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公开(公告)号:US20220262820A1
公开(公告)日:2022-08-18
申请号:US17661659
申请日:2022-05-02
Applicant: Micron Technology, Inc.
Inventor: Matthew J. King , David A. Daycock , Yoshiaki Fukuzumi , Albert Fayrushin , Richard J. Hill , Chandra S. Tiwari , Jun Fujiki
IPC: H01L27/11582 , H01L29/06 , H01L21/762
Abstract: Microelectronic devices include a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of pillars extends through the stack structure. At least one isolation structure extends through an upper stack portion of the stack structure. The at least one isolation structure protrudes into pillars of neighboring columns of pillars of the series of pillars. Conductive contacts are in electrical communication with the pillars into which the at least one isolation structure protrudes. Related methods and electronic systems are also disclosed.
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12.
公开(公告)号:US11302628B2
公开(公告)日:2022-04-12
申请号:US16924506
申请日:2020-07-09
Applicant: Micron Technology, Inc.
Inventor: Naveen Kaushik , Yoshihiko Kamata , Richard J. Hill , Kyle A. Ritter , Tomoko Ogura Iwasaki , Haitao Liu
IPC: H01L23/522 , H01L27/11524 , H01L27/1157 , H01L27/11582 , H01L27/11556
Abstract: Some embodiments include an assembly having channel-material-structures, and having memory cells along the channel-material-structures. The memory cells include charge-storage-material. Linear-conductive-structures are vertically offset from the channel-material-structures and are electrically coupled with the channel-material-structures. Intervening regions are between the linear-conductive-structures. Conductive-shield-structures are within the intervening regions. The conductive-shield-structures are electrically coupled with a reference-voltage-source.
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13.
公开(公告)号:US11069687B2
公开(公告)日:2021-07-20
申请号:US16809924
申请日:2020-03-05
Applicant: Micron Technology, Inc.
Inventor: Sanh D. Tang , Srinivas Pulugurtha , Richard J. Hill , Yunfei Gao , Nicholas R. Tapias , Litao Yang , Haitao Liu
IPC: H01L27/108
Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.
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14.
公开(公告)号:US10998224B2
公开(公告)日:2021-05-04
申请号:US16531837
申请日:2019-08-05
Applicant: Micron Technology, Inc.
Inventor: Scott L. Light , Richard J. Hill
IPC: H01L23/52 , H01L21/768 , H01L21/033 , H01L23/522 , H01L23/528
Abstract: A metal pattern comprising interconnected small metal segments, medium metal segments, and large metal segments. At least one of the small metal segments comprises a pitch of less than about 45 nm and the small metal segments, medium metal segments, and large metal segments are separated from one another by variable spacing. Semiconductor devices comprising initial metallizations, systems comprising the metal pattern, and methods of forming a pattern are also disclosed.
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公开(公告)号:US10950618B2
公开(公告)日:2021-03-16
申请号:US16204224
申请日:2018-11-29
Applicant: Micron Technology, Inc.
Inventor: Sanh D. Tang , Richard J. Hill , Yi Fang Lee , Martin C. Roberts
IPC: H01L27/11582 , H01L27/11585 , H01L27/11514 , G06F3/06
Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. The individual memory cells comprise a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode electrically couples to the first source/drain region. Wordline structures extend elevationally through the insulative material and the memory cells of the vertically-alternating tiers. Individual of the gates that are in different of the memory cell tiers directly electrically couple to individual of the wordline structures. Sense-lines electrically couple to multiple of the second source/drain regions of individual of the transistors. Other embodiments are disclosed.
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公开(公告)号:US20210066272A1
公开(公告)日:2021-03-04
申请号:US16553448
申请日:2019-08-28
Applicant: Micron Technology, Inc.
