公开(公告)号：US20160268390A1

公开(公告)日：2016-09-15

申请号：US15159269

申请日：2016-05-19

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Anthony I. CHOU ,  Arvind KUMAR ,  Chung-Hsun LIN ,  Shreesh NARASIMHA ,  Claude ORTOLLAND ,  Jonathan T. SHAW

IPC: H01L29/51 ,  H01L29/423 ,  H01L29/417 ,  H01L29/78

CPC classification number: H01L21/28158 ,  H01L21/02181 ,  H01L21/0223 ,  H01L21/02247 ,  H01L21/02255 ,  H01L21/02323 ,  H01L21/02332 ,  H01L21/265 ,  H01L21/26586 ,  H01L21/28176 ,  H01L21/28185 ,  H01L21/283 ,  H01L21/3065 ,  H01L21/3085 ,  H01L21/31155 ,  H01L21/324 ,  H01L21/426 ,  H01L21/823462 ,  H01L21/845 ,  H01L29/401 ,  H01L29/41791 ,  H01L29/42356 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/511 ,  H01L29/512 ,  H01L29/517 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7856

Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.

公开(公告)号：US20160260638A1

公开(公告)日：2016-09-08

申请号：US15159255

申请日：2016-05-19

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Anthony I. CHOU ,  Arvind KUMAR ,  Chung-Hsun LIN ,  Shreesh NARASIMHA ,  Claude ORTOLLAND ,  Jonathan T. SHAW

IPC: H01L21/8234 ,  H01L21/265 ,  H01L29/78 ,  H01L29/51 ,  H01L29/66 ,  H01L21/02 ,  H01L21/426

CPC classification number: H01L21/28158 ,  H01L21/02181 ,  H01L21/0223 ,  H01L21/02247 ,  H01L21/02255 ,  H01L21/02323 ,  H01L21/02332 ,  H01L21/265 ,  H01L21/26586 ,  H01L21/28176 ,  H01L21/28185 ,  H01L21/283 ,  H01L21/3065 ,  H01L21/3085 ,  H01L21/31155 ,  H01L21/324 ,  H01L21/426 ,  H01L21/823462 ,  H01L21/845 ,  H01L29/401 ,  H01L29/41791 ,  H01L29/42356 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/511 ,  H01L29/512 ,  H01L29/517 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7856

Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.

公开(公告)号：US20160204214A1

公开(公告)日：2016-07-14

申请号：US15076036

申请日：2016-03-21

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Anthony I. CHOU ,  Arvind KUMAR ,  Chung-Hsun LIN ,  Shreesh NARASIMHA ,  Claude ORTOLLAND ,  Jonathan T. SHAW

IPC: H01L29/423 ,  H01L29/51

CPC classification number: H01L21/28158 ,  H01L21/02181 ,  H01L21/0223 ,  H01L21/02247 ,  H01L21/02255 ,  H01L21/02323 ,  H01L21/02332 ,  H01L21/265 ,  H01L21/26586 ,  H01L21/28176 ,  H01L21/28185 ,  H01L21/283 ,  H01L21/3065 ,  H01L21/3085 ,  H01L21/31155 ,  H01L21/324 ,  H01L21/426 ,  H01L21/823462 ,  H01L21/845 ,  H01L29/401 ,  H01L29/41791 ,  H01L29/42356 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/511 ,  H01L29/512 ,  H01L29/517 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7856

Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.

公开(公告)号：US20160203986A1

公开(公告)日：2016-07-14

申请号：US15075960

申请日：2016-03-21

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Anthony I. CHOU ,  Arvind KUMAR ,  Chung-Hsun LIN ,  Shreesh NARASIMHA ,  Claude ORTOLLAND ,  Jonathan T. SHAW

IPC: H01L21/28 ,  H01L29/51 ,  H01L29/423

CPC classification number: H01L21/28158 ,  H01L21/02181 ,  H01L21/0223 ,  H01L21/02247 ,  H01L21/02255 ,  H01L21/02323 ,  H01L21/02332 ,  H01L21/265 ,  H01L21/26586 ,  H01L21/28176 ,  H01L21/28185 ,  H01L21/283 ,  H01L21/3065 ,  H01L21/3085 ,  H01L21/31155 ,  H01L21/324 ,  H01L21/426 ,  H01L21/823462 ,  H01L21/845 ,  H01L29/401 ,  H01L29/41791 ,  H01L29/42356 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/511 ,  H01L29/512 ,  H01L29/517 ,  H01L29/66545 ,  H01L29/6656 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7856

Abstract: An asymmetric high-k dielectric for reduced gate induced drain leakage in high-k MOSFETs and methods of manufacture are disclosed. The method includes performing an implant process on a high-k dielectric sidewall of a gate structure. The method further includes performing an oxygen annealing process to grow an oxide region on a drain side of the gate structure, while inhibiting oxide growth on a source side of the gate structure adjacent to a source region.