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公开(公告)号：US07514709B2
公开(公告)日：2009-04-07
申请号：US10552663
申请日：2004-04-13
申请人： Juha T. Rantala , Jyri Paulasaari , Janne Kylmä
发明人： Juha T. Rantala , Jyri Paulasaari , Janne Kylmä
IPC分类号： H01L29/08
CPC分类号： C08L83/04 , C08G77/06 , C08G77/12 , C08G77/14 , C08G77/16 , C08G77/18 , C08G77/20 , C08G77/24 , C08G77/70 , H01B3/30 , H01L21/02126 , H01L21/02211 , H01L21/02282 , H01L21/3122 , H01L23/5329 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： A low dielectric constant polymer, comprising monomeric units derived from a compound having the general formula I (R1—R2)n—Si—(X1)4-n, wherein each X1 is independently selected from hydrogen and inorganic leaving groups, R2 is an optional group and comprises an alkylene having 1 to 6 carbon atoms or an arylene, R1 is a polycycloalkyl group and n is an integer 1 to 3. The polymer has excellent electrical and mechanical properties.
摘要翻译： 低介电常数聚合物，其包含衍生自具有通式I（R1-R2）n-Si-（X1）4-n的化合物的单体单元，其中每个X1独立地选自氢和无机离去基团，R 2是 任选的基团，并且包含具有1至6个碳原子的亚烷基或亚芳基，R 1是多环烷基，n是1至3的整数。该聚合物具有优异的电学和机械性能。
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公开(公告)号：US20170088565A1
公开(公告)日：2017-03-30
申请号：US15281162
申请日：2016-09-30
申请人： Jyri Paulasaari
发明人： Jyri Paulasaari
CPC分类号： C07F7/0874 , C07F7/0838 , C07F7/089 , C07F7/0896 , C07F7/1804 , C07F7/188 , C07F7/1892 , C08G77/045 , C08G77/12 , C08G77/14 , C08G77/80
摘要： A method for preparation and polymerization of siloxane monomers of Formula I is presented. The synthesis includes the selective reaction between silanol containing unit and alkoxy containing units in the presence of basic catalyst. The siloxane monomers of the invention can be used for preparation of siloxane polymers with good flexibility and cracking threshold, and functional sites, useful for applications requiring low metal content in semiconductor industry.
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公开(公告)号：US20140249326A1
公开(公告)日：2014-09-04
申请号：US14126446
申请日：2012-06-14
申请人： Jyri Paulasaari
发明人： Jyri Paulasaari
CPC分类号： C07F7/0874 , C07F7/0838 , C07F7/089 , C07F7/0896 , C07F7/1804 , C07F7/188 , C07F7/1892 , C08G77/045 , C08G77/12 , C08G77/14 , C08G77/80
摘要： A method for preparation and polymerization of siloxane monomers of Formula I is presented. The synthesis includes the selective reaction between silanol containing unit and alkoxy containing units in the presence of basic catalyst. The siloxane monomers of the invention can be used for preparation of siloxane polymers with good flexibility and cracking threshold, and functional sites, useful for applications requiring low metal content in semiconductor industry.
摘要翻译： 提出了制备和聚合式I的硅氧烷单体的方法。 该合成包括在碱性催化剂存在下，含硅烷醇单元和含烷氧基的单元之间的选择性反应。 本发明的硅氧烷单体可用于制备具有良好柔软性和裂化阈值的硅氧烷聚合物，以及可用于半导体工业中低金属含量的应用的功能部位。
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14.发明申请公开(公告)号：US20100136798A1
公开(公告)日：2010-06-03
申请号：US12588014
申请日：2009-09-30
IPC分类号： H01L21/312 , C08G77/12
CPC分类号： H01B3/46 , C08G77/08 , C08G77/50 , C09D183/04 , C09D183/14 , H01L21/02126 , H01L21/02216 , H01L21/02282 , H01L21/3122 , H01L21/3127 , Y10T428/31663
摘要： A method for producing a polymer for semiconductor optoelectronics, comprising the steps of providing a monomer is produced having the formula: wherein: R1 is a hydrolysable group R2 is hydrogen, and R3 is a bridging linear or branched bivalent hydrocarbyl group, said monomer being produced by hydrosilylation of the corresponding starting materials, and homo- or copolymerizing the monomer to produce a polymer.
