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    OPTICAL DEVICE
    13.
    发明申请
    OPTICAL DEVICE 有权

    公开(公告)号：US20210132367A1

    公开(公告)日：2021-05-06

    申请号：US16625685

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: G02B26/08 ,  G01J3/45 ,  B81B3/00

    Abstract: An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.

    OPTICAL MODULE
    14.
    发明申请
    OPTICAL MODULE 有权

    公开(公告)号：US20210132366A1

    公开(公告)日：2021-05-06

    申请号：US16492712

    申请日：2018-03-14

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi SUZUKI ,  Kyosuke KOTANI ,  Tatsuya SUGIMOTO

    IPC: G02B26/08 ,  G01J3/02 ,  G01J3/45

    Abstract: An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.

    OPTICAL DEVICE
    15.
    发明申请
    OPTICAL DEVICE 有权

    公开(公告)号：US20210130159A1

    公开(公告)日：2021-05-06

    申请号：US16625687

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: B81B3/00 ,  G02B26/08 ,  H02N1/00

    Abstract: An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.

    OPTICAL DEVICE
    16.
    发明申请
    OPTICAL DEVICE 有权

    公开(公告)号：US20210132330A1

    公开(公告)日：2021-05-06

    申请号：US16625698

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: G02B7/182 ,  G02B26/08

    Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.

    OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME
    17.
    发明申请
    OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME 有权

    公开(公告)号：US20210130160A1

    公开(公告)日：2021-05-06

    申请号：US16625701

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: B81B3/00 ,  G02B26/08 ,  H02N1/00 ,  G01B9/02

    Abstract: An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.

    OPTICAL MODULE
    18.
    发明申请
    OPTICAL MODULE 审中-公开

    公开(公告)号：US20200049975A1

    公开(公告)日：2020-02-13

    申请号：US16492691

    申请日：2018-03-14

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi SUZUKI ,  Tatsuya SUGIMOTO ,  Kyosuke KOTANI

    IPC: G02B26/08 ,  G02B27/14

    Abstract: An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region which is penetrated by the movable mirror, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. A portion of the movable mirror is positioned in the space.

    LIGHT MODULE
    19.
    发明申请
    LIGHT MODULE 审中-公开

    公开(公告)号：US20200049974A1

    公开(公告)日：2020-02-13

    申请号：US16492672

    申请日：2018-03-14

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Kyosuke KOTANI ,  Tomofumi SUZUKI ,  Katsumi SHIBAYAMA ,  Noburo HOSOKAWA ,  Nao INOUE ,  Masashi ITO ,  Yutaka KURAMOTO

    IPC: G02B26/06 ,  G01J3/45 ,  G01N21/35 ,  G02B26/08 ,  B81B3/00 ,  G02B6/35

    Abstract: A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

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