto , Chris Ryder
IPC: B23K26/382 , B23K26/082 , B23K26/70 , B23K26/0622
Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.
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18.
公开(公告)号:US20160368110A1
公开(公告)日:2016-12-22
申请号:US15188496
申请日:2016-06-21
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Guang Lu , Mehmet E. Alpay , Mike Tyler , Qian XU , Jan Kleinert , Zhibin Lin , James D. Brookhyser , Ho Wai Lo , Kurt M. Eaton
IPC: B23Q15/14 , G05B19/402
CPC classification number: B23Q15/14 , G05B19/402 , G05B2219/34015 , G05B2219/50218
Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.
Abstract translation: 本发明的一个实施例可以被表征为一种用于控制多轴机床的方法,包括获得初步旋转致动器命令(其中旋转致动器指令的频率含量超过旋转致动器的带宽),产生处理旋转 至少部分地基于初步旋转致动器命令,所述处理的旋转致动器命令具有在旋转致动器的带宽内的频率含量,并且至少部分地基于第一线性致动器命令和第二线性致动器命令产生第二线性致动器命令 在加工的旋转执行器命令上。 经处理的旋转致动器命令可以被输出到旋转致动器,第一线性致动器命令可被输出到第一线性致动器,并且第二线性致动器命令可被输出到第二线性致动器。
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公开(公告)号:US20140110384A1
公开(公告)日:2014-04-24
申请号:US14059029
申请日:2013-10-21
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Jan Kleinert , Robert Reichenbach , Mark Unrath , Hisashi Matsumoto , Jefferey Howerton , Mehmet E. Alpay , Andy MOORE
IPC: B23K26/00
CPC classification number: B23K26/082 , B23K26/0006 , B23K26/009 , B23K26/352
Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.
Abstract translation: 本发明是用于标记物品和如此标记的物品的方法和装置。 它包括提供文章。 产生多组激光脉冲。 通过调制激光脉冲束来形成多个子束中的至少一个组。 多个子束中的每一个包括至少一个激光脉冲。 它还包括将多组激光脉冲引导到物品上使得多个组中的至少一个组内的激光脉冲在不彼此重叠的斑点区域处撞击物品,其中多个组内的激光脉冲 被配置为在物品上产生可见标记。
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公开(公告)号:US20140015170A1
公开(公告)日:2014-01-16
申请号:US13938099
申请日:2013-07-09
Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Inventor: Robert Reichenbach , Michael Darwin , Jan Kleinert , Mehmet Alpay , Jeffrey Howerton , Mathew Rekow , Haibin Zhang
IPC: B29C59/16
CPC classification number: B29C59/16 , B23K26/0622 , B23K26/0643 , B23K26/082 , B23K26/361 , B23K2101/007 , B23K2101/34 , B23K2101/36 , B41M5/262
Abstract: Numerous embodiments of methods and apparatus for marking articles are disclosed. In one embodiment, a method of marking an article includes providing an article having a preliminary visual appearance; modifying a region of the article; and directing a plurality of optical pulses into the modified region of the article. The plurality of optical pulses can be configured to produce a visible mark on the article. Generally, the mark can be characterized as having a modified visual appearance different from the preliminary visual appearance.
Abstract translation: 公开了用于标记物品的方法和装置的许多实施例。 在一个实施例中,标记物品的方法包括提供具有初步视觉外观的物品; 修改文章的区域; 以及将多个光脉冲引导到所述制品的修改区域中。 多个光脉冲可以被配置为在物品上产生可见标记。 通常,标记可以被表征为具有与初步视觉外观不同的修改的视觉外观。
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