METHOD AND APPARATUS FOR SHAPING GAS PROFILE NEAR BEVEL EDGE
    12.
    发明申请
    METHOD AND APPARATUS FOR SHAPING GAS PROFILE NEAR BEVEL EDGE 有权
    用于形成近似气体剖面的方法和装置

    公开(公告)号:US20090084758A1

    公开(公告)日:2009-04-02

    申请号:US11866392

    申请日:2007-10-02

    Abstract: A method for etching a bevel edge of a substrate in a processing chamber is provided. The method includes flowing an inert gas into a center region of the processing chamber defined above a center region of the substrate and flowing a mixture of an inert gas and a processing gas over an edge region of the substrate. The method further includes striking a plasma in the edge region, wherein the flow of the inert gas and the flow of the mixture maintain a mass fraction of the processing gas substantially constant. A processing chamber configured to clean a bevel edge of a substrate is also provided.

    Abstract translation: 提供了一种用于在处理室中蚀刻衬底的斜边缘的方法。 该方法包括将惰性气体流入位于衬底的中心区域上方的处理室的中心区域,并将惰性气体和处理气体的混合物流过衬底的边缘区域。 该方法还包括在边缘区域中打击等离子体,其中惰性气体的流动和混合物的流动维持处理气体的质量分数基本恒定。 还提供了一种构造成清洁基板的斜边缘的处理室。

    Method for fabricating a microscale anemometer
    13.
    发明授权
    Method for fabricating a microscale anemometer 有权
    微型风速仪的制造方法

    公开(公告)号:US07451537B2

    公开(公告)日:2008-11-18

    申请号:US11132144

    申请日:2005-05-18

    Inventor: Chang Liu Jack Chen

    Abstract: Method for fabricating a microscale anemometer on a substrate. A sacrificial layer is formed on the substrate, and a metal thin film is patterned to form a sensing element. At least one support for the sensing element is patterned. The sacrificial layer is removed, and the sensing element is lifted away from the substrate by raising the supports, thus creating a clearance between the sensing element and the substrate to allow fluid flow between the sensing element and the substrate. The supports are raised preferably by use of a magnetic field applied to magnetic material patterned on the supports.

    Abstract translation: 在基板上制造微型风速计的方法。 在基板上形成牺牲层,对金属薄膜进行图案化以形成传感元件。 至少一个用于感测元件的支撑件被图案化。 去除牺牲层,并且通过升高支撑件将感测元件从基板提升离开,从而在感测元件和基板之间产生间隙,以允许流体在感测元件和基板之间流动。 优选地,通过使用施加到在支撑体上图案化的磁性材料的磁场来升高支撑件。

    Apparatus for defining regions of process exclusion and process performance in a process chamber
    14.
    发明申请
    Apparatus for defining regions of process exclusion and process performance in a process chamber 有权
    用于限定处理室中的工艺排除区域和工艺性能的装置

    公开(公告)号:US20080185105A1

    公开(公告)日:2008-08-07

    申请号:US11701854

    申请日:2007-02-02

    CPC classification number: H01L21/67069 H01J37/32568 H01L21/68721

    Abstract: Positional relationships are established in a process chamber. An upper electrode is configured with a first surface to support a wafer, and an electrode has a second surface. A linear drive is mounted on the base and a linkage connected between the drive and the upper electrode. Linkage adjustment defines a desired orientation between the surfaces. The linear drive and linkage maintain the desired orientation while the assembly moves the upper electrode with the surfaces moving relative to each other. An annular etching region defined between the electrodes enables etching of a wafer edge exclusion region extending along a top and bottom of the wafer. Removable etch defining rings are configured to define unique lengths along each of the top and bottom of the wafer to be etched. Positional relationships of the surfaces enable limiting the etching to those unique lengths of the exclusion region.