Inventor: Hiroki Fujisawa , Charles L. Ingalls , Richard J. Hill , Gurtej S. Sandhu , Scott J. Derner
IPC: H01L25/18 , G11C11/4091 , H01L23/528 , G11C11/408 , H01L27/108
Abstract: Some embodiments include an integrated assembly having a base comprising sense-amplifier-circuitry, a first deck over the base, and a second deck over the first deck. The first deck includes a first portion of a first array of first memory cells, and includes a first portion of a second array of second memory cells. The second deck includes a second portion of the first array of the first memory cells, and includes a second portion of the second array of the second memory cells. A first digit line is associated with the first array, and a second digit line is associated with the second array. The first and second digit lines are comparatively coupled with one another through the sense-amplifier-circuitry.
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公开(公告)号:US20200373325A1
公开(公告)日:2020-11-26
申请号:US16988548
申请日:2020-08-07
Applicant: Micron Technology, Inc.
Inventor: Byeung Chul Kim , Francois H. Fabreguette , Richard J. Hill , Purnima Narayanan , Shyam Surthi
IPC: H01L27/11582 , H01L27/1157 , G11C16/08 , H01L21/02
Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material. Some embodiments include methods of forming integrated assemblies.
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公开(公告)号:US20200176465A1
公开(公告)日:2020-06-04
申请号:US16204224
申请日:2018-11-29
Applicant: Micron Technology, Inc.
Inventor: Sanh D. Tang , Richard J. Hill , Yi Fang Lee , Martin C. Roberts
IPC: H01L27/11582 , G06F3/06 , H01L27/11514 , H01L27/11585
Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. The individual memory cells comprise a capacitor comprising first and second electrodes having a capacitor insulator there-between. The first electrode electrically couples to the first source/drain region. Wordline structures extend elevationally through the insulative material and the memory cells of the vertically-alternating tiers. Individual of the gates that are in different of the memory cell tiers directly electrically couple to individual of the wordline structures. Sense-lines electrically couple to multiple of the second source/drain regions of individual of the transistors. Other embodiments are disclosed.
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公开(公告)号:US20200075630A1
公开(公告)日:2020-03-05
申请号:US16674823
申请日:2019-11-05
Applicant: Micron Technology, Inc.
Inventor: Changhan Kim , Chet E. Carter , Cole Smith , Collin Howder , Richard J. Hill , Jie Li
IPC: H01L27/11582 , H01L27/11529 , H01L27/1157 , H01L23/528 , H01L27/11568 , H01L29/51 , H01L29/49 , H01L21/311 , H01L21/02 , H01L27/11521 , H01L27/11556 , H01L29/788 , H01L29/792 , H01L29/66 , H01L29/10 , H01L21/28
Abstract: Some embodiments include a method of forming an assembly (e.g., a memory array). A first opening is formed through a stack of alternating first and second levels. The first levels contain silicon nitride, and the second levels contain silicon dioxide. Some of the silicon dioxide of the second levels is replaced with memory cell structures. The memory cell structures include charge-storage regions adjacent charge-blocking regions. Tunneling material is formed within the first opening, and channel material is formed adjacent the tunneling material. A second opening is formed through the stack. The second opening extends through remaining portions of the silicon dioxide, and through the silicon nitride. The remaining portions of the silicon dioxide are removed to form cavities. Conductive regions are formed within the cavities. The silicon nitride is removed to form voids between the conductive regions. Some embodiments include memory arrays.
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公开(公告)号:US10541252B2
公开(公告)日:2020-01-21
申请号:US16410973
申请日:2019-05-13
Applicant: Micron Technology, Inc.
Inventor: David Daycock , Richard J. Hill , Christopher Larsen , Woohee Kim , Justin B. Dorhout , Brett D. Lowe , John D. Hopkins , Qian Tao , Barbara L. Casey
IPC: H01L27/11582 , H01L27/1157 , H01L29/423 , H01L21/28 , H01L29/10 , H01L29/792
Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. The wordline levels have terminal ends corresponding to control gate regions. Charge-trapping material is along the control gate regions of the wordline levels and not along the insulative levels. The charge-trapping material is spaced from the control gate regions by charge-blocking material. Channel material extends vertically along the stack and is laterally spaced from the charge-trapping material by dielectric material. Some embodiments include methods of forming NAND memory arrays.
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