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11.
公开(公告)号:US20210125919A1
公开(公告)日:2021-04-29
申请号:US16663683
申请日:2019-10-25
Applicant: Micron Technology, Inc.
Inventor: Vladimir Machkaoutsan , Pieter Blomme , Emilio Camerlenghi , Justin B. Dorhout , Jian Li , Ryan L. Meyer , Paolo Tessariol
IPC: H01L23/522 , H01L23/528 , H01L27/11524 , H01L27/11556 , H01L27/1157 , H01L27/11582
Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second dummy pillars are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.
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公开(公告)号:US11818893B2
公开(公告)日:2023-11-14
申请号:US17819009
申请日:2022-08-11
Applicant: Micron Technology, Inc.
Inventor: Umberto Maria Meotto , Emilio Camerlenghi , Paolo Tessariol , Luca Laurin
IPC: H10B43/40 , H01L23/522 , H01L23/528 , H01L23/544 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/27 , H10B43/35
CPC classification number: H10B43/40 , H01L23/5226 , H01L23/5283 , H01L23/544 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/27 , H10B43/35 , H01L2223/54426
Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
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公开(公告)号:US20220068317A1
公开(公告)日:2022-03-03
申请号:US17243937
申请日:2021-04-29
Applicant: Micron Technology, Inc.
Inventor: Yoshiaki Fukuzumi , Paolo Tessariol , David H. Wells , Lars P. Heineck , Richard J. Hill , Lifang Xu , Indra V. Chary , Emilio Camerlenghi
IPC: G11C5/06 , H01L21/50 , H01L25/065 , H01L27/11556 , H01L27/11582
Abstract: Some embodiments include an integrated assembly having a pair of adjacent memory-block-regions, and having a separator structure between the adjacent memory-block-regions. The memory-block-regions include a first stack of alternating conductive levels and first insulative levels. The separator structure includes a second stack of alternating second and third insulative levels. The second insulative levels are substantially horizontally aligned with the conductive levels, and the third insulative levels are substantially horizontally aligned with the first insulative levels. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US20200211660A1
公开(公告)日:2020-07-02
申请号:US16267488
申请日:2019-02-05
Applicant: MICRON TECHNOLOGY, INC.
Inventor: Violante Moschiano , Tecla Ghilardi , Tommaso Vali , Emilio Camerlenghi , William C. Filipiak , Andrea D'Alessandro
IPC: G11C16/34 , G11C16/26 , G11C5/06 , G11C11/413 , G11C8/08
Abstract: Methods of operating a memory, and memory configured to perform similar methods, might include sensing a state of each data line of a plurality of data lines while increasing a voltage level applied to each access line of a plurality of access lines commonly connected to a plurality of strings of series-connected memory cells, ceasing increasing the voltage level applied to each access line of the plurality of access lines in response to the state of each data line of the plurality of data lines having a particular condition, changing a voltage level applied to a particular access line of the plurality of access lines to a particular voltage level, and sensing a state of each data line of a subset of the plurality of data lines while applying the particular voltage level to the particular access line.
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公开(公告)号:US20200168622A1
公开(公告)日:2020-05-28
申请号:US16200158
申请日:2018-11-26
Applicant: Micron Technology, Inc.
Inventor: Yoshiaki Fukuzumi , M. Jared Barclay , Emilio Camerlenghi , Paolo Tessariol
IPC: H01L27/11582 , H01L27/11565 , H01L21/768 , H01L21/28
Abstract: A method used in forming a memory array comprises forming a tier comprising conductor material above a substrate. Sacrificial islands comprising etch-stop material are formed directly above the conductor material of the tier comprising the conductor material. A stack comprising vertically-alternating insulative tiers and wordline tiers is formed above the sacrificial islands and the tier comprising the conductor material. Etching is conducted through the insulative tiers and the wordline tiers to the etch-stop material of individual of the sacrificial islands to form channel openings that have individual bases comprising the etch-stop material. The sacrificial islands are removed through individual of the channel openings to extend the individual channel openings to the tier comprising the conductor material. Channel material is formed in the extended-channel openings to the tier comprising the conductor material. The channel material is electrically coupled with the conductor material of the tier comprising the conductor material. Structure independent of method is disclosed.
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公开(公告)号:US09214389B2
公开(公告)日:2015-12-15
申请号:US14265168
申请日:2014-04-29
Applicant: Micron Technology, Inc.
Inventor: Niccolo′ Righetti , Sara Vigano , Emilio Camerlenghi
IPC: H01L21/76 , H01L21/768
CPC classification number: H01L21/76802 , H01L21/76877 , H01L27/0688 , H01L27/105
Abstract: Some embodiments include methods of forming memory arrays. An assembly is formed which has an upper level over a lower level. The lower level includes circuitry. The upper level includes semiconductor material within a memory array region, and includes insulative material in a region peripheral to the memory array region. First and second trenches are formed to extend into the semiconductor material. The first and second trenches pattern the semiconductor material into a plurality of pedestals. The second trenches extend into the peripheral region. Contact openings are formed within the peripheral region to extend from the second trenches to the first level of circuitry. Conductive material is formed within the second trenches and within the contact openings. The conductive material forms sense/access lines within the second trenches and forms electrical contacts within the contact openings to electrically couple the sense/access lines to the lower level of circuitry.