    Abstract translation: 位置关系建立在一个过程室中。 上电极配置有第一表面以支撑晶片,并且电极具有第二表面。 线性驱动器安装在基座上,连接在驱动器和上电极之间。 连接调整定义了表面之间的期望取向。 线性驱动器和连接件保持所需的取向,同时组件移动上电极,表面相对于彼此移动。 限定在电极之间的环形蚀刻区域能够蚀刻沿着晶片的顶部和底部延伸的晶片边缘排除区域。 可移除蚀刻限定环被配置为沿待蚀刻的晶片的顶部和底部的每一个限定独特的长度。 表面的位置关系使得能够将蚀刻限制到排除区域的那些独特长度。

    Multiple channel vehicle entertainment device
    15.
    发明申请
    Multiple channel vehicle entertainment device 审中-公开
    多通道车载娱乐设备

    公开(公告)号:US20070271583A1

    公开(公告)日:2007-11-22

    申请号:US11436018

    申请日:2006-05-17

    Applicant: Jack Chen

    Inventor: Jack Chen

    CPC classification number: H04N7/183

    Abstract: A vehicle entertainment center includes a plurality of bays for receiving electronically reproducible entertainment. The bays include memory card bays. The entertainment center has a plurality of channel readers with each channel reader capable of reading a separate entertainment channel accessible through one of the plurality of bays. There is also a plurality of receivers for receiving wireless transmitted entertainment from each of the channel readers. Each of the receivers is capable of selecting to receive the entertainment channel being projected by one of the channel readers and playing the selected channel to a passenger in a vehicle such that each passenger can hear and view an entertainment channel that is different from that viewed and heard by any other passenger.

    Abstract translation: 车载娱乐中心包括用于接收电子可再现娱乐的多个托架。 托架包括存储卡托架。 娱乐中心具有多个通道读取器,每个通道读取器能够读取可通过多个托架之一访问的单独娱乐通道。 还有多个接收器用于从每个通道读取器接收无线传输的娱乐。 每个接收机能够选择接收由频道阅读器中的一个投射的娱乐频道并且将所选择的频道播放到车辆中的乘客,使得每个乘客可以听到和观看与所观看的娱乐频道不同的娱乐频道, 任何其他乘客听到。

    Motorized controls for a headlight of a vehicle
    17.
    发明申请
    Motorized controls for a headlight of a vehicle 失效
    汽车头灯的电动控制装置

    公开(公告)号:US20070127254A1

    公开(公告)日:2007-06-07

    申请号:US11296741

    申请日:2005-12-07

    Applicant: Jack Chen

    Inventor: Jack Chen

    CPC classification number: B60Q1/0683 B60Q1/076

    Abstract: A vehicle headlight has a motor operated adjustable mounting for adjusting the beam of light in a plane. The adjustment device includes an ear on the headlight with an axially extendable arm, the extension of which is driven by an electric motor. Rotation of the motor causes motorized adjustment of the beam. The motor is slideably mounted in a retainer for movement parallel to the extendable arm. A manually adjustable screw adjusts the position of the motor along the slide to permit manual alignment of the headlight beam.

    Abstract translation: 车头灯具有用于调节平面中的光束的电动机操作的可调安装件。 调节装置包括在前灯上的耳朵,其具有可轴向延伸的臂,其延伸部由电动机驱动。 电机的旋转导致电动机的调整。 电动机可滑动地安装在保持器中以平行于可延伸臂移动。 手动调节的螺丝调节电动机沿着滑块的位置,以允许手动对准前照灯光束。

    Variable position sensor employing magnetic flux and housing therefore
    18.
    发明授权
    Variable position sensor employing magnetic flux and housing therefore 失效
    因此可变位置传感器采用磁通和外壳

    公开(公告)号:US07165450B2

    公开(公告)日:2007-01-23

    申请号:US10883155

    申请日:2004-07-01

    CPC classification number: G01F23/38

    Abstract: A fuel level sensor has a rotor with two magnets mounted for rotation therewith, the magnets spaced from one another and with like poles directed toward one another. A Hall effect sensor on the housing is positioned between the two magnets such that increasing the volume of fluid in the tank moves one magnet toward the sensor and decreasing the volume in the tank moves the other magnet toward the sensor. A metal sleeve around the magnets protects the parts from interference from magnetic material in the fuel. A static discharge path is provided from a metal rod connecting a float, a plate contracting the rod, and a pivot pin retaining the rotor to the housing, and a ground connector in contact with the pivot pin.