摘要翻译： 一种制备半导体光电子学聚合物的方法，包括提供具有下式的单体的步骤：其中：R1为可水解基团，R2为氢，R3为桥连的直链或支链二价烃基，所述单体的制备 通过相应起始材料的氢化硅烷化，以及均聚或共聚单体以产生聚合物。
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公开(公告)号：US20080206578A1
公开(公告)日：2008-08-28
申请号：US12071500
申请日：2008-02-21
申请人： Juha T. Rantala , Thomas Gadda , Jyri Paulasaari
发明人： Juha T. Rantala , Thomas Gadda , Jyri Paulasaari
CPC分类号： H01L21/3122 , C08G77/06 , C08G77/16 , C08G77/20 , C08G77/70 , C09D183/04 , H01B3/46 , H01L21/02126 , H01L21/02282 , Y10T428/31663
摘要： Thin films are disclosed that are suitable as thin films in IC's and for other similar applications. In particular, the invention concerns thin films comprising compositions obtainable by hydrolysis of two or more silicon compounds, which yield an at least partially cross-linked siloxane structure. The invention also concerns a method for producing such films by preparing siloxane compositions by hydrolysis of suitable reactants, by applying the hydrolyzed compositions on a substrate in the form of a thin layer and by curing the layer to form a high silicon content film.
摘要翻译： 公开了适用于IC中的薄膜和其它类似应用的薄膜。 特别地，本发明涉及包含通过水解两种或更多种硅化合物获得的组合物的薄膜，其产生至少部分交联的硅氧烷结构。 本发明还涉及通过将水解的组合物以薄层的形式施加在基材上并通过固化该层以形成高硅含量的膜而通过水解合适的反应物制备硅氧烷组合物来生产这种膜的方法。
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16.发明授权公开(公告)号：US09190616B2
公开(公告)日：2015-11-17
申请号：US14126447
申请日：2012-06-14
申请人： Jyri Paulasaari , Juha T. Rantala
发明人： Jyri Paulasaari , Juha T. Rantala
IPC分类号： H01L51/00 , C07F7/18 , C07F7/30 , C08G77/392
CPC分类号： H01L51/0036 , C07F7/1804 , C07F7/30 , C08G77/392 , H01L51/0074 , H01L51/0094
摘要： Synthesis of thianthrene moiety containing silane and germane monomers and their polymerization is presented. The polymers show high refractive index, high transparency and excellent thermal stability. They are useful as dielectric films for semiconductor industry and for optical applications, including high-RI materials in CMOS image sensors.
摘要翻译： 提出了含有硅烷和锗烷单体的噻蒽部分的合成及其聚合。 聚合物显示出高折射率，高透明度和优异的热稳定性。 它们可用作半导体工业和光学应用的介电膜，包括CMOS图像传感器中的高RI材料。
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公开(公告)号：US08952121B2
公开(公告)日：2015-02-10
申请号：US13489515
申请日：2012-06-06
申请人： Jyri Paulasaari
发明人： Jyri Paulasaari
IPC分类号： C08G8/02
CPC分类号： C08G8/02 , C08G2261/3142 , C08K5/0025 , C08K5/14 , C08K5/29 , G03F7/038 , Y10T428/24479 , C08L65/00
摘要： A novel novolac prepared by acid catalyzed condensation between biphenols or bisphenofluorenes and fluorenone is presented. The polymers exhibit excellent oxidative thermal stability and high carbon content, suitable for dielectric, etch stop applications as spin-on material.
摘要翻译： 提出了通过双酚或双酚芴和芴酮之间的酸催化缩合制备的新型酚醛清漆。 聚合物表现出优异的氧化热稳定性和高碳含量，适用于电介质，蚀刻停止应用作为旋涂材料。
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公开(公告)号：US20120322010A1
公开(公告)日：2012-12-20
申请号：US13489515
申请日：2012-06-06
申请人： Jyri Paulasaari
发明人： Jyri Paulasaari
CPC分类号： C08G8/02 , C08G2261/3142 , C08K5/0025 , C08K5/14 , C08K5/29 , G03F7/038 , Y10T428/24479 , C08L65/00
摘要： A novel novolac prepared by acid catalyzed condensation between biphenols or bisphenofluorenes and fluorenone is presented. The polymers exhibit excellent oxidative thermal stability and high carbon content, suitable for dielectric, etch stop applications as spin-on material.
摘要翻译： 提出了通过双酚或双酚芴和芴酮之间的酸催化缩合制备的新型酚醛清漆。 聚合物表现出优异的氧化热稳定性和高碳含量，适用于电介质，蚀刻停止应用作为旋涂材料。
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