Abstract translation: 一些实施例包括形成存储器阵列的方法。 形成了在较低水平上具有较高水平的组件。 下层包括电路。 上层包括存储器阵列区域内的半导体材料,并且在存储器阵列区域周围的区域中包括绝缘材料。 第一和第二沟槽形成为延伸到半导体材料中。 第一和第二沟槽将半导体材料图案化成多个基座。 第二沟槽延伸到周边区域。 在周边区域内形成接触开口以从第二沟槽延伸到电路的第一级。 导电材料形成在第二沟槽内部和接触开口内。 导电材料在第二沟槽内形成感测/接入线,并在接触开口内形成电接触,以将感测/接入线电耦合到较低级别的电路。
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公开(公告)号:US20150311115A1
公开(公告)日:2015-10-29
申请号:US14265168
申请日:2014-04-29
Applicant: Micron Technology, Inc.
Inventor: Niccolo' Righetti , Sara Vigano , Emilio Camerlenghi
IPC: H01L21/768
CPC classification number: H01L21/76802 , H01L21/76877 , H01L27/0688 , H01L27/105
Abstract: Some embodiments include methods of forming memory arrays. An assembly is formed which has an upper level over a lower level. The lower level includes circuitry. The upper level includes semiconductor material within a memory array region, and includes insulative material in a region peripheral to the memory array region. First and second trenches are formed to extend into the semiconductor material. The first and second trenches pattern the semiconductor material into a plurality of pedestals. The second trenches extend into the peripheral region. Contact openings are formed within the peripheral region to extend from the second trenches to the first level of circuitry. Conductive material is formed within the second trenches and within the contact openings. The conductive material forms sense/access lines within the second trenches and forms electrical contacts within the contact openings to electrically couple the sense/access lines to the lower level of circuitry.
Abstract translation: 一些实施例包括形成存储器阵列的方法。 形成了在较低水平上具有较高水平的组件。 下层包括电路。 上层包括存储器阵列区域内的半导体材料,并且在存储器阵列区域周围的区域中包括绝缘材料。 第一和第二沟槽形成为延伸到半导体材料中。 第一和第二沟槽将半导体材料图案化成多个基座。 第二沟槽延伸到周边区域。 在周边区域内形成接触开口以从第二沟槽延伸到电路的第一级。 导电材料形成在第二沟槽内部和接触开口内。 导电材料在第二沟槽内形成感测/接入线,并在接触开口内形成电接触,以将感测/接入线电耦合到较低级别的电路。
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公开(公告)号:US12190961B2
公开(公告)日:2025-01-07
申请号:US17988090
申请日:2022-11-16
Applicant: MICRON TECHNOLOGY, INC.
Inventor: Giovanni Maria Paolucci , Paolo Tessariol , Emilio Camerlenghi , Gianpietro Carnevale , Augusto Benvenuti
Abstract: Methods of operating a memory, and memory configured to perform similar methods, might include applying a negative first voltage level to a control gate of a transistor connected between a first node and a string of series-connected memory cells, increasing a voltage level applied to the first node at a particular rate while increasing the voltage level applied to the control gate of the transistor at the particular rate, and in response to the voltage level applied to the first node reaching a particular voltage level, ceasing increasing the voltage level applied to the first node and ceasing increasing the voltage level applied to the control gate of the transistor.
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公开(公告)号:US20230078036A1
公开(公告)日:2023-03-16
申请号:US17988090
申请日:2022-11-16
Applicant: MICRON TECHNOLOGY, INC.
Inventor: Giovanni Maria Paolucci , Paolo Tessariol , Emilio Camerlenghi , Gianpietro Carnevale , Augusto Benvenuti
Abstract: Methods of operating a memory, and memory configured to perform similar methods, might include applying a negative first voltage level to a control gate of a transistor connected between a first node and a string of series-connected memory cells, increasing a voltage level applied to the first node at a particular rate while increasing the voltage level applied to the control gate of the transistor at the particular rate, and in response to the voltage level applied to the first node reaching a particular voltage level, ceasing increasing the voltage level applied to the first node and ceasing increasing the voltage level applied to the control gate of the transistor.
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公开(公告)号:US20230065142A1
公开(公告)日:2023-03-02
申请号:US17968651
申请日:2022-10-18
Applicant: Micron Technology, Inc.
Inventor: Yoshiaki Fukuzumi , Paolo Tessariol , David H. Wells , Lars P. Heineck , Richard J. Hill , Lifang Xu , Indra V. Chary , Emilio Camerlenghi
IPC: G11C5/06 , H01L21/50 , H01L27/11582 , H01L27/11556 , H01L25/065
Abstract: Some embodiments include an integrated assembly having a pair of adjacent memory-block-regions, and having a separator structure between the adjacent memory-block-regions. The memory-block-regions include a first stack of alternating conductive levels and first insulative levels. The separator structure includes a second stack of alternating second and third insulative levels. The second insulative levels are substantially horizontally aligned with the conductive levels, and the third insulative levels are substantially horizontally aligned with the first insulative levels. Some embodiments include methods of forming integrated assemblies.
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