    Abstract translation: 燃料液位传感器具有转子,其具有安装成与其一起旋转的两个磁体,磁体彼此间隔开并且具有相互指向的相同磁极。 壳体上的霍尔效应传感器定位在两个磁体之间,使得增加容器中的流体的体积使一个磁体朝向传感器移动,并且减小容器中的体积将另一磁体移向传感器。 磁铁周围的金属套筒可保护零件免受燃料中磁性材料的干扰。 静电放电路径由金属棒提供,金属棒连接浮子,收缩杆的板和将转子保持在壳体上的枢轴销以及与枢轴销接触的接地连接器。

    Service broker for processing data from a data network

    公开(公告)号:US20060184657A1

    公开(公告)日:2006-08-17

    申请号:US11405978

    申请日:2006-04-17

    Abstract: A method and system for communication between server-less computing devices or clients in computers communicating over networks, such as the World Wide Web (WWW) using stateless protocols, e.g., HTTP. In this scheme there are two classes of clients which can operate independently or can be combined in computer communicating over the network: a) Clients that issue commands and request status or data, and b) clients which function as service brokers for provide services and processing commands, updating status and providing specific data. Based on the description of the latter client device it would resemble a server device but without accessible TCP/IP ports. Each service providing device is authenticated, retains a unique identity and establishes a soft state with the globally accessible server or servers. All devices and clients can compile and process a globally common command language established between all communicating network clients. The central server includes a CGI processing program and a database to retain client specific information. The server database represents a collection of queues, each having a client unique identifiable status, pending commands and/or data components. In this scheme commands and signaling transmitted between the servers and clients utilize standard HTTP protocol semantics and HTML or standard markup language syntax. Clients encapsulate or embed information as parameters passed to HTTP CGI as a set of standard HTTP conversations. A CGI processing program converts, parses or processes each conversation and passes arguments with or without data to queues. Each conversation is includes a client identification key(s) and commands which are structured as attribute-value pair tuples. The service-handler client connects to the central server and accesses the client queue on the central server to check for any pending commands or update their status in either synchronous or asynchronous manner. The synchronous server access scheme is regulated temporally by either deterministic clocking on server response or by a server based adaptive algorithm which can monitor network and client activities and optimize client access patterns.

    Variable position sensor employing capacitance
    20.
    发明授权
    Variable position sensor employing capacitance 失效
    可变位置传感器采用电容

    公开(公告)号:US07023684B1

    公开(公告)日:2006-04-04

    申请号:US11141832

    申请日:2005-06-01

    Applicant: Jack Chen

    Inventor: Jack Chen

    CPC classification number: G01D5/2415 H01G5/04 H01G5/08 H01G5/14

    Abstract: A variable position sensor has a stationary portion and a moveable portion. A plurality of plates are positioned on one of the members with the surfaces of the plates forming segments of a larger surface. A single plate is mounted on the other of the two members. One pole of an electric potential is applied to a first of the plurality of plates on the one member and the second pole of the electric potential is applied to the single plate on the other member. Similarly a pole of an electric potential is separately applied to each of the other of the parallel plates and to the one plate. When the one plate is positioned adjacent one of the plurality of plates a capacitance is formed between the adjacent plates, and by detecting the capacitance the position of the one plate can be determined.

    Abstract translation: 可变位置传感器具有静止部分和可移动部分。 多个板位于其中一个构件上,其中板的表面形成更大表面的段。 单个板安装在两个构件的另一个上。 一个电极被施加到一个构件上的多个板中的第一个,并且电位的第二极施加到另一个构件上的单个板。 类似地,电位的极分别施加到平行板中的每一个和一个板。 当一个板被定位成与多个板之一相邻时,在相邻的板之间形成电容,并且通过检测电容可以确定一个板的位置。

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